JPH0493783A - Imaging device of magnetic field - Google Patents
Imaging device of magnetic fieldInfo
- Publication number
- JPH0493783A JPH0493783A JP20915490A JP20915490A JPH0493783A JP H0493783 A JPH0493783 A JP H0493783A JP 20915490 A JP20915490 A JP 20915490A JP 20915490 A JP20915490 A JP 20915490A JP H0493783 A JPH0493783 A JP H0493783A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- magnetic flux
- linear conductor
- difference
- electromagnetic induction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003384 imaging method Methods 0.000 title claims description 28
- 239000004020 conductor Substances 0.000 claims abstract description 55
- 230000004907 flux Effects 0.000 claims abstract description 39
- 238000009826 distribution Methods 0.000 claims abstract description 37
- 230000005674 electromagnetic induction Effects 0.000 claims abstract description 16
- 238000002591 computed tomography Methods 0.000 claims abstract description 4
- 238000001514 detection method Methods 0.000 claims description 18
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 6
- 238000000034 method Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000005389 magnetism Effects 0.000 description 2
- 235000001674 Agaricus brunnescens Nutrition 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔概要〕
微細形状の磁界発生源の発生する水平磁界の空間分布を
映像化する磁界の映像化装置に関し、線状導体幅よりも
微小な領域の磁束分布も正確に検出することができる磁
界の映像化装置の提供を目的とし、
磁界発生源により発生した磁界領域のある断層面の磁束
分布の映像化装置を、映像化を行う断層面に対して垂直
で高さ方向に平行な２辺を備えた第１の線状導体と、映
像化を行う断層面に対して垂直で高さ方向に平行な２辺
を備え、その一方の辺が第１の線状導体の一方の辺と同
じ高さに隣接して設けられ、他方の辺が第１の線状導体
の他方の辺と異なる高さにある第２の線状導体と、２組
の線状導体に誘起される電磁誘導電圧を検出する電圧検
出手段と、第１と第２の線状導体に発生する電磁誘導電
圧の差分を演算する差分演算手段と、前記磁界発生源と
線状導体を相対的に一定速度で移動させると共に、両者
の相対的な移動方向を変更可能な移動手段と、得られた
検出値にコンピュータ断層映像手法を通用して、前記磁
束分布を一次元映像に変換する映像変換装置とから構成
する。[Detailed Description of the Invention] [Summary] Regarding a magnetic field imaging device that visualizes the spatial distribution of a horizontal magnetic field generated by a microscopic magnetic field generation source, the magnetic flux distribution in a region smaller than the width of a linear conductor can also be accurately recorded. In order to provide an imaging device that can detect magnetic fields, the imaging device is designed to visualize the magnetic flux distribution of a fault plane in a magnetic field area generated by a magnetic field source, at a height perpendicular to the fault plane to be visualized. A first linear conductor having two sides parallel to the direction, and two sides perpendicular to the tomographic plane to be imaged and parallel to the height direction, one of which is the first linear conductor. a second linear conductor that is provided adjacent to the same height as one side of the first linear conductor and whose other side is at a different height from the other side of the first linear conductor; a voltage detection means for detecting an induced electromagnetic induction voltage; a difference calculation means for calculating a difference between electromagnetic induction voltages generated in the first and second linear conductors; a moving means capable of moving the magnetic flux distribution at a constant speed and changing the relative direction of movement between the two, and an image conversion method that converts the magnetic flux distribution into a one-dimensional image by applying a computer tomographic imaging method to the detected values obtained. It consists of a device.
〔産業上の利用分野〕
本発明は磁界の映像化装置に関し、特に、微細形状の磁
界発生源の発生する水平方向の磁界の空間分布を映像化
する装置に関するものである。[Industrial Application Field] The present invention relates to a magnetic field imaging device, and more particularly to a device for imaging the spatial distribution of a horizontal magnetic field generated by a microscopic magnetic field generation source.
近年、磁気を使用する装置の数が増大するにつれ、それ
ぞれの装置が発生する磁気が相互に干渉することがある
。このため、各種装置は自己の発生する磁界の自己およ
び他の機器への磁界の影響を考慮して設計されることが
必要となってきている。そこで、磁界発生源、例えば、
磁石、磁気ヘッド、磁気テープ、磁気ディスク、モータ
等の磁界発生源が発生する磁界の空間分布を映像化する
ことにより、磁界発生源の磁化状態を簡単に評価するこ
とを可能とし、各種設計や品質管理を容易にすることが
できる装置が望まれている。また、近年、各種磁気使用
装置の小型化により、特に微細形状の磁界発生源の発生
する磁界の空間分布を映像化する装置が望まれている。In recent years, as the number of devices that use magnetism has increased, the magnetism generated by each device may interfere with each other. For this reason, it has become necessary for various devices to be designed in consideration of the influence of the magnetic field generated by the device itself and on other devices. Therefore, magnetic field sources, e.g.
By visualizing the spatial distribution of the magnetic field generated by magnetic field sources such as magnets, magnetic heads, magnetic tapes, magnetic disks, and motors, it is possible to easily evaluate the magnetization state of the magnetic field sources, which can be used to improve various designs and A device that can facilitate quality control is desired. Furthermore, in recent years, with the miniaturization of various magnetic devices, there has been a demand for a device that visualizes the spatial distribution of a magnetic field generated by a particularly minute magnetic field generating source.
一般に、第４図に示すように、長さ！、高さｈの矩形状
の線状導体９１が磁束密度Ｂ （Ｗｂ／ｍｚ〕の中にあ
り、磁束密度Ｂに対して垂直方向の線状導体９１の面を
一定速度ＶｓでＸ方向に移動させると、この線状導体９
１には電磁誘導の法則ｔこ従って次式に示すような電圧
■が生じる。In general, as shown in Figure 4, the length! , a rectangular linear conductor 91 with a height h is in a magnetic flux density B (Wb/mz), and the surface of the linear conductor 91 perpendicular to the magnetic flux density B is moved in the X direction at a constant speed Vs. This linear conductor 9
According to the law of electromagnetic induction t, a voltage 2 as shown in the following equation is generated.
Ｖ＝−ｄΦ／ｄｔ ・・・ ■
このとき、Φは線状導体９１に鎖交する磁束であるから
、磁束密度Ｂを線状導体９１の面内で面積骨した値にな
る。よって、線状導体９１を貫く磁束Φは次式のように
表すことができる。V=-dΦ/dt... ■ At this time, since Φ is the magnetic flux interlinking with the linear conductor 91, it becomes the value obtained by multiplying the magnetic flux density B by the area within the plane of the linear conductor 91. Therefore, the magnetic flux Φ penetrating the linear conductor 91 can be expressed as in the following equation.
Φ＝ｈＳＢｄｆｆｉ ・・・ ■
ここで、線状導体９１の移動速度Ｖｓ＝ｄｘ／ｄｔであ
ることに注意して、■弐に０式を代入すると０式は次の
ように変形することができる。Φ=hSBdffi... ■Here, by paying attention to the fact that the moving speed of the linear conductor 91 is Vs=dx/dt, and substituting the 0 formula into 2, the 0 formula can be transformed as follows. .
Ｖ−−ｈＶｓｄ／ｄｘ ５Ｂｄｌ −■ところで、
コンピュータ断層映像手法（Ｃ７手法）とは、１断面内
において多方向に収集した任意に物理量分布の線積分値
群（投影データ）から、その断面内の物理量分布を計算
により断層像として再構成する手法である。V--hVsd/dx 5Bdl -■By the way,
The computerized tomographic imaging method (C7 method) reconstructs a tomographic image by calculating the distribution of physical quantities within a cross section from a group of line integral values (projection data) of the distribution of physical quantities arbitrarily collected in multiple directions within one cross section. It is a method.
磁束密度Ｂに対して垂直方向に面を持つ線状導体９１を
測定面内で定速で移動させた時のこの線状導体９１に生
じる電圧は、０式から磁束密度Ｂの線積分の形になって
いることが分かる。そこで、線状導体９１の移動に伴っ
て測定される電圧■は導体９１の通過した面内における
磁束分布の投影データと考えることができる。一方、こ
の投影データを各方向から収集してＣ７手法を運用する
場合には、磁束密度Ｂと線状導体９１とのなす角度θを
考慮しなければならない。そこで、水平方向の磁束密度
Ｂがある面をｘ−ｙ平面とし、磁束密度Ｂと線状導体９
１とのなす角度θとした時に線状導体９１に鎖交する磁
束密度のＸ成分Ｂｘと、ｙ成分ｎｙに関する投影データ
は次式のようになる。When a linear conductor 91 with a surface perpendicular to the magnetic flux density B is moved at a constant speed within the measurement plane, the voltage generated in the linear conductor 91 is expressed by the form of the line integral of the magnetic flux density B from equation 0. You can see that it is. Therefore, the voltage (2) measured as the linear conductor 91 moves can be considered to be projection data of the magnetic flux distribution within the plane through which the conductor 91 passes. On the other hand, when collecting this projection data from each direction and applying the C7 method, the angle θ between the magnetic flux density B and the linear conductor 91 must be considered. Therefore, let the plane where the horizontal magnetic flux density B is located be the x-y plane, and the magnetic flux density B and the linear conductor 9
1, the projection data regarding the X component Bx and the y component ny of the magnetic flux density interlinking with the linear conductor 91 is expressed by the following equation.
ｊ１３Ｘ（Ｘ、ｙ）ｄｌ＝ ｃｏｓθｆＢｄｊｌ！ＳＢ
ｙ （ｘ、 ｙ）ｄｌ＝ ｓｉｎθＪＢｄ７！このよ
うに、さまざまな投影角θにおいて測定される投影デー
タ群にＣ７手法を適用することによリ、Ｂｘ （ｘ、ｙ
）、Ｂｙ （ｘ、ｙ）の再構成が可能になる。j13X(X,y)dl= cosθfBdjl! S.B.
y (x, y)dl= sinθJBd7! In this way, by applying the C7 method to a group of projection data measured at various projection angles θ, Bx (x, y
), By (x, y) becomes possible.
第５図は、本出願人が従来より提案している水平方向の
磁界分布を測定する磁界の映像化装置の一例を示すもの
であり、以上説明したＣ７手法を用いたものである。こ
の装置では、映像化を行う断層面（測定面）に垂直に配
置された線状導体（コイル）９３と磁界発生源９４が相
対運動しくこの例では直進ステージ９５により磁界発生
源９４が移動）、コイル９３に錯交する磁束の変化から
発生する電磁誘導電圧をアンプ９７で増幅、Ａ／Ｄ変換
器９８でディジタル値に変換してコンピュータ９９が逐
次読み取るようになっている。磁界発生源９４の一方向
の直線運動が終了すると、磁界発生源９４は回転ステー
ジ９６によって微小角度回転させられ、次いで直線ステ
ージ９５により磁界発生源９４が移動して同様な電圧検
出が行われる。このような電圧検出は磁界発生源９４を
微小角度ずつ回転させて１８０°もしくは３６０°の範
囲で行なわれ、検出電圧にＣ７手法を適用して磁界発生
源９４の断層面に水平な磁束分布を映像化するものであ
る。FIG. 5 shows an example of a magnetic field imaging device for measuring horizontal magnetic field distribution proposed by the applicant of the present invention, which uses the C7 method described above. In this device, a linear conductor (coil) 93 placed perpendicular to the tomographic plane (measurement plane) to be visualized and a magnetic field generation source 94 move relative to each other (in this example, the magnetic field generation source 94 is moved by a linear stage 95). , an electromagnetic induction voltage generated from a change in the magnetic flux intersecting the coil 93 is amplified by an amplifier 97, converted to a digital value by an A/D converter 98, and read out sequentially by a computer 99. When the linear motion of the magnetic field generating source 94 in one direction is completed, the magnetic field generating source 94 is rotated by a small angle by the rotary stage 96, and then the magnetic field generating source 94 is moved by the linear stage 95, and similar voltage detection is performed. Such voltage detection is performed in a range of 180° or 360° by rotating the magnetic field source 94 by minute angles, and by applying the C7 method to the detected voltage, a magnetic flux distribution horizontal to the fault plane of the magnetic field source 94 is detected. It is something that is visualized.
ところが、従来提案の磁界の映像化装置では、電圧検出
時の断層面に水平な方向の分解能はコイル９３の高さ方
向の幅で制約されてしまうという問題点がある。すなわ
ち、第６図に簡単なモデルで示すように、点線で示す水
平方向の磁束分布を正確に検出するためには、検出コイ
ル９３の高さ （検出幅）ｈを小さくする必要があるが
、検出コイル９３の高さを小さくするにつれて誘導電圧
は小さくなり、雑音成分は変化しないため、検出感度が
下がり、分解能が制限されるという問題がある。However, the conventionally proposed magnetic field imaging apparatus has a problem in that the resolution in the direction horizontal to the tomographic plane during voltage detection is limited by the width of the coil 93 in the height direction. That is, as shown in the simple model in FIG. 6, in order to accurately detect the horizontal magnetic flux distribution shown by the dotted line, it is necessary to reduce the height (detection width) h of the detection coil 93. As the height of the detection coil 93 is reduced, the induced voltage becomes smaller and the noise component remains unchanged, resulting in a problem of lower detection sensitivity and limited resolution.
本発明の目的は前記従来の磁界の映像化装置における課
題を解消し、コイルの検出感度を下げることなく、水平
方向の磁束分布の検出分解能を向上させることができる
磁界の映像化装置を捷供することにある。An object of the present invention is to provide a magnetic field imaging device that can solve the problems of the conventional magnetic field imaging device and improve the detection resolution of horizontal magnetic flux distribution without lowering the detection sensitivity of the coil. There is a particular thing.
前記目的を達成する本発明の磁界の映像化装置の構成が
第１図に示される。The configuration of a magnetic field imaging apparatus according to the present invention that achieves the above object is shown in FIG.
第１図（ａ）は磁界発生源１により発生した磁界領域の
ある断層面の磁束分布の映像化を行う本発明の第１の形
態の装置の構成を示している。第１の線状導体２は、映
像化を行う断層面に対して垂直で高さ方向に平行な２辺
２ａ、 ２ｂを備えており、第２の線状導体３は、映像
化を行う断層面に対して垂直で高さ方向に平行な２辺３
ａ、 ３ｂを備え、その一方の辺３ａが第１の線状導体
２の一方の辺２ａと同じ高さに隣接して設けられ、他方
の辺３ｂが第１の線状導体２の他方の辺２ｂと異なる高
さにある。電圧検出手段４は、２組の線状導体２，３に
誘起される電磁誘導電圧を検出し、差分演算手段５は、
第１と第２の線状導体２，３に発生する電磁誘導電圧の
差分を演算する。また、移動手段６は、磁界発生源１と
線状導体２，３を相対的に一定速度で移動させると共に
、両者の相対的な移動方向を変更する。そして、映像変
換手段７は、得られた検出値にコンピュータ断層映像手
法を適用して、磁束分布を二次元映像に変換する。FIG. 1(a) shows the configuration of a device according to a first embodiment of the present invention that visualizes the magnetic flux distribution on a certain cross-sectional plane in a magnetic field region generated by a magnetic field generation source 1. The first linear conductor 2 has two sides 2a and 2b that are perpendicular to the tomographic plane to be visualized and parallel to the height direction, and the second linear conductor 3 has two sides 2a and 2b that are perpendicular to the tomographic plane to be visualized and parallel to the height direction. 2 sides perpendicular to the surface and parallel to the height direction 3
a, 3b, one side 3a of which is provided adjacent to and at the same height as one side 2a of the first linear conductor 2, and the other side 3b of which is adjacent to the other side 2a of the first linear conductor 2. It is at a different height from side 2b. The voltage detection means 4 detects the electromagnetic induction voltage induced in the two sets of linear conductors 2 and 3, and the difference calculation means 5
The difference between the electromagnetic induction voltages generated in the first and second linear conductors 2 and 3 is calculated. Moreover, the moving means 6 moves the magnetic field generation source 1 and the linear conductors 2 and 3 relatively at a constant speed, and changes the relative moving direction of both. Then, the image converting means 7 converts the magnetic flux distribution into a two-dimensional image by applying a computerized tomographic image method to the obtained detected values.
第１図（ｂ）は磁界発生源１により発生した磁界領域の
ある断層面の磁束分布の映像化を行う本発明の第２の形
態の装置の構成を示している。この形態の磁界の映像化
装置が第１の形態と異なる点は、映像変換手段７が、電
圧検出手段４から得られた２組の線状導体２．３に誘起
される電磁誘導電圧の検出値にコンピュータ断層映像手
法を適用して、個々の磁束分布をまず二次元映像に変換
し、次いで差分演算手段５が二次元映像に変換された個
々の磁束分布の差分を演算して、線状導体２，３の重な
らない部分の磁束分布の二次元映像を得ることにある。FIG. 1(b) shows the configuration of an apparatus according to a second embodiment of the present invention, which visualizes the magnetic flux distribution on a certain tomographic plane in a magnetic field region generated by the magnetic field generation source 1. This form of magnetic field imaging device is different from the first form in that the image conversion means 7 detects electromagnetic induced voltages induced in the two sets of linear conductors 2.3 obtained from the voltage detection means 4. By applying a computerized tomographic imaging method to the values, each magnetic flux distribution is first converted into a two-dimensional image, and then the difference calculation means 5 calculates the difference between the individual magnetic flux distributions converted into two-dimensional images, and a linear The objective is to obtain a two-dimensional image of the magnetic flux distribution in the non-overlapping portion of the conductors 2 and 3.
本発明の磁界の映像化装置によれば、第１の線状導体と
第２の線状導体の重なり合わない部分の磁束分布が、第
１の線状導体の検出値と、第２の線状導体の検出値の差
分として求められる。この結果、２つの線状導体の高さ
の差が実効検出値となるため、線状導体の重なり合わな
い領域の磁束分布が、雑音成分が除かれて分解能良く正
確に検出される。According to the magnetic field imaging device of the present invention, the magnetic flux distribution in the non-overlapping portion of the first linear conductor and the second linear conductor is determined by the detected value of the first linear conductor and the detected value of the second linear conductor. It is obtained as the difference between the detected values of the shaped conductor. As a result, the difference in height between the two linear conductors becomes the effective detection value, so that the magnetic flux distribution in the non-overlapping region of the linear conductors is accurately detected with good resolution, with noise components removed.
以下添付図面を用いて本発明の実施例を詳細に説明する
。Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
第２図は本発明の一実施例の構成を示すものである。図
において２０は線状導体であり、この実施例では映像化
を行う断層面（測定面）に垂直で高さの大きいコイル２
１と高さの小さいコイル２２とを近接して配置している
。具体的には第３図に示すように、コイル２１の高さｈ
＋＝１０如、コイル２２の高さｈ２−８ＩＩｍのように
構成し、コイル２１とコイル２２の上側の辺の磁界発佳
源２３からの高さを一致させる。FIG. 2 shows the configuration of an embodiment of the present invention. In the figure, 20 is a linear conductor, and in this example, the coil 2 is perpendicular to the tomographic plane (measurement plane) on which imaging is performed and has a large height.
1 and a coil 22 having a small height are arranged close to each other. Specifically, as shown in FIG. 3, the height h of the coil 21
+=10, the height of the coil 22 is h2-8IIm, and the heights of the upper sides of the coils 21 and 22 from the magnetic field source 23 are made to match.
この２ｍのコイル２Ｌ ２２のそれぞれの端子に発生す
る電圧は、それぞれ対応するアンプ２６．２７において
増幅し、Ａ／Ｄ変換器２８．２９によってディジタル値
に変換した後にコンピュータ３０に入力して、各コイル
２１．２２における検出値を読み取るようにする。また
、磁界発生源２３の下部には回転ステージ２４と直進ス
テージ２５を設けておき、この実施例では磁界発生源２
３側が線状導体２０に対して移動するように構成する。The voltage generated at each terminal of this 2m long coil 2L 22 is amplified by the corresponding amplifier 26, 27, converted into a digital value by the A/D converter 28, 29, and then input to the computer 30. The detected values at the coils 21 and 22 are read. Further, a rotating stage 24 and a linear stage 25 are provided below the magnetic field generating source 23, and in this embodiment, the magnetic field generating source 23
The third side is configured to move relative to the linear conductor 20.
そして、測定時にはまず回転ステージ２４を回転させず
に、直進ステージ２５により磁界発生源２３を線状導体
２０に対して相対移動させ、このときコイル２Ｌ ２２
にそれぞれ発生する電磁誘導電圧をアンプ２６．２７で
増幅して、Ａ／Ｄ変換器２８．２９でディジタル値に変
換し、コンピュータ３０に逐次読み取らせる。Then, during measurement, first, without rotating the rotary stage 24, the magnetic field generation source 23 is moved relative to the linear conductor 20 by the linear stage 25, and at this time, the coil 2L 22
The electromagnetic induction voltages generated respectively are amplified by amplifiers 26 and 27, converted into digital values by A/D converters 28 and 29, and read out sequentially by a computer 30.
ここで、コンピュータ３０はコイル２１．２２に発生す
る電磁誘導電圧の差分■を演算する。この差分■の特性
は第３図に示すコイル２１とコイル２２との高さの差ｄ
の部分のコイルで読み取られた磁界分布に相当する。即
ち、高さｄ＝２茸の高さのコイルで検出した場合と実効
的に同等の磁束分布を得ることができる。Here, the computer 30 calculates the difference (2) between the electromagnetic induction voltages generated in the coils 21 and 22. The characteristic of this difference ■ is the height difference d between the coil 21 and the coil 22 shown in FIG.
This corresponds to the magnetic field distribution read by the coil in the area. That is, it is possible to obtain a magnetic flux distribution that is effectively equivalent to that detected by a coil having a height of d=2 mushrooms.
なお、各々のコイル２１．２２の検出電圧の差分演算は
、コンピュータ３０に取り込む前に処理しても、また、
コンピュータ３０に取り込んでから処理しても構わない
。Note that the difference calculation of the detected voltages of the respective coils 21 and 22 may be performed before being input into the computer 30, or
It is also possible to process the data after importing it into the computer 30.
このようにして、直進ステージ２５の動作を緋了すると
、回転ステージ２４によって磁界発生源２３を所定角度
回転させ、直線ステージ２５による動作を再び行ってコ
イル２１．２２にそれぞれ発生する電磁誘導電圧の差分
をコンピュータ３０に読み取らせる。In this way, when the operation of the linear stage 25 is completed, the magnetic field generation source 23 is rotated by a predetermined angle by the rotary stage 24, and the operation by the linear stage 25 is performed again to reduce the electromagnetic induction voltage generated in the coils 21 and 22. The computer 30 is made to read the difference.
以上の説明と同様の検出は、１８０°もしくは３６０゜
に渡って行ない、検出電圧にＣＴ （コンピュータ断層
映像）手法を適用して磁界発生源の磁束分布を映像化す
る。Detection similar to the above description is performed over 180° or 360°, and the magnetic flux distribution of the magnetic field source is visualized by applying a CT (computed tomography) technique to the detection voltage.
以上のようムこして、２つのコイルの高さ２１．２２が
大きい場合でも、その高さの差ｄ＝ｈ、−ｈ２の高さの
小さいコイルを使用したように、磁界の分布状態を分解
能良く、かつ正確に検出することができる。また、両コ
イル２Ｌ ２２の検出値の差分をとるので、コモンノイ
ズが除去されることになり、Ｓ／Ｎ比の良い磁界分布が
得られる。As described above, even if the height 21.22 of the two coils is large, the distribution state of the magnetic field can be resolved as if the height difference d=h, -h2 was used and a coil with a smaller height was used. It can be detected well and accurately. Further, since the difference between the detected values of both coils 2L 22 is taken, common noise is removed, and a magnetic field distribution with a good S/N ratio can be obtained.
以上説明したように、本発明の磁界の映像化装置によれ
ば、コイルの検出感度を下げることなく２つのコイルの
高さの差まで水平方向の磁束分布の検出分解能を向上さ
せることができるという効果がある。As explained above, according to the magnetic field imaging device of the present invention, it is possible to improve the detection resolution of horizontal magnetic flux distribution up to the difference in height between two coils without reducing the detection sensitivity of the coils. effective.
第１図（ａ）は本発明の磁界の映像化装置の第１の形態
の構成を示す原理図、
第１図（ｂ）は本発明の磁界の映像化装置の第２の形態
の構成を示す原理図、
第２図は本発明の磁界の映像化装置の一実施例の構成を
示す構成図、
第３図は第２図の実施例の線状導体の部分拡大図、
第４図は磁界の映像化の原理を説明する説明図、第５図
は従来の磁界の映像化装置の構成を示す構成図、
第６図は第５図の線状導体の部分拡大図である。
２０・・・線状導体、
２Ｌ ２２・・・コイル、
２３・・・磁界発生源、
２４・・・回転ステージ、
２５・・・直進ステージ、
２６、２７・・・アンプ、
２８、２９・・・Ａ／Ｄ変換器、
３０・・・コンピュータ、FIG. 1(a) is a principle diagram showing the configuration of the first form of the magnetic field imaging device of the present invention, and FIG. 1(b) is a diagram showing the configuration of the second form of the magnetic field imaging device of the present invention. FIG. 2 is a configuration diagram showing the configuration of an embodiment of the magnetic field imaging device of the present invention, FIG. 3 is a partially enlarged view of the linear conductor of the embodiment of FIG. 2, and FIG. FIG. 5 is a diagram illustrating the principle of imaging a magnetic field. FIG. 5 is a block diagram showing the configuration of a conventional magnetic field imaging device. FIG. 6 is a partially enlarged view of the linear conductor shown in FIG. 5. 20... Linear conductor, 2L 22... Coil, 23... Magnetic field generation source, 24... Rotating stage, 25... Linear stage, 26, 27... Amplifier, 28, 29...・A/D converter, 30...computer,
Claims (1)
層面の磁束分布の映像化装置であって、映像化を行う断
層面に対して垂直で高さ方向に平行な２辺（２ａ、２ｂ
）を備えた第１の線状導体（２）と、映像化を行う断層
面に対して垂直で高さ方向に平行な２辺（３ａ、３ｂ）
を備え、その一方の辺（３ａ）が第１の線状導体（２）
の一方の辺（２ａ）と同じ高さに隣接して設けられ、他
方の辺（３ｂ）が第１の線状導体（２）の他方の辺（２
ｂ）と異なる高さにある第２の線状導体（３）と、 ２組の線状導体（２、３）に誘起される電磁誘導電圧を
検出する電圧検出手段（４）と、 第１と第２の線状導体（２、３）に発生する電磁誘導電
圧の差分を演算する差分演算手段（５）と、前記磁界発
生源（１）と線状導体（２、３）を相対的に一定速度で
移動させると共に、両者の相対的な移動方向を変更可能
な移動手段（６）と、 得られた検出値にコンピュータ断層映像手法を適用して
、前記磁束分布を二次元映像に変換する映像変換手段（
７）とを備えることを特徴とする磁界の映像化装置。 ２、前記映像変換手段（７）が、前記電圧検出手段（４
）から得られた２組の線状導体（２、３）に誘起される
電磁誘導電圧の検出値に、コンピュータ断層映像手法を
適用して個々の磁束分布を二次元映像に変換し、 前記差分演算手段（５）が二次元映像に変換された個々
の磁束分布の差分を演算して、線状導体（２、３）の重
ならない部分の磁束分布の二次元映像を得ることを特徴
とする請求項１に記載の磁界の映像化装置。[Claims] 1. A device for imaging the magnetic flux distribution of a tomographic plane in which a magnetic field region is generated by a magnetic field generation source (1), which is perpendicular to the tomographic plane to be visualized and parallel to the height direction. 2 sides (2a, 2b
) and two sides (3a, 3b) perpendicular to the tomographic plane to be imaged and parallel to the height direction.
, one side (3a) of which is the first linear conductor (2)
is provided adjacent to one side (2a) of the first linear conductor (2), and the other side (3b) is adjacent to the other side (2a) of the first linear conductor (2).
a second linear conductor (3) located at a different height from the second linear conductor (3); a voltage detection means (4) for detecting electromagnetic induction voltage induced in the two sets of linear conductors (2, 3); and a difference calculation means (5) for calculating the difference between the electromagnetic induction voltages generated in the second linear conductor (2, 3), and the magnetic field generation source (1) and the linear conductor (2, 3) relative to each other. a moving means (6) capable of moving the magnetic flux distribution at a constant speed and changing the relative movement direction of the two, and applying a computer tomography imaging method to the obtained detected values to convert the magnetic flux distribution into a two-dimensional image. video conversion means (
7) A magnetic field imaging device comprising: 2. The video converting means (7) is connected to the voltage detecting means (4).
) to the detected values of the electromagnetic induction voltage induced in the two sets of linear conductors (2, 3), applying a computerized tomographic imaging method to convert each magnetic flux distribution into a two-dimensional image, and calculating the difference between the two. The calculation means (5) calculates the difference between the individual magnetic flux distributions converted into two-dimensional images to obtain a two-dimensional image of the magnetic flux distribution in non-overlapping parts of the linear conductors (2, 3). The magnetic field imaging device according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20915490A JPH0493783A (en) | 1990-08-09 | 1990-08-09 | Imaging device of magnetic field |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20915490A JPH0493783A (en) | 1990-08-09 | 1990-08-09 | Imaging device of magnetic field |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0493783A true JPH0493783A (en) | 1992-03-26 |
Family
ID=16568212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20915490A Pending JPH0493783A (en) | 1990-08-09 | 1990-08-09 | Imaging device of magnetic field |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0493783A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8125220B2 (en) | 2005-12-22 | 2012-02-28 | Koninklijke Philips Electronics N.V. | Magnetic induction tomography system and method |
| EP2544016A4 (en) * | 2010-03-01 | 2015-09-30 | Nat Univ Corp Univ Kobe | Potential obtaining device, magnetic field microscope, inspection device and method of obtaining potential |
-
1990
- 1990-08-09 JP JP20915490A patent/JPH0493783A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8125220B2 (en) | 2005-12-22 | 2012-02-28 | Koninklijke Philips Electronics N.V. | Magnetic induction tomography system and method |
| EP2544016A4 (en) * | 2010-03-01 | 2015-09-30 | Nat Univ Corp Univ Kobe | Potential obtaining device, magnetic field microscope, inspection device and method of obtaining potential |
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