JPH05142182A - Moisture sensor - Google Patents
Moisture sensorInfo
- Publication number
- JPH05142182A JPH05142182A JP32817191A JP32817191A JPH05142182A JP H05142182 A JPH05142182 A JP H05142182A JP 32817191 A JP32817191 A JP 32817191A JP 32817191 A JP32817191 A JP 32817191A JP H05142182 A JPH05142182 A JP H05142182A
- Authority
- JP
- Japan
- Prior art keywords
- moisture
- sensitive layer
- pair
- electrodes
- humidity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、有機高分子材料を感湿
層として用い湿度の変化を電気抵抗あるいは容量の変化
として検出する湿度センサに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a humidity sensor which uses an organic polymer material as a moisture sensitive layer to detect a change in humidity as a change in electric resistance or capacitance.
【０００２】[0002]
【従来の技術】一般に、有機高分子材料は水分子の吸脱
着に優れているため、この有機高分子材料を感湿層とし
て利用し得ることが知られている。2. Description of the Related Art Generally, it is known that an organic polymer material can be used as a moisture-sensitive layer because it is excellent in adsorption and desorption of water molecules.
【０００３】従来、これら有機高分子材料を感湿層とし
て用いた湿度センサは、例えば特開昭５９−１３３４５
３号公報によって提案されている。Conventionally, a humidity sensor using these organic polymer materials as a moisture sensitive layer is disclosed in, for example, JP-A-59-13345.
It is proposed by the gazette No. 3.
【０００４】この技術内容は、例えばアルミナやガラス
などからなる公知の絶縁基板上に形成した一対の電極間
に、有機高分子材料としてのメタクリルアミドプロピル
トリメチルアンモニウムハライドの重合体又は共重合体
を液体化させてなる感湿剤を塗布し感湿層を形成し、こ
の感湿層の電気抵抗の湿度に対する変化を利用したもの
である。[0004] The technical content is that a polymer or copolymer of methacrylamidopropyltrimethylammonium halide as an organic polymer material is formed between a pair of electrodes formed on a known insulating substrate made of, for example, alumina or glass. The moisture sensitive agent is applied to form a moisture sensitive layer, and a change in electric resistance of the moisture sensitive layer with respect to humidity is utilized.
【０００５】しかしながら、上記のような有機高分子材
料からなる感湿層は、本発明者の検討結果から、 高温度雰囲気での経時安定性に欠ける 高湿度雰囲気での経時安定性に欠ける 相対湿度と電気抵抗値の関係が対数直線的でない（直
線性に欠ける） などの問題点を有し、より高い信頼性を得る上で、実用
上必ずしも好ましいものとなっていないことが確認され
た。However, the moisture-sensitive layer made of the organic polymer material as described above is inferior in stability over time in a high temperature atmosphere from the results of studies by the present inventors. It has been confirmed that there is a problem that the relationship between the electric resistance value and the electric resistance value is not logarithmically linear (lack of linearity), and that it is not necessarily preferable for practical use in order to obtain higher reliability.
【０００６】このため、例えば感湿層上にエチルセルロ
ースなどを塗布しオーバーコートを施すなどの方法を採
用し、上記問題点の解消を試みてみたが、この試みによ
って上記問題点の一時的な解消に貢献することができる
が、構造が複雑化し、かつ工数が増し高価になることは
元より、長期的な使用下での経時変化による特性劣化が
あり、上記問題点の基本的な解消には至らなかった。Therefore, for example, an attempt was made to solve the above-mentioned problems by adopting a method of applying ethyl cellulose or the like on the moisture-sensitive layer and applying an overcoat, but this attempt temporarily solves the above-mentioned problems. However, in addition to the complicated structure, increased man-hours and high cost, there is characteristic deterioration due to aging over long-term use. It didn't come.
【０００７】このことは、上記した有機高分子材料自体
に起因するものであり、上記問題点の基本的な解消に貢
献できる有機高分子材料の改良が必要であった。This is due to the above organic polymer material itself, and it has been necessary to improve the organic polymer material which can contribute to the basic elimination of the above problems.
【０００８】[0008]
【発明が解決しようとする課題】以上のように従来提案
されている有機高分子材料を感湿層とした湿度センサ
は、感湿層を構成する有機高分子材料自体に起因して信
頼性に欠け、所望の性能を得ることができなかった。As described above, the humidity sensor using a moisture-sensitive layer made of an organic polymer material, which has been conventionally proposed, is not reliable because of the organic polymer material itself constituting the moisture-sensitive layer. It was chipped and the desired performance could not be obtained.
【０００９】本発明は、上記のような問題点を解決する
ためになされたもので、従来技術において問題点とされ
ていた、 高温及び高湿下での経時的安定性に欠ける 直線性に欠ける などの欠点を解消し、高温及び高湿雰囲気での経時特性
にも優れ、かつ直線性に優れ、しかも湿度ヒステリシス
の小さい湿度センサを提供することを目的とするもので
ある。The present invention has been made to solve the above problems, and lacks linearity which is a problem in the prior art and lacks stability with time under high temperature and high humidity. SUMMARY OF THE INVENTION It is an object of the present invention to solve the above drawbacks, to provide a humidity sensor having excellent characteristics over time in a high temperature and high humidity atmosphere, excellent linearity, and small humidity hysteresis.
【００１０】[0010]
【課題を解決するための手段】本発明になる湿度センサ
は、絶縁基板上に形成した一対の電極間に、ジメチルア
ミノプロピルメタクリルアミドをベンジルハライドで４
級塩化し合成したモノマーの重合体又は共重合体からな
る感湿層を設けたことを特徴とするものである。SUMMARY OF THE INVENTION A humidity sensor according to the present invention has a structure in which dimethylaminopropylmethacrylamide is formed between a pair of electrodes formed on an insulating substrate with benzyl halide.
It is characterized in that a moisture sensitive layer made of a polymer or a copolymer of a monomer which is chlorinated and synthesized is provided.
【００１１】[0011]
【作用】このように構成された湿度センサによれば、感
湿層がジメチルアミノプロピルメタクリルアミドをベン
ジルハライドで４級塩化し合成したモノマーの重合体又
は共重合体から構成されるものとなり、この感湿層は湿
度センサとして要求される室温中ではもちろん、高温及
び高湿中でも経時安定性に優れ、かつ直線性が良く、湿
度ヒステリシスも小さい性能を発揮することから、高信
頼性化に大きく貢献する。According to the humidity sensor thus constructed, the moisture sensitive layer is composed of a polymer or copolymer of monomers synthesized by quaternary chlorination of dimethylaminopropylmethacrylamide with benzyl halide. The humidity-sensitive layer has excellent stability over time not only at room temperature, which is required for a humidity sensor, but also at high temperature and high humidity, has good linearity, and has a small humidity hysteresis, which greatly contributes to high reliability. To do.
【００１２】[0012]
【実施例】以下、本発明の実施例について説明する。EXAMPLES Examples of the present invention will be described below.
【００１３】図１に示すように、表面に白金，金などか
らなる一対の櫛形電極１，２を印刷などによって形成し
た、例えばアルミナ、又はガラスなどからなる無機質の
絶縁基板３を、以下に述べる感湿剤溶液に浸漬させ、し
かる後１００℃中で２０分間乾燥させて、前記一対の櫛
形電極１，２間及びこの櫛形電極１，２面上に感湿層４
を形成する。As shown in FIG. 1, an inorganic insulating substrate 3 made of, for example, alumina or glass, on the surface of which a pair of comb-shaped electrodes 1 and 2 made of platinum, gold or the like is formed by printing or the like, will be described below. It is dipped in a moisture sensitive agent solution and then dried at 100 ° C. for 20 minutes, and the moisture sensitive layer 4 is formed between the pair of comb-shaped electrodes 1 and 2 and on the surfaces of the comb-shaped electrodes 1 and 2.
To form.
【００１４】上記感湿剤溶液は、次の手段で作製する。
すなわち、ジメチルアミノプロピルメタクリルアミド８
５．２ｇ，ベンジルブロマイド８５．５ｇをアセトンに
溶解させ、５０℃，３０時間反応させモノマーを合成
し、これをエーテル中に投入して、ろ別を行い真空乾燥
して白色固形物のモノマーを得、このモノマーをベンゼ
ン中に過酸化ベンゾイルと共に溶解させ、これを真空下
３０℃で２０時間反応させて重合体（ポリマー）を得た
後、これをメタノール，酢酸エチルなどで精製を行い、
乾燥後に再度メタノールに溶解させて調製する。The humectant solution is prepared by the following means.
That is, dimethylaminopropyl methacrylamide 8
5.2 g of benzyl bromide and 85.5 g of benzyl bromide were dissolved in acetone and reacted at 50 ° C. for 30 hours to synthesize a monomer, which was put into ether, filtered and vacuum dried to obtain a white solid monomer. Then, this monomer was dissolved in benzene together with benzoyl peroxide, and this was reacted under vacuum at 30 ° C. for 20 hours to obtain a polymer, which was then purified with methanol, ethyl acetate, etc.
After drying, it is dissolved in methanol again to prepare.
【００１５】次に、前記一対の櫛形電極１，２の端子導
出部５，６それぞれに、例えばはんだ７を介してリード
端子８，９を取着して湿度センサを完成するものであ
る。Next, lead terminals 8 and 9 are attached to the terminal lead-out portions 5 and 6 of the pair of comb-shaped electrodes 1 and 2, for example, via solder 7, to complete the humidity sensor.
【００１６】以上のような構成になる湿度センサによれ
ば、感湿層４がジメチルアミノプロピルメタクリルアミ
ドをベンジルブロマイドで４級塩化し合成したモノマー
の重合体又は共重合体から構成されるものとなり、室温
中ではもちろん、高温及び高湿中でも経時安定性に優
れ、長時間安定した特性を維持できると同時に、直線性
が良く、湿度ヒステリシスも小さい性能を発揮すること
から、各種回路に組み込み使用した湿度センサの高信頼
性化に大きく貢献できる優れた効果を得ることができる
利点を有する。According to the humidity sensor having the above structure, the moisture sensitive layer 4 is composed of a polymer or copolymer of monomers synthesized by quaternary chlorination of dimethylaminopropylmethacrylamide with benzyl bromide. , It has excellent stability over time not only at room temperature but also at high temperature and high humidity, and can maintain stable characteristics for a long time. At the same time, it exhibits good linearity and small humidity hysteresis. There is an advantage that an excellent effect that can greatly contribute to the high reliability of the humidity sensor can be obtained.
【００１７】このことは、以下に述べる本発明と従来例
の特性比較を行った実験結果によって実証された。This has been proved by the results of experiments in which the characteristics of the present invention and the conventional example are compared as described below.
【００１８】すなわち、上記実施例によって製作した本
発明Ａと、感湿層として上記従来技術にて例示したメタ
クリルアミドプロピルトリメチルアンモニウムブロマイ
ドの重合体を用いて製作した従来例Ａとの相対湿度に対
する抵抗値特性比較を行った結果、図２に示す通りとな
った。That is, the resistance to relative humidity between the present invention A manufactured according to the above-described embodiment and the conventional example A manufactured using the polymer of methacrylamidopropyltrimethylammonium bromide exemplified in the above-mentioned prior art as the moisture sensitive layer. As a result of the value characteristic comparison, the result is as shown in FIG.
【００１９】また、ジメチルアミノプロピルメタクリル
アミドにベンジルクロライドを本発明Ａの場合と同様に
反応させてモノマーを作製し、メタクリルアミドプロピ
ルジメチルベンジルアンモニウムクロライドを得て、こ
のメタクリルアミドプロピルジメチルベンジルアンモニ
ウムクロライドの重合体を感湿層として用いて製作した
本発明Ｂと、感湿層として上記従来技術にて例示したメ
タクリルアミドプロピルトリメチルアンモニウムクロラ
イドの重合体を用いた従来例Ｂとの高温（８５℃乾燥雰
囲気）放置下における経時特性及び高湿（５０℃，９０
％ＲＨ雰囲気）放置下における経時特性比較を行った結
果、図３及び図４に示す通りであった。Also, dimethylaminopropyl methacrylamide was reacted with benzyl chloride in the same manner as in the case of the present invention A to prepare a monomer, to obtain methacrylamidopropyl dimethyl benzyl ammonium chloride, and methacryl amide propyl dimethyl benzyl ammonium chloride A high temperature (85 ° C. dry atmosphere) of the present invention B manufactured using a polymer as a moisture-sensitive layer and the conventional example B using a polymer of methacrylamidopropyltrimethylammonium chloride exemplified in the above-mentioned prior art as a moisture-sensitive layer. ) Aging characteristics and high humidity (50 ℃, 90
% RH atmosphere) As a result of comparison of characteristics over time under standing, the results are as shown in FIGS. 3 and 4.
【００２０】図２から明らかなように、従来例Ａと比較
して本発明Ａのものは直線性に優れていることを示し、
また図３及び図４から明らかなように、従来例Ｂのもの
が高温及び高湿雰囲気下における相対湿度の経時変化が
大きいのに対し、本発明Ｂのものは高温及び高湿両雰囲
気下の１０００時間経過時点でも変化率は±３％ＲＨ以
内に納まっており、経時劣化が小さいことを示した。As is apparent from FIG. 2, the invention A has excellent linearity as compared with the conventional example A,
Further, as is clear from FIGS. 3 and 4, the conventional example B has a large change in relative humidity with time in a high temperature and high humidity atmosphere, whereas the invention B has a high relative humidity in both a high temperature and high humidity atmosphere. Even after 1000 hours, the rate of change was within ± 3% RH, indicating that the deterioration over time was small.
【００２１】なお、上記実施例では、ジメチルアミノプ
ロピルメタクリルアミドと反応させるベンジルハライド
としてベンジルブロマイドを例示して説明したが、ベン
ジルブロマイドに代えてベンジルクロライドを用いる
か、又はジメチルアミノプロピルメタクリルアミドとベ
ンジルブロマイドの合成モノマーと、ジメチルアミノプ
ロピルメタクリルアミドとベンジルクロライドの合成モ
ノマーを共重合させたものを用いても良いことはもちろ
んである。In the above examples, benzyl bromide was used as an example of the benzyl halide to be reacted with dimethylaminopropyl methacrylamide, but benzyl chloride was used instead of benzyl bromide, or dimethylaminopropyl methacrylamide and benzyl were used. It goes without saying that a synthetic bromide monomer and a synthetic monomer of dimethylaminopropyl methacrylamide and benzyl chloride may be copolymerized.
【００２２】[0022]
【発明の効果】本発明によれば、相対湿度と抵抗値の関
係が対数直線性に優れているために、回路的に利用度が
高く、高温及び高湿雰囲気下でも経時劣化が小さく初期
特性が維持でき、しかも湿度ヒステリシスの小さい高信
頼性の湿度センサを得ることができる。According to the present invention, since the relationship between the relative humidity and the resistance value is excellent in logarithmic linearity, it is highly utilized in a circuit and has little deterioration with time even in a high temperature and high humidity atmosphere and has an initial characteristic. It is possible to obtain a highly reliable humidity sensor which can maintain the above-mentioned value and has a small humidity hysteresis.
【図１】本発明の一実施例に係る湿度センサを示す正面
図である。FIG. 1 is a front view showing a humidity sensor according to an embodiment of the present invention.
【図２】相対湿度に対する抵抗値を示す特性曲線図であ
る。FIG. 2 is a characteristic curve diagram showing resistance values with respect to relative humidity.
【図３】高温放置における経時特性を示す特性曲線図で
ある。FIG. 3 is a characteristic curve diagram showing aging characteristics when left at high temperature.
【図４】高湿放置における経時特性を示す特性曲線図で
ある。FIG. 4 is a characteristic curve diagram showing a time-dependent characteristic when left at high humidity.
１，２ 櫛形電極 ３ 絶縁基板 ４ 感湿層 ５，６ 端子導出部 ７ はんだ ８，９ リード端子 1, 2 Comb-shaped electrodes 3 Insulating substrate 4 Moisture-sensitive layer 5, 6 Terminal lead-out portion 7 Solder 8, 9 Lead terminal
Claims (1)
ジメチルアミノプロピルメタクリルアミドをベンジルハ
ライドで４級塩化し合成したモノマーの重合体又は共重
合体からなる感湿層を設けたことを特徴とする湿度セン
サ。1. A pair of electrodes formed on an insulating substrate,
A humidity sensor comprising a moisture sensitive layer made of a polymer or copolymer of monomers synthesized by quaternary chlorination of dimethylaminopropyl methacrylamide with benzyl halide.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32817191A JP2874026B2 (en) | 1991-11-15 | 1991-11-15 | Humidity sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32817191A JP2874026B2 (en) | 1991-11-15 | 1991-11-15 | Humidity sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05142182A true JPH05142182A (en) | 1993-06-08 |
| JP2874026B2 JP2874026B2 (en) | 1999-03-24 |
Family
ID=18207277
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32817191A Expired - Lifetime JP2874026B2 (en) | 1991-11-15 | 1991-11-15 | Humidity sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2874026B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6628501B2 (en) | 2001-06-15 | 2003-09-30 | Denso Corporation | Capacitive moisture sensor |
| US20170167995A1 (en) * | 2014-07-23 | 2017-06-15 | National Institute For Materials Science | High-speed response/high-sensitivity dryness/wetness responsive sensor |
-
1991
- 1991-11-15 JP JP32817191A patent/JP2874026B2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6628501B2 (en) | 2001-06-15 | 2003-09-30 | Denso Corporation | Capacitive moisture sensor |
| US20170167995A1 (en) * | 2014-07-23 | 2017-06-15 | National Institute For Materials Science | High-speed response/high-sensitivity dryness/wetness responsive sensor |
| US10267756B2 (en) * | 2014-07-23 | 2019-04-23 | National Institute For Materials Science | Dryness/wetness responsive sensor having first and second wires spaced 5 nm to less than 20 μm apart |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2874026B2 (en) | 1999-03-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0242429B2 (en) | ||
| JPH051903B2 (en) | ||
| JPH0412418B2 (en) | ||
| US3705375A (en) | Electrode for electric humidity sensor | |
| JPH05142182A (en) | Moisture sensor | |
| JP2874021B2 (en) | Humidity sensor | |
| JP2874023B2 (en) | Humidity sensor | |
| JP2874022B2 (en) | Humidity sensor | |
| JP2874024B2 (en) | Humidity sensor | |
| JPH05332979A (en) | Humidity sensor | |
| JPS5967445A (en) | Humidity sensor | |
| JP3448799B2 (en) | Humidity sensor | |
| JPH04315040A (en) | Dewing detection element | |
| JP2513894B2 (en) | Moisture sensitive element | |
| JPS58171657A (en) | Moisture sensitive resistor | |
| JPH0318750A (en) | Humidity sensor element | |
| JPS6133374B2 (en) | ||
| JPS6288951A (en) | Moisture sensitive element and its production | |
| JPS6236549A (en) | Moisture-sensitive element | |
| JPS61165651A (en) | Preparation of humidity-sensitive resistor element | |
| JPS59142448A (en) | Humidity sensor | |
| JP2529137B2 (en) | Moisture-sensitive element and manufacturing method thereof | |
| JPH07140103A (en) | Humidity sensor | |
| JPH0484749A (en) | Humidity sensor | |
| JPS59171844A (en) | Humidity sensitive element |