JPH05138882A - Ink jet head - Google Patents
Ink jet headInfo
- Publication number
- JPH05138882A JPH05138882A JP3309214A JP30921491A JPH05138882A JP H05138882 A JPH05138882 A JP H05138882A JP 3309214 A JP3309214 A JP 3309214A JP 30921491 A JP30921491 A JP 30921491A JP H05138882 A JPH05138882 A JP H05138882A
- Authority
- JP
- Japan
- Prior art keywords
- ink
- pressure chamber
- opening part
- passage
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Laser Beam Processing (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明はインクを飛翔させて記録
を行うインクジェットヘッドに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet head which prints by ejecting ink.
【０００２】[0002]
【従来の技術】従来のインクジェットヘッドの、インク
室、圧力室、供給口、供給口部等いわゆるインク流路の
形成はプラスチックによる成形や金属板の積層によって
行われていた。またインク吐出口は、インク吐出口が多
数形成してあるノズルプレートをインク流路に接合をし
ていた。しかし、このような従来の方法では高密度化、
小型化に対応した微細パターンの成形用金型加工が困難
である、微細部の成形時の離形が悪い為成形品が反る、
微細部の高精度が望めない等の成形品特有の問題が起
き、ヘッドの小型化、高密度化には不適であった。2. Description of the Related Art In a conventional ink jet head, ink chambers, pressure chambers, supply ports, supply port portions, so-called ink flow paths are formed by molding with plastic or laminating metal plates. In addition, the ink ejection port is formed by joining a nozzle plate having a large number of ink ejection ports formed to the ink flow path. However, with such a conventional method, high density,
It is difficult to process a mold for forming a fine pattern corresponding to miniaturization, and the molded product warps due to poor mold release at the time of molding the fine part.
There were problems peculiar to the molded product such as high precision of the fine part could not be expected, and it was not suitable for downsizing and high density of the head.
【０００３】[0003]
【発明が解決しようとする課題】そこで、本発明は前述
の従来技術での問題点を鑑み、高密度で小型化を達成で
きるインクジェットヘッドを提供することにある。SUMMARY OF THE INVENTION In view of the above-mentioned problems of the prior art, the present invention is to provide an ink jet head which can achieve high density and miniaturization.
【０００４】[0004]
【課題を解決するための手段】インクが滞留するインク
室、該インクを飛翔させる手段、該飛翔手段に対向する
圧力室、インク吐出口、該吐出口を形成する吐出口部、
該圧力室とインク室を連通する供給口部を備えたインク
ジェットヘッドにおいて、圧力室、吐出口部、供給口部
をマスクパターンを通して紫外線レーザー光を照射する
ことにより形成することを特長としている。Means for Solving the Problems Ink chamber in which ink stays, means for ejecting the ink, pressure chamber facing the ejecting means, ink ejection port, ejection port forming the ejection port,
An ink jet head having a supply port that connects the pressure chamber and the ink chamber is characterized in that the pressure chamber, the discharge port, and the supply port are formed by irradiating an ultraviolet laser beam through a mask pattern.
【０００５】[0005]
【実施例】本発明の一実施例を図面を用いて詳細に説明
する。図１は本発明のインクジェットヘッドの分解斜視
図である。１が流路基板であり、インク室２、圧力室
３、インク吐出口４、圧力室３とヘッド外部との境界を
なすインク吐出口部５、供給口６、圧力室３とインク室
２の境界をなす供給口部７の、いわゆるインク流路で構
成されている。この流路基板１上に金属薄膜を表面上に
ラミネートしたプラスチックフィルムである第２基板８
を接合し、この第２基板８上に圧電素子９、圧電素子８
駆動用のＦＰＣ１０を載置している。ＦＰＣ１０に駆動
信号が入ると、圧電素子９が変形し第２基板８をたわま
せて、圧力室３に圧力を伝達しインクをインク吐出口４
から吐出させる。この第２基板８、圧電素子９、ＦＰＣ
１０はインク飛翔手段の１例であり、本発明を限定する
ものではなく、例えば第２基板８上に発熱抵抗体を載置
して、抵抗体の通電発熱によりインク内に気泡を発生さ
せ、気泡の膨張によりインクを飛翔させる等の飛翔手段
をとっても構わない。An embodiment of the present invention will be described in detail with reference to the drawings. FIG. 1 is an exploded perspective view of the inkjet head of the present invention. Reference numeral 1 denotes a flow path substrate, which includes an ink chamber 2, a pressure chamber 3, an ink ejection port 4, an ink ejection port portion 5 that forms a boundary between the pressure chamber 3 and the outside of the head, a supply port 6, a pressure chamber 3 and an ink chamber 2. It is configured by a so-called ink flow path of the supply port 7 that forms a boundary. A second substrate 8 which is a plastic film obtained by laminating a metal thin film on the surface of the flow path substrate 1.
And the piezoelectric element 9 and the piezoelectric element 8 on the second substrate 8.
The FPC 10 for driving is mounted. When a drive signal is input to the FPC 10, the piezoelectric element 9 is deformed and the second substrate 8 is bent, and the pressure is transmitted to the pressure chamber 3 to eject ink to the ink ejection port 4.
Discharge from. This second substrate 8, piezoelectric element 9, FPC
Reference numeral 10 is an example of an ink jetting means, which does not limit the present invention. For example, a heating resistor is placed on the second substrate 8, and air bubbles are generated in the ink due to the energized heat generation of the resistor. Flying means such as flying ink by expansion of bubbles may be used.
【０００６】図２が本発明の流路基板１にインク流路を
形成する方法の概念図である。１１が三菱電気製のエキ
シマレーザーであり、高反射ミラーを用いた多重反射光
学系により、単位面積あたりのレーザー出力を向上させ
たものを使用した。エキシマレーザーの加工原理は分子
間接合の切断（アブレーション加工）であり、ある一定
以上のエネルギ密度が必要である。しかし従来のエキシ
マレーザーは単位面積当りのエネルギ密度が低く、加工
可能なエネルギ密度を得るためにはパターンマスクから
の縮小倍率を大きくとる必要があり結果的に微小面積の
み加工が可能であったが、本装置を用いることにより、
比較的大面積の加工が可能である。１２はマスクであり
インク流路が書き込まれている。このマスク１２はフォ
トエッチング法でパターンを作っており、微細パターン
を正確に作ることが可能である。図３が図２の方法にて
流路基板８にインク流路を形成した１実施例である。図
３（ａ）がすでに射出成形等でインク室を形成したイン
ク室２を形成した流路基板原料１−ａである。インク室
２は高精度及び微細パターンが比較的不必要な為、この
ように事前に形成しておいても構わない。図３（ｂ）
は、エキシマレーザーにより圧力室３、インク吐出口部
５、供給口部７を形成したものである。この場合、イン
ク吐出口４の形成は図３（ｂ）のようにａ方向あるいは
ｃ方向からエキシマレーザーを照射し図３（ｃ）、
（ｄ）のように形成するのが望ましい。供給口６につい
ても同様に、ｂ、ｃ方向から照射し、図３（ｃ）、
（ｄ）のように形成し流路基板１を得ることができる。
尚、インク吐出口４あるいは供給口６をｃ方向からエキ
シマレーザーにて加工する場合は、図３（ｂ）の圧力室
３、インク吐出口部５、供給口部７の形成時に同時に形
成しても構わない。以上の様に流路形成を行ったとこ
ろ、マスクのパターン精度をそのまま流路基板上に転写
できるため微細なインク流路を高精度かつ短時間に形成
できた。FIG. 2 is a conceptual diagram of a method for forming an ink flow path in the flow path substrate 1 of the present invention. Numeral 11 is an excimer laser manufactured by Mitsubishi Electric Co., Ltd., which has an improved laser output per unit area by a multiple reflection optical system using a high reflection mirror. The processing principle of the excimer laser is cutting (ablation processing) of intermolecular bonding, and requires an energy density above a certain level. However, the conventional excimer laser has a low energy density per unit area, and in order to obtain a processable energy density, it is necessary to increase the reduction ratio from the pattern mask, and as a result, only a small area can be processed. By using this device,
It is possible to process a relatively large area. Reference numeral 12 is a mask in which ink flow paths are written. The mask 12 has a pattern formed by a photo-etching method, and it is possible to accurately form a fine pattern. FIG. 3 shows an embodiment in which ink channels are formed in the channel substrate 8 by the method of FIG. FIG. 3A shows the flow path substrate material 1-a in which the ink chamber 2 in which the ink chamber has already been formed by injection molding or the like is formed. Since the ink chamber 2 is relatively unnecessary for high precision and a fine pattern, it may be formed in this way in advance. Figure 3 (b)
The pressure chamber 3, the ink discharge port 5, and the supply port 7 are formed by an excimer laser. In this case, the ink ejection port 4 is formed by irradiating an excimer laser from the direction a or the direction c as shown in FIG.
It is desirable to form as shown in (d). Similarly, the supply port 6 is irradiated with light from the b and c directions, as shown in FIG.
The flow path substrate 1 can be obtained by forming as in (d).
When the ink discharge port 4 or the supply port 6 is processed by the excimer laser from the direction c, it is formed at the same time when the pressure chamber 3, the ink discharge port portion 5, and the supply port portion 7 of FIG. 3B are formed. I don't care. When the flow path is formed as described above, the pattern accuracy of the mask can be directly transferred onto the flow path substrate, and thus a fine ink flow path can be formed with high accuracy and in a short time.
【０００７】図４が図２の方法にて流路基板８にインク
流路を形成した１実施例である。図３（ａ）がすでに射
出成形等で形成した流路基板原料１−ａである。図４
（ｂ）は、エキシマレーザーによりインク室２、圧力室
３、インク吐出口部５、供給口部７を形成したものであ
る。この場合、インク吐出口４の形成は図４（ｂ）のよ
うにａ方向あるいはｃ方向からエキシマレーザーを照射
し図４（ｃ）、（ｄ）のように形成するのが望ましい。
供給口６についても同様に、ｂ、ｃ方向から照射し、図
４（ｃ）、（ｄ）のように形成し流路基板１を得ること
ができる。尚、インク吐出口４あるいは供給口６をｃ方
向からエキシマレーザーにて加工する場合は、図４
（ｂ）のインク室２、圧力室３、インク吐出口部５、供
給口部７の形成時に同時に形成しても構わない。以上の
様に流路形成を行ったところ、マスクのパターン精度を
そのまま流路基板上に転写できるため微細なインク流路
を高精度かつ短時間に形成できた。FIG. 4 shows an embodiment in which ink channels are formed in the channel substrate 8 by the method of FIG. FIG. 3A shows the flow path substrate material 1-a which has already been formed by injection molding or the like. Figure 4
In (b), the ink chamber 2, the pressure chamber 3, the ink ejection port 5, and the supply port 7 are formed by an excimer laser. In this case, it is desirable that the ink ejection port 4 is formed as shown in FIGS. 4C and 4D by irradiating an excimer laser from the a direction or the c direction as shown in FIG. 4B.
Similarly, the supply port 6 can be irradiated with light from the b and c directions, and can be formed as shown in FIGS. 4C and 4D to obtain the flow path substrate 1. When the ink discharge port 4 or the supply port 6 is processed by the excimer laser from the c direction,
They may be formed at the same time when the ink chamber 2, the pressure chamber 3, the ink ejection port portion 5, and the supply port portion 7 of (b) are formed. When the flow path is formed as described above, the pattern accuracy of the mask can be directly transferred onto the flow path substrate, and thus a fine ink flow path can be formed with high accuracy and in a short time.
【０００８】また図５で示す様に、図３、図４の実施例
においてレーザーの方向は自由に設定し、供給口６、イ
ンク吐出口４を形成しても構わない。Further, as shown in FIG. 5, in the embodiment of FIGS. 3 and 4, the direction of the laser may be freely set and the supply port 6 and the ink ejection port 4 may be formed.
【０００９】[0009]
【発明の効果】以上説明してきたように本発明を実施す
ることにより高精度、微細な流路基板ができ、高密度
化、小型化に対応できるインクジェットヘッドが製作で
きるという効果を有する。As described above, by carrying out the present invention, it is possible to manufacture a high-precision and fine flow path substrate, and to manufacture an ink jet head which can cope with higher density and smaller size.
【図１】本発明のインクジェットヘッドの分解斜視図。FIG. 1 is an exploded perspective view of an inkjet head of the present invention.
【図２】本発明の流路基板にインク流路を形成する方法
の概念図。FIG. 2 is a conceptual diagram of a method of forming an ink flow path on a flow path substrate of the present invention.
【図３】本発明の流路基板を示す図。FIG. 3 is a diagram showing a flow channel substrate of the present invention.
【図４】本発明の流路基板を示す図。FIG. 4 is a diagram showing a flow channel substrate of the present invention.
【図５】本発明の流路基板を示す図。FIG. 5 is a diagram showing a flow channel substrate of the present invention.
１ 流路基板 １−ａ流路基板原料 ２ インク室 ３ 圧力室 ４ 吐出口 ５ 吐出口部 ６ 供給口 ７ 供給口部 ８ 第２基板 ９ 圧電素子 １０ ＦＰＣ １１ エキシマレーザー １２ マスク 1 Flow Channel Substrate 1-a Flow Channel Substrate Raw Material 2 Ink Chamber 3 Pressure Chamber 4 Discharge Port 5 Discharge Port 6 Supply Port 7 Supply Port 8 Second Substrate 9 Piezoelectric Element 10 FPC 11 Excimer Laser 12 Mask
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｂ４１Ｊ 2/16 ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 5 Identification code Office reference number FI technical display location B41J 2/16
Claims (2)
翔させる手段、該飛翔手段に夫々対向する圧力室、イン
ク吐出口、該吐出口を形成する吐出口部、該圧力室とイ
ンク室を連通する供給口部、を備えたインクジェットヘ
ッドにおいて、 圧力室、吐出口部、供給口部をマスクパターンを通して
紫外線レーザー光を照射することにより形成することを
特徴とするインクジェットヘッド。1. An ink chamber in which ink is retained, a means for flying the ink, a pressure chamber facing each of the flying means, an ink ejection port, an ejection port portion for forming the ejection port, the pressure chamber and the ink chamber. An inkjet head having a supply port communicating with the pressure chamber, the discharge port, and the supply port formed by irradiating an ultraviolet laser beam through a mask pattern.
吐出口のうち少なくとも１つをマスクパターンを通して
紫外線レーザー光を照射することにより形成することを
特徴とするインクジェットヘッド。2. An ink jet head, characterized in that at least one of the pressure chamber, the ejection port, the supply port, and the ink ejection port is formed by irradiating an ultraviolet laser beam through a mask pattern.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3309214A JPH05138882A (en) | 1991-11-25 | 1991-11-25 | Ink jet head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3309214A JPH05138882A (en) | 1991-11-25 | 1991-11-25 | Ink jet head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05138882A true JPH05138882A (en) | 1993-06-08 |
Family
ID=17990306
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3309214A Pending JPH05138882A (en) | 1991-11-25 | 1991-11-25 | Ink jet head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05138882A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006123516A (en) * | 2004-09-28 | 2006-05-18 | Fuji Photo Film Co Ltd | Liquid ejection head, liquid ejection apparatus and image forming apparatus |
| US7055938B1 (en) * | 1995-04-21 | 2006-06-06 | Canon Kabushiki Kaisha | Liquid jet recording head and process for production thereof |
| US7503644B2 (en) | 2004-09-28 | 2009-03-17 | Fujifilm Corporation | Liquid ejection head, liquid ejection apparatus and image forming apparatus |
| CN106626809A (en) * | 2016-12-20 | 2017-05-10 | 李星 | Printing ink curing device and carriage unit mechanism of ink-jet printer |
-
1991
- 1991-11-25 JP JP3309214A patent/JPH05138882A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7055938B1 (en) * | 1995-04-21 | 2006-06-06 | Canon Kabushiki Kaisha | Liquid jet recording head and process for production thereof |
| JP2006123516A (en) * | 2004-09-28 | 2006-05-18 | Fuji Photo Film Co Ltd | Liquid ejection head, liquid ejection apparatus and image forming apparatus |
| US7503644B2 (en) | 2004-09-28 | 2009-03-17 | Fujifilm Corporation | Liquid ejection head, liquid ejection apparatus and image forming apparatus |
| CN106626809A (en) * | 2016-12-20 | 2017-05-10 | 李星 | Printing ink curing device and carriage unit mechanism of ink-jet printer |
| WO2018113152A1 (en) * | 2016-12-20 | 2018-06-28 | 李星 | Ink curing device and carriage mechanism of ink jet printer |
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