JPH05126641A - Spectral ellipsometer - Google Patents
Spectral ellipsometerInfo
- Publication number
- JPH05126641A JPH05126641A JP31348591A JP31348591A JPH05126641A JP H05126641 A JPH05126641 A JP H05126641A JP 31348591 A JP31348591 A JP 31348591A JP 31348591 A JP31348591 A JP 31348591A JP H05126641 A JPH05126641 A JP H05126641A
- Authority
- JP
- Japan
- Prior art keywords
- analyzer
- light
- spectrometer
- sample
- fed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は複数の波長で試料の偏光
解析を行う分光型エリプソメータに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a spectroscopic ellipsometer for analyzing the polarization of a sample at a plurality of wavelengths.
【０００２】分光型エリプソメータは偏光子，試料，検
光子の順に通って来た光を分光器で分光して特定の波長
での偏光解析を行うようになっている。分光器は入射光
の偏光方向によって光の透過効率が異なる。他方検光子
を出て分光器に入射する光は直線偏光であり、偏光解析
における消光法では検光子を回転させて透過光強度が最
小になる消光角を求めるので、分光器に入射する直線偏
光の偏光方向は一定していない。消光角において検光子
透過光が完全に０になることはなく、実際上検光子は透
過光強度が最小になる検光子の角位置を測定するので、
偏光の方向により分光器の光透過効率が変化すると、真
の光強度の最小点より少しずれた所が見掛上の光強度最
小点となることがあり、偏光解析の精度が低下すると云
う問題があった。この問題は回転偏光子法を用いた場合
も、同様の理由により、測定精度が低下する。A spectroscopic ellipsometer is designed to analyze the light having passed through a polarizer, a sample, and an analyzer in this order by a spectroscope to perform polarization analysis at a specific wavelength. The spectroscope has different light transmission efficiency depending on the polarization direction of incident light. On the other hand, the light that leaves the analyzer and enters the spectroscope is linearly polarized light.In the extinction method in polarization analysis, the analyzer is rotated to find the extinction angle that minimizes the transmitted light intensity. The polarization direction of is not constant. At the extinction angle, the transmitted light of the analyzer does not become 0 completely, and in reality, the analyzer measures the angular position of the analyzer at which the transmitted light intensity becomes the minimum.
If the light transmission efficiency of the spectroscope changes depending on the direction of polarization, the position slightly deviated from the true light intensity minimum point may become the apparent light intensity minimum point, which reduces the accuracy of polarization analysis. was there. This problem also reduces the measurement accuracy when the rotating polarizer method is used for the same reason.
【０００３】[0003]
【発明が解決しようとする課題】本発明は分光型エリプ
ソメータで分光器の光透過効率が偏光の方向によって異
なっていることの測定上の影響を除去しようとするもの
である。SUMMARY OF THE INVENTION The present invention is intended to eliminate the influence on the measurement that the light transmission efficiency of a spectroscope is different depending on the direction of polarization in a spectroscopic ellipsometer.
【０００４】[0004]
【課題を解決するための手段】エリプソメータで検光子
と分光器との間に方位軸が検光子の方位軸と４５度をな
すように１／４波長素子を挿入し、この１／４波長素子
を検光子と一体的に回転させるようにした。A quarter wavelength element is inserted between an analyzer and a spectroscope by an ellipsometer so that the azimuth axis forms an angle of 45 degrees with the azimuth axis of the analyzer. Was rotated integrally with the analyzer.
【０００５】[0005]
【作用】検光子と１／４波長素子とは方位軸が４５度で
交わっているので、検光子を透過した直線偏光は１／４
波長素子を透過することにより円偏光となる。検光子と
１／４波長素子とは一体的に回転するようにしてあるか
ら、検光子をどのように回転させても１／４波長素子透
過光は円偏光であり、この円偏光が分光器が入射せしめ
られるので、分光器の偏光方向による透過効率の違いの
影響は全く解消される。Since the analyzer and the 1/4 wavelength element intersect at an azimuth axis of 45 degrees, the linearly polarized light transmitted through the analyzer is 1/4.
Circularly polarized light is obtained by passing through the wavelength element. Since the analyzer and the 1/4 wavelength element are integrally rotated, the transmitted light of the 1/4 wavelength element is circularly polarized light no matter how the analyzer is rotated. Is incident, the influence of the difference in transmission efficiency depending on the polarization direction of the spectroscope is completely eliminated.
【０００６】[0006]
【実施例】図１に本発明の一実施例を示す。１は光源、
２はコリメータレンズ、３は偏光子、４は補償子、５が
試料で６が検光子である。光源１から出た光は偏光子，
補償子を通って試料５に入射せしめられ、試料からの反
射光或は透過光が検光子６に入射せしめられる。検光子
６を透過した光は１／４波長素子７を透過した後集光レ
ンズ８で分光器９に入射せしめられ、分光器９の出射光
が光検出器１０で検出されてその信号がデータ処理装置
１１に送られる。偏光子３，補償子４，検光子６は夫々
独立して回転可能でデータ処理装置１１により回転制御
が行われる。１／４波長素子７は検光子６と一体的に保
持枠に取付けられて、検光子６と共に回転せしめられ
る。１／４波長素子７の方位軸は検光子６の方位軸と４
５°で交わるように検光子６と一体化してある。FIG. 1 shows an embodiment of the present invention. 1 is a light source,
2 is a collimator lens, 3 is a polarizer, 4 is a compensator, 5 is a sample, and 6 is an analyzer. The light emitted from the light source 1 is a polarizer,
The light is made incident on the sample 5 through the compensator, and the reflected light or the transmitted light from the sample is made incident on the analyzer 6. The light transmitted through the analyzer 6 is transmitted through the quarter-wave element 7 and then is made incident on the spectroscope 9 by the condenser lens 8, and the light emitted from the spectroscope 9 is detected by the photodetector 10, and the signal is data. It is sent to the processing device 11. The polarizer 3, the compensator 4, and the analyzer 6 are independently rotatable, and the data processing device 11 controls the rotation. The quarter-wave element 7 is attached to the holding frame integrally with the analyzer 6 and is rotated together with the analyzer 6. The azimuth axis of the 1/4 wavelength element 7 and the azimuth axis of the analyzer 6 are 4
It is integrated with the analyzer 6 so as to intersect at 5 °.
【０００７】上記装置は、その１例として、次のように
操作される。分光器を複数の測定したい波長の一つに合
わせておく。光源１を点灯し、偏光子３を一つの方位に
固定して補償子４を微小角ずつ段階的に回転させる。補
償子４は１／４波長素子なので、その透過光は楕円偏光
となり、楕円率が補償子の方位によって変化する。補償
子４を回転させながら、一ステップ毎に検光子６を回転
させて透過光強度が最小になる方位を求める。このよう
な操作を偏光子３の方位を０°から９０°までの範囲で
変えながら行うと、試料に入射した楕円偏光が直線偏光
となって試料から出射する状態が現われる。このとき検
光子が試料からの直線偏光と直交する位置が検光子の消
光位置で、そのときの試料に入射する楕円偏光の方位と
楕円率および上記した検光子の消光位置が試料について
の測定値であり、これがデータ処理装置１１によりデー
タ処理され、試料薄膜の厚さ，屈折率等が算出される。The above-mentioned device is operated as follows, for example. Match the spectroscope to one of the multiple wavelengths you want to measure. The light source 1 is turned on, the polarizer 3 is fixed in one direction, and the compensator 4 is rotated stepwise by a small angle. Since the compensator 4 is a quarter wavelength element, the transmitted light becomes elliptically polarized light, and the ellipticity changes depending on the compensator azimuth. While rotating the compensator 4, the analyzer 6 is rotated for each step to obtain the azimuth in which the transmitted light intensity is minimized. When such an operation is performed while changing the azimuth of the polarizer 3 in the range of 0 ° to 90 °, the elliptically polarized light incident on the sample becomes linearly polarized light and emerges from the sample. At this time, the position where the analyzer is orthogonal to the linearly polarized light from the sample is the extinction position of the analyzer. This is data-processed by the data processing device 11, and the thickness, refractive index, etc. of the sample thin film are calculated.
【０００８】測定は上述したように行われるが、そのと
き、分光器９に入射する光は検光子透過光がそれと４５
°の方位にある１／４波長素子７を透過した光で常に円
偏光であるから、分光器の偏光方向による透過効率の違
いは全く表面化しないで測定が行われる。上述実施例で
は偏光素子や試料の配置が偏光子，補償子，試料，検光
子の順であるが（ＰＣＳＡ系）、本発明は偏光子，試
料，補償子，検光子の順の装置（ＰＳＣＡ系）でも適用
できることは云うまでもない。また１／４波長素子７と
して色消型のものを用いれば測定波長毎に１／４波長散
を交換する必要がなくなって便利である。The measurement is performed as described above, and at that time, the light incident on the spectroscope 9 is the same as that transmitted by the analyzer.
Since the light transmitted through the quarter-wave element 7 in the azimuth direction is always circularly polarized, the difference in the transmission efficiency depending on the polarization direction of the spectroscope is measured without making it surface. In the above-described embodiment, the arrangement of the polarizing element and the sample is in the order of the polarizer, the compensator, the sample and the analyzer (PCSA system), but the present invention is the device of the order of the polarizer, the sample, the compensator and the analyzer (PSCA). It goes without saying that it can also be applied to systems). Also, if an achromatic type element is used as the quarter-wave element 7, it is convenient because it is not necessary to exchange quarter-wavelengths for each measurement wavelength.
【０００９】[0009]
【発明の効果】本発明によれば、分光型エリプソメータ
で分光器の偏光方向による透過効率の違いの影響が解消
され、消光角の測定精度が向上する。According to the present invention, in the spectroscopic ellipsometer, the influence of the difference in transmission efficiency depending on the polarization direction of the spectroscope is eliminated, and the extinction angle measurement accuracy is improved.
【図１】本発明の一実施例の平面略図FIG. 1 is a schematic plan view of an embodiment of the present invention.
１ 光源 ２ コリメータ ３ 偏光子 ４ 補償子 ５ 試料 ６ 検光子 ７ １／４波長素子 ８ 集光レンズ ９ 分光器 １１ 信号処理装置 1 Light Source 2 Collimator 3 Polarizer 4 Compensator 5 Sample 6 Analyzer 7 1/4 Wave Element 8 Condensing Lens 9 Spectroscope 11 Signal Processing Device
Claims (1)
４５度傾いた関係で１／４波長素子を挿入し、この１／
４波長素子を検光子と一体的に回転可能としたことを特
徴とする分光型エリプソメータ。A 1/4 wavelength element is inserted between the analyzer and the spectroscope in a relationship in which the azimuth axis is inclined by 45 degrees with respect to the azimuth axis of the analyzer.
A spectroscopic ellipsometer characterized in that a four-wavelength element can be rotated integrally with an analyzer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31348591A JPH05126641A (en) | 1991-10-31 | 1991-10-31 | Spectral ellipsometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31348591A JPH05126641A (en) | 1991-10-31 | 1991-10-31 | Spectral ellipsometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05126641A true JPH05126641A (en) | 1993-05-21 |
Family
ID=18041879
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31348591A Pending JPH05126641A (en) | 1991-10-31 | 1991-10-31 | Spectral ellipsometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05126641A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6069697A (en) * | 1997-04-30 | 2000-05-30 | Anritsu Corporation | Optical transmission characteristic measuring apparatus and calibration method using the same |
| JP2000509830A (en) * | 1997-04-04 | 2000-08-02 | ジェイ・エイ・ウーラム・カンパニー・インコーポレイテッド | Rotation compensator-type spectroscopic ellipsometer system with regression calibration with photoarray detector |
-
1991
- 1991-10-31 JP JP31348591A patent/JPH05126641A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000509830A (en) * | 1997-04-04 | 2000-08-02 | ジェイ・エイ・ウーラム・カンパニー・インコーポレイテッド | Rotation compensator-type spectroscopic ellipsometer system with regression calibration with photoarray detector |
| US6069697A (en) * | 1997-04-30 | 2000-05-30 | Anritsu Corporation | Optical transmission characteristic measuring apparatus and calibration method using the same |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7889339B1 (en) | Complementary waveplate rotating compensator ellipsometer | |
| US6384916B1 (en) | Parallel detecting, spectroscopic ellipsometers/polarimeters | |
| US5757494A (en) | System and method for improving data acquisition capability in spectroscopic ellipsometers | |
| JP6893667B2 (en) | Integrated polarization interferometer and snapshot spectroscopic polarization meter to which it is applied | |
| US6184984B1 (en) | System for measuring polarimetric spectrum and other properties of a sample | |
| US5963327A (en) | Total internal reflection electromagnetic radiation beam entry to, and exit from, ellipsometer, polarimeter, reflectometer and the like systems | |
| JP3909363B2 (en) | Spectral polarization measurement method | |
| US7286243B2 (en) | Beam profile complex reflectance system and method for thin film and critical dimension measurements | |
| JPS6134442A (en) | Ellipsometry measuring method for inspecting physical characteristic of sample surface or surface film layer of sample and device thereof | |
| US5045701A (en) | Infrared spectropolarimeter | |
| US5929995A (en) | System and method for directing electromagnetic beams | |
| US2829555A (en) | Polarimetric method and apparatus | |
| EP0737856B1 (en) | A method of investigating samples by changing polarisation | |
| US7184145B2 (en) | Achromatic spectroscopic ellipsometer with high spatial resolution | |
| US7342661B2 (en) | Method for noise improvement in ellipsometers | |
| JPH05126641A (en) | Spectral ellipsometer | |
| Nee et al. | Effects of depolarization of polarimetric components on null ellipsometry | |
| JPH11101739A (en) | Ellipsometry apparatus | |
| JPH04127004A (en) | Ellipsometer and its using method | |
| JP2712987B2 (en) | Adjustment method of polarization measuring device | |
| JPH04138339A (en) | Thin-film measuring apparatus | |
| JPS63168523A (en) | Polarization analyzer | |
| JP4163104B2 (en) | Polarization state conversion in optically active spectroscopy | |
| Azzam | Integrated photopolarimeters | |
| JPS63168539A (en) | Polarization analyzer |