JPH0518839A - Differential pressure detection device - Google Patents
Differential pressure detection deviceInfo
- Publication number
- JPH0518839A JPH0518839A JP17026091A JP17026091A JPH0518839A JP H0518839 A JPH0518839 A JP H0518839A JP 17026091 A JP17026091 A JP 17026091A JP 17026091 A JP17026091 A JP 17026091A JP H0518839 A JPH0518839 A JP H0518839A
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- differential pressure
- housing
- pressure sensor
- elastic member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、とくに傾斜特性の再
現性向上を図った静電容量方式の差圧検出装置に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a capacitance type differential pressure detecting device which is particularly intended to improve the reproducibility of inclination characteristics.
【０００２】[0002]
【従来の技術】従来例について、その断面図である図６
を参照しながら説明する。図６において、21はステンレ
ス鋼からなる柱状筐体で、左側に大直径の有底穴があけ
られ、この底面を貫通して右側に小直径の孔があけられ
る。２はセラミックスの厚肉円筒状をなすリングで、そ
の外周が筐体21の有底穴に嵌り、側壁に３個の後述する
リードピン貫通用孔が軸線に直角にあけられる。６は差
圧センサで、押さえ金具８の右端面に絶縁板７を介して
接合される。押さえ金具８は、中心孔を有する円盤状部
材で、その外周が筐体21の有底穴に嵌り、右端面でリン
グ２を筐体21の有底穴の底面に対して押圧，固定させる
ようにして有底穴の内面で溶接される。そのとき差圧セ
ンサ６は、リング２の中心部の孔に収容されるように位
置する。2. Description of the Related Art FIG. 6 is a sectional view of a conventional example.
Will be described with reference to. In FIG. 6, 21 is a columnar casing made of stainless steel, which has a large-diameter bottomed hole on the left side and a small-diameter hole on the right side through the bottom surface. Reference numeral 2 denotes a ceramic thick-walled cylindrical ring, the outer periphery of which is fitted into a bottomed hole of the housing 21, and three lead pin penetrating holes, which will be described later, are formed in the side wall at right angles to the axis. Reference numeral 6 denotes a differential pressure sensor, which is joined to the right end surface of the holding metal fitting 8 via an insulating plate 7. The holding metal fitting 8 is a disk-shaped member having a center hole, the outer periphery of which is fitted into the bottomed hole of the housing 21 so that the ring 2 is pressed and fixed to the bottom surface of the bottomed hole of the housing 21 at the right end surface. Then, the inner surface of the bottomed hole is welded. At that time, the differential pressure sensor 6 is positioned so as to be housed in the hole at the center of the ring 2.
【０００３】一方、３個のリードピン４が端子台５にハ
ーメチックシールされており、この端子台５は筐体21の
側壁に溶接される。なお、この溶接の前に３個のセラミ
ックスのパイプ23が筐体１の側壁にあけられた３個の孔
にそれぞれ挿入されており、各パイプ23の中心孔を対応
するリードピン４が貫通する形で端子台５が溶接される
順序になる。各リードピン４は、リング２の側壁の孔を
貫通し、先端が差圧センサ６の固定，可動の各電極の外
周面に導通接触する。なお各リードピン４は、詳細な図
示はしてないが、その先端部が軸線方向に可動で外方に
伸びる方向に付勢される構造である。On the other hand, three lead pins 4 are hermetically sealed to the terminal block 5, and the terminal block 5 is welded to the side wall of the housing 21. Before this welding, the three ceramic pipes 23 are inserted into the three holes formed in the side wall of the housing 1, respectively, and the lead pins 4 corresponding to the center holes of the pipes 23 penetrate through the holes. The terminal block 5 is welded in this order. Each lead pin 4 penetrates through a hole in the side wall of the ring 2, and its tip comes into conductive contact with the outer peripheral surface of each fixed and movable electrode of the differential pressure sensor 6. Although not shown in detail, each lead pin 4 has a structure in which a tip end portion thereof is movable in the axial direction and is biased in a direction extending outward.
【０００４】10は蓋体で、中心孔を有し、筐体21の左端
部に溶接される。筐体21の右端面と蓋体10の左端面とに
は、それぞれ円環状波形が形成される。この波形表面に
近接対向してシールダイヤフラム11が、筐体21，蓋体10
の各周縁部にそれぞれ溶接され、この対向空間およびこ
れに連通する内部の各孔や空間には非圧縮性流体たとえ
ばシリコーンオイルが封入液として充填される。Reference numeral 10 denotes a lid, which has a central hole and is welded to the left end of the housing 21. An annular corrugation is formed on each of the right end surface of the housing 21 and the left end surface of the lid 10. The seal diaphragm 11 is closely opposed to the corrugated surface, and the casing 21 and the lid 10
Is welded to each of the peripheral edges thereof, and the facing space and the internal holes and spaces communicating with the facing space are filled with a non-compressible fluid such as silicone oil as a filling liquid.
【０００５】各シールダイヤフラム11の外側に作用する
圧力は、封入液を介して伝達され、差圧センサ６の、符
号を付けてない測定ダイヤフラムとしての可動電極の各
側面に作用してこれを変位させ、符号を付けてない各固
定電極との間の静電容量を変化させる。この静電容量
は、各リードピン４によって取り出され、これに基づい
て両側の各圧力の差、つまり差圧が検出されることにな
る。The pressure acting on the outside of each seal diaphragm 11 is transmitted through the filled liquid and acts on each side surface of the movable electrode as a measurement diaphragm (not shown) of the differential pressure sensor 6 to displace it. Then, the electrostatic capacitance between each fixed electrode not labeled is changed. This capacitance is taken out by each lead pin 4, and the difference between each pressure on both sides, that is, the differential pressure is detected based on this.
【０００６】[0006]
【発明が解決しようとする課題】以上説明したような従
来の技術では、パイプ23の外径と、筐体21の側壁にあけ
られた孔径との間に遊隙があり、リング２の外周と端子
台５の底面との間の間隔がパイプ23の長さより少しでも
大きいと、パイプ23は軸線方向に筐体21に対して移動可
能である。このパイプ23の筐体21に対する移動ないし変
位によって、パイプ23と固定，可動の各電極との間に形
成される浮遊容量が変動することになり、この浮遊容量
の変動が、正規の固定，可動の各電極間の静電容量に基
づく正確な差圧検出を妨害することになる。とくに、差
圧検出装置の傾斜特性の再現性を低下させる。なお、前
記のパイプ23や関連するその他の部材の寸法の精度を上
げて部材間の遊隙を除去するのは、部品ひいては装置の
コスト増大につながり、別の問題を引き起こすことにな
る。In the conventional technique as described above, there is a gap between the outer diameter of the pipe 23 and the diameter of the hole formed in the side wall of the housing 21, and the outer circumference of the ring 2 is If the distance between the bottom surface of the terminal block 5 and the bottom surface of the pipe 23 is slightly larger than the length of the pipe 23, the pipe 23 can move with respect to the housing 21 in the axial direction. Due to the movement or displacement of the pipe 23 with respect to the housing 21, the stray capacitance formed between the pipe 23 and each of the fixed and movable electrodes is changed. This will interfere with accurate detection of the differential pressure based on the capacitance between the electrodes. In particular, the reproducibility of the tilt characteristics of the differential pressure detection device is reduced. It should be noted that increasing the dimensional accuracy of the pipe 23 and other related members to eliminate the play between the members leads to an increase in the cost of the parts and thus the apparatus, and causes another problem.
【０００７】たとえば、いま差圧検出装置を左右または
前後に傾斜させたとき、その零点信号誤差の履歴で零点
の再現性を表すものとする。なお、この場合にリング２
は、その軸線方向に筐体21に対して移動しないよう十分
にしっかり固定されているものとする。図５はその履歴
線図、つまり零点再現性を表し、同図(a) は装置を左右
に傾斜させたときの特性図、同図(b) は装置を前後に傾
斜させたときの特性図である。いずれの場合にも、横軸
に左右または前後の傾斜角度を（正方向を右または前、
負方向を左または後）、縦軸に零点信号の誤差（％）を
とる。For example, when the differential pressure detecting device is tilted to the left or right or front and back, the reproducibility of the zero point is represented by the history of the zero point signal error. In this case, ring 2
Is sufficiently fixed so as not to move with respect to the housing 21 in its axial direction. Fig. 5 shows the history diagram, that is, the zero point reproducibility. Fig. 5 (a) is a characteristic diagram when the device is tilted left and right, and Fig. 5 (b) is a characteristic diagram when the device is tilted back and forth. Is. In either case, the horizontal axis indicates the left / right or front / back inclination angle (positive direction is right or front,
The negative direction is left or rear), and the error (%) of the zero point signal is taken on the vertical axis.
【０００８】初期の傾斜なしの状態から右または前に90
度だけ傾斜させ、次にいったん初期状態に戻した後に左
または後に90度だけ傾斜させ、再び初期状態に復帰させ
るときの、零点信号誤差の変化を矢印を付けた実線で表
す。図５(a) から明らかなように、装置を左右に傾斜さ
せたときの零点信号誤差の最大変動幅は４％強、前後に
傾斜させたときの零点信号誤差の最大変動幅は1.7 ％
で、傾斜が左右，前後で最大変動幅値に差はあるが、い
ずれにしても零点の再現性は悪い。90 from the initial untilted state to the right or forward
The solid line with an arrow indicates the change in the zero-point signal error when the initial state is returned to the initial state, the angle is tilted by 90 degrees to the left or later, and then returned to the initial state. As is clear from Fig. 5 (a), the maximum fluctuation range of the zero-point signal error when the device is tilted to the left and right is a little over 4%, and the maximum fluctuation range of the zero-point signal error when tilted forward and backward is 1.7%.
However, there is a difference in the maximum fluctuation width value between the left and right slopes and the front and rear slopes, but the reproducibility of the zero point is poor in any case.
【０００９】この発明の課題は、従来の技術がもつ以上
の問題点を解消し、傾斜特性の再現性向上を図る静電容
量方式の差圧検出装置を提供することにある。An object of the present invention is to provide a capacitance type differential pressure detecting device which solves the above problems of the prior art and improves the reproducibility of the tilt characteristics.
【００１０】[0010]
【課題を解決するための手段】請求項１に係る差圧検出
装置は、静電容量式の差圧センサが収容される筺体と；
前記差圧センサの固定，可動の各電極に導通接触し前記
筺体に対し絶縁的にシールされるリードピンが中心孔に
貫通固着され、前記筺体の側壁にあけられた孔に嵌ま
り、両側の各端面で当接阻止されるべきパイプと；この
パイプに付設され、これをその軸線方向に付勢する弾性
部材と；を備える。A differential pressure detecting device according to a first aspect of the present invention includes a housing for accommodating a capacitance type differential pressure sensor;
A lead pin, which is in conductive contact with each of the fixed and movable electrodes of the differential pressure sensor and is insulated from the casing, is fixed through the central hole, and is fitted in a hole formed in the side wall of the casing. A pipe to be prevented from contacting at the end face; and an elastic member attached to the pipe and urging the pipe in the axial direction thereof.
【００１１】請求項２に係る差圧検出装置は、請求項１
に記載の装置において、弾性部材が、パイプ外周面に形
成された段差面と、これに対応して筺体に形成された座
面との間に挿入される弾性座金またはバネ座金である。A differential pressure detecting device according to a second aspect is the first aspect.
In the device described in (1), the elastic member is an elastic washer or a spring washer that is inserted between the step surface formed on the outer peripheral surface of the pipe and the seat surface corresponding to the step surface formed on the housing.
【００１２】請求項３に係る差圧検出装置は、請求項１
に記載の装置において、弾性部材が、パイプの各端面の
少なくともいずれかと、これに対応する当接面との間に
挿入される弾性座金またはバネ座金である。A differential pressure detecting device according to a third aspect is the first aspect.
In the device described in (1), the elastic member is an elastic washer or a spring washer inserted between at least one of the end surfaces of the pipe and the corresponding abutting surface.
【００１３】[0013]
【作用】請求項１ないし３のいずれかに係る差圧検出装
置では、パイプは、弾性部材によって軸線方向に付勢さ
れ、その付勢方向に係る端面での当接によって筺体に対
する移動が阻止される。In the differential pressure detecting device according to any one of claims 1 to 3, the pipe is urged in the axial direction by the elastic member, and the movement of the pipe with respect to the housing is prevented by the abutment at the end face in the urging direction. It
【００１４】[0014]
【実施例】本発明に係る差圧検出装置の実施例につい
て、以下に図を参照しながら説明する。この実施例が従
来例と異なる点は、リードピンが貫通固着されるパイプ
が、弾性部材によって軸線方向に付勢され、その付勢方
向に係る端面での当接によって筺体に対する移動が阻止
されることである。なお、従来例におけるのと同じ部材
には同じ符号を付けてある。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the differential pressure detecting device according to the present invention will be described below with reference to the drawings. The difference of this embodiment from the conventional example is that the pipe through which the lead pin is fixed through is urged in the axial direction by the elastic member, and the movement of the pipe with respect to the housing is prevented by the contact at the end face in the urging direction. Is. The same members as those in the conventional example are designated by the same reference numerals.
【００１５】図１は実施例の断面図である。図１におい
て、パイプ３は段差部をもち、その段差面と、筺体１の
対応する座面との間に弾性座金１２が挿入される。した
がって、パイプ３は、たとえ軸線方向の遊隙があって
も、弾性座金１２によって軸線方向、上向きに付勢さ
れ、端子台５の下面での当接によって筺体１に対する移
動が確実に阻止される。FIG. 1 is a sectional view of the embodiment. In FIG. 1, the pipe 3 has a step portion, and an elastic washer 12 is inserted between the step surface and the corresponding seat surface of the housing 1. Therefore, even if there is a play in the axial direction, the pipe 3 is urged upward in the axial direction by the elastic washer 12, and the contact with the lower surface of the terminal block 5 reliably prevents the movement relative to the housing 1. .
【００１６】ところで、弾性座金１２は、図２(a) の側
面図、(b)の平面図に示すような形状である。この弾性
座金１２の代わりに、図３(a) の側面図、(b) の平面図
に示すような形状のバネ座金１３を用いることができ
る。作用は全く同様である。また、図示は省略するが、
弾性座金ないしバネ座金を挿入する位置を、円筒状パイ
プの各端面の少なくともいずれかにすることも可能であ
る。ただし、パイプの下側の端面に挿入するときには、
弾性座金ないしバネ座金をプラスチック成形品にして、
これと比較的近い距離にある、差圧センサの固定，可動
の各電極との間に浮遊容量を生じないように配慮する必
要がある。By the way, the elastic washer 12 has a shape as shown in the side view of FIG. 2A and the plan view of FIG. Instead of this elastic washer 12, a spring washer 13 having a shape as shown in the side view of FIG. 3A and the plan view of FIG. 3B can be used. The action is exactly the same. Although not shown,
It is also possible to insert the elastic washer or the spring washer at at least one of the end faces of the cylindrical pipe. However, when inserting into the lower end face of the pipe,
Make the elastic or spring washer a plastic molded product,
It is necessary to consider so as not to generate stray capacitance between the fixed and movable electrodes of the differential pressure sensor, which are relatively close to this.
【００１７】図４は、実施例における零点再現性に関
し、(a) は左右の傾斜に係る特性図、(b) は前後の傾斜
に係る特性図である。この図４(a) ，(b) はそれぞれ従
来例の図５(a) ，(b)に対応する。図４から明らかなよ
うに、実施例では、零点信号誤差の最大変動幅は、装置
の左右または前後のいずれの傾斜に関しても零であり、
極めて正確な再現性をもたせることができる。FIG. 4 is a characteristic diagram relating to the zero point reproducibility in the embodiment, (a) is a characteristic diagram relating to left and right inclinations, and (b) is a characteristic diagram relating to front and rear inclinations. FIGS. 4 (a) and 4 (b) correspond to FIGS. 5 (a) and 5 (b) of the conventional example, respectively. As is apparent from FIG. 4, in the embodiment, the maximum fluctuation range of the zero-point signal error is zero with respect to either the left or right or front or rear inclination of the device,
It is possible to have extremely accurate reproducibility.
【００１８】[0018]
【発明の効果】請求項１ないし３のいずれかに係る差圧
検出装置では、パイプは、弾性部材によって軸線方向に
付勢され、その付勢方向に係る端面での当接によって筺
体に対する移動が阻止される。したがって、パイプの微
小変位に起因する浮遊容量の変動が除去され、装置の傾
斜特性の再現性が向上する。具体的に言えば、装置を左
右または前後に傾斜させたときの零点の再現性を表す零
点信号誤差の最大変動幅は、従来例でそれぞれ４％強ま
たは１．７％あったものが、実施例ではいずれも零にな
り、しかも装置のコスト増分を極めて低く抑えることが
できる。In the differential pressure detecting device according to any one of claims 1 to 3, the pipe is urged in the axial direction by the elastic member, and is moved with respect to the housing by abutting on the end face in the urging direction. Be blocked. Therefore, the fluctuation of the stray capacitance due to the small displacement of the pipe is eliminated, and the reproducibility of the tilt characteristics of the device is improved. Specifically, the maximum fluctuation range of the zero point signal error, which represents the reproducibility of the zero point when the device is tilted to the left or right or front and back, is 4% or 1.7% in the conventional example. In the example, both are zero, and the cost increase of the device can be kept extremely low.
【図１】発明に係る実施例の断面図FIG. 1 is a sectional view of an embodiment according to the invention.
【図２】この実施例における主要部品に関し、(a) は側
面図、(b)は平面図2A is a side view and FIG. 2B is a plan view of main parts in this embodiment.
【図３】実施例における主要部品の変形例に関し、(a)
は側面図、(b) は平面図FIG. 3 shows a modification of the main parts in the embodiment, (a)
Is a side view, (b) is a plan view
【図４】実施例における零点再現性に関し、(a) は左右
の傾斜に係る特性図、(b) は前後の傾斜に係る特性図FIG. 4A is a characteristic diagram relating to left and right inclinations, and FIG. 4B is a characteristic diagram relating to front and rear inclinations regarding the zero point reproducibility in the embodiment.
【図５】従来例における零点再現性に関し、(a) は左右
の傾斜に係る特性図、(b) は前後の傾斜に係る特性図5A and 5B are graphs showing the reproducibility of the zero point in the conventional example, in which FIG.
【図６】従来例の断面図FIG. 6 is a sectional view of a conventional example.
１ 筺体 ２ リング ３ パイプ ４ リードピン ５ 端子台 ６ 差圧センサ １２ 弾性座金 １３ バネ座金 1 housing Two rings 3 pipes 4 lead pins 5 terminal block 6 Differential pressure sensor 12 elastic washer 13 Spring washer
Claims (3)
と；前記差圧センサの固定，可動の各電極に導通接触し
前記筺体に対し絶縁的にシールされるリードピンが中心
孔に貫通固着され、前記筺体の側壁にあけられた孔に嵌
まり、両側の各端面で当接阻止されるべきパイプと；こ
のパイプに付設され、これをその軸線方向に付勢する弾
性部材と；を備えることを特徴とする差圧検出装置。1. A housing for accommodating a capacitance type differential pressure sensor; and a lead pin, which is in conductive contact with fixed and movable electrodes of the differential pressure sensor and is insulated from the housing, in a central hole. A pipe which is fixed through and fits into a hole formed in a side wall of the housing and is to be prevented from abutting on each end face on both sides; and an elastic member attached to the pipe and biasing the pipe in the axial direction thereof. A differential pressure detection device comprising:
は、パイプ外周面に形成された段差面と、これに対応し
て筺体に形成された座面との間に挿入される弾性座金ま
たはバネ座金であることを特徴とする差圧検出装置。2. The elastic washer according to claim 1, wherein the elastic member is inserted between a step surface formed on the outer peripheral surface of the pipe and a seat surface corresponding to the step surface formed on the housing. Alternatively, the differential pressure detecting device is a spring washer.
は、パイプの各端面の少なくともいずれかと、これに対
応する当接面との間に挿入される弾性座金またはバネ座
金であることを特徴とする差圧検出装置。3. The device according to claim 1, wherein the elastic member is an elastic washer or a spring washer inserted between at least one of the end faces of the pipe and the abutting face corresponding thereto. Characteristic differential pressure detection device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17026091A JPH0518839A (en) | 1991-07-11 | 1991-07-11 | Differential pressure detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17026091A JPH0518839A (en) | 1991-07-11 | 1991-07-11 | Differential pressure detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0518839A true JPH0518839A (en) | 1993-01-26 |
Family
ID=15901646
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17026091A Pending JPH0518839A (en) | 1991-07-11 | 1991-07-11 | Differential pressure detection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0518839A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10461234B2 (en) | 2016-09-29 | 2019-10-29 | Nichia Corporation | Metal-base substrate, semiconductor device and method for manufacturing the same |
-
1991
- 1991-07-11 JP JP17026091A patent/JPH0518839A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10461234B2 (en) | 2016-09-29 | 2019-10-29 | Nichia Corporation | Metal-base substrate, semiconductor device and method for manufacturing the same |
| US11018288B2 (en) | 2016-09-29 | 2021-05-25 | Nichsa Corporation | Metal-base substrate and semiconductor device |
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