JPH0475952U - - Google Patents
Info
- Publication number
- JPH0475952U JPH0475952U JP11993590U JP11993590U JPH0475952U JP H0475952 U JPH0475952 U JP H0475952U JP 11993590 U JP11993590 U JP 11993590U JP 11993590 U JP11993590 U JP 11993590U JP H0475952 U JPH0475952 U JP H0475952U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- sample
- brought
- stage
- optical means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012360 testing method Methods 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims 4
- 230000003287 optical effect Effects 0.000 claims 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000003384 imaging method Methods 0.000 claims 1
- 238000012544 monitoring process Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Description
第１図はこの考案の一実施例の主要部の斜視図
、第２図はスクラツチ試験で得られた検出電圧の
一例の略線図、第３図はこの考案の一実施例の電
気的構成の概略を示すブロツク図である。
図面における主要な符号の説明、１……スクラ
ツチ試験装置の本体の一部、３……カートリツジ
、５……ステージ、６……試料、７……フアイバ
ースコープ、１０……取付け自在架台、２３……
ＣＣＤイメージヤ、２４……ＣＲＴモニタ。
Fig. 1 is a perspective view of the main parts of an embodiment of this invention, Fig. 2 is a schematic diagram of an example of a detected voltage obtained in a scratch test, and Fig. 3 is an electrical configuration of an embodiment of this invention. FIG. Explanation of main symbols in the drawings: 1... Part of the main body of the scratch test device, 3... Cartridge, 5... Stage, 6... Sample, 7... Fiberscope, 10... Mountable stand, 23... …
CCD imager, 24...CRT monitor.
Claims (1)
ージ上に固定され、上記薄膜の表面にセンサの先
端が荷重がかけられた状態で接触され、上記薄膜
の密着度を試験するようにしたスクラツチ試験装
置において、 上記ステージ上の上記試料の一部を拡大する光
学手段と、 上記光学手段により拡大された像を撮像する手
段と、 上記撮像手段の出力信号をモニタする手段と を設けたことを特徴とする被膜のスクラツチ試験
装置。[Claims for Utility Model Registration] A sample having a thin film adhered to a substrate is fixed on a movable stage, and the tip of the sensor is brought into contact with the surface of the thin film under a load, and the thin film is brought into close contact with the surface of the thin film. A scratch test device configured to test the degree of the specimen, comprising: an optical means for enlarging a part of the sample on the stage; a means for capturing an image enlarged by the optical means; and an output signal of the imaging means for monitoring. What is claimed is: 1. A coating scratch testing device, characterized in that it is provided with means for:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11993590U JPH0475952U (en) | 1990-11-16 | 1990-11-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11993590U JPH0475952U (en) | 1990-11-16 | 1990-11-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0475952U true JPH0475952U (en) | 1992-07-02 |
Family
ID=31867865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11993590U Pending JPH0475952U (en) | 1990-11-16 | 1990-11-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0475952U (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60196644A (en) * | 1984-03-21 | 1985-10-05 | Toshiba Corp | Adhesion evaluating method |
| JPS63238448A (en) * | 1987-03-27 | 1988-10-04 | Hitachi Ltd | Pellicle evaluating apparatus |
| JPS64445A (en) * | 1987-03-16 | 1989-01-05 | Resuka:Kk | Apparatus for testing adhesion of film |
| JPH02236142A (en) * | 1989-03-08 | 1990-09-19 | Nec Corp | Adhesion strength measuring apparatus |
-
1990
- 1990-11-16 JP JP11993590U patent/JPH0475952U/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60196644A (en) * | 1984-03-21 | 1985-10-05 | Toshiba Corp | Adhesion evaluating method |
| JPS64445A (en) * | 1987-03-16 | 1989-01-05 | Resuka:Kk | Apparatus for testing adhesion of film |
| JPS63238448A (en) * | 1987-03-27 | 1988-10-04 | Hitachi Ltd | Pellicle evaluating apparatus |
| JPH02236142A (en) * | 1989-03-08 | 1990-09-19 | Nec Corp | Adhesion strength measuring apparatus |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6251070B1 (en) | Device and a method for measuring skin parameters | |
| JPH0475952U (en) | ||
| JPS63222206A (en) | Image processor for measuring structure of optical fiber | |
| JPH0679327B2 (en) | Cylindrical surface imager | |
| JPH08889U (en) | Strength measuring device for compression molding materials | |
| JP3217434B2 (en) | Concentricity measuring device for cylindrical work | |
| WO2001004653A8 (en) | Method and apparatus for sub-micron imaging and probing on probe station | |
| JP3064234B2 (en) | Camera stand | |
| JPH037257U (en) | ||
| JPH0357688U (en) | ||
| JPH0360055U (en) | ||
| JPS61153022U (en) | ||
| JPH0463010U (en) | ||
| JPH0445907U (en) | ||
| JPH0467881U (en) | ||
| JPH02113108U (en) | ||
| JPS6415952U (en) | ||
| JPH0257688U (en) | ||
| JPS6021911U (en) | Surface roughness measuring device | |
| JPS63111604U (en) | ||
| JPH02146303U (en) | ||
| JPH0471161U (en) | ||
| JPH01163855U (en) | ||
| JPS6348108U (en) | ||
| JPS63137846U (en) |