JPH05105470A - Device for producing optical fiber preform - Google Patents
Device for producing optical fiber preformInfo
- Publication number
- JPH05105470A JPH05105470A JP30223491A JP30223491A JPH05105470A JP H05105470 A JPH05105470 A JP H05105470A JP 30223491 A JP30223491 A JP 30223491A JP 30223491 A JP30223491 A JP 30223491A JP H05105470 A JPH05105470 A JP H05105470A
- Authority
- JP
- Japan
- Prior art keywords
- soot
- target member
- optical fiber
- burner
- fiber preform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/50—Multiple burner arrangements
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/60—Relationship between burner and deposit, e.g. position
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】この発明は、棒状のターゲット部
材の軸方向に沿って移動しながらその外周面にスートを
吹付け堆積させ、光ファイバ母材を形成する光ファイバ
母材の製造装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical fiber preform manufacturing apparatus for forming an optical fiber preform by spraying and depositing soot on the outer peripheral surface of the rod-shaped target member while moving along the axial direction. It is a thing.
【0002】[0002]
【従来の技術】例えば、つぎのような光ファイバ母材の
製造方法が知られている。即ち図6において、ターゲッ
ト部材100の両端をガラス旋盤などで保持しながら回
転させるとともに、その周囲にスート(ガラス微粒子)
を付着させるためにスート合成用燃焼バーナ101を用
いてターゲット部材100の周囲を燃焼し、これによっ
てそのバーナ101の火炎中で生成されたスート(ガラ
ス微粒子)を付着・堆積させる。つまり、これは、ガラ
ス原料を燃焼ガス及び助燃ガスとともにバーナ101の
火炎102中に導入することにより、火炎102中で加
水分解反応等を生じさせ、このとき生成したSiO2等のス
ート(ガラス微粒子)をターゲット部材100の周囲に
堆積させるのである。そして、通常このようなスートの
堆積は、所定の装置(以下これを光ファイバ母材の製造
装置とよぶ)を用いて行うようになっており、つまりバ
ーナ102をターゲット部材100の軸方向に多数回ト
ラバースさせ、そのトラバースごとに1層ずつスート
(ガラス微粒子)の堆積層103を形成するものであ
る。2. Description of the Related Art For example, the following method of manufacturing an optical fiber preform is known. That is, in FIG. 6, both ends of the target member 100 are rotated while being held by a glass lathe or the like, and soot (glass fine particles) is provided around the target member 100.
In order to attach the soot, the combustion burner 101 for synthesizing soot is used to burn around the target member 100, whereby soot (glass fine particles) generated in the flame of the burner 101 is attached and deposited. In other words, by introducing the glass raw material into the flame 102 of the burner 101 together with the combustion gas and the auxiliary combustion gas, a hydrolysis reaction or the like is caused in the flame 102, and soot (glass fine particles) such as SiO 2 generated at this time is generated. ) Is deposited around the target member 100. In general, such soot deposition is performed by using a predetermined device (hereinafter referred to as an optical fiber preform manufacturing device), that is, a large number of burners 102 are arranged in the axial direction of the target member 100. The traverse is performed once, and a soot (glass fine particle) deposition layer 103 is formed for each traverse.
【0003】[0003]
【発明が解決しようとする課題】ところが、このような
製造装置にあっては、1個のバーナを用い、これを何度
も往復移動させるようになっているので、堆積効率が極
めて悪く、その作業に長時間を要している。そこで、こ
の発明は、上記した従来の欠点に鑑み、光ファイバ母材
を作業効率よく、短時間に製造することができる光ファ
イバ母材の製造装置を提供することを目的とするもので
ある。However, in such a manufacturing apparatus, since one burner is used and this is reciprocated many times, the deposition efficiency is extremely poor, and It takes a long time to work. Therefore, in view of the above-mentioned conventional defects, an object of the present invention is to provide an optical fiber preform manufacturing apparatus capable of manufacturing an optical fiber preform with good work efficiency in a short time.
【0004】[0004]
【課題を解決するための手段】即ち、この発明は棒状の
ターゲット部材の軸方向に沿って移動する走行体とこの
走行体上に設けられ前記ターゲット部材の半径方向に向
けて進退するバーナとを備えたスート吹付機構を有し、
前記バーナによりターゲット部材にスートを付着・堆積
して光ファイバ母材を製造する光ファイバ母材の製造装
置であって、前記ターゲット部材に向けてスートを吹付
けながらそのターゲット部材の一端から他端まで移動
し、その他端に到達後後退すると上方及び下方に夫々移
動して前記ターゲット部材の一端まで戻り、この一端か
ら再度同一動作を繰り返すアッパ系のスート吹付機構及
びロワ系のスート吹付機構を設け、前記アッパ系及びロ
ワ系の各スート吹付機構のバーナをターゲット部材に向
けて夫々異なる角度に取付け、前記各走行体によるター
ゲット部材の一端から他端までの往動作よりも一端まで
戻る復動作の方を高速で行なうように構成するととも
に、復動作中には走行体上のバーナをターゲット部材に
対して所定位置迄後退させるように構成したものであ
る。That is, according to the present invention, there is provided a traveling body which moves along the axial direction of a rod-shaped target member, and a burner which is provided on the traveling body and which advances and retreats in the radial direction of the target member. It has a soot spraying mechanism,
An optical fiber preform manufacturing apparatus for manufacturing an optical fiber preform by attaching and depositing soot on a target member by the burner, wherein one end to the other end of the target member while spraying the soot toward the target member. After reaching the other end, when it retreats after reaching the other end, it moves upward and downward respectively and returns to one end of the target member, and from this one end, an upper soot blowing mechanism and a lower soot blowing mechanism are provided to repeat the same operation again. , The burner of each of the upper and lower soot spraying mechanisms is attached to the target member at different angles, and the return motion of returning from one end to the other end of the target member by each traveling body is returned to one end. The burner on the traveling body is retracted to a predetermined position with respect to the target member during the returning operation. It is obtained by configured to.
【0005】[0005]
【作用】この発明の光ファイバ母材の製造装置は、ター
ゲット部材に沿って往復移動するロア及びアッパの各ス
ート吹付機構を有しており、これらが順次に、ターゲッ
ト部材の一端から他端まで移動しながらスートを吹付け
また他端まで移動後元の一端まで高速で戻ったのち、再
度その一端から同様の動作を繰り返しながら、極めてス
ピーディに効率よく光ファイバ母材を製造していくこと
ができる。The apparatus for producing an optical fiber preform of the present invention has soot spraying mechanisms of a lower and an upper that reciprocate along a target member, which are sequentially arranged from one end to the other end of the target member. After moving the soot while moving and moving to the other end and returning to the original end at high speed, repeating the same operation from that one end again, it is possible to manufacture the optical fiber preform extremely quickly and efficiently. it can.
【0006】[0006]
【実施例】以下、この発明の一実施例について添付図面
を参照しながら説明する。図1はこの発明に係る光ファ
イバ母材の製造装置を示すものであり、この製造装置
は、ターゲット部材1に対してその軸方向に移動しなが
らスート(図略)を吹付け堆積させていくロア系のスー
ト吹付機構2及びアッパ系のスート吹付機構3を備えて
いる。ロア系のスート吹付機構2は、バーナ4を備えた
第1スート吹付機構5及び第2スート吹付機構6から構
成されており、これらのスート吹付機構はターゲット部
材1の一端から他端まで(図1中同部材1の右端から左
端まで)移動しながら(以下これを往動作とよぶ)スー
トを吹付けると、次のスート吹付動作を繰り返し行うた
め他端から一端まで(同図中左端から右端)高速で戻る
(以下これを復動作とよぶ)ようになっている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the accompanying drawings. FIG. 1 shows an apparatus for manufacturing an optical fiber preform according to the present invention. This manufacturing apparatus sprays and deposits soot (not shown) on a target member 1 while moving in the axial direction thereof. A lower soot spraying mechanism 2 and an upper soot spraying mechanism 3 are provided. The lower soot spraying mechanism 2 is composed of a first soot spraying mechanism 5 and a second soot spraying mechanism 6 each having a burner 4, and these soot spraying mechanisms extend from one end to the other end of the target member 1 (see FIG. 1. While moving (from the right end to the left end of the same member 1) (hereinafter referred to as the forward operation) while spraying a soot, the next soot spraying operation is repeated, so the other end to one end (from the left end to the right end in the figure). ) It is designed to return at high speed (hereinafter referred to as "return operation").
【0007】第1スート吹付機構5は、図2において床
面側をターゲット部材1の軸芯に平行な方向(±X方
向)に移動する走行体5aと、この走行体5aに対し上
下方向(±Z方向)に移動する昇降体5bと、昇降体5
b上部においてターゲット部材1に向けて進退自在に設
けられ、バーナ4を搭載する移動体5cと、走行体5a
を移動させるX移動手段(図略)と、昇降体5bを昇降
させるZ昇降手段(図略)と、移動体5cを進退させる
Y移動手段(図略)とから構成されている。X移動手段
は、走行体5aの往復動作時に作動するものであり、Y
移動手段はスートを堆積してその半径が増大していくタ
ーゲット部材1の成長に合せて移動体5cを後退させる
ものであり、この実施例では何れもラックピニオン機構
が使用されている。また、Z昇降手段は、第2スート吹
付機構6がスートを吹付ける往動作時であって、その第
2スート吹付機構6とすれ違う場合に、双方のスート吹
付機構5,6に備えるバーナ4及び移動体どうしが接触
・衝突するのを防止するため、第1スート吹付機構5側
の昇降体5bを一定高さに降下させておくものであり、
同様にラックピニオン機構が使用されている。なお、第
2スート吹付機構6も、第1スート吹付機構5と同様の
構成となっているが、特に昇降体6b上部の移動体6c
はターゲット部材1に向けて大きく前進できるように構
成されている。The first soot blowing mechanism 5 includes a traveling body 5a which moves on the floor side in a direction (± X direction) parallel to the axis of the target member 1 in FIG. Lifting body 5b that moves in the ± Z direction) and lifting body 5
A moving body 5c, which is provided on the upper part of b so as to be able to move back and forth toward the target member 1 and carries the burner 4, and a traveling body 5a.
X moving means (not shown) for moving the moving body 5b, Z moving means (not shown) for moving the moving body 5b up and down, and Y moving means (not shown) for moving the moving body 5c back and forth. The X moving means operates when the traveling body 5a reciprocates, and
The moving means is to move the moving body 5c backward in accordance with the growth of the target member 1 in which the soot is deposited and the radius of which increases, and in this embodiment, the rack and pinion mechanism is used. Further, the Z elevating means is a burner 4 and a burner 4 provided in both soot blowing mechanisms 5 and 6 when the second soot blowing mechanism 6 passes the second soot blowing mechanism 6 during the forward movement of blowing the soot. In order to prevent the moving bodies from contacting and colliding with each other, the elevating body 5b on the first soot blowing mechanism 5 side is lowered to a certain height.
Similarly, a rack and pinion mechanism is used. The second soot spraying mechanism 6 has the same structure as the first soot spraying mechanism 5, but especially the moving body 6c above the lifting body 6b.
Are configured so that they can be greatly advanced toward the target member 1.
【0008】また、これら各スート吹付機構に備えるバ
ーナ4としては、図3に示すように常時水平方向(Y方
向)に指向するものに限らず、例えば図4に示すように
互いに各バーナ4′どうしを異なる角度に傾斜して取付
けてもよい。アッパ系のスート吹付機構3は、バーナ4
を備えた第3スート吹付機構7及び第4スート吹付機構
8から構成されており、ロア系のものと同方向にスート
をターゲット部材1に吹付け堆積する往動作と、高速で
元に戻り次の往動作に備える復動作とを順次、つまり第
1,第2スート吹付機構5,6と衝突しないように代わ
る代わるに行うようになっている。第3スート吹付機構
7は、図2において第1スート吹付機構5と同様の構成
のものを上下逆に配置した構成のものであり、走行体7
aは支柱9によって支持された架体10の溝(図略)内
をターゲット部材1の軸芯に平行な方向(±X方向)に
移動自在に設置されている。なお、第4スート吹付機構
8も、第2スート吹付機構6と同様の構成のものが使用
されており、走行体8aが架体10の溝内を移動自在に
設置されている。Further, the burners 4 provided in each of the soot blowing mechanisms are not limited to those always directed in the horizontal direction (Y direction) as shown in FIG. 3, but each burner 4'as shown in FIG. 4 for example. They may be mounted at different angles. The upper system soot spraying mechanism 3 includes a burner 4
It is composed of a third soot spraying mechanism 7 and a fourth soot spraying mechanism 8 provided with a soot, and a forward operation of spraying and depositing soot on the target member 1 in the same direction as that of the lower system, and returning to the original at a high speed. The backward movement to prepare for the forward movement is sequentially performed, that is, instead of so as not to collide with the first and second soot blowing mechanisms 5 and 6. The third soot spraying mechanism 7 has a structure similar to that of the first soot spraying mechanism 5 in FIG.
Reference character a is movably installed in a groove (not shown) of the frame 10 supported by the support column 9 in a direction parallel to the axis of the target member 1 (± X direction). The fourth soot blowing mechanism 8 also has the same structure as the second soot blowing mechanism 6, and the traveling body 8a is movably installed in the groove of the frame 10.
【0009】次に、この実施例の作用について説明す
る。図5に示すように、第1〜第4の各スート吹付機構
5〜8は、回転するターゲット部材1の軸芯方向に沿っ
て右端〜左端まで並進移動しながらスートを順次付着堆
積していく。そして、左端まで移動してきたスート吹付
機構(図5では第1のもの5)は、一旦その移動を停止
したのち、移動体5cが走行体5a上を後方(−Y方
向)に一定量移動するとともに昇降体5bが下方(−Z
方向)(アッパ系の場合には上方)へ一定量降下した状
態のまま、高速で右端まで復移動する。このようにし
て、右端まで戻ってきた各スート吹付機構5〜8は、再
度同様のスート吹付動作を繰り返していく。なお、この
実施例ではバーナを備えた各スート吹付機構をアッパ及
びロアの各々に夫々2系統ずつ設けたが、特にこれに限
定されるものではなく、夫々3系統以上設けた構成であ
ってもよい。Next, the operation of this embodiment will be described. As shown in FIG. 5, the first to fourth soot spraying mechanisms 5 to 8 sequentially deposit and deposit soot while translating from the right end to the left end along the axial direction of the rotating target member 1. . Then, the soot blowing mechanism (the first one 5 in FIG. 5) that has moved to the left end temporarily stops its movement, and then the moving body 5c moves backward (−Y direction) by a certain amount on the traveling body 5a. At the same time, the lifting body 5b moves downward (-Z
Direction) (upward in the case of upper system), with a certain amount of downward descent, it moves back to the right end at high speed. In this way, the soot spraying mechanisms 5 to 8 that have returned to the right end repeat the same soot spraying operation again. In this embodiment, each soot blowing mechanism provided with a burner is provided in each of the upper and lower two systems, but the present invention is not particularly limited to this, and a configuration having three or more systems is also possible. Good.
【0010】[0010]
【発明の効果】以上説明してきたように、この発明に係
る光ファイバ母材の製造装置によれば、ターゲット部材
に対してスートを吹付け堆積させていくバーナを備えた
スート吹付機構を上下に夫々ロア系及びアッパ系として
設けているので、極めて合理的に効率よくスートの吹付
けが可能となり、換言すれば光ファイバ母材の製造時間
を飛躍的に短縮化させることが可能となり、高性能の製
造装置を提供することができる。As described above, according to the optical fiber preform manufacturing apparatus of the present invention, the soot spraying mechanism having the burner for spraying and depositing the soot on the target member is vertically moved. Since it is provided as a lower system and an upper system, respectively, it is possible to spray the soot extremely reasonably and efficiently, in other words, it is possible to dramatically reduce the manufacturing time of the optical fiber preform, and to achieve high performance. Can be provided.
【図1】この発明に係る光ファイバ母材の製造装置を示
す正面図である。FIG. 1 is a front view showing an optical fiber preform manufacturing apparatus according to the present invention.
【図2】同装置を示す側面図である。FIG. 2 is a side view showing the device.
【図3】同装置の要部拡大図である。FIG. 3 is an enlarged view of a main part of the device.
【図4】同装置の変形例を示す要部拡大図である。FIG. 4 is an enlarged view of a main part showing a modified example of the device.
【図5】同装置の作用を示す説明図である。FIG. 5 is an explanatory diagram showing an operation of the apparatus.
【図6】従来の光ファイバ母材の製造装置を示す説明図
である。FIG. 6 is an explanatory view showing a conventional apparatus for manufacturing an optical fiber preform.
1 ターゲット部材 5a,6a,7a,8a 走行体 4,4′ バーナ 2 アッパ系のスート吹付機構 3 ロア系のスート吹付機構 5〜8 (第1〜第4)スート吹付機構 1 Target member 5a, 6a, 7a, 8a Running body 4, 4'burner 2 Upper soot spraying mechanism 3 Lower soot spraying mechanism 5-8 (1st-4th) Soot spraying mechanism
Claims (1)
沿って移動する走行体(5a・6a・7a・8a)と前
記ターゲット部材(1)の半径方向に向けて進退するバ
ーナ(4・4′)とを備えたスート吹付機構を有し、前
記バーナ(4・4′)によりターゲット部材(1)にス
ートを付着・堆積して光ファイバ母材を製造する光ファ
イバ母材の製造装置であって、 前記ターゲット部材(1)に向けてスートを吹付けなが
らそのターゲット部材(1)の一端から他端まで移動す
るとともに、その他端に到達後後退すると上方及び下方
に夫々移動して前記ターゲット部材(1)の一端まで戻
り、この一端から再度同一動作を繰り返すアッパ系のス
ート吹付機構(2)及びロワ系のスート吹付機構(3)
を設け、 前記アッパ系及びロワ系の各スート吹付機構 (2・
3)のバーナ(4・4′)をターゲット部材(1)に向
けて夫々異なる角度に取付け、 前記各走行体(5a・6a・7a・8a)によるターゲ
ット部材(1)の一端から他端までの往動作よりも一端
まで戻る復動作の方を高速で行なうように構成するとと
もに、 復動作中には走行体(5a・6a・7a・8a)上のバ
ーナ(4・4′)をターゲット部材(1)に対して所定
位置迄後退させるように構成したことを特徴とする光フ
ァイバ母材の製造装置。1. A running body (5a, 6a, 7a, 8a) moving along the axial direction of a rod-shaped target member (1) and a burner (4. 4 ′) and a soot spraying mechanism, and an apparatus for producing an optical fiber preform for producing an optical fiber preform by attaching and depositing soot on the target member (1) by the burner (4.4 ′). While moving the target member (1) from one end to the other end while spraying the soot toward the target member (1), when the target member (1) reaches the other end and moves backward, the target member (1) moves upward and downward respectively. The upper soot spraying mechanism (2) and the lower soot spraying mechanism (3) that return to one end of the target member (1) and repeat the same operation again from this one end
Is provided for each of the upper system and lower system soot spraying mechanisms (2.
The burners (4, 4 ') of 3) are attached to the target member (1) at different angles, respectively, from one end to the other end of the target member (1) by the traveling bodies (5a, 6a, 7a, 8a). The returning movement returning to one end is performed at a higher speed than the forward movement of the moving body, and during the returning movement, the burner (4, 4 ') on the traveling body (5a, 6a, 7a, 8a) is used as the target member. An apparatus for manufacturing an optical fiber preform, which is configured to retract to a predetermined position with respect to (1).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3302234A JP2767726B2 (en) | 1991-10-22 | 1991-10-22 | Optical fiber preform manufacturing equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3302234A JP2767726B2 (en) | 1991-10-22 | 1991-10-22 | Optical fiber preform manufacturing equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH05105470A true JPH05105470A (en) | 1993-04-27 |
JP2767726B2 JP2767726B2 (en) | 1998-06-18 |
Family
ID=17906567
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3302234A Expired - Lifetime JP2767726B2 (en) | 1991-10-22 | 1991-10-22 | Optical fiber preform manufacturing equipment |
Country Status (1)
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JP (1) | JP2767726B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009007242A (en) * | 2007-05-29 | 2009-01-15 | Shin Etsu Chem Co Ltd | Method of manufacturing optical fiber preform using high frequency induction thermal plasma torch |
US8322165B2 (en) | 2007-08-10 | 2012-12-04 | Shin-Etsu Chemical Co., Ltd. | Apparatus for fabricating an optical fiber |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59156930A (en) * | 1983-02-23 | 1984-09-06 | Sumitomo Electric Ind Ltd | Manufacture of porous glass body by external cvd method |
JPS60264336A (en) * | 1984-06-11 | 1985-12-27 | Furukawa Electric Co Ltd:The | Manufacture of optical glass preform |
JPS6418929A (en) * | 1987-07-13 | 1989-01-23 | Fujikura Ltd | Production of optical fiber preform |
JPH02307839A (en) * | 1989-05-23 | 1990-12-21 | Fujikura Ltd | Device for producing optical fiber preform |
-
1991
- 1991-10-22 JP JP3302234A patent/JP2767726B2/en not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59156930A (en) * | 1983-02-23 | 1984-09-06 | Sumitomo Electric Ind Ltd | Manufacture of porous glass body by external cvd method |
JPS60264336A (en) * | 1984-06-11 | 1985-12-27 | Furukawa Electric Co Ltd:The | Manufacture of optical glass preform |
JPS6418929A (en) * | 1987-07-13 | 1989-01-23 | Fujikura Ltd | Production of optical fiber preform |
JPH02307839A (en) * | 1989-05-23 | 1990-12-21 | Fujikura Ltd | Device for producing optical fiber preform |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009007242A (en) * | 2007-05-29 | 2009-01-15 | Shin Etsu Chem Co Ltd | Method of manufacturing optical fiber preform using high frequency induction thermal plasma torch |
US8322165B2 (en) | 2007-08-10 | 2012-12-04 | Shin-Etsu Chemical Co., Ltd. | Apparatus for fabricating an optical fiber |
Also Published As
Publication number | Publication date |
---|---|
JP2767726B2 (en) | 1998-06-18 |
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