JPH05103970A - Apparatus for producing fine particles - Google Patents
Apparatus for producing fine particlesInfo
- Publication number
- JPH05103970A JPH05103970A JP3266333A JP26633391A JPH05103970A JP H05103970 A JPH05103970 A JP H05103970A JP 3266333 A JP3266333 A JP 3266333A JP 26633391 A JP26633391 A JP 26633391A JP H05103970 A JPH05103970 A JP H05103970A
- Authority
- JP
- Japan
- Prior art keywords
- fine particles
- steam
- cooling gas
- pipe
- generated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、微粒子製造装置の改良
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement in a fine particle manufacturing apparatus.
【０００２】[0002]
【従来の技術】従来、複合微粒子を製造する装置として
は、例えば図２に示すものが知られている。2. Description of the Related Art Conventionally, an apparatus shown in FIG. 2 is known as an apparatus for producing composite fine particles.
【０００３】図中の１は、蒸気発生装置である。この装
置１には、捕集器２が連通されている。前記装置１と捕
集器２を連通する配管には、流量調整弁３を介在させた
配管４を介してファン５が連通されている。このファン
５の吸込み側には、微粒子供給機６が接続されている。Reference numeral 1 in the figure is a steam generator. A collector 2 is in communication with the device 1. A fan 5 is connected to a pipe that connects the device 1 and the collector 2 through a pipe 4 with a flow rate adjusting valve 3 interposed. A fine particle feeder 6 is connected to the suction side of the fan 5.
【０００４】こうした構成の微粒子製造装置において、
蒸気発生装置１から発生した蒸気７は、微粒子を含む冷
却ガス（例えば空気）８と混合して冷却され、複合微粒
子を形成し、捕集器２において捕集される。また、排ガ
ス９は排気される。冷却ガス８はファン５により流量調
整弁３で流量を調整され、配管４を通って蒸気発生装置
１の出口に供給される。更に、凝集核となる微粒子は、
微粒子供給機６からファン５の吸込側に供給される。In the fine particle production apparatus having such a structure,
The steam 7 generated from the steam generator 1 is mixed with a cooling gas (for example, air) 8 containing fine particles to be cooled, form composite fine particles, and are collected by a collector 2. Further, the exhaust gas 9 is exhausted. The flow rate of the cooling gas 8 is adjusted by the flow rate adjusting valve 3 by the fan 5, and is supplied to the outlet of the steam generator 1 through the pipe 4. Furthermore, the fine particles that become the aggregation nuclei are
It is supplied from the fine particle feeder 6 to the suction side of the fan 5.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、従来の
蒸気発生装置においては、配管４の内面に核となる微粒
子が付着する。この付着した微粒子は、凝集して塊状に
なって配管内面から剥離する。この剥離した塊状の粒子
が冷却ガス中に混入するため、捕集された製品となる複
合粒子径の分布がくずれる。また、これを防ぐためには
配管４を分離して清掃する必要があり、配管が長くなる
場合には非常に困難になる。However, in the conventional steam generator, fine particles serving as nuclei adhere to the inner surface of the pipe 4. The adhered fine particles are aggregated into a lump and separated from the inner surface of the pipe. Since the separated block-like particles are mixed in the cooling gas, the distribution of the composite particle size of the collected product is broken. Further, in order to prevent this, it is necessary to separate and clean the pipe 4, which becomes very difficult when the pipe becomes long.
【０００６】本発明は上記事情に鑑みてなされたもの
で、凝縮核となる微粒子が冷却用配管に付着することを
防止するとともに、この配管内に付着した微粒子を塊状
にして冷却ガス中に混入する量を少なくして生成される
複合微粒子の粒径分布をくずすことがない微粒子製造装
置を提供することを目的とする。The present invention has been made in view of the above circumstances, and prevents the fine particles which become condensation nuclei from adhering to the cooling pipe, and the fine particles adhering to the inside of the pipe are mixed in the cooling gas. An object of the present invention is to provide an apparatus for producing fine particles, which does not disturb the particle size distribution of the composite fine particles produced by reducing the amount to be generated.
【０００７】[0007]
【課題を解決するための手段】本願第１の発明は、大気
以上の圧力の発生蒸気を得るための蒸気発生装置と、前
記発生蒸気中に冷却ガスを供給する手段と、前記発生蒸
気中に凝縮核となる微粒子を供給する手段とを具備する
ことを特徴とする微粒子製造装置である。A first invention of the present application is to provide a steam generator for obtaining steam having a pressure higher than atmospheric pressure, a means for supplying a cooling gas into the steam, and a steam generator for supplying steam to the steam. And a means for supplying fine particles to be condensation nuclei.
【０００８】本願第２の発明は、発生蒸気を得るための
蒸気発生装置と、前記発生蒸気中に冷却ガスを供給する
冷却ガス配管と、前記発生蒸気中に凝縮核となる微粒子
を供給する手段と、前記発生蒸気中への冷却ガス供給口
近傍の前記冷却ガス配管に設けられ，前記微粒子を吸引
するイジェクタとを具備することを特徴とする微粒子製
造装置である。A second invention of the present application is a steam generator for obtaining generated steam, a cooling gas pipe for supplying cooling gas into the generated steam, and means for supplying fine particles to be condensation nuclei in the generated steam. And a ejector that is provided in the cooling gas pipe near the cooling gas supply port into the generated steam and that sucks the particles.
【０００９】[0009]
【作用】本願第１の発明において、蒸気中に微粒子を混
合した冷却ガスを吹き込み、冷却することにより、微粒
子を凝縮核として蒸気は微粒子の表面に凝固する。従っ
て、微粒子の表面に蒸気成分の固体が凝固して複合粒子
が生成する。In the first aspect of the present invention, the cooling gas in which the fine particles are mixed is blown into the vapor to cool the vapor, whereby the vapor is solidified on the surface of the fine particles by using the fine particles as condensation nuclei. Therefore, the solid of the vapor component is solidified on the surface of the fine particles to form the composite particles.
【００１０】本願第２の発明において、蒸気中への冷却
ガス供給口近傍の冷却ガス配管中にイジェクタを設置
し、このイジェクタから凝縮核となる微粒子を蒸気中に
供給することにより、微粒子表面に蒸気成分の固体が凝
固して複合粒子が生成する。In the second invention of the present application, an ejector is installed in the cooling gas pipe in the vicinity of the cooling gas supply port into the steam, and fine particles which become condensation nuclei are supplied into the steam from the ejector, so that the surface of the fine particles is The solid of the vapor component solidifies to produce composite particles.
【００１１】[0011]
【実施例】以下、本発明の一実施例を図を参照して説明
する。 （実施例１）An embodiment of the present invention will be described below with reference to the drawings. (Example 1)
【００１２】図１を参照する。図中の11は、蒸気発生装
置である。この装置11は高周波（ＲＦ）プラズマト−チ
を用いたもので、このト−チにプラズマガス12を供給し
てソレノイドコイル13に高周波電源14から高周波電流を
流してプラズマ15を形成するように構成されている。こ
こで、プラズマ15に原料粒子16を供給して蒸発せしめ、
発生蒸気17を得る。Referring to FIG. Reference numeral 11 in the figure is a steam generator. This apparatus 11 uses a high frequency (RF) plasma torch. A plasma gas 12 is supplied to this torch to supply a high frequency current from a high frequency power source 14 to a solenoid coil 13 to form a plasma 15. It is configured. Here, the raw material particles 16 are supplied to the plasma 15 to be evaporated,
Generated steam 17 is obtained.
【００１３】前記蒸気発生装置11の下部側には、流量調
整弁18を介在させた冷却空気配管19を介して第１のファ
ン20が連通されている。前記冷却空気配管19には、微粒
子供給器21，微粒子供給量調整弁22を介在させた微粒子
供給用配管23を介して第２のファン24が連通されてい
る。また、前記蒸気発生装置11の下部側には、捕集器25
が接続されている。A first fan 20 is connected to the lower side of the steam generator 11 via a cooling air pipe 19 with a flow rate adjusting valve 18 interposed. A second fan 24 is connected to the cooling air pipe 19 via a fine particle supply pipe 21 and a fine particle supply pipe 23 with a fine particle supply amount adjusting valve 22 interposed therebetween. Further, a collector 25 is provided on the lower side of the steam generator 11.
Are connected.
【００１４】こうした構成の微粒子製造装置において、
前記プラズマト−チにプラズマガス12を供給してソレノ
イドコイル13に高周波電源14から高周波電流を流してプ
ラズマ15を形成する。このプラズマ15には原料粒子16を
供給して蒸発せしめ、発生蒸気17を得る。また、前記発
生蒸気17に凝縮液となる微粒子を含んだ冷却空気26を吹
き込み、発生蒸気17を冷却し、生成した微粒子と捕集器
25にで捕集し、排ガス27を排気する。ここで、冷却空気
26は第１のファン20により流量調整弁18で流量を調整さ
れ、冷却空気配管19に供給される。更に、凝縮核となる
微粒子は、微粒子供給器21において第２のファン24及び
微粒子供給量調整弁22を介して供給される空気に同伴さ
れ、冷却空気に供給される。In the fine particle production apparatus having such a structure,
A plasma gas 12 is supplied to the plasma torch and a high frequency current is supplied from a high frequency power source 14 to a solenoid coil 13 to form a plasma 15. Raw material particles 16 are supplied to the plasma 15 to be evaporated, and a generated steam 17 is obtained. Further, the generated steam 17 is blown with cooling air 26 containing fine particles to be a condensate to cool the generated steam 17, and the generated fine particles and a collector.
It collects at 25 and exhausts the exhaust gas 27. Where the cooling air
The flow rate of 26 is adjusted by the first fan 20 by the flow rate adjusting valve 18, and is supplied to the cooling air pipe 19. Further, the fine particles to be condensation nuclei are entrained in the air supplied through the second fan 24 and the fine particle supply amount adjusting valve 22 in the fine particle feeder 21 and are supplied to the cooling air.
【００１５】しかして、実施例１に係る微粒子製造装置
によれば、前記蒸気発生装置11の下部側に流量調整弁18
を介在させた冷却空気配管19を介して第１のファン20が
連通するとともに、前記冷却空気配管19に微粒子供給器
21，微粒子供給量調整弁22を介在させた微粒子供給用配
管23を介して第２のファン24を連通させた構成になって
いるため、プラズマ15により得られた発生蒸気17中に微
粒子を混合した冷却ガスを吹き込み冷却することによ
り、微粒子を凝縮核として蒸気は微粒子の表面に凝固さ
せることができる。従って、微粒子の表面に蒸気成分の
固体が凝固した複合微粒子を生成できる。 （実施例２）図２を参照する。但し、図１と同部材は同
符号を付して説明を省略する。Therefore, according to the apparatus for producing fine particles of the first embodiment, the flow rate adjusting valve 18 is provided on the lower side of the steam generator 11.
The first fan 20 communicates with the cooling air pipe 19 with the interposition of the cooling air pipe 19, and the fine particle feeder is connected to the cooling air pipe 19.
21. Since the second fan 24 is connected through the fine particle supply pipe 23 with the fine particle supply amount adjusting valve 22 interposed, the fine particles are mixed in the generated steam 17 obtained by the plasma 15. By blowing and cooling the cooling gas, the vapor can be solidified on the surface of the fine particles by using the fine particles as condensation nuclei. Therefore, composite fine particles in which the solid of the vapor component is solidified can be generated on the surface of the fine particles. (Embodiment 2) Referring to FIG. However, the same members as those in FIG.
【００１６】この実施例２に係る微粒子製造装置では、
実施例１と比べ、第２のファンが存在せず、冷却空気配
管19と微粒子供給用配管23との連結箇所付近（冷却空気
吹き出し口近傍）にイジェクタ31及びイジェクタ絞り弁
32を設けた点が異なる。In the fine particle production apparatus according to the second embodiment,
Compared to the first embodiment, the second fan does not exist, and the ejector 31 and the ejector throttle valve are provided in the vicinity of the connection between the cooling air pipe 19 and the particulate supply pipe 23 (near the cooling air outlet).
The difference is that 32 is provided.
【００１７】こうした構成の微粒子製造装置において、
プラズマト−チにプラズマガス12を供給してソレノイド
コイル13に高周波電源14から高周波電流を流してプラズ
マ15を形成する。このプラズマ15には原料粒子16を供給
して蒸発せしめ、発生蒸気17を得る。また、前記発生蒸
気17に凝縮液となる微粒子を含んだ冷却空気26を吹き込
み、発生蒸気17を冷却し、生成した微粒子と捕集器25に
で捕集し、排ガス27を排気する。ここで、冷却空気26は
第１のファン20により流量調整弁18で流量を調整され、
冷却空気配管19に供給される。更に、イジェクタ31にお
いては、冷却ガスはイジェクタ絞り弁32で縮流，加速さ
れ、負圧になり、イジェクタ絞り弁32の加硫から凝縮核
となる微粒子を吸引する。即ち、凝縮核となる微粒子
は、微粒子供給器21で微粒子供給量調整弁22を介して吸
入される空気と同伴してイジェクタ絞り弁32下流に供給
される。In the fine particle manufacturing apparatus having such a structure,
A plasma gas 12 is supplied to the plasma torch and a high frequency current is supplied from a high frequency power source 14 to a solenoid coil 13 to form a plasma 15. Raw material particles 16 are supplied to the plasma 15 to be evaporated, and a generated steam 17 is obtained. Further, the generated steam 17 is blown with cooling air 26 containing fine particles to be a condensate, the generated steam 17 is cooled, the generated fine particles and the collector 25 are collected, and the exhaust gas 27 is exhausted. Here, the flow rate of the cooling air 26 is adjusted by the flow rate adjusting valve 18 by the first fan 20,
It is supplied to the cooling air pipe 19. Further, in the ejector 31, the cooling gas is contracted and accelerated by the ejector throttle valve 32 to become a negative pressure, and the vulcanization of the ejector throttle valve 32 sucks the fine particles which become condensation nuclei. That is, the fine particles which become the condensation nuclei are supplied to the downstream of the ejector throttle valve 32 together with the air sucked through the fine particle supply amount adjusting valve 22 in the fine particle feeder 21.
【００１８】実施例２に係る微粒子製造装置によれば、
冷却空気吹き出し口近傍にイジェクタ31を設けた構成に
なっているため、凝縮核となる微粒子が冷却空気配管19
に付着することを防止できる。また、捕集された生成微
粒子は凝縮核となる微粒子の表面に蒸気が凝固した複合
微粒子であり、その粒径は凝縮核となる微粒子の粒径よ
りわずかに大きくになるにすぎない。According to the apparatus for producing fine particles of Example 2,
Since the ejector 31 is provided in the vicinity of the cooling air outlet, the fine particles that become condensation nuclei are cooled air pipes 19
Can be prevented from adhering to. Further, the collected fine particles are composite fine particles in which vapor is solidified on the surface of fine particles to be condensation nuclei, and the particle size thereof is only slightly larger than the particle size of fine particles to be condensation nuclei.
【００１９】[0019]
【発明の効果】以上詳述した如く本発明によれば、凝縮
核となる微粒子が冷却用配管に付着することを防止する
とともに、この配管内に付着した微粒子を塊状にして冷
却ガス中に混入する量を少なくして生成される複合微粒
子の粒径分布をくずすことがない微粒子製造装置を提供
できる。As described above in detail, according to the present invention, it is possible to prevent the fine particles which become condensation nuclei from adhering to the cooling pipe, and to make the fine particles adhering in the pipe into a lump to be mixed in the cooling gas. It is possible to provide a fine particle manufacturing apparatus that does not disturb the particle size distribution of the composite fine particles that are generated by reducing the amount to be applied.
【図１】本発明の実施例１に係る微粒子製造装置の説明
図。FIG. 1 is an explanatory diagram of a fine particle manufacturing apparatus according to a first embodiment of the present invention.
【図２】本発明の実施例２に係る微粒子製造装置の説明
図。FIG. 2 is an explanatory diagram of a fine particle manufacturing apparatus according to a second embodiment of the present invention.
【図３】従来の微粒子製造装置の説明図。FIG. 3 is an explanatory view of a conventional fine particle manufacturing apparatus.
11…蒸気発生装置、12…プラズマガス、13…ソレノイド
コイル、14…高周波電源、15…プラズマ、16…原料粒
子、17…発生蒸気、18…流量調整弁、19…冷却空気配
管、20，24…ファン、21…微粒子供給器、22…微粒子供
給調整弁、23…微粒子供給用配管、25…捕集器、26…冷
却空気、27…排ガス、31…イジェクタ、32…イジェクタ
絞り弁。11 ... Steam generator, 12 ... Plasma gas, 13 ... Solenoid coil, 14 ... High frequency power supply, 15 ... Plasma, 16 ... Raw material particles, 17 ... Generated steam, 18 ... Flow control valve, 19 ... Cooling air piping, 20, 24 ... fan, 21 ... particulate supply device, 22 ... particulate supply adjustment valve, 23 ... particulate supply piping, 25 ... collector, 26 ... cooling air, 27 ... exhaust gas, 31 ... ejector, 32 ... ejector throttle valve.
Claims (2)
蒸気発生装置と、前記発生蒸気中に冷却ガスを供給する
手段と、前記発生蒸気中に凝縮核となる微粒子を供給す
る手段とを具備することを特徴とする微粒子製造装置。1. A steam generator for obtaining generated steam at a pressure higher than atmospheric pressure, a means for supplying a cooling gas into the generated steam, and a means for supplying fine particles to be condensed nuclei in the generated steam. An apparatus for producing fine particles, comprising:
前記発生蒸気中に冷却ガスを供給する冷却ガス配管と、
前記発生蒸気中に凝縮核となる微粒子を供給する手段
と、前記発生蒸気中への冷却ガス供給口近傍の前記冷却
ガス配管に設けられ，前記微粒子を吸引するイジェクタ
とを具備することを特徴とする微粒子製造装置。2. A steam generator for obtaining steam,
A cooling gas pipe for supplying a cooling gas into the generated steam,
A means for supplying fine particles to be condensation nuclei in the generated steam, and an ejector provided in the cooling gas pipe in the vicinity of a cooling gas supply port into the generated steam and sucking the fine particles are provided. Fine particle manufacturing equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3266333A JPH05103970A (en) | 1991-10-15 | 1991-10-15 | Apparatus for producing fine particles |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3266333A JPH05103970A (en) | 1991-10-15 | 1991-10-15 | Apparatus for producing fine particles |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05103970A true JPH05103970A (en) | 1993-04-27 |
Family
ID=17429478
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3266333A Withdrawn JPH05103970A (en) | 1991-10-15 | 1991-10-15 | Apparatus for producing fine particles |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05103970A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19980025483A (en) * | 1996-10-01 | 1998-07-15 | 이대원 | Steam Plasma Tochigi |
| JP2003530679A (en) * | 2000-04-10 | 2003-10-14 | テトロニクス リミテッド | Twin plasma torch device |
-
1991
- 1991-10-15 JP JP3266333A patent/JPH05103970A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19980025483A (en) * | 1996-10-01 | 1998-07-15 | 이대원 | Steam Plasma Tochigi |
| JP2003530679A (en) * | 2000-04-10 | 2003-10-14 | テトロニクス リミテッド | Twin plasma torch device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19990107 |