JPH05201766A - Silicon nitride-based sintered compact - Google Patents
Silicon nitride-based sintered compactInfo
- Publication number
- JPH05201766A JPH05201766A JP4035624A JP3562492A JPH05201766A JP H05201766 A JPH05201766 A JP H05201766A JP 4035624 A JP4035624 A JP 4035624A JP 3562492 A JP3562492 A JP 3562492A JP H05201766 A JPH05201766 A JP H05201766A
- Authority
- JP
- Japan
- Prior art keywords
- silicon nitride
- sintered compact
- based sintered
- wear resistance
- component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Ceramic Products (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、耐摩耗性に優れた窒化
珪素質焼結体に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a silicon nitride sintered body having excellent wear resistance.
【0002】[0002]
【従来の技術】窒化珪素は、強度が大きく、耐熱衝撃性
と耐食性に優れており、同じ高強度材料である炭化珪素
に比べて靱性が高く取扱いやすい利点があるので近年さ
まざまな分野で用いられている。2. Description of the Related Art Silicon nitride is used in various fields in recent years because it has high strength, excellent thermal shock resistance and corrosion resistance, and has the advantages of higher toughness and easier handling than silicon carbide, which is the same high-strength material. ing.
【0003】例えば、従来、ライナーにはアルミナが用
いられてきたが、摩耗が激しいので窒化珪素が注目され
始めた。また、金属線材圧延ロールやガイドロールには
窒化珪素が利用されるようになり、ロールの寿命向上と
線材の質向上に寄与してきた(特開昭59−21413
号公報)。しかし、冷間圧延工程やガイドロール等の比
較的緩やかな条件では問題なく使用できるが、条件がよ
り過酷な熱間圧延工程では、表面の肌荒れ等が問題とな
っており、より耐摩耗性の良好な窒化珪素セラミックス
の開発が望まれていた。For example, conventionally, alumina has been used for the liner, but silicon nitride has begun to attract attention because of its severe wear. Silicon nitride has come to be used for metal wire rod rolling rolls and guide rolls, which has contributed to the improvement of roll life and the quality of wire rods (Japanese Patent Laid-Open No. 59-21413).
Publication). However, it can be used without problems under relatively mild conditions such as the cold rolling process and guide rolls, but in the hot rolling process under more severe conditions, the surface roughness becomes a problem, and the wear resistance The development of good silicon nitride ceramics has been desired.
【0004】[0004]
【発明が解決しようとする課題】本発明者らは、以上の
ような状況に鑑み、窒化珪素セラミックスの耐摩耗性の
改善について鋭意検討を進めた結果、特定の希土類を特
定量存在させればよいことを見出し、本発明を完成させ
たものである。In view of the above situation, the inventors of the present invention have made earnest studies on improvement of the wear resistance of silicon nitride ceramics, and as a result, if a specific rare earth element is present in a specific amount. The inventors have found the good things and completed the present invention.
【0005】[0005]
【課題を解決するための手段】すなわち、本発明は、Al
2O3 、MgO 、SiO2、SrO 、CaO 、AlN 及びそれらを成分
とする化合物の中から選ばれた1種又は2種以上を1〜
10重量%、Nd成分及びPr成分をNd2O3 及びPr6O11でそ
れぞれ1〜10重量%を含んでなることを特徴とする窒
化珪素質焼結体である。That is, the present invention is based on Al
1 to 2 selected from 2 O 3 , MgO, SiO 2 , SrO, CaO, AlN and compounds containing them as 1 to 2
A silicon nitride sintered body, characterized by comprising 10 wt% of Nd component and Pr component of 1 to 10 wt% each of Nd 2 O 3 and Pr 6 O 11 .
【0006】以下、さらに詳しく本発明について説明す
る。The present invention will be described in more detail below.
【0007】従来より、窒化珪素の焼結助剤にはさまざ
まな元素の酸化物や窒化物が検討されている。例えば、
特開昭57−141393号公報では、Pr6O11もしくは
Pr6O11とY2O3とを併用することが検討されているが、得
られた焼結体の耐摩耗性は十分でなかった。Conventionally, oxides and nitrides of various elements have been studied as sintering aids for silicon nitride. For example,
In JP-A-57-141393, Pr 6 O 11 or
The combined use of Pr 6 O 11 and Y 2 O 3 has been studied, but the wear resistance of the obtained sintered body was not sufficient.
【0008】本発明は、耐摩耗性の向上を目的とし、そ
の向上剤として、例えばNd2O3 とPr6O11のようなNd成分
とPr成分を併用し、焼結助剤として、Al2O3 、MgO 、Si
O2、SrO 、CaO 、AlN 及びそれらを成分とする化合物の
中から選ばれた1種又は2種以上を用いたところに大き
な特徴がある。The present invention aims to improve wear resistance, and uses Nd component and Pr component such as Nd 2 O 3 and Pr 6 O 11 together as an enhancer, and uses Al as a sintering aid. 2 O 3 , MgO, Si
O 2, SrO, CaO, there is AlN and one or large characterized in that with two or more selected from among them as a component compound.
【0009】耐摩耗性向上剤であるNd成分及びPr成分の
窒化珪素焼結体中における存在量は、Nd2O3 及びPr6O11
換算でそれぞれ1〜10重量%である。Nd成分又はPr成
分が1重量%未満では耐摩耗性が向上せず、また、10
重量%をこえると窒化珪素本来の特性が損なわれる。The abundance of Nd component and Pr component, which are wear resistance improving agents, in the silicon nitride sintered body is Nd 2 O 3 and Pr 6 O 11
Each is 1 to 10% by weight in conversion. If the Nd component or Pr component is less than 1% by weight, the wear resistance is not improved, and 10
When it exceeds the weight%, the original characteristics of silicon nitride are impaired.
【0010】上記Nd成分とPr成分の割合にあって、Nd/
Prの好ましい重量比は1/10〜10/1である。これ
の具体例としてはジジムがあるのでそれを使用するのが
便利である。In the ratio of the Nd component and the Pr component, Nd /
The preferable weight ratio of Pr is 1/10 to 10/1. A specific example of this is zidim, which is convenient to use.
【0011】一方、焼結助剤であるAl2O3 、MgO 、Si
O2、SrO 、CaO 、AlN 及びそれらを成分とする化合物の
中から選ばれた1種又は2種以上の窒化珪素焼結体中に
おける存在量は、1〜10重量%であることが必要であ
る。1重量%未満では緻密な焼結体にはならず、また1
0重量%をこえると窒化珪素本来の特性が損なわれる。
本発明においては、例えば、CaO 、AlN 、Al2O3 を加え
サイアロン質焼結体にすることもできる。On the other hand, the sintering aids Al 2 O 3 , MgO, Si
The abundance in 1 or 2 or more types of silicon nitride sintered bodies selected from O 2 , SrO 2 , CaO, AlN and compounds containing them must be 1 to 10% by weight. is there. If it is less than 1% by weight, a dense sintered body will not be obtained, and 1
If it exceeds 0% by weight, the original characteristics of silicon nitride are impaired.
In the present invention, for example, CaO, AlN, and Al 2 O 3 may be added to form a sialon sintered body.
【0012】本発明においては、La2O3 、Y2O3、CeO2、
Sm2O3 等のようなNd成分とPr成分以外の希土類を含むこ
とは好ましくないが、不可避不純物としてそれぞれ1重
量%程度までの含有は問題とならない。また、TiC 、Ti
N 、CoO 、Fe2O3 等公知の耐摩耗性向上剤を含ませるこ
ともできる。In the present invention, La 2 O 3 , Y 2 O 3 , CeO 2 ,
It is not preferable to include rare earth elements other than Nd component and Pr component such as Sm 2 O 3 etc. However, inclusion of up to about 1 wt% each as an unavoidable impurity is not a problem. Also, TiC, Ti
A known wear resistance improver such as N 2 , CoO 2 or Fe 2 O 3 may be included.
【0013】本発明の窒化珪素質焼結体は以下の方法に
よって好ましく製造することができる。すなわち、平均
粒径0.8〜1.0μm のSi3N4 粉末に、Al2O3 、MgO 、Si
O2、SrO 、CaO 、AlN 及びそれを成分とする化合物の中
から選ばれた焼結助剤の1種又は2種以上を1〜10重
量%、Nd2O3 及びPr6O11をそれぞれ1〜10重量%又は
ジジムを酸化物換算で1〜10重量%添加し、クロロセ
ン等の有機溶媒と共にボールミルにて1〜5時間の湿式
混合を行い、乾燥後、解砕して混合原料粉末を調整す
る。次いで、それをプレス成形、冷間静水圧法(CIP
法)、射出成形、押し出し成形、鋳込み成形等により成
形した後、常圧焼結、ホットプレス焼結、熱間静水圧
(HIP)焼結等により焼結することによって製造する
ことができる。The silicon nitride sintered body of the present invention can be preferably manufactured by the following method. That is, Al 2 O 3 , MgO, Si was added to Si 3 N 4 powder having an average particle size of 0.8 to 1.0 μm.
1 to 10% by weight of one or more sintering aids selected from O 2 , SrO 2 , CaO, AlN and compounds containing them, and Nd 2 O 3 and Pr 6 O 11 respectively. 1 to 10% by weight or didymium of 1 to 10% by weight in terms of oxide is added, wet-mixed with an organic solvent such as chlorothene in a ball mill for 1 to 5 hours, dried and crushed to obtain a mixed raw material powder. adjust. Then, press it, cold isostatic pressing (CIP
Method), injection molding, extrusion molding, casting molding, etc., and then sintering by normal pressure sintering, hot press sintering, hot isostatic pressing (HIP) sintering, etc.
【0014】[0014]
【実施例】以下、実施例と比較例をあげてさらに具体的
に本発明を説明する。 実施例1〜12 比較例1〜10 平均粒径1μmのSi3N4 粉末に焼結助剤と耐摩耗向上剤
を表1に示す量を秤量し、クロロセンを溶媒として1時
間の湿式混合を行い混合原料粉末を調整した。それを金
型成形後、2.7ton /cm2 圧でCIP処理して成形体を
成形し、温度1700℃×20時間常圧焼結して相対密
度97〜99%の窒化珪素質焼結体を製造した。比較例
1は市販のアルミナ焼結体である。EXAMPLES The present invention will be described in more detail with reference to Examples and Comparative Examples. Examples 1 to 12 Comparative Examples 1 to 10 Si 3 N 4 powder having an average particle size of 1 μm was weighed with the amounts of the sintering aid and the antiwear agent shown in Table 1 and wet-mixed for 1 hour using chlorothene as a solvent. The mixed raw material powder was prepared. After molding it with a die, it is CIP-treated at 2.7 ton / cm 2 pressure to form a compact, which is sintered under normal pressure at a temperature of 1700 ° C. for 20 hours and a relative density of 97 to 99% silicon nitride sintered compact. Was manufactured. Comparative Example 1 is a commercially available alumina sintered body.
【0015】得られた窒化珪素質焼結体を平面研削盤で
40×40×5mmに研削後、ダイヤモンドスラリー
(粒径1〜2μm)を用い市販のウインゴ研磨機で鏡面
に仕上げ、硬度、破壊靱性及び耐摩耗性を以下に従って
測定した。それらの結果を表1に示す。The obtained silicon nitride sintered material was ground to a surface grinder of 40 × 40 × 5 mm, and then a diamond slurry (particle size: 1 to 2 μm) was used to finish it to a mirror surface with a commercially available wing-polishing machine, hardness, and fracture. The toughness and wear resistance were measured according to the following. The results are shown in Table 1.
【0016】表1から明らかなように、本発明の窒化珪
素質焼結体は、サンドブラストと摺動摩耗の何れの耐摩
耗性試験においても優れていることがわかる。As is clear from Table 1, the silicon nitride sintered material of the present invention is excellent in both abrasion resistance tests such as sandblasting and sliding abrasion.
【0017】(1)硬 度 :ビッカース硬度計(明石
製作所製 荷重20kg) (2)破壊靱性:JIS R1606に準じたIF法(明石
製作所製 荷重20kg) (3)耐摩耗性(リングオンディスク法):水中で銅リ
ングを押し付けながら一定周速で回転させた際の摩耗量
を測定した。 試験機;神鋼造機株式会社製 相手材;銅リング(外径25×内径20×厚み20m
m) 荷 重;125Kg/cm2 周 速;0.1m/s 試験時間;120分 評 価;120分試験後の摩耗量(cm3)(1) Hardness: Vickers hardness tester (Akashi Seisakusho load 20 kg) (2) Fracture toughness: IF method according to JIS R1606 (Akashi Seisakusho load 20 kg) (3) Wear resistance (ring-on-disk method) ): The amount of wear was measured when the copper ring was pressed in water and rotated at a constant peripheral speed. Testing machine: Shinko Seiki Co., Ltd. Counterpart material: Copper ring (outer diameter 25 x inner diameter 20 x thickness 20 m
m) Load: 125 Kg / cm 2 Peripheral speed: 0.1 m / s Test time: 120 minutes Evaluation: 120 minutes Amount of wear after test (cm 3 )
【0018】(4)耐摩耗性(サンドブラスト法):焼
結体に研磨材を所定時間噴射し摩耗量を求めた。 試験機;サンドブラスト(不二製作所製「形式SF−4
5−401」) ノズル;穴径7mm 材質B4C 研磨材;アルミナ質ホワイトランダム(#60) 噴射時間;120分 噴射スパン;距離50mm 角度90度 評 価;120分噴射後の摩耗量(g)(4) Abrasion resistance (sandblast method): An abrasive was sprayed on the sintered body for a predetermined time to determine the amount of abrasion. Testing machine: Sandblast (Fuji Seisakusho "Type SF-4
5-401 ”) Nozzle; Hole diameter 7mm Material B 4 C Abrasive material: Alumina white random (# 60) Injection time: 120 minutes Injection span: Distance 50mm Angle 90 degree Evaluation; 120 minutes wear amount after injection (g )
【0019】[0019]
【表1】 [Table 1]
【0020】[0020]
【発明の効果】本発明の窒化珪素質焼結体は、耐摩耗性
に優れたものである。本発明の窒化珪素質焼結体は、耐
摩耗ライナー、圧延ロール、ガイドロール、溶接治具、
切削工具等の耐摩耗部材として使用することができる。The silicon nitride-based sintered body of the present invention has excellent wear resistance. The silicon nitride sintered body of the present invention is a wear resistant liner, rolling roll, guide roll, welding jig,
It can be used as a wear resistant member such as a cutting tool.
Claims (1)
及びそれらを成分とする化合物の中から選ばれた1種又
は2種以上を1〜10重量%、Nd成分及びPr成分をNd2O
3 及びPr6O11換算でそれぞれ1〜10重量%を含んでな
ることを特徴とする窒化珪素質焼結体。1. Al 2 O 3 , MgO, SiO 2 , SrO, CaO, AlN
And 1 to 10% by weight of one or more selected from compounds containing them, and Nd and Pr components of Nd 2 O.
A silicon nitride sintered body, characterized in that it contains 1 to 10% by weight in terms of 3 and Pr 6 O 11 respectively.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4035624A JPH05201766A (en) | 1992-01-27 | 1992-01-27 | Silicon nitride-based sintered compact |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4035624A JPH05201766A (en) | 1992-01-27 | 1992-01-27 | Silicon nitride-based sintered compact |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH05201766A true JPH05201766A (en) | 1993-08-10 |
Family
ID=12447020
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4035624A Pending JPH05201766A (en) | 1992-01-27 | 1992-01-27 | Silicon nitride-based sintered compact |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH05201766A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001097264A1 (en) * | 2000-06-16 | 2001-12-20 | Ibiden Co., Ltd. | Hot plate |
-
1992
- 1992-01-27 JP JP4035624A patent/JPH05201766A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001097264A1 (en) * | 2000-06-16 | 2001-12-20 | Ibiden Co., Ltd. | Hot plate |
US6825555B2 (en) | 2000-06-16 | 2004-11-30 | Ibiden Co., Ltd. | Hot plate |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5591685A (en) | Superplastic silicon carbide sintered body | |
US6753284B2 (en) | Sintered alumina ceramic, method for producing the same, and cutting tool | |
JP2719941B2 (en) | Silicon nitride sintered body | |
JPH0680470A (en) | Production of silicon nitride sintered compact | |
KR0127871B1 (en) | Silicon nitride-based siuters | |
JP2855243B2 (en) | Silicon nitride sintered body with excellent wear resistance | |
JP3395247B2 (en) | Silicon nitride based sintered body | |
JPH05201766A (en) | Silicon nitride-based sintered compact | |
JPH05301776A (en) | Cubic boron nitride-based sintered compact | |
JP3588162B2 (en) | Silicon nitride cutting tool and method of manufacturing the same | |
JP3145470B2 (en) | Tungsten carbide-alumina sintered body and method for producing the same | |
JPS6018620B2 (en) | Zirconia wire drawing die and its manufacturing method | |
JPH11217258A (en) | Sintered compact of alumina-base ceramic and its production | |
EP0963962A1 (en) | Alumina-base ceramic sinter and process for producing the same | |
JP3419495B2 (en) | Composite ceramics | |
US5672553A (en) | Superplastic silicon nitride sintered body | |
JP4588379B2 (en) | Method for manufacturing member for semiconductor manufacturing apparatus | |
JP2920138B1 (en) | Ceramic jig for hot rolling line | |
JP2001322009A (en) | Alumina ceramic cutting tool and manufacturing method therefor | |
JP2581936B2 (en) | Alumina sintered body and method for producing the same | |
JPH06666B2 (en) | Ceramic material with excellent precision workability | |
JP2922713B2 (en) | Zirconia sintered body for tools | |
JP2000335976A (en) | Silicon nitride-based sintered compact and its production and abrasion-resistant member using the same | |
JP2700786B2 (en) | High-temperature high-strength silicon nitride sintered body and method for producing the same | |
KR920006806B1 (en) | Preparation method of calcined body made by al2o3-ticx |