JPH0521490B2 - - Google Patents
Info
- Publication number
- JPH0521490B2 JPH0521490B2 JP18807686A JP18807686A JPH0521490B2 JP H0521490 B2 JPH0521490 B2 JP H0521490B2 JP 18807686 A JP18807686 A JP 18807686A JP 18807686 A JP18807686 A JP 18807686A JP H0521490 B2 JPH0521490 B2 JP H0521490B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- light emitting
- measured
- real image
- positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000003384 imaging method Methods 0.000 claims description 10
- 238000005259 measurement Methods 0.000 claims description 8
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 230000003595 spectral effect Effects 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 description 14
- 239000003550 marker Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Landscapes
- Testing Of Optical Devices Or Fibers (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、発光素子の発光特性又は受光素子の
受光特性を測定する際の被測定素子の設定位置を
決める位置決め装置に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a positioning device that determines the set position of an element to be measured when measuring the light emission characteristics of a light emitting element or the light reception characteristics of a light receiving element.
（従来技術と問題点）
発光素子の発光特性又は受光素子の受光特性を
測定する際には被測定素子は測定装置の受光部又
は送光部の光軸上に設定された所定の位置（測定
装置の測定点に被測定素子の結像手段による実像
結像面がくるような位置）に正しく載置されなけ
ればならない。(Prior art and problems) When measuring the light emitting characteristics of a light emitting element or the light receiving characteristics of a light receiving element, the device to be measured is placed at a predetermined position (measurement It must be placed correctly in a position such that the real image plane formed by the imaging means of the device under test is aligned with the measurement point of the device.
従来は測定装置の受光部又は送光部の光軸を予
測し、勘に頼つて被測定素子の設定位置を決めて
いたので、特に例えば半導体発光素子又は半導体
発光素子のように発光面又は受光面の面積が極め
て小さい素子の場合にはこの素子を上記光軸上の
上記所定の位置に正しく置くことはむずかしく、
正しい測定が行なえないという問題点があつた。 Conventionally, the optical axis of the light-receiving section or the light-transmitting section of the measuring device was predicted and the setting position of the device to be measured was determined by relying on intuition. In the case of an element with an extremely small surface area, it is difficult to correctly place the element at the predetermined position on the optical axis.
There was a problem in that correct measurements could not be made.
（発明の目的）
本発明は以上の問題点を解消すべく提案するも
ので、被測定素子を測定装置の受光部又は送光部
の光軸上の所定の位置に正しく置くことができる
被測定素子の位置決め装置を得ることを目的とす
る。(Object of the Invention) The present invention is proposed to solve the above-mentioned problems. The purpose of this invention is to obtain an element positioning device.
（発明の概要）
以上の目的のため、本発明は、被測定素子の発
光光又は受光光の進路上に、例えば対物レンズの
ような結像手段と、例えばハーフミラーのような
分光手段を設け、該分光手段によつて分割された
一方の進路上で、被測定素子の上記結像手段によ
る実像結像面が測定点となるような位置に、測定
装置の受光部又は発光部を配置し、他方の進路上
で、上記分光手段による分光点からみて、上記実
像結像面までの距離と実質的に同一の距離となる
位置に、位置決め用の発光手段を設けて当該発光
手段によつて生ずる光スポツトの位置を被測定素
子の設定位置とするようにしたものである。(Summary of the Invention) For the above purpose, the present invention provides an imaging means such as an objective lens and a spectroscopic means such as a half mirror on the path of emitted light or received light from an element to be measured. , the light receiving part or the light emitting part of the measuring device is arranged on one path divided by the spectroscopic means at a position such that the real image plane of the device to be measured by the imaging means becomes the measurement point. , on the other course, a light emitting means for positioning is provided at a position that is substantially the same distance as the distance to the real image imaging plane from the point of spectral separation by the spectroscopic means, and the light emitting means is used for positioning. The position of the resulting light spot is set as the set position of the device to be measured.
（発明の実施例）
図面は本発明の実施例を示す構成図であり、こ
の実施例は例えばレーザーダイオードのような半
導体発光素子の発光をビデオカメラで捉えてその
発光特性パターンを得るようにした測定装置に実
施した例であり、上記ビデオカメラが測定装置の
受光部に相当する。(Embodiment of the Invention) The drawing is a block diagram showing an embodiment of the present invention. In this embodiment, the light emission of a semiconductor light emitting element such as a laser diode is captured with a video camera to obtain its light emission characteristic pattern. This is an example implemented in a measuring device, and the video camera corresponds to the light receiving section of the measuring device.
図面に示すように、ビデオカメラ１の撮像光軸
イの前方には例えばハーフミラーのような分光手
段（以下、ハーフミラーを例とする。）２が、そ
の反射面をビデオカメラ１の反対側に向けて設け
られており、当該ハーフミラー２による反射光側
の光軸ロには位置マーカ用の発光手段、例えば発
光ダイオード３が設けられている。尚、この発光
ダイオード３の発光面には被測定素子４の載置方
向がわかるようにするために位置マーカスポツト
の形状を例えば凸形にすべく凸形状の光通過窓５
１を有するマスク板５が設けられている。また、
ビデオカメラ１の撮像光軸イの前方でハーフミラ
ー２より被測定素子４側の光軸ハには対物レンズ
６が設けられる。尚、対物レンズ６は通常複数の
レンズで構成されるが、図では１枚のレンズで代
表させて描いてある。 As shown in the drawing, in front of the imaging optical axis A of the video camera 1, there is a spectroscopic means 2, such as a half mirror (hereinafter, a half mirror will be taken as an example), with its reflective surface on the opposite side of the video camera 1. A light emitting means for a position marker, for example, a light emitting diode 3, is provided on the optical axis B on the side of the light reflected by the half mirror 2. The light emitting surface of the light emitting diode 3 is provided with a convex light passage window 5 to make the position marker spot convex, for example, so that the mounting direction of the device to be measured 4 can be determined.
A mask plate 5 having a mask plate 1 is provided. Also,
An objective lens 6 is provided on the optical axis C, which is in front of the imaging optical axis A of the video camera 1 and closer to the device to be measured 4 than the half mirror 2. Note that although the objective lens 6 is usually composed of a plurality of lenses, in the figure, one lens is representatively depicted.
発光ダイオード３から投光した光はマスク板５
で凸形状の光束となつて光軸ロを進み、ハーフミ
ラー２で反射してビデオカメラ１の撮像光軸イと
一致した光軸ハ上に対物レンズ６による光スポツ
トＰが生ずる。 The light emitted from the light emitting diode 3 is transmitted to the mask plate 5.
The light beam becomes a convex light beam and travels along the optical axis B, is reflected by the half mirror 2, and a light spot P is generated by the objective lens 6 on the optical axis C, which coincides with the imaging optical axis A of the video camera 1.
いま、対物レンズ６によつて光軸イ上に結像す
る被測定素子４の実像結像面（以下、実像面とい
う。）が２点鎖線で示したニであるものとすると、
ビデオカメラ１の焦点は当該実像面ニに合わされ
て当該ビデオカメラ１で被測定素子４が撮像され
ることとなる。 Now, suppose that the real image plane (hereinafter referred to as the real image plane) of the device to be measured 4, which is imaged on the optical axis A by the objective lens 6, is D indicated by the two-dot chain line.
The focus of the video camera 1 is set on the real image plane D, and the device to be measured 4 is imaged by the video camera 1.
ここで、対物レンズ６と実像面ニとの間の光軸
イ，ハに沿つた距離をl1とし、対物レンズ６と発
光ダイオード３（マスク板５）との間の光軸ロ，
ハに沿つた距離をl2として「l1＝l2」に設定する
（ハーフミラー２による分光点からみて、実像面
ニまでの距離と、マスク板５までの距離とを実質
的に同一に設定する）と、発光ダイオード３（マ
スク板５）の位置は距離について上記実像面ニと
等価な位置となり、上記対物レンズ６で結像され
た発光ダイオード３（マスク板５）の光スポツト
Ｐの位置は当該対物レンズ６によつて実像面ニに
結像される実像の物体の位置となる。すなわち当
該光スポツトＰの位置に被測定素子４を置けば、
対物レンズ６によつて実像面ニに実像が結像され
る光軸ハ上の位置に被測定素子４が正しく置かれ
たこととなり、当該被測定素子４の発光はビデオ
カメラ１に正しく捉えられる
以上の実施例に於いて、ビデオカメラ１（測定
装置の受光部）と発光ダイオード３及びマスク板
５（位置決め用発光手段）の位置とは互に逆の位
置に設けても本発明を実施することができる。 Here, the distance between the objective lens 6 and the real image plane D along the optical axes A and C is defined as l 1 , and the distance between the objective lens 6 and the light emitting diode 3 (mask plate 5) along the optical axes B and C is l1.
The distance along C is l 2 and "l 1 = l 2 " is set. setting), the position of the light emitting diode 3 (mask plate 5) becomes a position equivalent to the above real image plane D in terms of distance, and the light spot P of the light emitting diode 3 (mask plate 5) imaged by the objective lens 6 The position is the position of the object of the real image formed by the objective lens 6 on the real image plane D. That is, if the device to be measured 4 is placed at the position of the light spot P,
The device to be measured 4 is correctly placed at a position on the optical axis C where a real image is formed on the real image plane D by the objective lens 6, and the light emitted from the device to be measured 4 is correctly captured by the video camera 1. In the above embodiments, the present invention can be carried out even if the video camera 1 (light receiving section of the measuring device), the light emitting diode 3, and the mask plate 5 (light emitting means for positioning) are provided in opposite positions. be able to.
また、以上の実施例は被測定素子４が発光素子
である場合の例であるが、受光素子の測定装置に
も本発明を実施することができる。すなわち、ビ
デオカメラ１の位置に測定装置の測定光を投光す
る発光部を置けばよい。 Moreover, although the above embodiment is an example in which the device to be measured 4 is a light emitting device, the present invention can also be implemented in a measuring device for a light receiving device. That is, a light emitting section that emits measurement light from the measuring device may be placed at the position of the video camera 1.
（発明の効果）
以上、詳細に説明したように、本発明は分光手
段によつて分けられた一方の光軸に位置マーカ用
の発光手段を設けて被測定素子を設定すべき位置
に光スポツトを形成するようにしたものであり、
被測定素子の設定位置が目視によつて容易に判断
できるので特に被測定素子が小さい場合等の測定
が極めて容易になるという効果が得られる。(Effects of the Invention) As explained above in detail, the present invention provides a light emitting means for a position marker on one of the optical axes separated by the spectroscopic means, and places a light spot at the position where the device to be measured is to be set. It is designed to form
Since the set position of the device to be measured can be easily determined by visual inspection, it is possible to obtain the effect that measurement is extremely easy, especially when the device to be measured is small.
図面は本発明の実施例を示す構成図である。
主な記号、１……ビデオカメラ、２……ハーフ
ミラー、３……発光ダイオード、４……被測定素
子、Ｐ……光スポツト形成位置。
The drawings are configuration diagrams showing embodiments of the present invention. Main symbols: 1...video camera, 2...half mirror, 3...light emitting diode, 4...device to be measured, P...light spot formation position.
Claims (1)
を測定する装置に於いて、被測定素子の発光光又
は受光光の進路上に設けた結像手段と、上記進路
上に設けられ、上記進路を２方路に分割する分光
手段と、該分光手段によつて分割された一方の進
路に配置した測定装置と、他方の進路に設けた位
置決め用の発光手段で構成され、上記測定装置
は、上記被測定素子の上記結像手段による実像結
像面がその測定点となるような位置に設定され、
上記発光手段は、上記分光手段による分光点から
みて、上記実像結像面までの距離と実質的に同一
の距離となる位置に設定されており、上記発光手
段の発光光が上記結像手段を通ることによつて生
ずる光スポツトの位置を被測定素子の設定位置と
するようにした被測定素子の位置決め装置。 ２ 分光手段がハーフミラーである特許請求の範
囲第１項に記載の被測定素子の位置決め装置。[Scope of Claims] 1. In an apparatus for measuring the light emitting characteristics of a light emitting element or the light receiving characteristics of a light receiving element, an imaging means provided on the path of the emitted light or the light received by the device to be measured; a spectroscopic means which is provided and divides the course into two directions, a measuring device arranged on one course divided by the spectroscopic means, and a light emitting means for positioning provided on the other course, The measurement device is set at a position such that a real image formation plane of the device to be measured by the imaging means serves as the measurement point,
The light emitting means is set at a position that is substantially the same distance from the spectral point of the spectroscopic means as the distance to the real image imaging plane, and the light emitted from the light emitting means is set at a position that is substantially the same distance as the real image forming plane. A device for positioning a device to be measured, in which the position of a light spot generated by the passage of light is set as the set position of the device to be measured. 2. The device for positioning an element to be measured according to claim 1, wherein the spectroscopic means is a half mirror.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18807686A JPS6344130A (en) | 1986-08-11 | 1986-08-11 | Positioner of element to be measured |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18807686A JPS6344130A (en) | 1986-08-11 | 1986-08-11 | Positioner of element to be measured |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6344130A JPS6344130A (en) | 1988-02-25 |
| JPH0521490B2 true JPH0521490B2 (en) | 1993-03-24 |
Family
ID=16217283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18807686A Granted JPS6344130A (en) | 1986-08-11 | 1986-08-11 | Positioner of element to be measured |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6344130A (en) |
-
1986
- 1986-08-11 JP JP18807686A patent/JPS6344130A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6344130A (en) | 1988-02-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |