JPH0516223Y2 - - Google Patents
Info
- Publication number
- JPH0516223Y2 JPH0516223Y2 JP10830387U JP10830387U JPH0516223Y2 JP H0516223 Y2 JPH0516223 Y2 JP H0516223Y2 JP 10830387 U JP10830387 U JP 10830387U JP 10830387 U JP10830387 U JP 10830387U JP H0516223 Y2 JPH0516223 Y2 JP H0516223Y2
- Authority
- JP
- Japan
- Prior art keywords
- molecular beam
- rotating shaft
- rotation
- drive device
- joint component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000008020 evaporation Effects 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims description 6
- 239000002994 raw material Substances 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
【考案の詳細な説明】
〔産業上の利用分野〕
この考案は分子線エピタキシヤル装置の原料分
子線蒸発源から発生する分子線を遮蔽する分子線
シヤツタを駆動する装置に関するものである。[Detailed Description of the Invention] [Industrial Application Field] This invention relates to a device for driving a molecular beam shutter that shields molecular beams generated from a raw material molecular beam evaporation source of a molecular beam epitaxial apparatus.
第２図は従来の分子線エピタキシヤル装置の分
子線シヤツタ駆動装置を示す概略図、第３図は第
２図に示した分子線シヤツタ駆動装置の回転導入
機を示す平面図、第４図は同じく正断面図であ
る。図において、１は筒体、２は筒体１に設けら
れたφ34IFCミニフランジで、筒体１はミニフラ
ンジ２により真空チヤンバ（図示せず）に取り付
けられている。３はベアリング４を介して筒体１
に回転可能に支持された回転シヤフトで、回転シ
ヤフト３の後端は曲がつている。５はベアリング
６を介して筒体１に回転可能に支持された回転外
筒、７は回転外筒５に設けられた穴内に挿入され
たキヤツプで、キヤツプ７はベアリング８を介し
て回転外筒５に回転可能に支持されており、かつ
ベアリング９を介して回転シヤフト３の後端を回
転可能に支持している。１０は筒体１とキヤツプ
７との間に設けられたベローズ、１１は回転外筒
５に設けられた回転軸で、筒体１、回転シヤフト
３、回転外筒５、キヤツプ７等により回転導入機
１２を構成している。１３は空気圧モータ、１４
は空気圧モータ１３の回転軸、１５は回転軸１４
と回転軸１１とを連結するジヨイント部品で、ジ
ヨイント部品１５の両端には回転軸１１、回転軸
１４がネジ２４，２５により取り付けられてい
る。１６は真空チヤンバ内に設けられた原料分子
線蒸発源、１７は原料分子線蒸発源１６から発生
する分子線を遮蔽する分子線シヤツタで、分子線
シヤツタ１７は回転シヤフト３に取り付けられて
いる。
Fig. 2 is a schematic diagram showing a molecular beam shutter drive device of a conventional molecular beam epitaxial apparatus, Fig. 3 is a plan view showing a rotating introduction machine of the molecular beam shutter drive device shown in Fig. 2, and Fig. 4 is a schematic diagram showing a molecular beam shutter drive device of a conventional molecular beam epitaxial apparatus. Similarly, it is a front sectional view. In the figure, 1 is a cylindrical body, 2 is a φ34 IFC mini flange provided on the cylindrical body 1, and the cylindrical body 1 is attached to a vacuum chamber (not shown) by the mini flange 2. 3 is connected to the cylindrical body 1 via the bearing 4
The rear end of the rotary shaft 3 is curved. Reference numeral 5 denotes a rotary outer cylinder rotatably supported by the cylinder 1 via a bearing 6, 7 a cap inserted into a hole provided in the rotary outer cylinder 5, and the cap 7 connected to the rotary outer cylinder via a bearing 8. 5, and rotatably supports the rear end of the rotary shaft 3 via a bearing 9. 10 is a bellows provided between the cylinder 1 and the cap 7, and 11 is a rotating shaft provided in the rotating outer cylinder 5, which is rotated by the cylinder 1, the rotating shaft 3, the rotating outer cylinder 5, the cap 7, etc. It constitutes machine 12. 13 is a pneumatic motor, 14
is the rotating shaft of the pneumatic motor 13, and 15 is the rotating shaft 14.
The rotary shaft 11 and the rotary shaft 14 are attached to both ends of the joint component 15 with screws 24 and 25. 16 is a raw material molecular beam evaporation source provided in the vacuum chamber; 17 is a molecular beam shutter for shielding the molecular beam generated from the raw material molecular beam evaporation source 16; the molecular beam shutter 17 is attached to the rotating shaft 3;
この分子線エピタキシヤル装置の分子線シヤツ
タ駆動装置においては、空気圧モータ１３に圧縮
空気を供給すると、回転軸１４が回転し、回転外
筒５が回転するから、回転シヤフト３が回転し、
分子線シヤツタ１７が開閉される。 In the molecular beam shutter drive device of this molecular beam epitaxial apparatus, when compressed air is supplied to the pneumatic motor 13, the rotating shaft 14 rotates and the rotating outer cylinder 5 rotates, so the rotating shaft 3 rotates.
The molecular beam shutter 17 is opened and closed.
しかし、このような分子線エピタキシヤル装置
の分子線シヤツタ駆動装置においては、回転軸１
４の中心線と回転軸１１の中心線とが一致してい
ないと、ベアリング８，９およびベアリング４に
無理な力が作用する。また、回転軸１４の中心線
と回転軸１１の中心線とを一致させたとしても、
回転シヤフト３の回転に伴い、ベローズ１０が伸
縮するため、回転シヤフト３が軸方向にわずかに
変位するから、ベアリング８，９に無理な力が作
用する。このため、ベアリング８，９およびベア
リング４に片減りが生じ、分子線シヤツタ１７の
開閉動作を数万回行なうと、分子線シヤツタ１７
の開閉動作を行なうことができなくなつてしま
う。
However, in the molecular beam shutter drive device of such a molecular beam epitaxial device, the rotation axis 1
If the center line of 4 and the center line of rotating shaft 11 do not match, unreasonable force will act on bearings 8 and 9 and bearing 4. Furthermore, even if the center line of the rotating shaft 14 and the center line of the rotating shaft 11 are made to match,
Since the bellows 10 expands and contracts as the rotating shaft 3 rotates, the rotating shaft 3 is slightly displaced in the axial direction, and an unreasonable force is applied to the bearings 8 and 9. For this reason, uneven wear occurs in the bearings 8, 9 and the bearing 4, and when the molecular beam shutter 17 is opened and closed tens of thousands of times, the molecular beam shutter 17
It becomes impossible to open and close the door.
この考案は上述の問題点を解決するためになさ
れたもので、回転導入機のベアリングに片減りが
ほとんど生ずることがない分子線エピタキシヤル
装置の分子線シヤツタ駆動装置を提供することを
目的とする。 This invention was made in order to solve the above-mentioned problems, and the purpose is to provide a molecular beam shutter drive device for a molecular beam epitaxial device in which uneven wear hardly occurs in the bearing of the rotation introduction machine. .
この目的を達成するため、この考案において
は、駆動装置と、上記駆動装置とジヨイント部品
を介して連結されかつ後端が曲がつた回転シヤフ
トおよび上記回転シヤフトの後端部を囲んで設け
られたベローズを有する回転導入機とを具備し、
分子線エピタキシヤル装置の原料分子線蒸発源か
ら発生する分子線を遮蔽する分子線シヤツタを駆
動する装置において、上記ジヨンイント部品の両
端部に自在結合子を設け、上記駆動装置の回転軸
と上記ジヨイント部品との連結部分、上記回転導
入機の回転軸と上記ジヨイント部品との連結部分
の少なくとも一方を、回転が伝わりかつ上記回転
軸の軸方向に空隙を有するはめあい構造にする。
In order to achieve this purpose, this invention includes a driving device, a rotating shaft connected to the driving device via a joint part and having a curved rear end, and a rotating shaft provided surrounding the rear end of the rotating shaft. A rotating introduction machine having a bellows,
In a device for driving a molecular beam shutter that shields molecular beams generated from a raw material molecular beam evaporation source of a molecular beam epitaxial device, a flexible connector is provided at both ends of the joint part, and a rotating shaft of the drive device and the joint are provided. At least one of the connecting portion with the component and the connecting portion between the rotating shaft of the rotation introducing machine and the joint component is configured to have a fitting structure through which rotation is transmitted and having a gap in the axial direction of the rotating shaft.
〔作用〕
この分子線エピタキシヤル装置の分子線シヤツ
タ駆動装置においては、ジヨイント部品の両端部
に自在結合子が設けられているから、駆動装置の
回転軸の中心線と回転導入機の回転軸の中心線と
が一致しなくとも、回転導入機のベアリングに無
理な力が作用することがない。また、駆動装置の
回転軸とジヨイント部品との連結部分、回転導入
機の回転軸とジヨイント部品との連結部分の少な
くとも一方を、回転が伝わりかつ上記回転軸の軸
方向に空隙を有するはめあい構造にしているか
ら、回転シヤフトが軸方向に変位したとしても、
回転導入機のベアリングに無理な力が作用するこ
とがない。[Function] In the molecular beam shutter drive device of this molecular beam epitaxial device, since flexible connectors are provided at both ends of the joint component, the center line of the rotation axis of the drive device and the rotation axis of the rotation introduction machine are aligned. Even if the center lines do not match, no unreasonable force will be applied to the bearing of the rotation introduction machine. In addition, at least one of the connecting portion between the rotating shaft of the drive device and the joint component and the connecting portion between the rotating shaft of the rotation introducing machine and the joint component is configured to have a fitting structure through which rotation is transmitted and having a gap in the axial direction of the rotating shaft. Therefore, even if the rotating shaft is displaced in the axial direction,
No excessive force is applied to the bearing of the rotation introduction machine.
第１図はこの考案に係る分子線エピタキシヤル
装置の分子線シヤツタ駆動装置を示す概略図であ
る。図において、１８は空気圧モータ１３と回転
導入機１２とを連結するジヨイント部品、１９，
２０はジヨイント部品１８の両端部に設けられた
自在結合子、２１は空気圧モータ１３の回転軸１
４をジヨイント部品１８の一端に取り付けるネ
ジ、２２はジヨイント部品１８の他端に設けられ
た断面形状が正方形の連結穴、２３は回転外筒５
に設けられかつ断面形状が正方形の回転軸で、回
転軸２３は連結穴２２に挿入されており、連結穴
２２の底面と回転軸２３の先端面との間には間隙
δが設けられている。
FIG. 1 is a schematic diagram showing a molecular beam shutter driving device for a molecular beam epitaxial apparatus according to this invention. In the figure, 18 is a joint component that connects the pneumatic motor 13 and the rotation introducing machine 12;
20 is a flexible connector provided at both ends of the joint part 18; 21 is a rotating shaft 1 of the pneumatic motor 13;
4 is a screw for attaching it to one end of the joint part 18, 22 is a connection hole with a square cross section provided at the other end of the joint part 18, and 23 is a rotary outer cylinder 5.
The rotating shaft 23 is inserted into the connecting hole 22, and a gap δ is provided between the bottom surface of the connecting hole 22 and the tip surface of the rotating shaft 23. .
この分子線エピタキシヤル装置の分子線シヤツ
タ駆動装置においては、ジヨイント部品１８の両
端部に自在結合子１９，２０が設けられているか
ら、回転軸１４の中心線と回転軸２３の中心線と
が一致しなくとも、回転導入機１２のベアリング
８，９およびベアリング４に無理な力が作用する
ことがない。また、断面形状が正方形の回転軸２
３を断面形状が正方形の連結穴２２に挿入し、連
結穴２２の底面と回転軸２３の先端面との間に間
隙δを設けているから、空気圧モータ１３の回転
を回転導入機１２に伝えることができるととも
に、回転シヤフト３が軸方向に変位したとして
も、ベアリング８，９に無理な力が作用すること
がない。したがつて、分子線シヤツタ１７の開閉
動作を繰り返したとしても、ベアリング８，９お
よびベアリング４に片減りが生ずることがほとん
どなく、寿命を従来の十倍の数十万回にすること
ができる。 In the molecular beam shutter drive device of this molecular beam epitaxial apparatus, since the flexible connectors 19 and 20 are provided at both ends of the joint component 18, the center line of the rotating shaft 14 and the center line of the rotating shaft 23 are aligned. Even if they do not match, no unreasonable force will be applied to the bearings 8, 9 and 4 of the rotation introduction device 12. In addition, a rotating shaft 2 with a square cross-sectional shape
3 is inserted into the connection hole 22 having a square cross-sectional shape, and a gap δ is provided between the bottom surface of the connection hole 22 and the tip surface of the rotating shaft 23, so that the rotation of the pneumatic motor 13 is transmitted to the rotation introduction device 12. In addition, even if the rotating shaft 3 is displaced in the axial direction, no unreasonable force is applied to the bearings 8 and 9. Therefore, even if the opening and closing operations of the molecular beam shutter 17 are repeated, the bearings 8, 9 and the bearing 4 will hardly wear out on one side, and the lifespan can be extended to several hundred thousand times, which is ten times that of the conventional one. .
なお、上述実施例においては、駆動装置として
空気圧モータ１３を用いたが、ステツピングモー
タ等を用いてもよい。また、上述実施例において
は、回転軸２３とジヨイント部品１８との連結部
分のみを、回転が伝わりかつ回転軸２３の軸方向
に空隙δを有するはめあい構造にしたが、空気圧
モータ１３の回転軸とジヨイント部品１８との連
結部分のみを、回転が伝わりかつ回転軸の軸方向
に空隙を有するはめあい構造にしてもよく、空気
圧モータ１３の回転軸とジヨイント部品１８との
連結部分および回転導入機１２の回転軸とジヨイ
ント部品１８との連結部分を、回転が伝わりかつ
回転軸の軸方向に空隙を有するはめあい構造にし
てもよい。さらに、上述実施例においては、連結
穴２２、回転軸２３の断面形状を正方形とした
が、連結穴、回転軸の断面形状を円形以外の形状
にすれば、回転を伝えることができる。 In the above embodiment, the pneumatic motor 13 was used as the drive device, but a stepping motor or the like may also be used. Furthermore, in the above-mentioned embodiment, only the connecting portion between the rotary shaft 23 and the joint component 18 has a fitting structure through which rotation is transmitted and has a gap δ in the axial direction of the rotary shaft 23, but the rotary shaft of the pneumatic motor 13 and Only the connecting part with the joint part 18 may have a fitting structure through which rotation is transmitted and having a gap in the axial direction of the rotating shaft. The connecting portion between the rotating shaft and the joint component 18 may have a fitting structure through which rotation is transmitted and having a gap in the axial direction of the rotating shaft. Further, in the above embodiment, the connecting hole 22 and the rotating shaft 23 have a square cross-sectional shape, but if the connecting hole and the rotating shaft have a cross-sectional shape other than circular, rotation can be transmitted.
以上説明したように、この考案に係る分子線エ
ピタキシヤル装置の分子線シヤツタ駆動装置にお
いては、回転導入機のベアリングに無理な力が作
用することがないから、分子線シヤツタの開閉動
作を繰り返したとしても、回転導入機のベアリン
グに片減りが生ずることがほとんどなく、寿命を
著しく向上することができる。このように、この
考案の効果は顕著である。
As explained above, in the molecular beam shutter drive device of the molecular beam epitaxial apparatus according to this invention, since no unreasonable force is applied to the bearing of the rotation introducing machine, the opening and closing operations of the molecular beam shutter can be repeated. Even so, there is almost no uneven wear on the bearings of the rotation introduction machine, and the lifespan can be significantly improved. In this way, the effects of this invention are remarkable.
第１図はこの考案に係る分子線エピタキシヤル
装置の分子線シヤツタ駆動装置を示す概略図、第
２図は従来の分子線エピタキシヤル装置の分子線
シヤツタ駆動装置を示す概略図、第３図は第２図
に示した分子線シヤツタ駆動装置の回転導入機を
示す平面図、第４図は同じく正断面図である。
３……回転シヤフト、１０……ベローズ、１２
……回転導入機、１３……空気圧モータ、１４…
…回転軸、１６……原料分子線蒸発源、１７……
分子線シヤツタ、１８……ジヨイント部品、１
９，２０……自在結合子、２２……連結穴、２３
……回転軸。
FIG. 1 is a schematic diagram showing a molecular beam shutter driving device of a molecular beam epitaxial device according to this invention, FIG. 2 is a schematic diagram showing a molecular beam shutter driving device of a conventional molecular beam epitaxial device, and FIG. 3 is a schematic diagram showing a molecular beam shutter driving device of a conventional molecular beam epitaxial device. FIG. 2 is a plan view showing the rotation introduction machine of the molecular beam shutter drive device shown in FIG. 2, and FIG. 4 is a front sectional view. 3... Rotating shaft, 10... Bellows, 12
...Rotation introduction machine, 13...Pneumatic motor, 14...
...Rotating shaft, 16... Raw material molecular beam evaporation source, 17...
Molecular beam shutter, 18...joint parts, 1
9, 20... Universal connector, 22... Connection hole, 23
……Axis of rotation.
Claims (1)
介して連結されかつ後端が曲がつた回転シヤフト
および上記回転シヤフトの後端部を囲んで設けら
れたベローズを有する回転導入機とを具備し、分
子線エピタキシヤル装置の原料分子線蒸発源から
発生する分子線を遮蔽する分子線シヤツタを駆動
する装置において、上記ジヨイント部品の両端部
に自在結合子を設け、上記駆動装置の回転軸と上
記ジヨイント部品との連結部分、上記回転導入機
の回転軸と上記ジヨイント部品との連結部分の少
なくとも一方を、回転が伝わりかつ上記回転軸の
軸方向に空隙を有するはめあい構造にしたことを
特徴とする分子線エピタキシヤル装置の分子線シ
ヤツタ駆動装置。 A rotation introduction device comprising a drive device, a rotation shaft connected to the drive device via a joint part and having a bent rear end, and a bellows provided surrounding the rear end of the rotation shaft, In a device for driving a molecular beam shutter that shields molecular beams generated from a raw material molecular beam evaporation source of a line epitaxial device, a flexible connector is provided at both ends of the joint component, and a rotating shaft of the drive device and the joint component are provided. A molecular beam characterized in that at least one of the connecting portion between the rotary shaft of the rotation introducing machine and the joint component has a fitting structure through which rotation is transmitted and having a gap in the axial direction of the rotary shaft. Molecular beam shutter drive device for epitaxial equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10830387U JPH0516223Y2 (en) | 1987-07-16 | 1987-07-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10830387U JPH0516223Y2 (en) | 1987-07-16 | 1987-07-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6414168U JPS6414168U (en) | 1989-01-25 |
| JPH0516223Y2 true JPH0516223Y2 (en) | 1993-04-28 |
Family
ID=31343504
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10830387U Expired - Lifetime JPH0516223Y2 (en) | 1987-07-16 | 1987-07-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0516223Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4074209B1 (en) | 2019-12-12 | 2024-05-15 | Ykk Corporation | Watertight fastener and method for manufacturing same |
-
1987
- 1987-07-16 JP JP10830387U patent/JPH0516223Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6414168U (en) | 1989-01-25 |
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