JPH05107025A - Coaxial-degree measuring apparatus - Google Patents
Coaxial-degree measuring apparatusInfo
- Publication number
- JPH05107025A JPH05107025A JP26575391A JP26575391A JPH05107025A JP H05107025 A JPH05107025 A JP H05107025A JP 26575391 A JP26575391 A JP 26575391A JP 26575391 A JP26575391 A JP 26575391A JP H05107025 A JPH05107025 A JP H05107025A
- Authority
- JP
- Japan
- Prior art keywords
- work
- outer diameter
- measuring device
- microscope
- laser outer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、円筒形のワークの端面
上に設けられる対象点のワークに対する同軸度を測定す
る同軸度測定装置に関し、特に光通信用レーザダイオー
ドモジュールの集光スポットの同軸度測定装置に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coaxiality measuring device for measuring the coaxiality of a target point provided on the end face of a cylindrical work with respect to the work, and more particularly, to the coaxial of a focused spot of a laser diode module for optical communication. Degree measuring device.
【０００２】[0002]
【従来の技術】従来の同軸度測定装置は、図２に示すよ
うに顕微鏡１と、顕微鏡１の像面上におかれ顕微鏡１に
固定されるカメラ２と、カメラ２に接続され顕微鏡１に
より拡大される円筒形状ワーク１２の外径の中心位置と
対象点の中心位置を算出する画像処理装置１７と、顕微
鏡１にとりつけられる低倍率対物レンズ１３と、顕微鏡
１を支持する顕微鏡台５と、円筒形状ワーク１２を保持
し顕微鏡１の光軸と円筒形状ワーク１２の軸が平行かつ
同軸にそして端面が低倍率対物レンズ１３の焦点面上に
くる位置にセットするワーク供給ユニット１１とを有し
ている。2. Description of the Related Art A conventional coaxiality measuring apparatus includes a microscope 1, a camera 2 placed on the image plane of the microscope 1 and fixed to the microscope 1, and a microscope 1 connected to the camera 1 as shown in FIG. An image processing device 17 for calculating the center position of the outer diameter of the enlarged cylindrical work 12 and the center position of the target point, a low-magnification objective lens 13 attached to the microscope 1, and a microscope table 5 for supporting the microscope 1. It has a work supply unit 11 which holds the cylindrical work 12 and sets the optical axis of the microscope 1 and the axis of the cylindrical work 12 in parallel and coaxially and sets the end face on the focal plane of the low magnification objective lens 13. ing.
【０００３】低倍率対物レンズ１３はワーク１２の端面
の像すべてがカメラ２の視野内に入るような低い倍率の
対物レンズである。顕微鏡１と低倍率対物レンズ１３で
ワーク１２の端面を拡大しその像をカメラ２がとらえ、
光電変換する。カメラ２がとらえた像のデータは、画像
処理装置１７に送られワーク１２の端面の外径より端面
外径の中心を算出し、一方同軸度の対象となる部分の中
心位置を算出し外径と対象点の同軸度を算出する。The low-magnification objective lens 13 is a low-magnification objective lens so that the entire image of the end surface of the work 12 is within the field of view of the camera 2. The end surface of the work 12 is enlarged by the microscope 1 and the low-magnification objective lens 13, and the image is captured by the camera 2,
Photoelectric conversion. The image data captured by the camera 2 is sent to the image processing device 17 to calculate the center of the outer diameter of the end face from the outer diameter of the end face of the work 12, while calculating the center position of the target portion of the coaxiality. And calculate the coaxiality of the target point.
【０００４】ここで対象点とは例えば光通信用ＬＤモジ
ュールの光ファイバとの結合点、すなわちレーザダイオ
ード光の集光スポットの空中像である。図２に示す同軸
度測定装置は、この結合点位置と光通信用ＬＤモジュー
ル外径との同軸を測定する用途に用いられる。Here, the target point is, for example, a coupling point with an optical fiber of an LD module for optical communication, that is, an aerial image of a focused spot of laser diode light. The coaxiality measuring device shown in FIG. 2 is used for the purpose of measuring the coaxiality between this coupling point position and the outer diameter of the LD module for optical communication.
【０００５】図３は光通信用ＬＤモジュールであるワー
ク１２の端面を示す平面図である。ワーク外径１４の中
心に対象点１５であるＬＤ光の集光スポットが配置され
ている。FIG. 3 is a plan view showing an end face of a work 12 which is an LD module for optical communication. At the center of the work outer diameter 14, a focused spot of LD light, which is a target point 15, is arranged.
【０００６】[0006]
【発明が解決しようとする課題】この従来の同軸度測定
装置では、同軸度の基準となるワーク１２の外径と対象
点を同一の画像でとらえて処理する必要性から、対象点
より大きいワーク１２の外径にあわせて顕微鏡１の倍率
を決めるため、低倍率の対物レンズ１３を使用すること
となりカメラ２の解像度の制限から１ミクロン以下、
０．１ミクロン台の高精度な同軸度検出精度がえられな
いという問題点があった。In this conventional coaxiality measuring device, since it is necessary to process the outer diameter of the workpiece 12 which is the reference of the coaxiality and the target point by the same image, the workpiece larger than the target point is processed. Since the magnification of the microscope 1 is determined according to the outer diameter of the lens 12, a low-magnification objective lens 13 is used, and the resolution of the camera 2 limits the resolution to 1 micron or less.
There is a problem in that a highly accurate coaxiality detection accuracy on the order of 0.1 micron cannot be obtained.
【０００７】[0007]
【課題を解決するための手段】本発明は同軸度測定装置
は、対物レンズが取り付けられた顕微鏡と、この顕微鏡
の光軸と同軸の状態に円筒形状のワークを保持するワー
ク供給ユニットと、前記ワークの端面の対象点が配置さ
れる範囲の前記顕微鏡による像を光電変換するカメラ
と、このカメラに撮像される前記対象点の中心位置を算
出する画像処理装置と、互いに前記ワークを挟んで向い
合う第１のレーザ外径測定器投光ユニットおよび第１の
レーザ外径測定器受光ユニットと、これら第１のレーザ
外径測定器投光ユニットおよび第１のレーザ外径測定器
受光ユニットと垂直な方向に互いに前記ワークを挟んで
向い合う第２のレーザ外径測定器投光ユニットおよび第
２のレーザ外径測定器受光ユニットと、前記第１のレー
ザ外径測定器投光ユニットおよび第１のレーザ外径測定
器受光ユニットならびに前記第２のレーザ外径測定器投
光ユニットおよび第２のレーザ外径測定器受光ユニット
に接続され前記ワークの中心位置を算出するレーザ外径
測定器コントローラと、このレーザ外径測定器コントロ
ーラが算出する前記ワークの中心位置および前記画像処
理装置が算出する前記対象点の中心位置より前記対象点
の前記ワークに対する同軸度を算出する演算装置とを備
えている。According to the present invention, there is provided a coaxiality measuring device, a microscope having an objective lens attached thereto, a work supply unit for holding a cylindrical work coaxially with the optical axis of the microscope, A camera that photoelectrically converts an image by the microscope in the range where the target point on the end surface of the work is arranged, an image processing device that calculates the center position of the target point imaged by this camera, and face each other with the work sandwiched therebetween. A first laser outer diameter measuring device light emitting unit and a first laser outer diameter measuring device light receiving unit which are fitted to the first laser outer diameter measuring device light emitting unit and the first laser outer diameter measuring device light receiving unit A second laser outer diameter measuring device light projecting unit and a second laser outer diameter measuring device light receiving unit, which face each other across the workpiece in different directions, and the first laser outer diameter measuring device light projecting unit. And a first laser outer diameter measuring device light receiving unit, and a second laser outer diameter measuring device projecting unit and a second laser outer diameter measuring device light receiving unit connected to the laser outer unit for calculating the center position of the work. A diameter measuring device controller, and an arithmetic device for calculating the coaxiality of the target point with respect to the work from the center position of the work calculated by the laser outer diameter measuring device controller and the center position of the target point calculated by the image processing device. It has and.
【０００８】本発明の同軸度測定装置は、対物レンズが
取り付けられた顕微鏡と、この顕微鏡の光軸と同軸の状
態に円筒形状のワークを保持するワーク供給ユニット
と、前記ワークの端面の対象点が配置される範囲の前記
顕微鏡による像を光電変換するカメラと、このカメラに
撮像される前記対象点の中心位置を算出する画像処理装
置と、それぞれが前記ワークの側面上で前記ワークの中
心軸に垂直な面上の異なる点である第１〜第３の点の位
置を測定する第１〜第３の測長手段と、これら第１〜第
３の測長手段に接続され前記第１〜第３の点の位置から
前記ワークの中心位置を測定するコントローラと、この
コントローラが算出する前記ワークの中心位置および前
記画像処理装置が算出する前記対象点の中心位置より前
記対象点の前記ワークに対する同軸度を算出する演算装
置とを備えている。The coaxiality measuring apparatus of the present invention comprises a microscope having an objective lens attached thereto, a work supply unit for holding a cylindrical work coaxially with the optical axis of the microscope, and a target point on the end face of the work. A camera for photoelectrically converting an image by the microscope in a range where is arranged, an image processing device for calculating the center position of the target point imaged by the camera, and a central axis of the work on the side surface of the work. First to third length measuring means for measuring the positions of first to third points, which are different points on a plane perpendicular to the plane, and the first to third length measuring means connected to the first to third length measuring means. A controller that measures the center position of the work from the position of a third point, and the work position of the target point from the center position of the work calculated by the controller and the center position of the target point calculated by the image processing apparatus. And an arithmetic unit for calculating a concentricity with respect.
【０００９】[0009]
【実施例】次に、本発明について図面を参照して説明す
る。DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings.
【００１０】図１は本発明の一実施例の同軸度測定装置
の構成図である。FIG. 1 is a block diagram of a coaxiality measuring device according to an embodiment of the present invention.
【００１１】ワーク供給ユニット１１が円筒形状ワーク
１２を保持し、ワーク１２の軸が顕微鏡１の光軸と平行
かつ同軸になりそして端面が高倍率対物レンズ４の焦点
面上にくる位置にワーク１２をセットする。高倍率対物
レンズ４はワーク１２の外径との同軸度を求めたい対象
点がカメラ２の視野から外れない範囲で最も高い倍率の
対物レンズである。The work supply unit 11 holds a cylindrical work 12, the axis of the work 12 is parallel and coaxial with the optical axis of the microscope 1, and the end face is at a position on the focal plane of the high-power objective lens 4. Set. The high-magnification objective lens 4 is an objective lens with the highest magnification in a range in which the target point for which the coaxiality with the outer diameter of the work 12 is desired to be obtained does not deviate from the visual field of the camera 2.
【００１２】高倍率対物レンズ４のセットされた顕微鏡
１でワーク１２の端面を拡大しワーク１２の外径との同
軸度を求めたい対象点をカメラ２がとらえる。カメラ２
は顕微鏡１の像面上におかれ顕微鏡１に固定されてい
る。顕微鏡１は顕微鏡台５に支持されている。カメラ２
がどらえた像のデータは画像処理装置３に送られワーク
１２の外径との同軸度を求めたい対象点の中心位置を算
出する。The microscope 1 in which the high-magnification objective lens 4 is set up enlarges the end face of the work 12 and the camera 2 captures the target point for which the coaxiality with the outer diameter of the work 12 is to be obtained. Camera 2
Is fixed on the microscope 1 on the image plane of the microscope 1. The microscope 1 is supported by a microscope table 5. Camera 2
The defocused image data is sent to the image processing device 3 to calculate the center position of the target point for which the coaxiality with the outer diameter of the work 12 is to be obtained.
【００１３】一方、光軸が顕微鏡１の光軸に対し垂直な
第１のレーザ外径測定器投光ユニット６と第１のレーザ
外径測定受光ユニット７によりワーク１２の径および側
面の位置を検出しこれからレーザ外径測定器コントロー
ラ１６によりワーク１２の外径の一の方向の中心位置を
算出する。第１のレーザ外径測定器投光ユニット６と第
１のレーザ外径測定器受光ユニット７は対になっており
１セットでレーザ外径測定器となる。ここでレーザ外径
測定器とは例えばアンリツ（株）製レーザ外径測定器Ｋ
Ｌ１５Ｘシリーズ等であり、ワーク１２の径および側面
の位置を０．１ミクロン台の精度で測定できる。On the other hand, the diameter of the work 12 and the position of the side surface thereof are determined by the first laser outer diameter measuring device projecting unit 6 and the first laser outer diameter measuring light receiving unit 7 whose optical axes are perpendicular to the optical axis of the microscope 1. The laser outer diameter measuring device controller 16 calculates the center position of the outer diameter of the workpiece 12 in one direction from the detected value. The first laser outer diameter measuring device projecting unit 6 and the first laser outer diameter measuring device light receiving unit 7 are paired, and one set serves as a laser outer diameter measuring device. Here, the laser outer diameter measuring instrument is, for example, laser outer diameter measuring instrument K manufactured by Anritsu Corporation.
The L15X series and the like can measure the diameter and the position of the side surface of the work 12 with an accuracy of the order of 0.1 micron.
【００１４】また光軸が顕微鏡１の光軸と第１のレーザ
外径測定器投光ユニット６の光軸に対し垂直な第２のレ
ーザ外径測定器投光ユニット８と第２のレーザ外径測定
器受光ユニット９により第１のレーザ外径測定器の測定
対象である一の方向と直角な他の方向のワーク１２の径
および測面の位置を検出し、これからレーザ外径測定器
コントローラ１６によりワーク１２の外径の他の方向の
中心位置を算出する。第２のレーザ外径測定器投光ユニ
ット８と第２のレーザ外径測定器受光ユニット９は対に
なっており１セットでレーザに外径測定器となる。Further, the second laser outer diameter measuring unit light projecting unit 8 and the second laser outer unit whose optical axes are perpendicular to the optical axis of the microscope 1 and the optical axis of the first laser outer diameter measuring device projecting unit 6. The diameter measuring device light receiving unit 9 detects the diameter and the position of the measuring surface of the work 12 in the other direction perpendicular to the one direction to be measured by the first laser outer diameter measuring device. The center position of the outer diameter of the work 12 in the other direction is calculated by 16. The second laser outer diameter measuring device projecting unit 8 and the second laser outer diameter measuring device light receiving unit 9 are paired, and one set serves as an outer diameter measuring device for the laser.
【００１５】カメラ２と画像処理装置３により得られる
対象点の中心位置および第１のレーザ外径測定器と第２
のレーザ外径測定器とレーザ外径測定器コントローラ１
６により得られるワーク１２の外径の中心位置からワー
ク１２の外径と対象点の同軸度をレーザ外径測定器コン
トローラ１６と画像処理装置３のそれぞれと接続する演
算装置１８が算出する。The center position of the target point obtained by the camera 2 and the image processing device 3, the first laser outer diameter measuring device, and the second laser outer diameter measuring device.
Laser Outer Diameter Measuring Instrument and Laser Outer Diameter Measuring Instrument Controller 1
From the center position of the outer diameter of the work 12 obtained in step 6, the outer diameter of the work 12 and the coaxiality of the target point are calculated by the arithmetic unit 18 connected to the laser outer diameter measuring device controller 16 and the image processing apparatus 3, respectively.
【００１６】第１のレーザ外径測定器投光ユニット６と
第１のレーザ外径測定器受光ユニット７と第２のレーザ
外径測定器投光ユニット８と第２のレーザ外径測定器受
光ユニット９はサブベース１０により顕微鏡台５に接
続、固定され顕微鏡１との相対位置が固定されている。A first laser outer diameter measuring device projecting unit 6, a first laser outer diameter measuring device light receiving unit 7, a second laser outer diameter measuring device projecting unit 8, and a second laser outer diameter measuring device The unit 9 is connected and fixed to the microscope table 5 by the sub-base 10, and the position relative to the microscope 1 is fixed.
【００１７】図４は本発明の他の実施例の構成図であ
る。FIG. 4 is a block diagram of another embodiment of the present invention.
【００１８】この実施例で、顕微鏡１、カメラ２、画像
処理装置３、高倍率対物レンズ４、顕微鏡台５、ワーク
供給ユニット１１および演算装置１８は図１に示すもの
と同じである。In this embodiment, the microscope 1, the camera 2, the image processing device 3, the high-magnification objective lens 4, the microscope table 5, the work supply unit 11 and the arithmetic unit 18 are the same as those shown in FIG.
【００１９】図４は示す実施例では、計測方向が顕微鏡
１の光軸に対し垂直な第１の光マイクロメータ２１によ
りワーク１２の側面の点の位置を検出する。ここで光マ
イクロメータとは例えばアンリツ（株）製光マイクロＫ
Ｌ１３Ｘシリーズ等であり、ワーク１２の側面の点の位
置を０．１ミクロン台の精度で測定できる。In the embodiment shown in FIG. 4, the position of a point on the side surface of the work 12 is detected by the first optical micrometer 21 whose measuring direction is perpendicular to the optical axis of the microscope 1. Here, the optical micrometer is, for example, an optical micro K manufactured by Anritsu Corporation.
The L13X series and the like can measure the position of a point on the side surface of the work 12 with an accuracy of the order of 0.1 micron.
【００２０】また、計測方向が顕微鏡１の光軸に対し垂
直な、第２の光利マイクロメータ２２と第３の光マイク
ロメータ２３それぞれにより第１の光マイクロメータ２
１が計測するワーク１２の側面の位置を含むワーク１２
の軸に垂直な面内のワーク１２の側面の他の２点の位置
を検出する。The second optical micrometer 22 and the third optical micrometer 23, whose measurement directions are perpendicular to the optical axis of the microscope 1, are used to form the first optical micrometer 2 respectively.
Work 12 including the position of the side surface of work 12 measured by 1
The positions of the other two points on the side surface of the work 12 in the plane perpendicular to the axis of are detected.
【００２１】これら３点を通る円は一意に決まるため、
光マイクロメータ２１と光マイクロメータ２２と第３の
光マイクロメータ２３により検出されたワーク１２の側
面の３点の位置よりワーク１２の中心位置を光マイクロ
メータコントローラ１９を介して演算装置１８が算出す
る。カメラ２と画像処理装置３により得られる対象点の
中心位置および第１の光マイクロメータ２１と第２の光
マイクロメータ２２と第３の光マイクロメータ２３と光
マイクロメータコントローラ１９より得られるワーク１
２の外径の中心位置からワーク１２の外径と対象点の同
軸度を画像処理装置３と光マイクロメータコントローラ
１９のそれぞれと接続する演算装置１８が算出する。Since the circle passing through these three points is uniquely determined,
The arithmetic unit 18 calculates the central position of the work 12 via the optical micrometer controller 19 from the positions of the three points on the side surface of the work 12 detected by the optical micrometer 21, the optical micrometer 22, and the third optical micrometer 23. To do. Workpiece 1 obtained from the center position of the target point obtained by the camera 2 and the image processing device 3 and the first optical micrometer 21, the second optical micrometer 22, the third optical micrometer 23, and the optical micrometer controller 19.
From the center position of the outer diameter of 2, the outer diameter of the workpiece 12 and the coaxiality of the target point are calculated by the arithmetic unit 18 connected to the image processing apparatus 3 and the optical micrometer controller 19.
【００２２】第１の光マイクロメータ２１と第２の光マ
イクロメータ２２と第３の光マイクロメータ２３はサブ
ベース２０により顕微鏡台５に接続、固定され顕微鏡１
との相対位置を固定されている。The first optical micrometer 21, the second optical micrometer 22 and the third optical micrometer 23 are connected and fixed to the microscope table 5 by the sub-base 20 and fixed to the microscope 1.
The relative position with is fixed.
【００２３】[0023]
【発明の効果】以上説明したように本発明は、ワーク１
２の外径の中心位置をレーザ外径測定器または３つの測
長手段により求め、一方対象点を高倍率の対物レンズに
より大きく拡大して画像処理して対象点の中心位置を求
め、ワーク１２の外径と対象点の同軸度を高精度（０．
１ミクロン台）で測定できるという効果を有する。As described above, according to the present invention, the work 1
The center position of the outer diameter of 2 is determined by a laser outer diameter measuring device or three length measuring means, while the target point is greatly enlarged by a high-magnification objective lens and image processing is performed to determine the center position of the target point. The accuracy of the outer diameter and the coaxiality of the target point (0.
It has the effect that it can be measured on the order of 1 micron.
【図１】本発明の一実施例の構成図である。FIG. 1 is a configuration diagram of an embodiment of the present invention.
【図２】従来の同軸度測定装置を示す構成図である。FIG. 2 is a configuration diagram showing a conventional coaxiality measuring device.
【図３】光通信用ＬＤモジュールの端面を示す平面図で
ある。FIG. 3 is a plan view showing an end face of an LD module for optical communication.
【図４】本発明の他の実施例の構成図である。FIG. 4 is a configuration diagram of another embodiment of the present invention.
１ 顕微鏡 ２ カメラ ３ 画像処理装置 ４ 高倍率対物レンズ ５ 顕微鏡台 ６ 第１のレーザ外径測定器投光ユニット ７ 第１のレーザ外径測定器受光ユニット ８ 第２のレーザ外径測定器投光ユニット ９ 第２のレーザ外径測定器受光ユニット １０ サブベース １１ ワーク供給ユニット １２ ワーク １３ 低倍率対物レンズ １４ ワーク外径 １５ ＬＤ光の集光スポット １６ レーザ外径測定器コントローラ １７ 画像処理装置 １８ 演算装置 １９ 光マイクロメータコントローラ ２０ サブベース ２１ 第１の光マイクロメータ ２２ 第２の光マイクロメータ ２３ 第３の光マイクロメータ 1 microscope 2 camera 3 image processing device 4 high-magnification objective lens 5 microscope stage 6 first laser outer diameter measuring device projecting unit 7 first laser outer measuring device light receiving unit 8 second laser outer measuring device projecting Unit 9 Second laser outer diameter measuring device light receiving unit 10 Sub-base 11 Work supply unit 12 Work 13 Low magnification objective lens 14 Work outer diameter 15 LD light condensing spot 16 Laser outer diameter measuring instrument controller 17 Image processing device 18 Calculation Device 19 Optical micrometer controller 20 Sub-base 21 First optical micrometer 22 Second optical micrometer 23 Third optical micrometer
Claims (2)
この顕微鏡の光軸と同軸の状態に円筒形状のワークを保
持するワーク供給ユニットと、前記ワークの端面の対象
点が配置される範囲の前記顕微鏡による像を光電変換す
るカメラと、このカメラに撮像される前記対象点の中心
位置を算出する画像処理装置と、互いに前記ワークを挟
んで向い合う第１のレーザ外径測定器投光ユニットおよ
び第１のレーザ外径測定器受光ユニットと、これら第１
のレーザ外径測定器投光ユニットおよび第１のレーザ外
径測定器受光ユニットと垂直な方向に互いに前記ワーク
を挟んで向い合う第２のレーザ外径測定器投光ユニット
および第２のレーザ外径測定器受光ユニットと、前記第
１のレーザ外径測定器投光ユニットおよび第１のレーザ
外径測定器受光ユニットならびに前記第２のレーザ外径
測定器投光ユニットおよび第２のレーザ外径測定器受光
ユニットに接続され前記ワークの中心位置を算出するレ
ーザ外径測定器コントローラと、このレーザ外径測定器
コントローラが算出する前記ワークの中心位置および前
記画像処理装置が算出する前記対象点の中心位置より前
記対象点の前記ワークに対する同軸度を算出する演算装
置とを含むことを特徴とする同軸度測定装置。1. A microscope having an objective lens attached thereto,
A work supply unit that holds a cylindrical work coaxially with the optical axis of the microscope, a camera that photoelectrically converts an image by the microscope in a range where a target point on the end surface of the work is arranged, and an image captured by the camera. An image processing apparatus for calculating the center position of the target point, a first laser outer diameter measuring instrument light projecting unit and a first laser outer diameter measuring instrument light receiving unit facing each other with the work sandwiched therebetween, 1
Second laser outer diameter measuring device projecting unit and second laser outer measuring device projecting unit facing each other with the work sandwiched therebetween in a direction perpendicular to the laser outer diameter measuring device projecting unit and the first laser outer measuring device receiving unit. Diameter measuring device light receiving unit, first laser outer diameter measuring device projecting unit, first laser outer diameter measuring device receiving unit, second laser outer diameter measuring device projecting unit and second laser outer diameter A laser outer diameter measuring device controller connected to a measuring device light receiving unit for calculating the center position of the work, and a center position of the work calculated by the laser outer diameter measuring device controller and the target point calculated by the image processing device. A coaxiality measuring device, comprising: a calculation device that calculates a coaxiality of the target point with respect to the workpiece from a center position.
この顕微鏡の光軸と同軸の状態に円筒形状のワークを保
持するワーク供給ユニットと、前記ワークの端面の対象
点が配置される範囲の前記顕微鏡による像を光電変換す
るカメラと、このカメラに撮像される前記対象点の中心
位置を算出する画像処理装置と、それぞれが前記ワーク
の側面上で前記ワークの中心軸に垂直な面上の異なる点
である第１〜第３の点の位置を測定する第１〜第３の測
長手段と、これら第１〜第３の測長手段に接続され前記
第１〜第３の点の位置から前記ワークの中心位置を測定
するコントローラと、このコントローラが算出する前記
ワークの中心位置および前記画像処理装置が算出する前
記対象点の中心位置より前記対象点の前記ワークに対す
る同軸度を算出する演算装置とを含むことを特徴とする
同軸度測定装置。2. A microscope having an objective lens attached thereto,
A work supply unit that holds a cylindrical work coaxially with the optical axis of the microscope, a camera that photoelectrically converts an image by the microscope in a range where a target point on the end surface of the work is arranged, and an image captured by the camera. And an image processing apparatus for calculating the center position of the target point, and measuring the positions of first to third points, which are different points on the side surface of the work and perpendicular to the center axis of the work. First to third length measuring means, a controller connected to these first to third length measuring means for measuring the center position of the work from the positions of the first to third points, and this controller A coaxiality measuring device, comprising: a calculation device that calculates the coaxiality of the target point with respect to the work from the calculated central position of the work and the central position of the target point calculated by the image processing device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26575391A JPH05107025A (en) | 1991-10-15 | 1991-10-15 | Coaxial-degree measuring apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26575391A JPH05107025A (en) | 1991-10-15 | 1991-10-15 | Coaxial-degree measuring apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05107025A true JPH05107025A (en) | 1993-04-27 |
Family
ID=17421536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26575391A Pending JPH05107025A (en) | 1991-10-15 | 1991-10-15 | Coaxial-degree measuring apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05107025A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101888861B1 (en) * | 2017-03-22 | 2018-08-16 | 주식회사 마크텍코리아 | Pipe Measuring Device and Measuring Method thereof |
| CN108453564A (en) * | 2018-03-05 | 2018-08-28 | 上海理工大学 | Ball-screw in NC Machine Tools assembles the vision inspection apparatus and method of coaxiality error |
| CN109596074A (en) * | 2018-12-25 | 2019-04-09 | 芜湖哈特机器人产业技术研究院有限公司 | Coaxial bearing degree detection system |
| CN110146257A (en) * | 2019-05-17 | 2019-08-20 | 中国科学院上海技术物理研究所 | A kind of device and method of rapid survey space laser load optical axis variation |
-
1991
- 1991-10-15 JP JP26575391A patent/JPH05107025A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101888861B1 (en) * | 2017-03-22 | 2018-08-16 | 주식회사 마크텍코리아 | Pipe Measuring Device and Measuring Method thereof |
| CN108453564A (en) * | 2018-03-05 | 2018-08-28 | 上海理工大学 | Ball-screw in NC Machine Tools assembles the vision inspection apparatus and method of coaxiality error |
| CN109596074A (en) * | 2018-12-25 | 2019-04-09 | 芜湖哈特机器人产业技术研究院有限公司 | Coaxial bearing degree detection system |
| CN109596074B (en) * | 2018-12-25 | 2020-12-15 | 芜湖哈特机器人产业技术研究院有限公司 | Bearing coaxiality detection system |
| CN110146257A (en) * | 2019-05-17 | 2019-08-20 | 中国科学院上海技术物理研究所 | A kind of device and method of rapid survey space laser load optical axis variation |
| CN110146257B (en) * | 2019-05-17 | 2024-02-20 | 中国科学院上海技术物理研究所 | Device and method for rapidly measuring change of optical axis of space laser load |
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