JPH05152091A - Characteristic x-ray generating device - Google Patents
Characteristic x-ray generating deviceInfo
- Publication number
- JPH05152091A JPH05152091A JP31602691A JP31602691A JPH05152091A JP H05152091 A JPH05152091 A JP H05152091A JP 31602691 A JP31602691 A JP 31602691A JP 31602691 A JP31602691 A JP 31602691A JP H05152091 A JPH05152091 A JP H05152091A
- Authority
- JP
- Japan
- Prior art keywords
- target
- rays
- characteristic
- ray
- substances
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
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- X-Ray Techniques (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、化学分析、応力測定等
に使用される特性Ｘ線発生装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a characteristic X-ray generator used for chemical analysis, stress measurement and the like.
【０００２】[0002]
【従来の技術】真空中で電子を物質に衝突させることに
よりＸ線を発生させることができる。このとき、発生す
るエネルギーの大部分は熱に変換されるため、電子の衝
突部分である回転ターゲットを冷却することが重要とな
る。この回転ターゲットは、その周面部にターゲット物
質を周状に配列して埋設した円筒形状のものであり、回
転させながら冷却を行なうことで、より強い特性のＸ線
の発生を可能としている。発生させる特性Ｘ線はターゲ
ット物質、例えばＣｒ、Ｆｅ、Ｃｏ、Ｃｕ、Ｍｏ等によ
って特有の波長を有するものであり、１つの回転ターゲ
ットには１種類のターゲット物質を用いている。したが
って、発生させる特性Ｘ線を変更する場合には、使用し
ている回転ターゲットをターゲット物質の異なる他の回
転ターゲットと交換するようにしていた。2. Description of the Related Art X-rays can be generated by colliding electrons with a substance in a vacuum. At this time, most of the generated energy is converted into heat, so it is important to cool the rotating target, which is the electron collision part. This rotating target has a cylindrical shape in which target materials are arranged in a circumferential shape and embedded in the peripheral surface portion, and cooling is performed while rotating the target material, thereby making it possible to generate X-rays having stronger characteristics. The characteristic X-ray generated has a specific wavelength depending on the target material, for example, Cr, Fe, Co, Cu, Mo, etc., and one kind of target material is used for one rotating target. Therefore, when changing the characteristic X-rays to be generated, the rotating target used is replaced with another rotating target having a different target material.
【０００３】[0003]
【発明が解決しようとする課題】特性Ｘ線を用いて行な
う試験の多くはＸ線の回析現象を利用している。この場
合、使用する特性Ｘ線と被測定材の結晶格子の面間隔と
の間にはブラッグの回析条件式が成立する必要がある。
このブラッグの回析条件式は、 ｎλ＝２ｄ・ｓｉｎθ …(1) （但し、ｎ：自然数、λ：特性Ｘ線の波長［オングスト
ローム］、ｄ：格子面間隔［オングストローム］、θ：
回析角［度］。）となるもので、そのために被測定材の
種類に応じて特性Ｘ線を選定しなければならず、頻繁に
回転ターゲットを交換する必要が生じる。Many of the tests conducted using characteristic X-rays utilize the diffraction phenomenon of X-rays. In this case, the Bragg diffraction conditional expression must be satisfied between the characteristic X-rays used and the plane spacing of the crystal lattice of the measured material.
The Bragg diffraction condition formula is as follows: nλ = 2d · sin θ (1) (where, n: natural number, λ: wavelength of characteristic X-ray [angstrom], d: lattice spacing [angstrom], θ:
Diffraction angle [degree]. Therefore, the characteristic X-ray must be selected according to the type of the material to be measured, and the rotating target must be frequently replaced.
【０００４】そして、回転ターゲットの交換に際して
は、装置の真空系を一旦大気状態に戻さなければなら
ず、再度の真空引きが必要で、これが作業上の大きなタ
イムロスとなる。When the rotary target is replaced, the vacuum system of the apparatus must be once returned to the atmospheric condition, and it is necessary to evacuate again, which causes a great time loss in work.
【０００５】本発明は上記のような実情に鑑みてなされ
たもので、その目的とするところは、回転ターゲットを
交換することなしに複数の特性Ｘ線を発生させることが
可能な特性Ｘ線発生装置を提供することにある。The present invention has been made in view of the above circumstances, and an object of the present invention is to generate a characteristic X-ray capable of generating a plurality of characteristic X-rays without exchanging a rotary target. To provide a device.
【０００６】[0006]
【課題を解決するための手段及び作用】すなわち本発明
は、回転ターゲットの周面部に異なる複数種類のターゲ
ット物質を規則的に配列して埋設するようにしたもの
で、この回転ターゲットを用いることで交換作業等を行
なうことなく、複数の特性Ｘ線の発生を可能とし、それ
ら複数の特性Ｘ線による同時試験を可能とする。That is, according to the present invention, a plurality of different types of target materials are regularly arranged and embedded in the peripheral surface of a rotary target. By using this rotary target, It is possible to generate a plurality of characteristic X-rays without performing replacement work, etc., and to simultaneously test with a plurality of these characteristic X-rays.
【０００７】また、単一の特性Ｘ線のみを得たい場合に
は、Ｘ線取出し口に回転ターゲットの回転に同期したシ
ャッタを設け、所望のターゲット物質の配置周期とシャ
ッタの開閉タイミングとを同期させることにより、必要
とする特性Ｘ線のみを取出すことができるようにしたも
ので、広範な物質の測定に対しても回転ターゲットの交
換なしに試験することが可能となる。Further, in order to obtain only a single characteristic X-ray, a shutter synchronized with the rotation of the rotary target is provided at the X-ray extraction port, and the arrangement period of the desired target material and the opening / closing timing of the shutter are synchronized. By doing so, only the required characteristic X-rays can be taken out, and it becomes possible to test a wide range of substances without changing the rotating target.
【０００８】[0008]
【実施例】以下図面を参照して本発明の一実施例を説明
する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.
【０００９】図１は主に回転ターゲット周辺の機械構成
を示すもので、図中の１が円柱状のターゲット部、２が
ターゲット部１を回転駆動するベルト、３がターゲット
部１での発熱を冷却するための冷却栓、４がターゲット
部１の周面に規則的に配列して埋設されたターゲット物
質であり、ここでは白抜きで図示するＡ物質とハッチン
グで示すＢ物質の２種類の物質を交互に配列するものと
する。FIG. 1 mainly shows a mechanical structure around a rotary target. In the figure, 1 is a cylindrical target portion, 2 is a belt for rotationally driving the target portion 1, and 3 is heat generated in the target portion 1. A cooling plug 4 for cooling is a target material which is regularly arranged and embedded in the peripheral surface of the target portion 1. Here, two kinds of materials, a material A shown in white and a material B shown by hatching, are used. Shall be arranged alternately.
【００１０】図２はこの回転ターゲットから発生される
特性Ｘ線を図２（１）のターゲットの回転角に対してＡ
物質からの特性Ｘ線（以下「Ａ−Ｘ線」と称する）と、
図２（２）のＢ物質からの特性Ｘ線（以下「Ｂ−Ｘ線」
と称する）とに分離して示したものである。FIG. 2 shows characteristic X-rays generated from this rotating target as A with respect to the rotation angle of the target shown in FIG.
Characteristic X-rays from the substance (hereinafter referred to as "AX rays"),
Characteristic X-ray from the substance B in FIG. 2 (2) (hereinafter referred to as “B-X-ray”)
It is shown separately.
【００１１】図３は上記回転ターゲットを用いた特性Ｘ
線発生装置全体の構成を示すもので、フィラメント５か
ら飛出した電子を回転ターゲット６に衝突させ、Ｘ線を
発生させる。発生したＸ線１４はＸ線取出し口７から取
出される。このＸ線取出し口７を通過するＸ線１４は上
記図２（１）に示したＡ−Ｘ線と図２（２）に示したＢ
−Ｘ線とを重畳した状態となっているため、Ｘ線取出し
口７に図４に示すようなＸ線通過孔１３を円周状に形成
した構造のシャッタ８を設け、このシャッタ８の回転と
回転ターゲット６の回転とをそれぞれの回転駆動部１
６，１７間に同期回路１８を配設することで同期させ、
必要なＸ線１５のみを通過させる。FIG. 3 shows a characteristic X using the rotary target.
This shows the configuration of the entire ray generator, in which electrons ejected from the filament 5 collide with the rotating target 6 to generate X-rays. The generated X-rays 14 are extracted from the X-ray extraction port 7. The X-ray 14 passing through the X-ray extraction port 7 is the A-X line shown in FIG. 2 (1) and the B line shown in FIG. 2 (2).
Since the X-ray and the X-ray are superposed, a shutter 8 having a structure in which an X-ray passage hole 13 as shown in FIG. And the rotation of the rotary target 6 are respectively controlled by the rotary drive unit 1
By arranging the synchronization circuit 18 between 6 and 17,
Only the necessary X-rays 15 are passed.
【００１２】この通過Ｘ線１５を用いて、例えば図中に
９の被測定材、１０のゴニオメータ、１１のＸ線検出
器、１２の記録計をセットすることで、目的に応じた試
験を行なうことができる。Using this passing X-ray 15, for example, by setting 9 materials to be measured, 10 goniometers, 11 X-ray detectors, and 12 recorders in the figure, a test according to the purpose is carried out. be able to.
【００１３】なお、上記Ｘ線取出し口７のシャッタ８を
取り外すことにより、同時に複数の特性Ｘ線を発生させ
て試験を行なうこともできる。この場合、特性Ｘ線はそ
の種類によって物質への侵入深さが異なるため、同時に
得られる複数の特性Ｘ線のデータを比較することによ
り、被測定材９の深さ方向の情報が得られることとな
る。By removing the shutter 8 of the X-ray extraction port 7, a plurality of characteristic X-rays can be simultaneously generated and a test can be conducted. In this case, since the characteristic X-rays have different penetration depths into the substance depending on their types, it is possible to obtain information in the depth direction of the material 9 to be measured by comparing data of a plurality of characteristic X-rays obtained at the same time. Becomes
【００１４】[0014]
【発明の効果】以上詳記した如く本発明によれば、回転
ターゲットの周面部に異なる複数種類のターゲット物質
を規則的に配列して埋設するようにしたので、この回転
ターゲットを用いることで交換作業等を行なうことな
く、複数の特性Ｘ線の発生を可能とし、それら複数の特
性Ｘ線による同時試験を可能とする一方、単一の特性Ｘ
線のみを得たい場合には、Ｘ線取出し口に回転ターゲッ
トの回転に同期したシャッタを設け、所望のターゲット
物質の配置周期とシャッタの開閉タイミングとを同期さ
せることにより、必要とする特性Ｘ線のみを取出すこと
もできるため、広範な物質の測定に対しても回転ターゲ
ットの交換なしに試験することも可能な特性Ｘ線発生装
置を提供することができる。As described above in detail, according to the present invention, a plurality of different kinds of target materials are regularly arranged and embedded in the peripheral surface of the rotary target. A plurality of characteristic X-rays can be generated without performing any work, and simultaneous testing with a plurality of these characteristic X-rays is possible, while a single characteristic X-ray
To obtain only the X-rays, a shutter synchronized with the rotation of the rotating target is provided at the X-ray extraction port, and the desired characteristic X-rays are obtained by synchronizing the arrangement period of the desired target material and the opening / closing timing of the shutter. Since it is possible to extract only a wide range of substances, it is possible to provide a characteristic X-ray generator that can be tested for a wide range of substances without changing the rotating target.
【図１】本発明の一実施例に係る回転ターゲット部の構
成を示す斜視図。FIG. 1 is a perspective view showing a configuration of a rotary target unit according to an embodiment of the present invention.
【図２】図１のターゲット物質より発生される２種類の
特性Ｘ線の状態を示す図。FIG. 2 is a diagram showing the states of two types of characteristic X-rays generated from the target material of FIG.
【図３】図１の回転ターゲット部を用いた特性Ｘ線発生
装置全体の構成を示す図。FIG. 3 is a diagram showing the overall configuration of a characteristic X-ray generator using the rotary target unit shown in FIG.
【図４】図３のシャッタの構造を示す図。FIG. 4 is a view showing the structure of the shutter shown in FIG.
１…ターゲット部、２…ベルト、３…冷却栓、４…ター
ゲット物質、５…フィラメント、６…回転ターゲット、
７…Ｘ線取出し口、８…シャッタ、被測定材、１０…ゴ
ニオメータ、１１…Ｘ線検出器、１２…記録計、１３…
Ｘ線通過孔、１４…Ｘ線、１５…通過Ｘ線、１６，１７
…回転駆動部、１８…同期回路。1 ... Target part, 2 ... Belt, 3 ... Cooling plug, 4 ... Target material, 5 ... Filament, 6 ... Rotating target,
7 ... X-ray extraction port, 8 ... Shutter, material to be measured, 10 ... Goniometer, 11 ... X-ray detector, 12 ... Recorder, 13 ...
X-ray passing hole, 14 ... X-ray, 15 ... Passing X-ray, 16, 17
… Rotation drive, 18… Synchronous circuit.
Claims (1)
則配列して埋設した回転ターゲットを備えたことを特徴
とする特性Ｘ線発生装置。1. A characteristic X-ray generator comprising a rotating target in which a plurality of kinds of target materials are regularly arranged and embedded in a peripheral surface portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31602691A JPH05152091A (en) | 1991-11-29 | 1991-11-29 | Characteristic x-ray generating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31602691A JPH05152091A (en) | 1991-11-29 | 1991-11-29 | Characteristic x-ray generating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05152091A true JPH05152091A (en) | 1993-06-18 |
Family
ID=18072426
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31602691A Withdrawn JPH05152091A (en) | 1991-11-29 | 1991-11-29 | Characteristic x-ray generating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05152091A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007073297A (en) * | 2005-09-06 | 2007-03-22 | Toshiba Corp | Anode target, and rotary anode x-ray tube device |
| KR101023713B1 (en) * | 2009-06-16 | 2011-03-25 | 한국전기연구원 | Dual X-ray generator capable of selecting one of transmission mode and reflection mode |
| KR101042033B1 (en) * | 2009-06-08 | 2011-06-16 | 재단법인 한국원자력의학원 | Multi-channel target exchange apparatus |
| DE102011078357A1 (en) | 2010-06-29 | 2011-12-29 | Rigaku Corp. | Apparatus for X-ray analysis with classified wavelengths |
-
1991
- 1991-11-29 JP JP31602691A patent/JPH05152091A/en not_active Withdrawn
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007073297A (en) * | 2005-09-06 | 2007-03-22 | Toshiba Corp | Anode target, and rotary anode x-ray tube device |
| JP4744992B2 (en) * | 2005-09-06 | 2011-08-10 | 株式会社東芝 | Rotating anode X-ray tube device |
| KR101042033B1 (en) * | 2009-06-08 | 2011-06-16 | 재단법인 한국원자력의학원 | Multi-channel target exchange apparatus |
| KR101023713B1 (en) * | 2009-06-16 | 2011-03-25 | 한국전기연구원 | Dual X-ray generator capable of selecting one of transmission mode and reflection mode |
| DE102011078357A1 (en) | 2010-06-29 | 2011-12-29 | Rigaku Corp. | Apparatus for X-ray analysis with classified wavelengths |
| US8300767B1 (en) | 2010-06-29 | 2012-10-30 | Rigaku Corporation | Wavelength-classifying type X-ray diffraction device |
| US8699665B2 (en) | 2010-06-29 | 2014-04-15 | Rigaku Corporation | Wavelength-classifying type X-ray diffraction device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19990204 |