JPH05219760A - Electrostatic actuator - Google Patents
Electrostatic actuatorInfo
- Publication number
- JPH05219760A JPH05219760A JP2302692A JP2302692A JPH05219760A JP H05219760 A JPH05219760 A JP H05219760A JP 2302692 A JP2302692 A JP 2302692A JP 2302692 A JP2302692 A JP 2302692A JP H05219760 A JPH05219760 A JP H05219760A
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- JP
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- Prior art keywords
- electrodes
- pair
- teeth
- comb
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、電極間の静電力を利
用して物体を変位させる、外形がミリメートル以下の超
小型の静電式アクチュエータに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microminiature electrostatic actuator having an outer shape of less than millimeter, which displaces an object by utilizing electrostatic force between electrodes.
【０００２】[0002]
【従来の技術】図８にこの種の従来例を示す。これは、
櫛歯状の固定電極Ｋと可動電極Ｍとを適当なギャップを
設けて互いに噛み合わせ、両者に電圧を印加することに
より、櫛歯の長手方向に変位させ、櫛歯数に比例する静
電駆動力を得るものである。の如く電圧を印加したと
きは矢印Ｒ１の方向に、またの如く電圧を印加したと
きは矢印Ｒ２の方向にそれぞれ変位する。なお、Ｈは支
持部（固定部）を示す。この場合に作用する静電駆動力
Ｆはεを比誘電率、ε0 を真空の誘電率、ｄをギャップ
間距離、ｎを櫛歯数、ｔを歯厚、Ｖを印加電圧とすれ
ば、 Ｆ＝ε・ε0 ・ｎ・ｔ・Ｖ2 ／２ｄ …（１） として表わされる。2. Description of the Related Art FIG. 8 shows a conventional example of this kind. this is,
The comb-shaped fixed electrode K and the movable electrode M are meshed with each other with an appropriate gap provided, and a voltage is applied to both to displace them in the longitudinal direction of the comb teeth and electrostatically drive in proportion to the number of comb teeth. It is to gain strength. When a voltage is applied as described above, it is displaced in the direction of arrow R1, and when a voltage is applied as described above, it is displaced in the direction of arrow R2. In addition, H shows a support part (fixed part). The electrostatic driving force F acting in this case is ε is the relative permittivity, ε 0 is the permittivity of vacuum, d is the gap distance, n is the number of comb teeth, t is the tooth thickness, and V is the applied voltage, F = ε · ε 0 · n · t · V 2 / 2d (1)
【０００３】図９に別の従来例を示す。これは、固定電
極Ｋと可動電極Ｍとを対向配置し、両者に電圧を印加し
て矢印Ｆの如きギャップ間を小さくする方向の静電駆動
力を得るものである。この場合の静電駆動力Ｆはεを比
誘電率、ε0 を真空の誘電率、ｄをギャップ間距離、Ｓ
を対向面積、Ｖを印加電圧とすれば、 Ｆ＝ε・ε0 ・Ｓ・Ｖ2 ／２ｄ2 …（２） として表わされる。FIG. 9 shows another conventional example. In this method, the fixed electrode K and the movable electrode M are arranged so as to face each other, and a voltage is applied to the fixed electrode K and the movable electrode M to obtain an electrostatic driving force in the direction of reducing the gap as indicated by arrow F. In this case, the electrostatic driving force F is ε as relative permittivity, ε 0 as vacuum permittivity, d as gap distance, and S
Is the facing area and V is the applied voltage, F = ε · ε 0 · S · V 2 / 2d 2 (2)
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、上記い
ずれのものも変位量が極めて小さいためその適用範囲や
用途が制限され、大きな変位量が要求される用途には適
用できないという問題がある。したがって、この発明の
課題は特に大きな変位量を発生し得るようにすることに
ある。However, since the displacement amount of any of the above is extremely small, its application range and application are limited, and there is a problem that it cannot be applied to the application requiring a large displacement amount. Therefore, an object of the present invention is to make it possible to generate a particularly large displacement amount.
【０００５】[0005]
【課題を解決するための手段】このような課題を解決す
るため、第１の発明では、絶縁体を介して分割された１
対の固定電極を持つ固定子に対し複数の可動電極を複数
の弾性支持部材を介して連結し、隣り合う電極同士が互
いに異なる極性となるように各固定電極から弾性支持部
材を介して電圧を印加し、各電極間に作用する静電力を
利用して可動電極を変位させることを特徴としている。
この第１の発明では、前記複数の弾性支持部材のばね定
数を、互いに異ならせることができる。In order to solve such a problem, in the first aspect of the present invention, 1 is divided by an insulator.
A plurality of movable electrodes are connected to a stator having a pair of fixed electrodes via a plurality of elastic supporting members, and a voltage is applied from each fixed electrode via the elastic supporting members so that adjacent electrodes have different polarities. It is characterized in that the movable electrode is displaced by applying an electrostatic force acting between the electrodes.
In the first aspect of the invention, the spring constants of the plurality of elastic supporting members can be different from each other.
【０００６】第２の発明では、絶縁体を介して分割され
た１対の固定電極を持つ固定子に対し、１対の櫛歯電極
を持つ複数の可動子を複数の弾性支持部材を介して連結
し、前記可動子の１対の櫛歯電極が互いに異なる極性と
なるように各固定電極から弾性支持部材を介して電圧を
印加し、この１対の櫛歯電極間に作用する静電力を利用
して可動子を変位させることを特徴としている。この第
２の発明では、前記各可動子の１対の櫛歯電極の歯を変
位方向に対して同方向または平行に配置することができ
る。In the second invention, a plurality of movers having a pair of comb-teeth electrodes are provided through a plurality of elastic supporting members to a stator having a pair of fixed electrodes divided by an insulator. A voltage is applied from each fixed electrode through the elastic supporting member so that the pair of comb-teeth electrodes of the mover have different polarities, and the electrostatic force acting between the pair of comb-teeth electrodes is applied. The feature is that the mover is displaced by utilizing it. In the second aspect of the invention, the teeth of the pair of comb-teeth electrodes of each of the movers can be arranged in the same direction or parallel to the displacement direction.
【０００７】[0007]
【作用】可動電極または可動子を支持ばね（弾性支持部
材）を介して互いに連結し、この支持ばねを介して電圧
を印加することにより、比較的簡単な構造で大きな変位
を得られるようにする。The movable electrode or the movable element is connected to each other through the support spring (elastic support member), and a voltage is applied through the support spring, so that a large displacement can be obtained with a relatively simple structure. ..
【０００８】[0008]
【実施例】図１はこの発明の実施例を示す斜視図であ
る。同図において、１は固定電極１Ａ，１Ｂからなる固
定子、２は複数の可動電極２Ａ〜２Ｎからなる可動子、
３は絶縁体、４は支持ばね（弾性支持部材）、５は摺動
部、６はガラス基板をそれぞれ示している。すなわち、
固定子１と複数の可動電極２Ａ〜２Ｎからなる可動子２
とが支持ばね４を介して互いに連結され、ガラス基板６
上に配置される。固定子１と第１の可動子２Ａとの間お
よび各可動子２Ａと２Ｂ，２Ｂと２Ｃ…は絶縁体３によ
って図示のように絶縁され、各可動子２にはその下面全
体がガラス基板６に当接しないよう、摺動部５によって
支えられている。1 is a perspective view showing an embodiment of the present invention. In the figure, 1 is a stator composed of fixed electrodes 1A and 1B, 2 is a mover composed of a plurality of movable electrodes 2A to 2N,
3 is an insulator, 4 is a support spring (elastic support member), 5 is a sliding portion, and 6 is a glass substrate. That is,
A mover 2 including a stator 1 and a plurality of movable electrodes 2A to 2N
Are connected to each other via a support spring 4, and the glass substrate 6
Placed on top. The stator 1 and the first mover 2A, and the movers 2A and 2B, 2B and 2C ... Are insulated by the insulator 3 as shown in the figure, and the entire lower surface of the mover 2 is entirely covered by the glass substrate 6. It is supported by the sliding portion 5 so as not to come into contact with.
【０００９】したがって、固定子１の固定電極１Ａ，１
Ｂ間に図示のような直流電圧Ｅを印加すると、固定電極
１Ａと可動電極２Ａ，可動電極２Ａと２Ｂ，２Ｂと２Ｃ
…の間には、先の（２）式で示すような静電力が発生す
る。各電極間は支持ばね４を介して互いに連結されてい
るので、電極間の静電力が支持ばねの力に打ち勝てば可
動子２は固定子１に引き付けられ、これにより基準位置
から矢印方向へと変位（変位量ｘ）することになる。可
動子２は多数形成することが比較的容易であることか
ら、簡単な構造で大きな変位量を得ることが可能とな
る。なお、印加電圧Ｅと変位ｘとの関係を示すと、図２
のようになる。印加電圧Ｅ０が、電極間の静電力が支持
ばねの力に打ち勝つときの電圧を示す。また、ここでは
印加電圧を直流としているが、パルス状の電圧により繰
り返し駆動するようにしても良いものである。Therefore, the fixed electrodes 1A, 1 of the stator 1 are
When a DC voltage E as shown in the figure is applied between B, the fixed electrode 1A and the movable electrode 2A, the movable electrodes 2A and 2B, 2B and 2C.
The electrostatic force as expressed by the above equation (2) is generated between. Since the electrodes are connected to each other via the support spring 4, if the electrostatic force between the electrodes overcomes the force of the support spring, the mover 2 is attracted to the stator 1, thereby moving from the reference position in the arrow direction. Displacement (displacement amount x) will occur. Since it is relatively easy to form a large number of movers 2, a large amount of displacement can be obtained with a simple structure. The relationship between the applied voltage E and the displacement x is shown in FIG.
become that way. The applied voltage E0 indicates the voltage when the electrostatic force between the electrodes overcomes the force of the support spring. Further, the applied voltage is DC here, but it may be repeatedly driven by a pulsed voltage.
【００１０】図３は図１の変形例を示す斜視図である。
これは、図１に示すものが電極間を互いに同じばね力を
持つ支持ばね４を介して互いに連結しているのに対し、
この実施例では固定子１に近いものから遠くに離れるも
のの順に、支持ばね４のばね力を次第に弱めて行くよう
にしたものである。ここでは支持ばね４の幅を順に狭く
してばね力を次第に弱めるようにしているが、こうする
代わりにその厚みを変えるようにしても良い。こうすれ
ば、印加電圧Ｅと変位ｘとの関係を図４のようなステッ
プ状の関係にすることができ、印加電圧Ｅの大きさに応
じた変位ｘを得ることが可能となる。印加電圧Ｅ１が、
電極間の静電力が先端の支持ばねの力に打ち勝つときの
電圧を示す。FIG. 3 is a perspective view showing a modification of FIG.
This is because the one shown in FIG. 1 connects the electrodes to each other via the support spring 4 having the same spring force,
In this embodiment, the spring force of the support springs 4 is gradually weakened in the order from those closer to the stator 1 to those farther away. Here, the width of the support spring 4 is gradually reduced to gradually weaken the spring force, but the thickness may be changed instead. By doing so, the relationship between the applied voltage E and the displacement x can be made stepwise as shown in FIG. 4, and the displacement x according to the magnitude of the applied voltage E can be obtained. The applied voltage E1 is
The voltage when the electrostatic force between the electrodes overcomes the force of the support spring at the tip is shown.
【００１１】図５はこの発明の第３実施例を示す斜視図
である。これは、図１または図３に示す可動子２と対応
する可動子１，２２を対となる櫛歯電極２１Ａ，２１
Ｂ、２２Ａ，２２Ｂにて構成し、可動子２１と２２との
間および可動子２２の先端を連結部材７により互いに結
合するようにしたものである。そして、この場合も固定
子１の固定電極１Ａと１Ｂとの間に図示の如き電圧Ｅを
印加すれば、固定電極１Ａと櫛歯電極２１Ａ，２２Ａに
は正の電圧、また固定電極１Ｂと櫛歯電極２１Ｂ，２２
Ｂには負の電圧がそれぞれ印加され、各櫛歯電極間には
先の（２）式で示すような静電力が働くため両者は矢印
方向に互いに吸引され、これに伴い支持ばね４が弾性変
形して基準位置から矢印方向へとｘだけ変位することに
なる。この場合、変位ｘは例えば図６に示すように印加
電圧Ｅの２乗に比例するので、図１や図３に示すものの
ようにステップ状に変位するものと比べてリニアな関係
にすることができ、精度の良い微小変位を得ることが可
能となる。なお、ここでは、可動子を２つとしたが、一
般的には複数とすることができる。FIG. 5 is a perspective view showing a third embodiment of the present invention. This is because the comb-teeth electrodes 21A and 21A that form a pair with the movers 1 and 22 corresponding to the mover 2 shown in FIG. 1 or FIG.
B, 22A, 22B, and the movable member 21 and 22 and the tip of the movable member 22 are connected to each other by the connecting member 7. Also in this case, if a voltage E as shown in the figure is applied between the fixed electrodes 1A and 1B of the stator 1, a positive voltage is applied to the fixed electrode 1A and the comb-teeth electrodes 21A and 22A, and a voltage is fixed between the fixed electrode 1B and the comb electrode 1B. Tooth electrodes 21B, 22
A negative voltage is applied to each of the electrodes B, and the electrostatic force as expressed by the equation (2) acts between the comb-teeth electrodes, so that the two are attracted to each other in the direction of the arrow, and the support spring 4 is elastic. It deforms and is displaced by x from the reference position in the arrow direction. In this case, since the displacement x is proportional to the square of the applied voltage E as shown in FIG. 6, for example, a linear relationship can be established as compared with the one shown in FIGS. 1 and 3 that is displaced stepwise. Therefore, it is possible to obtain a minute displacement with high accuracy. In addition, although the number of the movable elements is two here, generally, the number of the movable elements can be plural.
【００１２】図７は図５の変形例を示す斜視図である。
これは、図５に示すものが可動子２１，２２の櫛歯電極
を静電アクチュエータの変位方向に対して直角方向に動
作するように配置しているのに対し、ここでは静電アク
チュエータの変位方向と同方向に動作するように配置
し、固定子１に対して近づくように変位させるようにし
た点が特徴である。なお、その他は図５と同様である。
この例も可動子の数は２つに限らないことはいうまでも
ない。FIG. 7 is a perspective view showing a modification of FIG.
5 is arranged such that the comb-teeth electrodes of the movers 21 and 22 are operated in a direction perpendicular to the displacement direction of the electrostatic actuator, whereas the displacement of the electrostatic actuator is shown here. It is characterized in that it is arranged so as to move in the same direction as the direction, and is displaced so as to approach the stator 1. The rest is the same as in FIG.
It goes without saying that the number of movers is not limited to two in this example as well.
【００１３】[0013]
【発明の効果】この発明によれば、可動電極または可動
子を支持ばねを介して互いに連結し、この支持ばねを介
して電圧を印加するようにしたので、比較的簡単な構造
で大きな変位を得ることが可能となる。According to the present invention, since the movable electrode or the movable element is connected to each other through the support spring and the voltage is applied through the support spring, a large displacement can be achieved with a relatively simple structure. It becomes possible to obtain.
【図１】この発明の１実施例を示す斜視図である。FIG. 1 is a perspective view showing an embodiment of the present invention.
【図２】図１の動作を説明するための説明図である。FIG. 2 is an explanatory diagram for explaining the operation of FIG.
【図３】図１の変形例を示す斜視図である。FIG. 3 is a perspective view showing a modified example of FIG.
【図４】図３の動作を説明するための説明図である。FIG. 4 is an explanatory diagram for explaining the operation of FIG.
【図５】この発明の他の実施例を示す斜視図である。FIG. 5 is a perspective view showing another embodiment of the present invention.
【図６】図５の動作を説明するための説明図である。6 is an explanatory diagram for explaining the operation of FIG. 5. FIG.
【図７】図５の変形例を示す斜視図である。FIG. 7 is a perspective view showing a modified example of FIG.
【図８】従来例を示す概要図である。FIG. 8 is a schematic diagram showing a conventional example.
【図９】別の従来例を示す概要図である。FIG. 9 is a schematic diagram showing another conventional example.
１…固定子、１Ａ，１Ｂ…固定電極、２，２１，２２…
可動子、２Ａ〜２Ｎ，２１Ａ，２１Ｂ，２２Ａ，２２Ｂ
…可動電極、３…絶縁体、４…支持ばね、５…摺動部、
６…ガラス基板、７…連結部材。1 ... Stator, 1A, 1B ... Fixed electrode, 2, 21, 22 ...
Mover 2A-2N, 21A, 21B, 22A, 22B
... movable electrode, 3 ... insulator, 4 ... support spring, 5 ... sliding part,
6 ... Glass substrate, 7 ... Connection member.
Claims (5)
極を持つ固定子に対し複数の可動電極を複数の弾性支持
部材を介して連結し、隣り合う電極同士が互いに異なる
極性となるように各固定電極から弾性支持部材を介して
電圧を印加し、各電極間に作用する静電力を利用して可
動電極を変位させることを特徴とする静電式アクチュエ
ータ。1. A plurality of movable electrodes are connected via a plurality of elastic supporting members to a stator having a pair of fixed electrodes divided by an insulator, and adjacent electrodes have polarities different from each other. Thus, an electrostatic actuator characterized in that a voltage is applied from each fixed electrode via an elastic support member, and the movable electrode is displaced by utilizing an electrostatic force acting between each electrode.
互いに異ならせることを特徴とする請求項１に記載の静
電式アクチュエータ。2. The spring constants of the plurality of elastic support members are
The electrostatic actuator according to claim 1, wherein the electrostatic actuators are different from each other.
極を持つ固定子に対し、１対の櫛歯電極を持つ複数の可
動子を複数の弾性支持部材を介して連結し、前記可動子
の１対の櫛歯電極が互いに異なる極性となるように各固
定電極から弾性支持部材を介して電圧を印加し、この１
対の櫛歯電極間に作用する静電力を利用して可動子を変
位させることを特徴とする静電式アクチュエータ。3. A plurality of movers having a pair of comb-teeth electrodes are connected to a stator having a pair of fixed electrodes divided via an insulator via a plurality of elastic supporting members, and A voltage is applied from each fixed electrode through the elastic support member so that the pair of comb-teeth electrodes of the mover have different polarities.
An electrostatic actuator characterized by displacing a mover by utilizing an electrostatic force acting between a pair of comb-teeth electrodes.
位方向に対して直角方向に配置することを特徴とする請
求項３に記載の静電式アクチュエータ。4. The electrostatic actuator according to claim 3, wherein the teeth of the pair of comb-teeth electrodes of each of the movers are arranged in a direction perpendicular to the displacement direction.
位方向に対して平行に配置することを特徴とする請求項
３に記載の静電式アクチュエータ。5. The electrostatic actuator according to claim 3, wherein the pair of teeth of the comb-teeth electrode of each mover are arranged in parallel to the displacement direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP02302692A JP3144500B2 (en) | 1992-02-10 | 1992-02-10 | Electrostatic actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP02302692A JP3144500B2 (en) | 1992-02-10 | 1992-02-10 | Electrostatic actuator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05219760A true JPH05219760A (en) | 1993-08-27 |
| JP3144500B2 JP3144500B2 (en) | 2001-03-12 |
Family
ID=12098969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP02302692A Expired - Fee Related JP3144500B2 (en) | 1992-02-10 | 1992-02-10 | Electrostatic actuator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3144500B2 (en) |
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| US6568286B1 (en) | 2000-06-02 | 2003-05-27 | Honeywell International Inc. | 3D array of integrated cells for the sampling and detection of air bound chemical and biological species |
| US6729856B2 (en) | 2001-10-09 | 2004-05-04 | Honeywell International Inc. | Electrostatically actuated pump with elastic restoring forces |
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| JP2006280181A (en) * | 2005-03-30 | 2006-10-12 | Yamaguchi Univ | Electrostatic actuator |
| JP2007274793A (en) * | 2006-03-30 | 2007-10-18 | Akita Prefecture | Actuator |
| US7320338B2 (en) | 2005-06-03 | 2008-01-22 | Honeywell International Inc. | Microvalve package assembly |
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-
1992
- 1992-02-10 JP JP02302692A patent/JP3144500B2/en not_active Expired - Fee Related
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