JPH05159357A - Optical recording medium and its production - Google Patents
Optical recording medium and its productionInfo
- Publication number
- JPH05159357A JPH05159357A JP3318298A JP31829891A JPH05159357A JP H05159357 A JPH05159357 A JP H05159357A JP 3318298 A JP3318298 A JP 3318298A JP 31829891 A JP31829891 A JP 31829891A JP H05159357 A JPH05159357 A JP H05159357A
- Authority
- JP
- Japan
- Prior art keywords
- recording medium
- optical recording
- shape
- recording
- bit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Optical Record Carriers And Manufacture Thereof (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Thermal Transfer Or Thermal Recording In General (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、大容量なファイルとし
て用いられる光記録媒体に関し、特に、形状記憶合金の
可逆的な形状変化を利用して情報の記録消去を行い、形
状変化にともなう反射光量変化から情報を読み出す光記
録媒体とその製造方法および記録方式に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical recording medium used as a large-capacity file, and in particular, recording and erasing of information by utilizing reversible shape change of a shape memory alloy, and reflection due to shape change. The present invention relates to an optical recording medium for reading information from a change in light amount, a manufacturing method thereof, and a recording system.
【０００２】[0002]
【従来の技術】大容量な書き換え可能な光記録方式には
光磁気記録，相変化記録がある。これらは熱書き込み方
式で記録を行う。このとき、記録媒体は一様に成膜され
た連続膜であるため、記録時に膜を伝わる熱の流れが記
録密度の向上を妨げることが問題になっている。ディス
ク構成を変えることで媒体の熱伝達を調整し、記録密度
を向上させることが試みられているが、信号品質を確保
するための光学的な条件と矛盾する関係にあり、記録密
度を向上させながら良い信号品質を得ることは困難であ
った。2. Description of the Related Art Large-capacity rewritable optical recording systems include magneto-optical recording and phase change recording. These are recorded by the thermal writing method. At this time, since the recording medium is a continuous film formed uniformly, there is a problem that the flow of heat transmitted through the film during recording hinders the improvement of the recording density. Attempts have been made to adjust the heat transfer of the medium and improve the recording density by changing the disk configuration, but there is a conflict with the optical conditions for ensuring signal quality, and it is intended to improve the recording density. However, it was difficult to obtain good signal quality.
【０００３】一方、形状記憶合金は構造材料として用い
られる場合が多く、従来は女性用下着，岩石粉砕機，サ
ーモスタット，温度差を利用した発電などマクロな変形
を利用した用途が主であった。形状記憶効果は本質的に
ミクロスコピックな現象であり、ミクロンオーダーの変
形を利用した分野への適用が可能であるにもかかわら
ず、これを生かす利用方法はみられなかった。On the other hand, shape memory alloys are often used as structural materials, and in the past, they were mainly used for macroscopic deformation such as underwear for women, rock crushers, thermostats, and power generation utilizing temperature difference. The shape memory effect is essentially a microscopic phenomenon, and although it can be applied to the field utilizing micron-order deformation, no method of utilizing it has been found.
【０００４】[0004]
【発明が解決しようとする課題】上記観点から、熱伝達
を遮断し高密度化をはかる方法が探索されていた。ま
た、形状記憶合金のミクロスコピックな分野への適用が
探索されていた。From the above viewpoint, a method for blocking heat transfer and increasing the density has been sought. Further, application of shape memory alloys to microscopic fields has been sought.
【０００５】本発明の目的は、熱記録方式を行う光ディ
スク媒体に関して、記録媒体に形状記録合金を利用し、
ひとつひとつの微細なビットを独立に形成して、そのビ
ットの可逆的な形状変化を利用することで媒体内の熱伝
達の影響をなくすことによって高い記録密度の光ディス
クとその記録方式を提供することと、これを満たすこと
のできるディスクの作製方法を提供することにある。An object of the present invention is to use a shape recording alloy as a recording medium for an optical disk medium that performs a thermal recording method,
To provide an optical disc of high recording density and its recording method by eliminating the influence of heat transfer in the medium by forming each minute bit independently and utilizing the reversible shape change of the bit. The purpose of the present invention is to provide a method of manufacturing a disc that can satisfy this.
【０００６】[0006]
【課題を解決するための手段】本発明の光記録媒体は、
形状記憶効果を利用した可逆形状変化にともなう微細ビ
ットを有し、レーザ光によりビット誘起される可逆的な
光学的性質の変化を利用して情報の記録消去読み出しを
することを特徴とする。The optical recording medium of the present invention comprises:
It is characterized in that it has a fine bit associated with a reversible shape change utilizing the shape memory effect, and records and erases information by utilizing the reversible change in optical properties induced by a bit by a laser beam.
【０００７】また、本発明の光記録媒体の記録方式は、
細ビットの形状変化を一つの情報に対応させることを特
徴とする。The recording system of the optical recording medium of the present invention is
The feature is that the shape change of the fine bits is associated with one piece of information.
【０００８】また、本発明の光記録媒体の製造方法は、
基板上にスパッタリングで変形層を作製する工程と、変
形層の上にスパッタリングで反射層を作製する工程と、
フォトレジストによるマスタリング工程と、プラズマを
用いた反応性イオンエッチングによる微細ビット作製工
程と、ウェットエッチングによる変形層溶解工程を含む
ことを特徴とする。The method of manufacturing the optical recording medium of the present invention is
A step of forming a deformable layer on the substrate by sputtering, a step of forming a reflective layer on the deformable layer by sputtering,
The method is characterized by including a mastering process using a photoresist, a fine bit manufacturing process using reactive ion etching using plasma, and a deformation layer dissolving process using wet etching.
【０００９】[0009]
【作用】形状記憶とは、材料をマルテンサイト変態温度
以上の高温下で加工して変形させると、材料を変態温度
以下で変形させても、再加熱急冷により形状が高温時の
ものに戻ることをいう。可逆的なマルテンサイト変態が
原因となって起こる現象であり、Ｃｕ−Ａｌ−Ｎｉなど
のＣｕ系、Ｔｉ−ＮｉなどのＴｉ系が知られている。マ
ルテンサイト変態は、急冷により原子が拡散を伴わずに
変位する現象であり、巨視的な変位を伴わない微視的
で、高速に生じる現象である。従って、可逆的にマルテ
ンサイト変態が起これば、微視的な領域での可逆的な変
形を利用して情報の記録および消去が可能である。形状
記憶効果を示す合金を用いて再生レーザ光と同程度の大
きさの可逆変形をするビットをディスク上に加工すれば
光記録媒体となる。近年の微細加工技術では、サブミク
ロンの大きさのものを作製できることが知られているの
で、赤外領域の波長のレーザ光に関しては十分な高密度
化が期待できる。[Function] Shape memory means that when a material is processed and deformed at a high temperature above the martensitic transformation temperature, even if the material is deformed below the transformation temperature, the shape will return to that at high temperature by reheating and rapid cooling. Say. This is a phenomenon caused by reversible martensitic transformation, and Cu-based materials such as Cu-Al-Ni and Ti-based materials such as Ti-Ni are known. The martensitic transformation is a phenomenon in which atoms are displaced without diffusion due to quenching, and is a microscopic phenomenon that does not involve macroscopic displacement and occurs at high speed. Therefore, if the martensitic transformation occurs reversibly, it is possible to record and erase information by utilizing the reversible transformation in the microscopic region. An optical recording medium can be obtained by processing a disk on which a reversible deformable bit having a size similar to that of a reproducing laser beam is processed using an alloy having a shape memory effect. Since it is known that a submicron size can be manufactured by the recent microfabrication technology, sufficient densification can be expected for laser light having a wavelength in the infrared region.
【００１０】実際の記録方式は、次のようになる。まず
ビットを加熱状態で折り曲げて変形させる（初期化とい
う）。このときビットはレーザ光の入射方向から傾いた
面にあるため、レーザ光側への反射光量は少ない。次に
ビットにレーザ光を照射して徐冷し、ビットをまっすぐ
に伸ばす。今度はビットがレーザ光の入射方向と直交
し、レーザ光側への反射光量が初期状態と比較して大き
くなる。これを利用すれば２値記録ができる。The actual recording method is as follows. First, the bit is bent and deformed in a heated state (referred to as initialization). At this time, since the bit is on the surface inclined from the incident direction of the laser light, the reflected light amount to the laser light side is small. Next, the bit is irradiated with laser light and gradually cooled to straighten the bit. This time, the bit is orthogonal to the incident direction of the laser light, and the amount of light reflected to the laser light side becomes larger than in the initial state. Binary recording is possible by using this.
【００１１】[0011]
【実施例】図１は、本発明の光記録媒体の一実施例であ
る。光記録媒体のビットを模式的に示す図である。ビッ
トは、基板１と、円錐状の変形層２と、円盤状の反射層
３とからなり、変形層２が可逆変形することで反射層３
の傾きが変化して記録消去する。この構成では、基板１
にはガラス、変形層２としてＣｕ−Ｎｉ−Ａｌ（Ａｌ
１４〜１４．５ｗｔ％，Ｎｉ ３〜４．５ｗｔ％）形状
記憶合金（１００ｎｍ）、反射層３としてＳｉＯ2 （５
０ｎｍ）を用いている。DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows an embodiment of the optical recording medium of the present invention. It is a figure which shows the bit of an optical recording medium typically. The bit is composed of a substrate 1, a conical deformation layer 2 and a disc-shaped reflection layer 3, and the deformation layer 2 undergoes reversible deformation, whereby the reflection layer 3 is formed.
The recording will be erased as the slope of changes. In this configuration, the substrate 1
Is glass, and the deformation layer 2 is Cu-Ni-Al (Al
14 to 14.5 wt%, Ni 3 to 4.5 wt%) shape memory alloy (100 nm), SiO 2 (5
0 nm) is used.
【００１２】図２に、この記録媒体の作製過程を示す。
まず、図２（Ａ）に示すようにガラス基板１上に、変形
層２としてＣｕ−Ｎｉ−Ａｌ形状記憶合金をスパッタ法
で作製する。次に、図２（Ｂ）に示すように変形層２の
上に反射層３としてＳｉＯ2 をスパッタ法で作製する。
次に、図２（Ｃ）に示すように反射層３の上に、ネガ型
フォトレジスト４をスピンコートで塗布する。次に、図
２（Ｄ）に示すように形成された多層膜に直径０．４μ
ｍの円形のパルス状レーザ光５を照射して、フォトレジ
ストを感光させる。次に、図２（Ｅ）に示すようにＣＣ
ｌ4 を用いた反応性イオンエッチングを施し、フォトレ
ジストの未感光部分とその下にあるＳｉＯ2 を削り取っ
たのち、図２（Ｆ）に示すように酸素アッシングでレジ
ストを剥離する。この処理によって、円盤状のＳｉＯ2
反射層３を形成することができる。更に、円盤状反射膜
を形成したディスクを王水につけると図２（Ｇ）に示す
ように変形層２がエッチングされ、ＳｉＯ2 反射膜３を
上面とする円錐状になる。この円盤状反射膜つきの変形
部をビットという。この方法で直径１３０ｍｍのディス
ク全面にビットを形成することができた。FIG. 2 shows a manufacturing process of this recording medium.
First, as shown in FIG. 2A, a Cu—Ni—Al shape memory alloy is formed as a deformation layer 2 on a glass substrate 1 by a sputtering method. Next, as shown in FIG. 2B, SiO 2 is formed as a reflective layer 3 on the deformable layer 2 by a sputtering method.
Next, as shown in FIG. 2C, a negative photoresist 4 is applied on the reflective layer 3 by spin coating. Next, the multilayer film formed as shown in FIG.
The circular pulsed laser light 5 of m is irradiated to expose the photoresist. Next, as shown in FIG. 2 (E), CC
Reactive ion etching using l 4 is applied to scrape off the unexposed portion of the photoresist and the underlying SiO 2 and then the resist is removed by oxygen ashing as shown in FIG. 2 (F). By this treatment, disk-shaped SiO 2
The reflective layer 3 can be formed. Further, when the disk having the disk-shaped reflective film formed thereon is immersed in aqua regia, the deformable layer 2 is etched as shown in FIG. 2 (G) to form a conical shape with the SiO 2 reflective film 3 as the upper surface. The deformed portion with the disc-shaped reflective film is called a bit. Bits could be formed on the entire surface of the disk having a diameter of 130 mm by this method.
【００１３】あらかじめＳＴＭ（走査型トンネル顕微
鏡）の針でビットを折り曲げ初期化した試料に関して、
図３に示した２つの強度を持つ記録信号を照射したとき
の再生信号をとったのが図４である。記録消去再生に
は、相変化光ディスクなどに用いられるコンパクト光ヘ
ッドを用いた。変態温度以上に加熱し冷却速度の遅いレ
ーザパルス６を照射したとき、変形層２がまっすぐに伸
び、反射層３がレーザ光の入射方向と直交するので、反
射光量は大きくなった（反射光量８）。これにより情報
を記録できる。また、同じ場所に変態温度以上に加熱し
冷却速度の速いレーザパルス７を照射すると、変形層２
が初期化の状態に戻るので、反射層３がレーザ光の入射
方向に対して傾き反射光量が減少した（反射光量９）。
これにより、情報を消去できる。Regarding a sample in which a bit is preliminarily bent and initialized by an STM (scanning tunneling microscope) needle,
FIG. 4 shows a reproduction signal when the recording signal having the two intensities shown in FIG. 3 is emitted. For recording / erasing / reproducing, a compact optical head used for a phase change optical disk or the like was used. When the laser pulse 6 heated to the transformation temperature or higher and having a slow cooling rate is irradiated, the deformation layer 2 extends straight and the reflection layer 3 is orthogonal to the incident direction of the laser light, so that the reflection light amount becomes large (the reflection light amount 8 ). This allows information to be recorded. In addition, when the same location is heated to a temperature higher than the transformation temperature and irradiated with a laser pulse 7 having a high cooling rate, the deformation layer 2
Is returned to the initialized state, the reflective layer 3 is inclined with respect to the incident direction of the laser light, and the reflected light amount is reduced (reflected light amount 9).
This allows the information to be erased.
【００１４】以上のような反射光量の変化は、形状変化
から期待されるものと同じ様相を呈している。また、記
録消去は可逆的に起こった。このとき、隣のビットの反
射光量変化を調べると、図５のように変化しなかった。
このことは、この方式を用いた場合、０．４μｍのビッ
ト径では隣のビットに影響することなく記録消去が行え
ることを示している。The change in the amount of reflected light as described above has the same aspect as expected from the change in shape. Moreover, the recording and erasing occurred reversibly. At this time, when the change in the reflected light amount of the adjacent bit was examined, it did not change as shown in FIG.
This indicates that when this method is used, recording / erasing can be performed with a bit diameter of 0.4 μm without affecting adjacent bits.
【００１５】従来の光ディスクはビット径約１μｍ、ト
ラックピッチ１．６μｍなので、０．４μｍ径のビット
からなるディスクを作製することにより、レーザ光の強
度変調だけで可逆的に記録消去でき、１０倍の記録密度
を達成することができる。Since the conventional optical disc has a bit diameter of about 1 μm and a track pitch of 1.6 μm, it is possible to reversibly record and erase by only modulating the intensity of laser light by producing a disc consisting of bits with a diameter of 0.4 μm. It is possible to achieve a recording density of.
【００１６】以上のように本実施例によれば、冷却速度
に応じて変形層２の形状が変化し、光反射層３の向きが
変わるため、光ヘッドに戻る反射光量が変化し、情報の
記録・消去ができる。このとき、各ビットは孤立してい
るので、ビット間の熱干渉がなく、高密度に記録ができ
る。As described above, according to this embodiment, the shape of the deformable layer 2 changes according to the cooling rate, and the direction of the light reflection layer 3 changes, so that the amount of reflected light returning to the optical head changes, and Recording / erasing is possible. At this time, since each bit is isolated, there is no thermal interference between the bits and high density recording is possible.
【００１７】[0017]
【発明の効果】本発明による、形状記憶合金を用い、記
録ビットを円錐状に微細加工して形状変化で生じる反射
光量変化により記録・消去・再生する光記録媒体を用い
て、高密度な光記録ができた。The optical recording medium according to the present invention, which uses the shape memory alloy and finely processes the recording bit into a conical shape to record / erase / reproduce by the change in the amount of reflected light caused by the change in shape, a high density optical recording medium is obtained. I was able to record.
【図１】本発明の光記録媒体を示す図である。FIG. 1 is a diagram showing an optical recording medium of the present invention.
【図２】本発明の光記録媒体の製造方法を説明するため
の図である。FIG. 2 is a diagram illustrating a method for manufacturing an optical recording medium of the present invention.
【図３】記録信号を示す図である。FIG. 3 is a diagram showing a recording signal.
【図４】図３で示した記録パルスを照射した場合の再生
光で測定した反射光量を示す図である。FIG. 4 is a diagram showing the amount of reflected light measured with reproduction light when the recording pulse shown in FIG. 3 is irradiated.
【図５】図３で示した記録パルスを照射したビットの隣
のビットを再生したときの反射光量を示す図である。5 is a diagram showing the amount of reflected light when a bit next to the bit irradiated with the recording pulse shown in FIG. 3 is reproduced.
１ 基板 ２ 変形層 ３ 反射層 ４ ネガ型フォトレジスト ５ ビット形成露光用レーザ光 ６ 急冷を実現するレーザパルス ７ 徐冷を実現するレーザパルス ８，９ 反射光量 1 Substrate 2 Deformation Layer 3 Reflection Layer 4 Negative Photoresist 5 Bit Forming Exposure Laser Light 6 Laser Pulse for Realizing Rapid Cooling 7 Laser Pulse for Realizing Slow Cooling 8, 9 Reflected Light Amount
Claims (4)
もなう微細ビットを有し、レーザ光によりビット誘起さ
れる可逆的な光学的性質の変化を利用して情報の記録消
去読み出しをすることを特徴とする光記録媒体。1. A method for recording, erasing and reading information by using a reversible change in optical properties induced by a laser beam, which has fine bits associated with a reversible shape change utilizing a shape memory effect. Characteristic optical recording medium.
た可逆形状変化をともなう円錐状の形状変形部と、この
形状変形部に連結された円盤状の光反射部とからなるこ
とを特徴とする請求項１記載の光記録媒体。2. The fine bit comprises a conical shape-changing portion with a reversible shape change utilizing a shape memory effect, and a disc-shaped light reflecting portion connected to the shape-changing portion. The optical recording medium according to claim 1.
変化を、一つの情報に対応させることを特徴とする光記
録媒体の記録方式。3. A recording method for an optical recording medium, characterized in that the shape change of the fine bits according to claim 1 or 2 is associated with one piece of information.
る工程と、 変形層の上にスパッタリングで反射層を作製する工程
と、 フォトレジストによるマスタリング工程と、 プラズマを用いた反応性イオンエッチングによる微細ビ
ット作製工程と、 ウェットエッチングによる変形層溶解工程を含むことを
特徴とする光記録媒体の製造方法。4. A step of forming a deformable layer on a substrate by sputtering, a step of forming a reflective layer on the deformable layer by sputtering, a mastering step using a photoresist, and a fine step by reactive ion etching using plasma. A method of manufacturing an optical recording medium, comprising: a bit manufacturing step; and a deformed layer dissolving step by wet etching.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3318298A JPH05159357A (en) | 1991-12-03 | 1991-12-03 | Optical recording medium and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3318298A JPH05159357A (en) | 1991-12-03 | 1991-12-03 | Optical recording medium and its production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05159357A true JPH05159357A (en) | 1993-06-25 |
Family
ID=18097643
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3318298A Pending JPH05159357A (en) | 1991-12-03 | 1991-12-03 | Optical recording medium and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05159357A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5728240A (en) * | 1994-12-16 | 1998-03-17 | Sharp Kabushiki Kaisha | Positionally adjustable member and applications therefor |
| US7813258B2 (en) | 2007-02-28 | 2010-10-12 | Hitachi, Ltd. | Optical information recording medium and optical information reproducing method |
| US7876667B2 (en) | 2005-05-20 | 2011-01-25 | Hitachi, Ltd. | Optical information recording medium, and information recording method and information reproducing method using the same |
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|---|---|---|---|---|
| JPS60125944A (en) * | 1983-12-13 | 1985-07-05 | Fujitsu Ltd | Recording medium |
| JPS61228989A (en) * | 1985-04-02 | 1986-10-13 | Hamamatsu Photonics Kk | Optical recording medium using shape memory alloy |
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1991
- 1991-12-03 JP JP3318298A patent/JPH05159357A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60125944A (en) * | 1983-12-13 | 1985-07-05 | Fujitsu Ltd | Recording medium |
| JPS61228989A (en) * | 1985-04-02 | 1986-10-13 | Hamamatsu Photonics Kk | Optical recording medium using shape memory alloy |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5728240A (en) * | 1994-12-16 | 1998-03-17 | Sharp Kabushiki Kaisha | Positionally adjustable member and applications therefor |
| US7876667B2 (en) | 2005-05-20 | 2011-01-25 | Hitachi, Ltd. | Optical information recording medium, and information recording method and information reproducing method using the same |
| US7813258B2 (en) | 2007-02-28 | 2010-10-12 | Hitachi, Ltd. | Optical information recording medium and optical information reproducing method |
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