JPH05230799A - Sintered metallic fiber sheet and its production - Google Patents
Sintered metallic fiber sheet and its productionInfo
- Publication number
- JPH05230799A JPH05230799A JP5927692A JP5927692A JPH05230799A JP H05230799 A JPH05230799 A JP H05230799A JP 5927692 A JP5927692 A JP 5927692A JP 5927692 A JP5927692 A JP 5927692A JP H05230799 A JPH05230799 A JP H05230799A
- Authority
- JP
- Japan
- Prior art keywords
- metal
- sheet
- fiber
- fibers
- sintered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は多孔性の金属焼結シート
に関し、詳しくは、半導体装置、精密コネクター部材等
の電子機器用の導電部材に好適な金属繊維焼結シートお
よびその製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a porous metal sintered sheet, and more particularly to a metal fiber sintered sheet suitable as a conductive member for electronic equipment such as semiconductor devices and precision connector members, and a method for producing the same.
【０００２】[0002]
【従来の技術】電子機器等のコネクター部材として銅線
又は銅合金線が用いられているが、さらに部材の精細化
のために極細線が求められている。しかしながら極細線
は製造する上で難しく、かつ極めて高価である。そのた
めに、コネクターの精細化が可能で、かつ、積層化が可
能なことから、多孔性の薄葉シートで体積固有抵抗値が
１×１０-4 Ω−ｃｍ程度の導電性を有する材料が求め
られている。このような背景のもとに従来提案されてき
た多孔性の金属シート状物としては、多孔性金属箔、金
網、金属織布、金属焼結シート等が知られている。しか
しながら、多孔性金属箔は、機械的に金属箔に孔や裂け
目を付与したものであるため、機械的強度が弱くてハン
ドリングに問題があり、金網や金属織布は、一種あるい
は複数の金属繊維を用いてメッシュ状あるいは布状に編
んだり、織ったりしたものであるので、その繊維径によ
って多孔性、空隙率、厚さ等が制約されて厚さ１００μ
ｍ以下の金網の製造が困難であることや、極細径繊維を
使った薄葉クロスの価格が極めて高いことに問題があ
り、また金属焼結シートは粉末状または短繊維状の金属
を金網状のキャリヤーの上に散布し、これを真空あるい
は不活性ガスの雰囲気下で加圧、加熱融着させたもので
あるので、薄いシートの製造が困難で、また均質性に欠
けるうえに、長尺シートが得られない等々の問題があっ
た。2. Description of the Related Art Copper wires or copper alloy wires are used as connector members for electronic devices and the like, and ultrafine wires are required to further refine the members. However, ultrafine wires are difficult to manufacture and extremely expensive. Therefore, since the connector can be made finer and can be laminated, a material having conductivity such as a porous thin sheet having a volume specific resistance value of about 1 × 10 −4 Ω-cm is required. ing. Porous metal foils, wire nets, metal woven fabrics, metal sintered sheets, and the like are known as porous metal sheet-like materials that have been conventionally proposed against such a background. However, the porous metal foil is a mechanically weakened metal foil with holes and crevices, and therefore has poor mechanical strength and has a problem in handling. Since it is knitted or woven into a mesh or cloth using the fiber, its fiber diameter limits porosity, porosity, thickness, etc.
There are problems that it is difficult to manufacture wire mesh of less than m and that the price of thin cloth using ultrafine fibers is extremely high. Moreover, the metal sintered sheet is made of powder or short fiber metal Since it is sprayed on a carrier and pressed and heated and fused in a vacuum or inert gas atmosphere, it is difficult to manufacture thin sheets, and lack of homogeneity and long sheets There was a problem such as not being able to get.
【０００３】そこで、本出願人は、上述したような従来
技術の問題を解決するために、先に特開昭６１−２２３
１０５号において、湿式抄造法により金属繊維を７０重
量％以上含有するシートを作成し、それを真空又は不活
性ガス雰囲気下に金属繊維の融点を越えない温度で焼結
した金属繊維焼結シートの製造方法を提案した。しかし
ながら、上記の製造方法で作成した金属繊維焼結シート
は導電性の点で必ずしも満足できるものではなかった。
一方、導電性金属材料としては銅材が汎用されている
が、繊維径が３０μｍ以下の銅繊維の製造は困難であ
り、かつ極めて高価であるという問題がある。また、金
属シートに導電性を付与するためには金属メッキ法があ
るが、例えばステンレス鋼へのメッキが困難であること
や二次加工による製造コストのアップなどが問題であ
る。Therefore, in order to solve the above-mentioned problems of the prior art, the applicant of the present invention has previously disclosed Japanese Patent Laid-Open No. 61-223.
No. 105, a sheet of a metal fiber sintered sheet prepared by producing a sheet containing 70% by weight or more of metal fiber by a wet papermaking method and sintering the sheet at a temperature not exceeding the melting point of the metal fiber in a vacuum or an inert gas atmosphere. The manufacturing method was proposed. However, the sintered metal fiber sheet produced by the above-described manufacturing method is not always satisfactory in terms of conductivity.
On the other hand, although a copper material is widely used as the conductive metal material, there is a problem that it is difficult and extremely expensive to manufacture copper fibers having a fiber diameter of 30 μm or less. Further, there is a metal plating method for imparting conductivity to a metal sheet, but there are problems such as difficulty in plating stainless steel and an increase in manufacturing cost due to secondary processing.
【０００４】[0004]
【発明が解決しようとする課題】本発明は上記の事情に
鑑みてなされたもので、十分な導電性と物理強度をもっ
た金属シート状物を薄葉で多孔性シートとして提供する
ことを目的とする。The present invention has been made in view of the above circumstances, and an object thereof is to provide a thin metal sheet-like material having sufficient conductivity and physical strength as a porous sheet. To do.
【０００５】[0005]
【課題を解決するための手段】本発明の第１の発明は、
ステンレス繊維を主成分とする金属繊維を５０〜９０重
量％含有する焼結シートであって、該金属繊維の表面に
導電性金属が融着されていることを特徴とする金属繊維
焼結シートである。すなわち、本発明の金属繊維焼結シ
ートは、シート中の金属繊維間に結着剤としての非金属
材料を介在させることなく、金属繊維の表面焼結融合に
よって繊維間強度を保ち、かつ該繊維表面に導電性金属
を融着させた厚さの薄い緻密な網状構造の均質な導電性
シートである。The first invention of the present invention is as follows:
A sintered sheet containing 50 to 90% by weight of metal fibers containing stainless steel as a main component, wherein a conductive metal is fused to the surface of the metal fibers. is there. That is, the metal fiber sintered sheet of the present invention, without interposing a non-metal material as a binder between the metal fibers in the sheet, maintains the interfiber strength by surface sinter fusion of the metal fibers, and It is a uniform conductive sheet having a thin and dense network structure in which a conductive metal is fused on the surface.
【０００６】本発明に用いる金属繊維としては、細線加
工が可能で耐熱性、耐錆性のあるステンレス繊維が必須
構成成分として使用され、その他必要に応じてチタン、
アルミニウム、銀、銅、真ちゅう等の繊維が配合され
る。その性状は、特に繊維径２〜１６μｍ、繊維長２〜
１２ｍｍのものが好ましい。As the metal fiber used in the present invention, a stainless fiber which can be processed into a fine wire and has heat resistance and rust resistance is used as an essential constituent component.
Fibers such as aluminum, silver, copper and brass are blended. The properties are, in particular, a fiber diameter of 2 to 16 μm and a fiber length of 2 to
It is preferably 12 mm.
【０００７】本発明にいう導電性金属は、常温で体積固
有抵抗が１×１０-5 Ω−ｃｍ以下の金属で、例えば
銅、銀、アルミニウム、亜鉛、マグネシウムが挙げら
れ、それらの中でも銅が本発明に好適に使用できる。The conductive metal referred to in the present invention is a metal having a volume resistivity of 1 × 10 -5 Ω-cm or less at room temperature, and examples thereof include copper, silver, aluminum, zinc and magnesium. Among them, copper is preferable. It can be preferably used in the present invention.
【０００８】本発明において、ステンレス繊維の含有率
が導電性金属に対して９０重量％を越えると、シートの
導電性が十分に得られず、また５０重量％に満たない場
合は、焼結時の繊維間の焼結融合が十分でないため、シ
ートの物理強度が十分に得られないので好ましくない。In the present invention, if the content of the stainless fiber exceeds 90% by weight with respect to the conductive metal, the conductivity of the sheet cannot be sufficiently obtained. Since the sinter fusion between the fibers is not sufficient, the physical strength of the sheet cannot be sufficiently obtained, which is not preferable.
【０００９】以下に本発明の金属繊維焼結シートの製造
方法について詳述する。本発明の金属繊維焼結シートは
次の３つの製造方法を特徴とする。すなわち第１の方法
はステンレス繊維を主成分とする金属繊維５０〜９０重
量部と微細状導電性金属１０〜５０重量部からなる導電
材料およびバインダー繊維を含有するスラリーを湿式抄
紙法によりシート化して金属繊維シートを作成し、然る
のち該シートを無酸素雰囲気下に金属繊維の融点を越え
ない温度で加熱して繊維間を焼結して該金属繊維の表面
に導電性金属を融着させることを特徴とする。The method for producing the sintered metal fiber sheet of the present invention will be described in detail below. The metal fiber sintered sheet of the present invention is characterized by the following three manufacturing methods. That is, the first method is to prepare a slurry containing a conductive material composed of 50 to 90 parts by weight of metal fibers containing stainless steel fibers as a main component and 10 to 50 parts by weight of fine conductive metal and binder fibers into a sheet by a wet papermaking method. A metal fiber sheet is prepared, and then the sheet is heated in an oxygen-free atmosphere at a temperature not exceeding the melting point of the metal fiber to sinter the fibers to fuse a conductive metal to the surface of the metal fiber. It is characterized by
【００１０】第２の方法は、ステンレス繊維を主成分と
する金属繊維７０〜９５重量部とバインダー繊維５〜３
０重量部とからなるスラリーを湿式抄紙法によりシート
化して金属繊維シートを作成し、然るのち該シートの表
面に微細状導電性金属を散布し、無酸素雰囲気下に金属
繊維の融点を越えない温度で加熱して繊維間を焼結し、
該金属繊維の表面に導電性金属を融着させることを特徴
とする。The second method is to use 70 to 95 parts by weight of metal fibers composed mainly of stainless steel fibers and 5 to 3 binder fibers.
A slurry consisting of 0 parts by weight is formed into a sheet by a wet papermaking method to prepare a metal fiber sheet, and then fine conductive metal is sprinkled on the surface of the sheet to exceed the melting point of the metal fiber in an oxygen-free atmosphere. Heating at a non-temperature to sinter between the fibers,
It is characterized in that a conductive metal is fused on the surface of the metal fiber.
【００１１】また第３の方法はステンレス繊維を主成分
とする金属繊維７０〜９５重量部とバインダー繊維５〜
３０重量部からなるスラリーを湿式抄紙法にてシート化
して金属繊維シートを作成し、然るのち該シートを無酸
素雰囲気下で金属繊維の融点を越えない温度で加熱して
繊維間を予め焼結して得た金属繊維の表面に微細状導電
性金属を散布し、再度前記条件にて焼結し、該金属繊維
の表面に導電性金属を融着させることを特徴とするもの
である。In the third method, 70 to 95 parts by weight of metal fibers containing stainless steel as a main component and 5 to 5 parts of binder fibers are used.
A slurry of 30 parts by weight is formed into a sheet by a wet papermaking method to form a metal fiber sheet, and then the sheet is heated in an oxygen-free atmosphere at a temperature not exceeding the melting point of the metal fiber to pre-burn between the fibers. It is characterized in that a fine conductive metal is sprinkled on the surface of the metal fiber obtained by binding and is sintered again under the above conditions to fuse the conductive metal to the surface of the metal fiber.
【００１２】本発明において、用いられる微細状導電性
金属としては繊維状小片もしくは粉末状等の銅、銀、ア
ルミニウム、亜鉛、マグネシウムあるいはその合金、ろ
う材、炭酸銅が適用できる。ろう材としては、銀ろう、
黄銅ろう、りん銅ろう、アルミニウム合金ろう等が挙げ
られる。In the present invention, as the fine conductive metal to be used, fibrous small particles or powdery copper, silver, aluminum, zinc, magnesium or alloys thereof, brazing filler metal, and copper carbonate can be applied. As a brazing material, silver brazing,
Examples include brass braze, phosphor copper braze, and aluminum alloy braze.
【００１３】本発明において、湿式抄紙の際に配合する
バインダーとしては、例えばクラレ社製のフィブリボン
ドＶＰＢ１０５−１−３（商品名）として知られる水中
溶解度７０℃のＰＶＡ繊維やダイセル化学工業社製の微
細化セルロースが好適に使用できる。In the present invention, as the binder to be blended in the wet papermaking, for example, PVA fiber having a solubility in water of 70 ° C. known from Fibrebond VPB105-1-3 (trade name) manufactured by Kuraray Co., Ltd. or manufactured by Daicel Chemical Industries Ltd. The micronized cellulose can be preferably used.
【００１４】本発明における焼結温度条件としては、金
属繊維の融点を越えない温度かつ導電性金属の融点以上
の温度、例えば、ステンレス繊維の場合は約１２００℃
を焼成温度に設定して焼結する。この場合、焼結を水素
ガス単独の連続焼結炉で行ってもよいし、窒素ガス等の
不活性ガス雰囲気炉の前工程と水素ガス雰囲気炉の後工
程とを併用した連続焼結炉で行ってもよい。The sintering temperature condition in the present invention is a temperature which does not exceed the melting point of the metal fiber and is higher than the melting point of the conductive metal, for example, about 1200 ° C. in the case of stainless fiber.
Is set to a firing temperature and sintered. In this case, the sintering may be performed in a continuous sintering furnace using only hydrogen gas, or in a continuous sintering furnace in which a pre-process of an inert gas atmosphere furnace such as nitrogen gas and a post-process of a hydrogen gas atmosphere furnace are used together. You can go.
【００１５】本発明においては、焼結炉における加熱の
過程でまず金属繊維シート中のバインダーである非金属
繊維が約４００℃で熱分解するので、一旦金属繊維間の
結合状態が失われてシートのハンドリング性もなくなる
が、更に昇温し、例えばステンレス繊維の場合約８００
℃で金属繊維の一部が焼結しはじめ繊維間結合が生じ、
ハンドリング性のある機械強度の大きいシートを得るこ
とができる。この際、溶融した導電性金属が金属繊維の
表面を被覆して融着することができる。In the present invention, since the non-metal fiber as the binder in the metal fiber sheet is thermally decomposed at about 400 ° C. during the heating process in the sintering furnace, the bonding state between the metal fibers is once lost and the sheet is lost. However, the temperature rises further, for example, in the case of stainless fiber, about 800
At ℃, some of the metal fibers begin to sinter and interfiber bonding occurs,
It is possible to obtain a sheet having high handling strength and high mechanical strength. At this time, the molten conductive metal can cover the surface of the metal fibers and fuse them.
【００１６】本発明においては、上記の焼結工程で金属
繊維シートに新たに機能を付与できるほか、その添加量
によって、性能を容易にコントロールできるという作用
効果を有する。また金属繊維間の結合、交絡状態をより
安定な密着状態にするために焼結工程の前後、もしくは
焼結時に加圧処理を施すことも可能であり、その場合１
０数μｍの極めて薄い平滑な多孔性金属焼結シートを得
ることができる。In the present invention, a function can be newly added to the metal fiber sheet in the above-mentioned sintering step, and the performance can be easily controlled by the addition amount thereof. In addition, pressure treatment can be performed before or after the sintering step or during the sintering in order to make the bond or entanglement between the metal fibers into a more stable contact state.
It is possible to obtain a very thin smooth porous metal sintered sheet having a thickness of 0 to several μm.
【００１７】[0017]
【実施例】以下に実施例をもって本発明をさらに詳細に
説明する。 実施例１ 繊維長４ｍｍ、繊維径８μｍのステンレス繊維（商品名
サスミック、東京製綱社製）６０重量部、微細状導電性
金属として繊維長４ｍｍ、繊維径３０μｍの銅繊維（商
品名カプロン、エスコ社製）２０重量部、及び水中溶解
度７０℃であるＰＶＡ繊維（フィブリボンドＶＰＢ１０
５−１−３クラレ社製）２０重量部からなるスラリーを
湿式抄紙法によって脱水プレス、加熱乾燥し１００ｇ／
ｍ2 の金属繊維シートを得た。得られた該シートを表面
温度が１６０℃の加熱ロールを用い線圧３００ｋｇ／ｃ
ｍ、速度５ｍ／ｍｉｎの条件で加熱圧着した。次に上記
の圧着した金属繊維シートを加圧を施すことなく水素ガ
ス雰囲気の連続焼結炉（メッシュベルト付ろう付炉）を
用い、熱処理温度１１２０℃、速度１５ｃｍ／ｍｉｎで
焼結処理を行い坪量８０ｇ／ｍ2 、密度１．６９ｇ／cm
3 のステンレス繊維表面に銅が融着して被覆された本発
明による金属繊維焼結シートを得た。更に得られたシー
トを金属ロール間で処理を施し、加圧処理後の本発明の
金属繊維焼結シートを得た。The present invention will be described in more detail with reference to the following examples. Example 1 60 parts by weight of a stainless fiber having a fiber length of 4 mm and a fiber diameter of 8 μm (trade name Susmic, manufactured by Tokyo Tsunasha Co., Ltd.), a copper fiber having a fiber length of 4 mm and a fiber diameter of 30 μm as fine conductive metal (trade name: Kapron, Esco) 20 parts by weight and a solubility in water of 70 ° C. in PVA fiber (Fibribond VPB10).
5-1-3 Kuraray Co., Ltd.) 20 parts by weight of a slurry was dehydrated by a wet papermaking method, heated and dried to 100 g /
A metal fiber sheet of m 2 was obtained. The sheet thus obtained was heated at a surface temperature of 160 ° C. using a heating roll to obtain a linear pressure of 300 kg / c.
m and the speed was 5 m / min. Next, the pressure-bonded metal fiber sheet was subjected to a sintering treatment at a heat treatment temperature of 1120 ° C. and a speed of 15 cm / min using a continuous sintering furnace (brazing furnace with a mesh belt) in a hydrogen gas atmosphere without applying pressure. Basis weight 80 g / m 2 , density 1.69 g / cm
A metal fiber sintered sheet according to the present invention was obtained, in which the surface of the stainless fiber of 3 was fused and coated with copper. Further, the obtained sheet was treated between metal rolls to obtain a metal fiber sintered sheet of the present invention after pressure treatment.
【００１８】実施例２ 繊維長４ｍｍ、繊維径８μｍのステンレス繊維（サスミ
ック、東京製綱社製）６０重量部、微細状導電性金属と
して炭酸銅（ＣｕＣＯ3・Ｃｕ（ＯＨ）2・Ｈ2Ｏ和光純
薬工業社製）３０重量部、及び水中溶解度７０℃である
ＰＶＡ繊維（フィブリボンドＶＰＢ１０５−１−３クラ
レ社製）１０重量部からなるスラリーを湿式抄紙法で脱
水プレス、加熱乾燥して、１００ｇ／ｍ2 の金属繊維シ
ートを得た。該シートを表面温度が１６０℃の加熱ロー
ルを使用し線圧３００ｋｇ／ｃｍ、速度５ｍ／ｍｉｎの
条件で加熱圧着した。次に該圧着シートを加圧を施すこ
となく水素ガス雰囲気の還元焼結炉を用い、熱処理温度
１１２０℃、速度１５ｃｍ／ｍｉｎで焼結処理を行い、
坪量７４ｇ／ｍ2 、密度１．６１ｇ／cm3 のステンレス
繊維表面に銅が融着された本発明による金属繊維焼結シ
ートが得られた。得られた該シートを、さらに金属ロー
ル間で処理することによって加圧処理後の本発明の金属
繊維焼結シートを得た。Example 2 60 parts by weight of stainless fiber (Susmic, manufactured by Tokyo Tsunasha) having a fiber length of 4 mm and a fiber diameter of 8 μm, and copper carbonate (CuCO 3 .Cu (OH) 2 .H 2 O as a fine conductive metal. 30 parts by weight of Wako Pure Chemical Industries, Ltd. and 10 parts by weight of PVA fiber (Fibribond VPB105-1-3 manufactured by Kuraray Co., Ltd.) having a solubility in water of 70 ° C. are dehydrated by a wet papermaking method and heated and dried. , 100 g / m 2 of metal fiber sheet was obtained. The sheet was heated and pressure-bonded using a heating roll having a surface temperature of 160 ° C. under the conditions of a linear pressure of 300 kg / cm and a speed of 5 m / min. Next, the pressure-bonded sheet was subjected to a sintering treatment at a heat treatment temperature of 1120 ° C. at a speed of 15 cm / min using a reduction sintering furnace in a hydrogen gas atmosphere without applying pressure,
A metal fiber sintered sheet according to the present invention having a basis weight of 74 g / m 2 and a density of 1.61 g / cm 3 and having copper fused to the surface of a stainless fiber was obtained. The obtained sheet was further processed between metal rolls to obtain a metal fiber sintered sheet of the present invention after pressure treatment.
【００１９】実施例３ 繊維長４ｍｍ、繊維径８μｍのステンレス繊維（サスミ
ック、東京製綱社製）９０重量部、及び水中溶解度７０
℃であるＰＶＡ繊維（フィブリボンドＶＰＢ１０５−１
−３クラレ社製）１０重量部からなるスラリーを湿式抄
紙法で脱水プレス、加熱乾燥して、８０ｇ／ｍ2 の金属
繊維シートを得た。次に該シートを表面温度が１６０℃
の加熱ロールを使用して、線圧３００ｋｇ／ｃｍ、速度
５ｍ／ｍｉｎの条件で加熱圧着した。さらに、１ｍ2 の
該圧着シートに銅繊維（繊維長２ｍｍ、繊維径３０μ
ｍ、商品名カプロン、エスコ社製）３０ｇを概ね均一に
散布し、加圧を施すことなく、水素ガス雰囲気の還元焼
結炉を用いて、熱処理温度１１２０℃、速度１５ｃｍ／
ｍｉｎで焼結処理を行い、坪量１０１ｇ／ｍ2 、密度
１．７１ｇ／cm3 のステンレス繊維表面に銅が融着して
被覆された本発明による金属繊維焼結シートを得た。更
に得られたシートを金属ロール間で処理を施し、加圧処
理後の本発明の金属繊維焼結シートを得た。Example 3 90 parts by weight of stainless fiber (Susmic, manufactured by Tokyo Tsunasha) having a fiber length of 4 mm and a fiber diameter of 8 μm, and a solubility in water of 70
C. PVA fiber (Fibribond VPB105-1
-3 Kuraray Co., Ltd.) 10 parts by weight of the slurry was dehydrated by a wet papermaking method and heated and dried to obtain a metal fiber sheet of 80 g / m 2 . Next, the sheet has a surface temperature of 160 ° C.
Was heated and pressed under the conditions of a linear pressure of 300 kg / cm and a speed of 5 m / min. Moreover, copper fibers (fiber length 2mm to piezoelectric adhesive sheet of 1 m 2, fiber diameter 30μ
m, trade name Kapron, manufactured by Esco Co., Ltd.) about 30 g, and without applying pressure, using a reduction sintering furnace in a hydrogen gas atmosphere, heat treatment temperature 1120 ° C., speed 15 cm /
Sintering treatment was performed for min to obtain a metal fiber sintered sheet according to the present invention in which copper was fused and coated on the surface of stainless fiber having a basis weight of 101 g / m 2 and a density of 1.71 g / cm 3 . Further, the obtained sheet was treated between metal rolls to obtain a metal fiber sintered sheet of the present invention after pressure treatment.
【００２０】実施例４ 繊維長４ｍｍ、繊維径８μｍのステンレス繊維（サスミ
ック、東京製綱社製）９０重量部、及び水中溶解度７０
℃であるＰＶＡ繊維（フィブリボンドＶＰＢ１０５−１
−３クラレ社製）２０重量部からなるスラリーを湿式抄
紙法で脱水プレス、加熱乾燥して、坪量７９ｇ／ｍ2 の
金属繊維シートを得た。得られた該シートを表面温度が
１６０℃の加熱ロールを使用して、線圧３００ｋｇ／ｃ
ｍ、速度５ｍ／ｍｉｎの条件で加熱圧着した。次に、前
記の圧着した金属繊維シートを加圧を施すことなく、水
素ガス雰囲気の連続焼結炉（メッシュベルト付ろう付
炉）を用い、熱処理温度１１２０℃、速度１５ｃｍ／ｍ
ｉｎで焼結処理を行い、坪量８１ｇ／ｍ2 、密度１．７
ｇ／cm3のステンレス繊維焼結シートを得た。さらに、
該シート１ｍ2 に銅繊維（繊維長２ｍｍ、繊維径３０μ
ｍ、商品名カプロン、エスコ社製）３０ｇを概ね均一に
散布し、加圧を施すことなく水素ガス雰囲気の還元焼成
炉を用い、再度熱処理温度１１００℃、速度３０ｃｍ／
ｍｉｎで焼成処理を行い、坪量１００ｇ／ｍ2 、密度
１．７５ｇ／cm3 のステンレス繊維表面に銅が融着して
被覆された本発明による金属繊維焼結シートを得た。さ
らに、得られたシートを金属ロールで処理を施し、加圧
処理後の本発明の金属繊維焼結シートを得た。Example 4 90 parts by weight of stainless fiber (Susmic, manufactured by Tokyo Tsunasha) having a fiber length of 4 mm and a fiber diameter of 8 μm, and a solubility in water of 70
C. PVA fiber (Fibribond VPB105-1
-3 Kuraray Co., Ltd.) 20 parts by weight of the slurry was dehydrated by a wet papermaking method and heated and dried to obtain a metal fiber sheet having a basis weight of 79 g / m 2 . Using a heating roll having a surface temperature of 160 ° C., the obtained sheet was subjected to a linear pressure of 300 kg / c.
m and the speed was 5 m / min. Next, without applying pressure to the pressure-bonded metal fiber sheet, a continuous sintering furnace (brazing furnace with mesh belt) in a hydrogen gas atmosphere was used, and the heat treatment temperature was 1120 ° C. and the speed was 15 cm / m.
Sintering treatment with in, basis weight 81 g / m 2 , density 1.7
A g / cm 3 stainless fiber sintered sheet was obtained. further,
Copper fibers (fiber length 2mm to the seat 1 m 2, fiber diameter 30μ
m, a trade name of Capron, manufactured by Esco Co., Ltd.) 30 g is sprayed almost uniformly, and a heat treatment temperature of 1100 ° C. and a speed of 30 cm /
A baking treatment was performed for min to obtain a metal fiber sintered sheet according to the present invention in which the surface of the stainless fiber having a basis weight of 100 g / m 2 and a density of 1.75 g / cm 3 was fused and coated with copper. Further, the obtained sheet was treated with a metal roll to obtain a metal fiber sintered sheet of the present invention after pressure treatment.
【００２１】比較例１ 繊維長４ｍｍ、繊維径８μｍのステンレス繊維（商品名
サスミック、東京製綱社製）９０重量部と水中溶解度７
０℃であるＰＶＡ繊維（フィブリボンドＶＰＢ１０５−
１−３クラレ社製）１０重量部からなるスラリーを湿式
抄紙法で脱水プレス、加熱乾燥して、７８ｇ／ｍ2 の金
属繊維シートを得た。次に該シートを加圧を施すことな
く水素ガス雰囲気下に処理温度１１８０℃、２０ｃｍ／
分の速度の条件で焼結し、坪量７５ｇ／ｍ2 、密度１．
６５ｇ／cm3 の比較例の金属繊維焼結シートを作成し
た。得られたシートを金属ロール間で処理をすることに
よって加圧処理後の比較用の金属繊維焼結シートを得
た。Comparative Example 1 90 parts by weight of stainless steel fiber having a fiber length of 4 mm and a fiber diameter of 8 μm (trade name: Susmic, manufactured by Tokyo Steel Co., Ltd.) and solubility in water 7
PVA fiber at 0 ° C (Fibribond VPB105-
A slurry consisting of 10 parts by weight of 1-3 Kuraray Co., Ltd.) was dehydrated and heated and dried by a wet papermaking method to obtain a metal fiber sheet of 78 g / m 2 . Next, the sheet was subjected to a treatment temperature of 1180 ° C. and a pressure of 20 cm / cm 2 under a hydrogen gas atmosphere without applying pressure.
Sintered under the condition of speed of 1 minute, basis weight 75 g / m 2 , density 1.
A metal fiber sintered sheet of 65 g / cm 3 as a comparative example was prepared. The obtained sheet was processed between metal rolls to obtain a comparative metal fiber sintered sheet after pressure treatment.
【００２２】実施例１〜４および比較例の性状および特
性についての試験結果を表１に示す。表から明らかなと
おり、本発明の金属繊維焼結シートは薄葉シートであり
ながら導電性の向上が確認できた。Table 1 shows the test results for the properties and characteristics of Examples 1 to 4 and Comparative Example. As is clear from the table, it was confirmed that the metal fiber sintered sheet of the present invention is a thin sheet, but has improved conductivity.
【００２３】[0023]
【表１】 注１） 空隙率の計算方法：ｄ×１００／（Ｗｓ・ｄｓ
＋ＷM・ｄM） ｄ：焼結シートの密度の実測値、Ｗｓ：シート中のステ
ンレス繊維の配合量、ＷM：シート中の微細状導電性金
属の配合量、ｄｓ：ステンレス繊維の比重、ｄM：微細
状導電性金属の比重 注２） 体積固有抵抗の測定：長さ７０ｍｍ、巾５０ｍ
ｍの試験片の長さ方向の両端をクリップ状電極にスパン
５０ｍｍになるようにはさみ、通電して電圧および電流
を測定して得られた実測抵抗値から次式により算出し
た。 体積固有抵抗（Ω−ｃｍ）＝Ｒ×Ｓ／ｌ 但しＲは実測抵抗値 Ｓ：試料の断面積（ｃｍ2） ｌ：スパン距離（ｃｍ）[Table 1] Note 1) Porosity calculation method: d × 100 / (Ws · ds
+ WM · dM) d: actually measured density of sintered sheet, Ws: blended amount of stainless fiber in sheet, WM: blended amount of fine conductive metal in sheet, ds: specific gravity of stainless fiber, dM: fine Specific gravity of the conductive metal Note 2) Measurement of volume resistivity: length 70 mm, width 50 m
The lengthwise ends of the m test piece were sandwiched between clip-shaped electrodes with a span of 50 mm, and the voltage and current were measured by energizing the test piece, and the measured resistance value was calculated by the following equation. Volume resistivity (Ω-cm) = R × S / l where R is a measured resistance value S: cross-sectional area of sample (cm 2 ) l: span distance (cm)
【００２４】[0024]
【発明の効果】本発明の金属繊維焼結シートは体積固有
抵抗が非常に低く、厚さが２０μｍ程度の緻密な網状構
造のシートとして得られるので、半導体装置、精密コネ
クター等の諸電子機器用導電部材として広範な用途に利
用できる。EFFECTS OF THE INVENTION The metal fiber sintered sheet of the present invention has a very low volume resistivity and is obtained as a sheet having a dense mesh structure with a thickness of about 20 μm. Therefore, it can be used for various electronic devices such as semiconductor devices and precision connectors. It can be used in a wide range of applications as a conductive member.
「繊維の形状を示す写真」 "Photo showing the shape of fibers"
【図１】本発明の実施例１における銅を表面に融着した
ステンレス繊維焼結シートの表面写真。FIG. 1 is a surface photograph of a stainless fiber sintered sheet having copper adhered to the surface thereof in Example 1 of the present invention.
【図２】比較例におけるステンレス繊維焼結シートの表
面写真。FIG. 2 is a surface photograph of a stainless fiber sintered sheet in a comparative example.
Claims (6)
を５０〜９０重量％含有する焼結シートであって、該金
属繊維の表面に導電性金属が融着されていることを特徴
とする金属繊維焼結シート1. A sintered sheet containing 50 to 90% by weight of metal fibers containing stainless steel as a main component, wherein a conductive metal is fused to the surface of the metal fibers. Fiber sintered sheet
の体積固有抵抗を有する銅、銀、アルミニウム、亜鉛、
マグネシウムである請求項１に記載の金属繊維焼結シー
ト。2. A conductive metal having a volume resistivity of 1 × 10 −5 Ω-cm or less, copper, silver, aluminum, zinc,
The metal fiber sintered sheet according to claim 1, which is magnesium.
５０〜９０重量％と微細状導電性金属１０〜５０重量部
からなる導電材料およびバインダー繊維を含有するスラ
リーを湿式抄紙法によりシート化して金属繊維シートを
作成し、然るのち該シートを無酸素雰囲気下に金属繊維
の融点を越えない温度に加熱して繊維間を焼結し、該金
属繊維の表面に導電性金属を融着せしめることを特徴と
する金属繊維焼結シートの製造方法。3. A metal containing a slurry containing a conductive material composed of 50 to 90% by weight of metal fibers composed mainly of stainless steel fibers and 10 to 50 parts by weight of fine conductive metal and a binder fiber is formed into a sheet by a wet papermaking method. Producing a fiber sheet, and then heating the sheet to a temperature not exceeding the melting point of the metal fibers in an oxygen-free atmosphere to sinter the fibers and fuse a conductive metal to the surface of the metal fibers. A method for producing a metal fiber sintered sheet, comprising:
７０〜９５重量部とバインダー繊維５〜３０重量部とか
らなるスラリーを湿式抄紙法によりシート化して金属繊
維シートを作成し、然るのち、該シートの表面に微細状
導電性金属を散布し、無酸素雰囲気下に金属繊維の融点
を越えない温度で加熱して、繊維間を焼結し、該金属繊
維の表面に導電性金属を融着せしめたことを特徴とする
金属繊維焼結シートの製造方法。4. A metal fiber sheet is prepared by forming a slurry comprising 70 to 95 parts by weight of metal fibers mainly composed of stainless steel fibers and 5 to 30 parts by weight of binder fibers into a sheet by a wet papermaking method. A fine conductive metal is sprinkled on the surface of the sheet, heated in an oxygen-free atmosphere at a temperature not exceeding the melting point of the metal fiber to sinter the fibers, and to melt the conductive metal on the surface of the metal fiber. A method for producing a metal fiber sintered sheet, which is characterized by being put on.
７０〜９５重量部とバインダー繊維５〜３０重量部から
なるスラリーを湿式抄紙法にてシート化して金属繊維シ
ートを作成し、然るのち該シートを無酸素雰囲気下で金
属繊維の融点を越えない温度で加熱して繊維間を予め焼
結して得た金属繊維の表面に微細状導電性金属を散布
し、再度、前記条件にて焼結し、該金属繊維の表面に導
電性金属を融着せしめたことを特徴とする金属繊維焼結
シートの製造方法。5. A metal fiber sheet is prepared by forming a slurry of 70 to 95 parts by weight of metal fiber containing stainless steel fiber as a main component and 5 to 30 parts by weight of binder fiber into a sheet by a wet papermaking method. The sheet is heated in an oxygen-free atmosphere at a temperature not exceeding the melting point of the metal fibers, and fine conductive metal is sprinkled on the surface of the metal fibers obtained by pre-sintering the fibers, and then baked again under the above conditions. A method for producing a sintered metal fiber sheet, which comprises binding and fusing a conductive metal on the surface of the metal fiber.
は粉末状の銅、銀、アルミニウム、亜鉛、マグネシウム
あるいはその合金、炭酸銅から選ばれた少なくとも１種
であることを特徴とする請求項３、４、又は５に記載の
金属繊維焼結シートの製造方法。6. The fine conductive metal is at least one selected from fibrous small pieces or powdered copper, silver, aluminum, zinc, magnesium or alloys thereof, and copper carbonate. The method for producing a metal fiber sintered sheet according to 3, 4, or 5.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4059276A JP2562761B2 (en) | 1992-02-14 | 1992-02-14 | Manufacturing method of sintered metal fiber sheet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4059276A JP2562761B2 (en) | 1992-02-14 | 1992-02-14 | Manufacturing method of sintered metal fiber sheet |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05230799A true JPH05230799A (en) | 1993-09-07 |
| JP2562761B2 JP2562761B2 (en) | 1996-12-11 |
Family
ID=13108702
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4059276A Expired - Fee Related JP2562761B2 (en) | 1992-02-14 | 1992-02-14 | Manufacturing method of sintered metal fiber sheet |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2562761B2 (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0797602A (en) * | 1993-09-29 | 1995-04-11 | Tomoegawa Paper Co Ltd | Dissimilar metal coated porous metallic fiber sintered sheet and production thereof |
| JPH07138606A (en) * | 1993-11-17 | 1995-05-30 | Tomoegawa Paper Co Ltd | Production of metallic fiber sintered sheet |
| WO1995023951A1 (en) * | 1994-03-04 | 1995-09-08 | A. Bromberg & Co. Ltd. | Heat-radiating element |
| US6228509B1 (en) * | 1998-01-30 | 2001-05-08 | Tomoegawa Paper Co., Ltd | Electromagnetic wave shielding sheet |
| JP2001517273A (en) * | 1997-03-31 | 2001-10-02 | ファイバーマーク インコーポレイテッド | Sheet of metal fiber and metal powder and method for producing the same |
| WO2018070795A1 (en) * | 2016-10-14 | 2018-04-19 | 주식회사 엘지화학 | Metal alloy foam manufacturing method |
| KR20190001536A (en) * | 2017-06-26 | 2019-01-04 | 도쿄엘렉트론가부시키가이샤 | Power feed member and substrate processing apparatus |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5599140B2 (en) * | 2008-09-02 | 2014-10-01 | 株式会社巴川製紙所 | Sound absorbing structure member and sound absorbing structure |
| JP5927291B2 (en) | 2012-03-21 | 2016-06-01 | 株式会社巴川製紙所 | Microphone device, microphone unit, microphone structure, and electronic apparatus using them |
| JP5606580B2 (en) * | 2013-04-17 | 2014-10-15 | 株式会社巴川製紙所 | Sound transmission material |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50133107A (en) * | 1974-04-10 | 1975-10-22 | ||
| JPS57169002A (en) * | 1981-04-06 | 1982-10-18 | Nippon Seisen Kk | Sintered body |
| JPS6479307A (en) * | 1987-09-18 | 1989-03-24 | Aisin Seiki | Reduction of metallic fiber sheet |
-
1992
- 1992-02-14 JP JP4059276A patent/JP2562761B2/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50133107A (en) * | 1974-04-10 | 1975-10-22 | ||
| JPS57169002A (en) * | 1981-04-06 | 1982-10-18 | Nippon Seisen Kk | Sintered body |
| JPS6479307A (en) * | 1987-09-18 | 1989-03-24 | Aisin Seiki | Reduction of metallic fiber sheet |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0797602A (en) * | 1993-09-29 | 1995-04-11 | Tomoegawa Paper Co Ltd | Dissimilar metal coated porous metallic fiber sintered sheet and production thereof |
| JPH07138606A (en) * | 1993-11-17 | 1995-05-30 | Tomoegawa Paper Co Ltd | Production of metallic fiber sintered sheet |
| WO1995023951A1 (en) * | 1994-03-04 | 1995-09-08 | A. Bromberg & Co. Ltd. | Heat-radiating element |
| US5727622A (en) * | 1994-03-04 | 1998-03-17 | Elisra Gan Ltd. | Heat radiating element |
| JP2001517273A (en) * | 1997-03-31 | 2001-10-02 | ファイバーマーク インコーポレイテッド | Sheet of metal fiber and metal powder and method for producing the same |
| US6228509B1 (en) * | 1998-01-30 | 2001-05-08 | Tomoegawa Paper Co., Ltd | Electromagnetic wave shielding sheet |
| WO2018070795A1 (en) * | 2016-10-14 | 2018-04-19 | 주식회사 엘지화학 | Metal alloy foam manufacturing method |
| US11951544B2 (en) | 2016-10-14 | 2024-04-09 | Lg Chem, Ltd. | Method for manufacturing metal alloy foam |
| KR20190001536A (en) * | 2017-06-26 | 2019-01-04 | 도쿄엘렉트론가부시키가이샤 | Power feed member and substrate processing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2562761B2 (en) | 1996-12-11 |
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