JPH0461306A - Magnetic alloy film - Google Patents
Magnetic alloy filmInfo
- Publication number
- JPH0461306A JPH0461306A JP2173013A JP17301390A JPH0461306A JP H0461306 A JPH0461306 A JP H0461306A JP 2173013 A JP2173013 A JP 2173013A JP 17301390 A JP17301390 A JP 17301390A JP H0461306 A JPH0461306 A JP H0461306A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- alloy film
- magnetic alloy
- metal
- oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910001004 magnetic alloy Inorganic materials 0.000 title claims abstract description 25
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 20
- 239000002184 metal Substances 0.000 claims abstract description 18
- 229910052751 metal Inorganic materials 0.000 claims abstract description 18
- 229910052742 iron Inorganic materials 0.000 claims abstract description 10
- 150000002739 metals Chemical class 0.000 claims abstract description 6
- 229910052752 metalloid Inorganic materials 0.000 claims description 10
- 150000002738 metalloids Chemical class 0.000 claims description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 11
- 239000001301 oxygen Substances 0.000 abstract description 11
- 229910052760 oxygen Inorganic materials 0.000 abstract description 11
- 239000000203 mixture Substances 0.000 abstract description 3
- 150000004767 nitrides Chemical class 0.000 abstract description 2
- 229920006395 saturated elastomer Polymers 0.000 abstract 1
- 238000000926 separation method Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 17
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
- 230000004907 flux Effects 0.000 description 7
- 229910045601 alloy Inorganic materials 0.000 description 6
- 239000000956 alloy Substances 0.000 description 6
- 229910052757 nitrogen Inorganic materials 0.000 description 6
- 230000000694 effects Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 229910001199 N alloy Inorganic materials 0.000 description 2
- 229910001362 Ta alloys Inorganic materials 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910000889 permalloy Inorganic materials 0.000 description 2
- 229910000979 O alloy Inorganic materials 0.000 description 1
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 1
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 229910001337 iron nitride Inorganic materials 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
- H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
- H01F10/18—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being compounds
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、特に高密度磁気記録に適する磁気ヘッド等の
磁気デバイス用磁性合金膜に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a magnetic alloy film for a magnetic device such as a magnetic head, which is particularly suitable for high-density magnetic recording.
（従来の技術）
近年、磁気記録の高密度化や広帯域化の必要性が高まり
、磁気記録媒体に高い抗磁力を有する磁性材料を使用し
て記録トラック幅を狭くすることにより、高密度磁気記
録再生を実現している。そして、この高い抗磁力をもつ
磁気記録媒体に記録再生するするための磁気ヘッド材料
として、飽和磁束密度Ｂｓの高い磁性合金が必要とされ
ており、センダスト合金や非晶質合金等をコアの一部ま
たは全部に使用した磁気ヘッドが提案されている。(Prior art) In recent years, the need for higher density and wider band magnetic recording has increased, and high-density magnetic recording has been achieved by narrowing the recording track width by using magnetic materials with high coercive force in magnetic recording media. Achieving regeneration. Magnetic alloys with high saturation magnetic flux density Bs are required as magnetic head materials for recording and reproducing on magnetic recording media with high coercive force. A magnetic head that uses part or all of the magnetic head has been proposed.
然しなから、磁気記録媒体の高抗磁力化が一段と進み、
磁気記録媒体の抗磁力が２００００ ｅ以上になるとセ
ンダスト合金や非晶質合金を使用した磁気ヘッドでは良
好な磁気記録再生が困難になる。However, as the coercive force of magnetic recording media continues to increase,
When the coercive force of the magnetic recording medium exceeds 20,000 e, it becomes difficult to perform good magnetic recording and reproduction with a magnetic head using Sendust alloy or an amorphous alloy.
又、磁気記録媒体の長平方向ではなく、厚さ方向に磁化
して記録する垂直磁化記録方式も提案されているが、こ
の垂直磁化記録を良好に行うには、磁気ヘッドの主磁極
の先端部の厚さを０．５μｍ以下にする必要があり、比
較的抗磁力の低い磁気記録媒体に記録するにも、高い飽
和磁束密度を持つ磁気ヘッド用磁性合金が必要になる。Also, a perpendicular magnetization recording method has been proposed in which the magnetic recording medium is magnetized in the thickness direction rather than in the longitudinal direction, but in order to perform this perpendicular magnetization effectively, it is necessary to The thickness of the magnetic head must be 0.5 μm or less, and a magnetic alloy for a magnetic head with a high saturation magnetic flux density is required even for recording on a magnetic recording medium with a relatively low coercive force.
そして、センダスト合金や非晶質合金よりも飽和磁束密
度Ｂｓの高い磁気ヘッド用合金として、窒化鉄、Ｆｅ−
３ｆ系合金等の鉄を主成分とした磁性合金が知られてい
る。Iron nitride, Fe-
Magnetic alloys containing iron as a main component, such as 3f alloys, are known.
（発明が解決しようとする課題）
ところが、従来より知られている、高飽和磁束密度を有
する磁性合金は、保磁力Ｈｃが大きく、そのままでは磁
気ヘッドの材料としては不十分であるので、センダスト
合金やパーマロイ等の保磁力の小さい磁性材料を層間膜
として使用した多層構造の磁気ヘッドが提案されている
。(Problems to be Solved by the Invention) However, conventionally known magnetic alloys with high saturation magnetic flux density have a large coercive force Hc and are insufficient as materials for magnetic heads as they are. A magnetic head with a multilayer structure using a magnetic material with a low coercive force such as Permalloy or Permalloy as an interlayer film has been proposed.
然しなから、多層構造にするには工数やコストがかかり
、信頼性を保つのも難しいという問題点があった。特に
、数μｍ以上の膜厚にする為には場合によっては１００
層以上の多層構造にする必要があり、使用範囲も限られ
ていた。However, creating a multilayer structure requires a lot of man-hours and costs, and it is difficult to maintain reliability. In particular, in order to obtain a film thickness of several μm or more, it may be necessary to
It required a multilayer structure with more than one layer, and its range of use was also limited.
この問題点を解決するために、本発明人等はＦｅ−Ｎ−
０合金によって、１１１層で高Ｂｓ・低Ｈｃの磁性合金
が得られることを提案したが、熱安定性の面から、ガラ
スモールド工程には適さないという問題があった。In order to solve this problem, the present inventors have developed Fe-N-
It was proposed that a magnetic alloy with high Bs and low Hc could be obtained in the 111 layer by using the 0 alloy, but there was a problem that it was not suitable for the glass molding process from the viewpoint of thermal stability.
そこで本発明は多層構造にしなくても高飽和磁束密度を
持ち、保磁力が小さく、熱安定性に優れた磁性合金を提
供することを目的とする。Therefore, an object of the present invention is to provide a magnetic alloy that has a high saturation magnetic flux density without having a multilayer structure, has a small coercive force, and has excellent thermal stability.
（課題を解決するための手段）
本発明は上記の課題を解決するためになされたものであ
り、ＦｅＸＮ、０□Ｍｖなる組成式で表される磁性合金
膜において、ＭＯ２・Ｍ２Ｏ９等で表されるＭの酸化物
を有する磁性合金膜（但し、Ｍは鉄以外の金属または半
金属の中から選ばれた少なくとも１種類以上の元素）お
よび
ｘＳＹ ％ Ｚ 、Ｖで表される原子％がｌ≦ｙ≦１０
０．１≦２≦１０
０．５≦ｖ≦６
ｘ ＋ｙ ＋ｚ ＋ｖ −１００
である特許請求の範囲第１項記載の磁性合金膜を提供す
るものである。(Means for Solving the Problems) The present invention has been made to solve the above problems, and in a magnetic alloy film represented by a composition formula of FeXN, 0□Mv, A magnetic alloy film having an oxide of M (where M is at least one element selected from metals or metalloids other than iron) and xSY % Z, atomic % represented by V is l≦ The present invention provides a magnetic alloy film according to claim 1, in which y≦10 0.1≦2≦10 0.5≦v≦6 x +y +z +v −100 .
（実施例）
Ｆｅ−Ｎ−０−Ｍ合金膜（Ｍは鉄以外の金属または半金
属の少なくとも１種類以上の元素）を成膜する場合、そ
の成膜条件や熱処理温度によって、各元素の結合状態が
異なり、これによって磁気特性も変化する。(Example) When forming a Fe-N-0-M alloy film (M is at least one element of a metal or metalloid other than iron), the bonding of each element may be affected depending on the film forming conditions and heat treatment temperature. The state is different, and the magnetic properties change accordingly.
第１図は、Ｆｅ−Ｎ−０−Ｔａ合金膜のｘｐｓ（Ｘ線光
電子分光法）によるＴａ４ｆのスペクトルを示したもの
である。FIG. 1 shows the Ta4f spectrum of the Fe-N-0-Ta alloy film measured by xps (X-ray photoelectron spectroscopy).
（ａ）は、０＆Ｉｔｉの金属成分だけが表れており、酸
化物のスペクトルは検出されていない。この時の保磁力
Ｈｅは３０ｅと大きい。これに対し、（ｂ）は、０価の
金属成分の他に■価、■価、７価の酸化物成分が検出さ
れている。この合金膜のＨｃは、０．２０ｅで良好な磁
気特性が得られている。表は、この時のＴａの状態別の
割合を示す。In (a), only the metal components of 0 & Iti appear, and no oxide spectrum is detected. The coercive force He at this time is as large as 30e. On the other hand, in (b), in addition to the zero-valent metal component, oxide components with a valence of 1, 2, and 7 are detected. The Hc of this alloy film was 0.20e, and good magnetic properties were obtained. The table shows the percentage of Ta at this time according to the state.
表
Ｔａ以外の金属または半金属においても略同様の傾向が
得られ、Ｍて示した金属または半金属の酸化物が生成さ
れている時に、良好な軟磁気特性が得られることを本出
願人は、実験により確認している。特に、Ｍで示した鉄
以外の金属または半金属の少なくとも１種類以上の元素
の合計含有量が少ない時は、高温の熱処理において、膜
中の酸素が離脱して磁気特性が劣化する。高温でも良好
な磁気特性を維持するためには、Ｍで示した金属または
半金属が適当な量の酸素と酸化物を形成して酸素の離脱
を抑止することが必要である。また、Ｍで示した鉄以外
の金属または半金属が窒化物を一部生成していても良好
な磁気特性が得られる。The applicant has found that almost the same tendency is obtained for metals or metalloids other than Ta, and that good soft magnetic properties are obtained when oxides of metals or metalloids shown in M are produced. , confirmed by experiment. In particular, when the total content of at least one element of metals or metalloids other than iron, indicated by M, is small, oxygen in the film is removed during high-temperature heat treatment, resulting in deterioration of magnetic properties. In order to maintain good magnetic properties even at high temperatures, it is necessary for the metal or metalloid represented by M to form an oxide with an appropriate amount of oxygen to suppress the release of oxygen. Further, even if a metal or metalloid other than iron, indicated by M, partially forms nitrides, good magnetic properties can be obtained.
第２図は、Ｆｅ−Ｎ合金における窒素含有量と飽和磁束
密度（Ｂｓ）の関係を示したものである。FIG. 2 shows the relationship between nitrogen content and saturation magnetic flux density (Bs) in Fe--N alloys.
この図が示すように、窒素含有量がＩＯ原原子量以下時
、Ｂｓが１５ｋＧ以上の高Ｂｓ磁性合金が得られるもの
である。As shown in this figure, a high Bs magnetic alloy with a Bs of 15 kG or more can be obtained when the nitrogen content is less than the original atomic weight of IO.
同様に、酸素の含有量がＩＯ原原子量以下時にはＢｓの
高い磁性合金が得られる。例えば、特願平１−２５６１
０２に開示されているように、窒素の含有量が１原子％
未満の時は、窒素の顕著な効果が見られない。Similarly, when the oxygen content is less than the original atomic weight of IO, a magnetic alloy with high Bs can be obtained. For example, patent application No. 1-2561
As disclosed in 02, the nitrogen content is 1 at%
When the amount is less than 1, no significant effect of nitrogen is observed.
一方、酸素の含有量が０．１原子％未病の時は、酸素の
顕著な効果が見られず、Ｍで示した金属または半金属の
酸化物も生成されない。また、Ｍの含有量が０．５原子
％未満の時は、例えば、４００ ”Ｃ以上の高温で熱処
理すると磁性合金膜中の酸素が離脱してしまい良好な磁
気特性が得られなくなる。On the other hand, when the oxygen content is 0.1 atomic %, no significant effect of oxygen is observed, and the metal or metalloid oxide indicated by M is not produced. Further, when the M content is less than 0.5 atomic %, oxygen in the magnetic alloy film is separated from the magnetic alloy film when heat treatment is performed at a high temperature of 400''C or higher, making it impossible to obtain good magnetic properties.
言い換えると、Ｍの含有量が０．５原子％未満であると
、高温でも酸素を十分に合金中に捕獲しておくだけの酸
化物を生成することが出来ない。In other words, if the M content is less than 0.5 atomic %, it is not possible to generate enough oxide to trap oxygen in the alloy even at high temperatures.
Ｆｅ−Ｎ−０−Ｍ合金において、Ｍの含有量が６原子％
を越えると、磁気特性の劣化が生じる。In the Fe-N-0-M alloy, the M content is 6 at%
Exceeding this will cause deterioration of magnetic properties.
従って、１〜ＩＯ原子％の窒素と、０．１−１０原子％
の酸素と、０．５〜６原子％の鉄以外の金属、または半
金属の少なくとも１種類上の元素と残部が鉄からなる合
金組成である時、高Ｂｓ・低Ｈｃで熱安定性に優れた磁
性合金膜を得ることができる。Therefore, 1 to IO atomic % nitrogen and 0.1 to 10 atomic %
of oxygen, 0.5 to 6 atom% of at least one element of a metal or metalloid other than iron, and the balance is iron, and has excellent thermal stability with high Bs and low Hc. A magnetic alloy film can be obtained.
（発明の効果）
以上詳述したように、本発明になる磁性合金膜は、高飽
和磁束密度を有し、保磁力が小さく、透磁率が大きく、
更に熱安定性と耐蝕性に優れた磁気ヘッド等の磁気デバ
イス用磁性合金が得られる。(Effects of the Invention) As detailed above, the magnetic alloy film of the present invention has a high saturation magnetic flux density, a small coercive force, a large magnetic permeability,
Furthermore, a magnetic alloy for magnetic devices such as magnetic heads having excellent thermal stability and corrosion resistance can be obtained.
従って、本発明の磁性合金膜を用いれば、高保磁力媒体
への良好な記録再生が行える他、高性能の薄膜磁気ヘッ
ド等を作成することができ、高密度磁気記録再生が実現
できる。Therefore, by using the magnetic alloy film of the present invention, it is possible to perform good recording and reproducing on a high coercive force medium, and also to create a high-performance thin film magnetic head and the like, and realize high-density magnetic recording and reproducing.
第１図は、ｘｐｓｃＸ線光電子分光法）によるＦｅ−Ｎ
−０−Ｔａ合金膜のＴａ４ ｆのスペクトルを示す図、
第２図は、Ｆｅ−Ｎ合金における窒素含有量と飽和磁束
密度（Ｂｓ）の関係を示す図である。
特許出願人 日本ビクター株式会社
代表者 切上 小部
、＃倉イｉ工Ｊｔシ牛１− ｔ−マー）を普合１７ｗキ
ー（ｅＶ）
苓 １ 回
Ａ４金Ｊｆｉ（＆げ）
射２厨Figure 1 shows the Fe-N
A diagram showing the spectrum of Ta4f of a -0-Ta alloy film,
FIG. 2 is a diagram showing the relationship between nitrogen content and saturation magnetic flux density (Bs) in Fe--N alloys. Patent applicant: Japan Victor Co., Ltd. Representative Kirigami Kobe,
Claims (1)
る磁性合金膜において、ＭＯ＿２・Ｍ＿２Ｏ＿５等で表
されるＭの酸化物を有することを特徴とする磁性合金膜
。（但し、Ｍは鉄以外の金属または半金属の中から選ば
れた少なくとも１種類以上の元素） （２）ｘ、ｙ、ｚ、ｖで表される原子％が １≦ｙ≦１０ ０．１≦ｚ≦１０ ０．５≦ｖ≦６ ｘ＋ｙ＋ｚ＋ｖ＝１００ である特許請求の範囲第１項記載の磁性合金膜。[Scope of Claims] (1) A magnetic alloy film represented by the compositional formula Fe_xN_yO_zM_v, characterized in that it contains an oxide of M represented by MO_2, M_2O_5, etc. (However, M is at least one element selected from metals or metalloids other than iron) (2) Atomic % represented by x, y, z, v is 1≦y≦10 0.1 The magnetic alloy film according to claim 1, wherein ≦z≦10 0.5≦v≦6 x+y+z+v=100.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2173013A JPH0461306A (en) | 1990-06-29 | 1990-06-29 | Magnetic alloy film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2173013A JPH0461306A (en) | 1990-06-29 | 1990-06-29 | Magnetic alloy film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0461306A true JPH0461306A (en) | 1992-02-27 |
Family
ID=15952584
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2173013A Pending JPH0461306A (en) | 1990-06-29 | 1990-06-29 | Magnetic alloy film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0461306A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5617275A (en) * | 1994-05-02 | 1997-04-01 | Sanyo Electric Co., Ltd. | Thin film head having a core comprising Fe-N-O in a specific atomic composition ratio |
-
1990
- 1990-06-29 JP JP2173013A patent/JPH0461306A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5617275A (en) * | 1994-05-02 | 1997-04-01 | Sanyo Electric Co., Ltd. | Thin film head having a core comprising Fe-N-O in a specific atomic composition ratio |
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