JPH0460428A - Mechanism for driving relative flat board - Google Patents
Mechanism for driving relative flat boardInfo
- Publication number
- JPH0460428A JPH0460428A JP17160090A JP17160090A JPH0460428A JP H0460428 A JPH0460428 A JP H0460428A JP 17160090 A JP17160090 A JP 17160090A JP 17160090 A JP17160090 A JP 17160090A JP H0460428 A JPH0460428 A JP H0460428A
- Authority
- JP
- Japan
- Prior art keywords
- strain
- voltage
- relative plane
- holding means
- target value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007246 mechanism Effects 0.000 title claims description 11
- 238000006243 chemical reaction Methods 0.000 claims description 9
- 238000010408 sweeping Methods 0.000 abstract description 7
- 230000008878 coupling Effects 0.000 abstract 1
- 238000010168 coupling process Methods 0.000 abstract 1
- 238000005859 coupling reaction Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 10
- 238000006073 displacement reaction Methods 0.000 description 8
- 230000003287 optical effect Effects 0.000 description 7
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Landscapes
- Spectrometry And Color Measurement (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、ファブリベロー型干渉計など移動距離が数μ
ｍの光学的装置、特に相対平面板の駆動機構に関する。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention is applicable to devices with a moving distance of several μm, such as a Fabry-Bello interferometer.
The present invention relates to an optical device of m, in particular to a driving mechanism of a relative plane plate.
（従来技術）
従来この種の駆動８！横として、■相対平面板間の気圧
を変化させることにより、屈折率を変え光路長を変化さ
せるもの、■純機械的に平行移動させ条もの、■相対平
面板自体を傾けるもの、■電歪素子または磁歪素子等に
より電気的に平行移動させるもの、などが用いられ、特
に■の電気的に平行移動させる手法は、ア）高速掃引が
可能、イ）小型化が可能でありスペース長との関係が得
やすい、つ）比較的安定度が高い、工）平行度の調整も
比較的簡単にできる、などの特徴があり、電歪素子等に
よりオープン制御する方法、および静電容量式位置セン
サの出力信号をフィードバックするクローズド制御など
が多用されている。(Prior art) Conventionally, this type of drive 8! Horizontally, ■ those that change the refractive index and change the optical path length by changing the air pressure between the relative plane plates, ■ the ones that move the parallel plane purely mechanically, ■ the ones that tilt the relative plane plates themselves, and ■ the electrostrictive ones. Electrical parallel movement using elements or magnetostrictive elements, etc. are used. In particular, the method (2) of electrically moving parallel movement is a) capable of high-speed sweeping, b) miniaturization is possible, and has a small space length. It has the following characteristics: (1) relatively high stability; and (4) parallelism adjustment is relatively easy. Closed control, which feeds back the output signal of the controller, is often used.
（発明が解決しようとする課題）
上記従来の駆動機構のうち相対平面板間の気圧を変化さ
せ屈折率を変える方法は、気体の調圧装置が大がかりと
なり、また高速で気圧を変化させることが困難なため、
高速掃引が難しい、また、相対平面板自体を傾ける方法
は、駆動方法および支持方法に高度な技術が必要であり
、剛性および固有振動数が低下するため高速掃引が困難
である。(Problems to be Solved by the Invention) Among the conventional drive mechanisms described above, the method of changing the refractive index by changing the air pressure between relative plane plates requires a large-scale gas pressure regulating device, and it is difficult to change the air pressure at high speed. Because it is difficult,
High-speed sweeping is difficult, and the method of tilting the relative plane plate itself requires advanced techniques for driving and supporting methods, and high-speed sweeping is difficult because the rigidity and natural frequency are reduced.
さらに、純機械的に平行移動させる方法は、装置全体が
大型化するとともに精度も比較的低く調整も困難で、光
学的な位置のフィードバックや、高速掃引が不可能であ
る、などの欠点があり、電歪素子等により駆動する方法
が多用されていた。しかしこの方法でも、電歪素子の印
加電圧と変位との関係が直線でなく、また、一定電圧を
印加していても、クリープ現象により変位が変動したり
、素子自身の温度係数が大きい欠点があった。また、静
電容量式位置センサの出力信号をフィードバックする方
法は、センサ自体の直線性、温度係数も低く、特に相対
平面板間の距離が大きい場合には静電容量も小さくなり
、この欠点も大きがった。Furthermore, the method of purely mechanical translation has drawbacks such as the overall size of the device, relatively low precision and difficult adjustment, and the inability to provide optical position feedback or high-speed sweeping. , methods of driving using electrostrictive elements, etc. have been frequently used. However, even with this method, the relationship between the applied voltage and displacement of the electrostrictive element is not linear, and even if a constant voltage is applied, the displacement may fluctuate due to the creep phenomenon, and the temperature coefficient of the element itself is large. there were. In addition, the method of feeding back the output signal of a capacitive position sensor has the disadvantage that the linearity and temperature coefficient of the sensor itself are low, and the capacitance is also small, especially when the distance between relative plane plates is large. It got bigger.
本発明は、上記のような従来技術の欠点を解消するため
に創案されたものであり、小型で高速掃引が可能であり
、しかも制御電圧と移動距離の直線性や温度特性が高く
、高精度な相対平面板の駆動ａｍを提供することを目的
とする。The present invention was devised to eliminate the above-mentioned drawbacks of the conventional technology, and is compact and capable of high-speed sweeping, and has high linearity and temperature characteristics of control voltage and moving distance, and has high precision. It is an object of the present invention to provide a drive am for a relative plane plate.
（課題を解決するための手段）
上記の問題点を解決するために、本発明は二枚の相対平
面板の一方を固定し、他方の相対平面板を法線方向に移
動する駆動８！椙において、上記固定側相対平面板を保
持する保持手段と、上記移動側相対平面板を保持する保
持手段と、上記二つの保持手段を連結する複数の歪み発
生部と、信号印加時に上記二つの保持手段の距離を変え
る方向に伸縮する複数の電気−歪変換素子と、上記歪み
発生部に取付けられ、上記複数の歪み発生部の歪みを検
出する複数の歪みゲージと、上記二つの相対平面板間の
距離を目標値に設定する設定信号を与える設定手段と、
上記歪ゲージの出力信号を上記電気−歪変換素子の制御
信号にフィードバックするフィードバック回路とを設け
た。(Means for Solving the Problems) In order to solve the above problems, the present invention provides a drive 8! that fixes one of two relative plane plates and moves the other relative plane plate in the normal direction. A holding means for holding the fixed side relative flat plate, a holding means for holding the movable side relative flat plate, a plurality of strain generating parts connecting the two holding means, and a a plurality of electro-strain converting elements that expand and contract in a direction that changes the distance of the holding means; a plurality of strain gauges that are attached to the strain generating section to detect strain in the plurality of strain generating sections; and the two relative plane plates. setting means for providing a setting signal for setting the distance between the two to a target value;
A feedback circuit is provided for feeding back the output signal of the strain gauge to the control signal of the electro-strain conversion element.
（作用）
本発明の駆動機構により二つの相対平面板間の距離を目
標値に設定する場合、設定手段により複数の電気−歪変
換素子に信号が印加され、二つの保持手段の距離を変え
る方向に伸縮しようとする。(Function) When setting the distance between two relative plane plates to a target value by the drive mechanism of the present invention, a signal is applied to a plurality of electro-strain conversion elements by the setting means, and a direction in which the distance between the two holding means is changed is applied. Attempts to expand and contract.
この伸縮は歪み発生部により吸収され、歪み発生部に歪
みが生じる。この歪みは複数の歪みゲージにより検出さ
れ、その出力信号が、フィードバック回路により個々の
電気−歪変換素子の印加信号にフィードバックされ、二
つの相対平面板は平行度を保ちつつ、目標値に正確に移
動される。This expansion and contraction is absorbed by the strain generating section, and distortion occurs in the strain generating section. This strain is detected by multiple strain gauges, and the output signal is fed back to the applied signal of each electro-strain conversion element by a feedback circuit, so that the two relative plane plates maintain parallelism and accurately reach the target value. will be moved.
（実施例）
本発明の相対平面板の駆動機構の一実施例を第１図ない
し第３図にて説明する。第１図は相対平面板の駆動機構
本体の縦断面図、第２図はそのＡ−Ａ断面図を表す。(Embodiment) An embodiment of the relative plane plate drive mechanism of the present invention will be described with reference to FIGS. 1 to 3. FIG. 1 is a longitudinal cross-sectional view of the drive mechanism main body of the relative plane plate, and FIG. 2 is a cross-sectional view taken along the line A-A.
第１図において固定側相対平面板５および移動側相対平
面板６は、それぞれホルダ４およびホルダ２に光学的歪
みを生じないよう接着等の適当な方法で固定さており、
ホルダ４およびホルダ２は、各々ねじ１２およびねＬｉ
２によりボディ１に固定されている。ボディ１は同軸な
二つの円管を薄肉な三枚の瓦状の歪発生部１５で連結し
た形状であり、下の円管の上面には、第２図に示すごと
く二枚の等しい形状の扇形スペーサ７が接着されている
。扇形スペーサ７の中央部には正方形の角穴が穿設され
ており、電歪素子８が嵌合されている。In FIG. 1, the fixed relative plane plate 5 and the movable relative plane plate 6 are fixed by an appropriate method such as adhesive so as not to cause optical distortion in the holder 4 and the holder 2, respectively.
Holder 4 and holder 2 each have a screw 12 and a screw Li.
2 is fixed to the body 1. The body 1 has a shape in which two coaxial circular tubes are connected by three thin-walled tile-shaped strain generating parts 15, and the upper surface of the lower circular tube has two equally shaped plates as shown in Fig. 2. A fan-shaped spacer 7 is glued. A square hole is bored in the center of the fan-shaped spacer 7, into which the electrostrictive element 8 is fitted.
電歪索子８の他端は電歪素子８の断面よりやや大きいス
ペーサ９が接着され、設定ねじ１１により電歪素子８の
軸方向に与圧を加えている。歪発生部１５の外面に歪ゲ
ージ１０と熱電対等の温度センサ１４が取付けられてい
る。また、歪発生部１５を保護するために、カバー３が
設けられている。A spacer 9, which is slightly larger than the cross section of the electrostrictive element 8, is bonded to the other end of the electrostrictive cable 8, and pressurization is applied to the electrostrictive element 8 in the axial direction by a setting screw 11. A strain gauge 10 and a temperature sensor 14 such as a thermocouple are attached to the outer surface of the strain generating section 15. Further, a cover 3 is provided to protect the strain generating section 15.
また、第３図に主として一つの歪発生部１５に関する制
御回路の概略を示す、破線で囲まれた部分は設定回路４
０である０本回路の構成と共にその作用について説明す
ると、固定抵抗Ｒ１，Ｒ２゜Ｒ３は歪ゲージ１０と共に
平衡ブリッジを楕成し、可変抵抗ＶＲＩによりあらがし
め零点調整された歪みゲージ１０からの出力信号は増幅
器３ｏにより増幅される。また温度センサ１４からの出
力信号は増幅器２１により増幅される。なお、増幅器２
１の増幅率は可変抵抗ＶＲ２により調節される。Further, FIG. 3 shows an outline of a control circuit mainly related to one distortion generating section 15, and the part surrounded by a broken line is a setting circuit 4.
To explain the structure and operation of the circuit, the fixed resistors R1, R2°R3 form a balanced bridge together with the strain gauge 10, and the resistance from the strain gauge 10 whose zero point is adjusted by the variable resistor VRI is explained. The output signal is amplified by amplifier 3o. Further, the output signal from the temperature sensor 14 is amplified by the amplifier 21. In addition, amplifier 2
The amplification factor of 1 is adjusted by variable resistor VR2.
可変抵抗ＶＲ３により三つの歪発生部１５の変位が同時
に設定されるべく、その設定電圧が増幅器２２を介して
他の二つの歪発生部１５に送られる。In order to simultaneously set the displacements of the three distortion generating sections 15 by the variable resistor VR3, the set voltage is sent to the other two distortion generating sections 15 via the amplifier 22.
可変抵抗ＶＲ４，ＶＲ５，ＶＲ６により個々の歪発生部
の変位が調整されるべく、その設定電圧が増幅器２３．
２４．２５を介してそれぞれ第１、第２、第３の歪発生
部１５の制御回路に送られる。In order to adjust the displacement of each distortion generating section by the variable resistors VR4, VR5, VR6, the set voltage is applied to the amplifier 23.
24 and 25 to the control circuits of the first, second, and third distortion generating sections 15, respectively.
切替えスイッチＳがａの位置の場合、加算器２６は三つ
の歪発生部の変位を同時に設定する可変抵抗ＶＲ３から
の設定電圧と、第１の歪発生部の変位のみを設定する可
変抵抗ＶＲ４からの設定電圧を加算する。比較器２７は
増幅器２０から出力された温度センサ１４からの出力信
号が重畳された変位信号と、加算器２６から出力された
設定信号が比較され、その差出力が増幅器２８に出力さ
れる。増幅器２８は比較器２７からの差出力を、電歪素
子８を駆動するのに十分な電圧に増幅して、電歪素子８
を駆動する。また、本回路は本駆動機楕を透過後の光束
の強度を検出するフォトダイオド２９と発信器３０を有
しており、切替えスイッチＳをＣの位置にすることで、
この光学センサからの出力を設定信号として比較器２７
に入力することもでき、スイッチＳをｂの位置にするこ
とで、上記手動設定信号に発信器３０からの交番信号を
重畳することにより高速掃引を行うこともできる。When the selector switch S is in position a, the adder 26 receives the set voltage from the variable resistor VR3 that simultaneously sets the displacement of the three distortion generating sections, and the set voltage from the variable resistor VR4 that sets only the displacement of the first distortion generating section. Add the set voltage of The comparator 27 compares the displacement signal outputted from the amplifier 20 on which the output signal from the temperature sensor 14 is superimposed, and the setting signal outputted from the adder 26, and outputs the difference output to the amplifier 28. The amplifier 28 amplifies the difference output from the comparator 27 to a voltage sufficient to drive the electrostrictive element 8.
to drive. In addition, this circuit has a photodiode 29 and a transmitter 30 that detect the intensity of the luminous flux after passing through the main driver ellipse, and by setting the changeover switch S to the position C,
A comparator 27 uses the output from this optical sensor as a setting signal.
By setting the switch S to position b, a high-speed sweep can be performed by superimposing an alternating signal from the transmitter 30 on the manual setting signal.
次に本発明の駆動機構の動作を説明すると、２枚の相対
平面板間の距離をある目標値に設定する場合、まず可変
抵抗ＶＲ３の抵抗値を変化させ、その目標値に対応する
設定電圧に設定する。この設定電圧は増幅器２２により
増幅され、３つの歪発生部１５の制御回路の加算器２６
へ出力され、各歪発生部の比較器２７の入力端子の一方
に入力される。この時各々の歪みゲージ１０からの歪信
号および温度センサ１４からの温度信号が比較器２７の
入力端子の他方に入力される。これより両端子間の電位
差が駆動増幅機２８により増幅され、電歪素子８に駆動
電圧が印加される。この時、電歪素子８はほぼ電圧に比
例してのびる方向に力を発生する。この力により各歪発
生部１５は伸ばされて、その伸びに比例した歪が発生す
る。この歪を各歪発生部１５に取付けられた歪みゲージ
１０で検出し、本制御回路にフィードバックする。この
ようにして、比較器２７の入力端子間の電位差が零にな
るまで電歪素子８に電圧が印加され、移動側相対平面板
が法線方向に移動する。Next, to explain the operation of the drive mechanism of the present invention, when setting the distance between two relative plane plates to a certain target value, first change the resistance value of the variable resistor VR3, and then apply the set voltage corresponding to the target value. Set to . This set voltage is amplified by the amplifier 22, and the adder 26 of the control circuit of the three distortion generating sections 15
and is input to one of the input terminals of the comparator 27 of each distortion generating section. At this time, the strain signal from each strain gauge 10 and the temperature signal from the temperature sensor 14 are input to the other input terminal of the comparator 27. Thereby, the potential difference between both terminals is amplified by the drive amplifier 28, and a drive voltage is applied to the electrostrictive element 8. At this time, the electrostrictive element 8 generates a force in an extending direction substantially in proportion to the voltage. Each strain generating section 15 is stretched by this force, and a strain proportional to the stretch is generated. This strain is detected by strain gauges 10 attached to each strain generating section 15 and fed back to the main control circuit. In this way, a voltage is applied to the electrostrictive element 8 until the potential difference between the input terminals of the comparator 27 becomes zero, and the moving side relative plane plate moves in the normal direction.
ところが、各歪発生部１５の電歪素子８、回路素子、歪
ゲージ１０、温度センサ１４の特性は異なるので、２枚
の相対平面板が平行を保ったまま移動するとは限らない
、その場合、本エタロン駆動ｖ１楕を透過後の光路を検
出しながら可変抵抗ＶＲ４，ＶＲ５，ＶＲ６の抵抗値を
変化させ、各歪発生部１５の加算器２６に入力される設
定電圧を変化させる。これにより各歪発生部１５を単独
に移動させることができ、２枚の相対平面板を平行に保
つことができる。However, since the characteristics of the electrostrictive element 8, circuit element, strain gauge 10, and temperature sensor 14 of each strain generating section 15 are different, the two relative plane plates do not necessarily move while remaining parallel. While detecting the optical path after passing through the etalon drive v1 ellipse, the resistance values of the variable resistors VR4, VR5, and VR6 are changed, and the set voltage input to the adder 26 of each distortion generating section 15 is changed. As a result, each strain generating section 15 can be moved independently, and the two relative plane plates can be kept parallel.
なお、設定回路４０は第３図の回路に限らず、第４図に
示す実施例のようにフォトダイオード２９および発振器
３１からの信号を入力した場合の相対平面板間の平行度
を保つために、個別に電圧調整部ＶＲ７およびＶＨ２を
設けてもよい、また、第５図に示す実施例のように各歪
発生部の電圧調整部を歪ゲージの信号ラインに入れても
よい、さらに、最初の実施例およびその他の実施例の組
合わせも可能である。また、上記実施例ではアナログ素
子を用いて回路を制御したが、ＣＰＵ等を用いてディジ
タル的に制御してもよい、また、上記実施例では電気−
歪変換素子として電歪素子を用いた場合を説明したが、
磁歪素子を用いることもできる。Note that the setting circuit 40 is not limited to the circuit shown in FIG. 3, but can also be used to maintain parallelism between the relative plane plates when signals from the photodiode 29 and the oscillator 31 are inputted, as in the embodiment shown in FIG. , the voltage regulators VR7 and VH2 may be provided individually, or the voltage regulators of each strain generator may be connected to the signal line of the strain gauge as in the embodiment shown in FIG. Combinations of this embodiment and other embodiments are also possible. Further, in the above embodiment, the circuit was controlled using an analog element, but it may also be controlled digitally using a CPU or the like.
Although we have explained the case where an electrostrictive element is used as a strain conversion element,
A magnetostrictive element can also be used.
なお本実施例では、相対平面板の支持部材の温度信号を
フィードバックしているので温度特性がさらに向上し、
光学的センサよりの信号を設定信号とすることにより、
さらに高精度な位置制御が可能である。In addition, in this example, since the temperature signal of the support member of the relative plane plate is fed back, the temperature characteristics are further improved.
By using the signal from the optical sensor as the setting signal,
Furthermore, highly accurate position control is possible.
また上記の実施例は、電歪素子に電圧を印加したときに
電歪素子が伸び、２枚の相対平面板の間隔が大きくなる
構造であるが、逆に電歪素子に電圧を印加したときに、
２枚の相対平面板の間隔が小さくなる構造にしてもよい
。Furthermore, in the above embodiment, when a voltage is applied to the electrostrictive element, the electrostrictive element expands, and the gap between the two relative plane plates becomes large.However, conversely, when a voltage is applied to the electrostrictive element, To,
A structure may be adopted in which the distance between the two relative plane plates is reduced.
（発明の効果）
本発明のエタロン駆動機構によれば次のような効果を奏
する。(Effects of the Invention) The etalon drive mechanism of the present invention provides the following effects.
イ）相対平面板の変位を歪みゲージで検出するため、感
度、直線性、温度特性が向上する。b) Sensitivity, linearity, and temperature characteristics are improved because the displacement of the relative plane plate is detected using a strain gauge.
口）電気−歪変換素子を固定し、歪発生部に生じる歪み
を検出するため、印加電圧−歪の非直線性、クリーブ現
象、温度係数の悪さなど悪影響がなくなる。Since the electro-strain conversion element is fixed and the strain generated in the strain generation part is detected, adverse effects such as applied voltage-strain nonlinearity, cleave phenomenon, and poor temperature coefficient are eliminated.
ハ）複数の電気−歪変換素子を単独で制御できるため、
平行度の調節が容易にできる。c) Since multiple electro-strain conversion elements can be controlled independently,
Parallelism can be easily adjusted.
二）構造が簡素化され、小形化が可能になる。2) The structure is simplified and miniaturization is possible.
ホ）駆動源が電気−歪変換素子であるため高速掃引が可
能になる。e) Since the driving source is an electro-strictive conversion element, high-speed sweeping is possible.
第１図ないし第３図は、本発明のエタロン駆動機構の一
実施例に係り、第１図は縦断面図、第２図は第１図にお
けるＡ−Ａ横断面図、第３図は制御回路の概略図、第４
図および第５図は第３図の制御回路内の他の設定回路を
示す図である。
２．４：ホルダ
５：固定側相対平面板
６コ移動側相対平面板 ８：電歪素子１０：歪ゲージ
１５：歪発生部
ＶＲ３，ＶＲ４，ＶＲ５，ＶＲ６：可変抵抗２９：フォ
トダイオード
特許出願人 株式会社 島津−１ｆｒ、−４−！ｉ代理
人 弁理士 武石端彦−イ也？ｉ名１じ弓Ｈ−ｒｌ
吊１日
第づ図
第５１２１1 to 3 relate to an embodiment of the etalon drive mechanism of the present invention, in which FIG. 1 is a longitudinal sectional view, FIG. 2 is a cross-sectional view taken along line A-A in FIG. 1, and FIG. 3 is a control Schematic diagram of the circuit, 4th
5 and 5 are diagrams showing other setting circuits within the control circuit of FIG. 3. 2.4: Holder 5: Fixed side relative flat plate 6 Moving side relative flat plate 8: Electrostrictive element 10: Strain gauge 15: Strain generating section VR3, VR4, VR5, VR6: Variable resistor 29: Photodiode Patent applicant Shimadzu Corporation -1fr, -4-! i Agent Patent Attorney Hajiko Takeishi - Iya? i Name 1ji Bow H-rl Hanging 1st Day Figure No. 5121
Claims (1)
向に移動する駆動機構において、上記固定側相対平面板
を保持する保持手段と、上記移動側相対平面板を保持す
る保持手段と、上記二つの保持手段を連結する複数の歪
み発生部と、上記二つの保持手段間に配置され、信号印
加時に上記二つの保持手段の距離を変える方向に伸縮す
る複数の電気−歪変換素子と、上記複数の歪み発生部に
取付けられ、上記歪み発生部の歪みを検出する複数の歪
みゲージと、上記二つの相対平面板間の距離を目標値に
設定する設定手段と、上記歪ゲージの出力信号を上記電
気−歪変換素子の制御信号にフィードバックするフィー
ドバック回路とを有することを特徴とする相対平面板の
駆動機構。In a drive mechanism that fixes two relative plane plates and moves the other relative plane plate in the normal direction, holding means holds the fixed side relative plane plate and holding means holds the movable side relative plane plate. , a plurality of strain generating parts connecting the two holding means, and a plurality of electro-strain conversion elements arranged between the two holding means and expanding and contracting in a direction that changes the distance between the two holding means when a signal is applied. a plurality of strain gauges attached to the plurality of strain generating parts to detect strain in the strain generating parts; a setting means for setting a distance between the two relative plane plates to a target value; A driving mechanism for a relative flat plate, comprising a feedback circuit that feeds back an output signal to a control signal for the electro-strain conversion element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17160090A JPH0460428A (en) | 1990-06-28 | 1990-06-28 | Mechanism for driving relative flat board |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17160090A JPH0460428A (en) | 1990-06-28 | 1990-06-28 | Mechanism for driving relative flat board |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0460428A true JPH0460428A (en) | 1992-02-26 |
Family
ID=15926176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17160090A Pending JPH0460428A (en) | 1990-06-28 | 1990-06-28 | Mechanism for driving relative flat board |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0460428A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007127445A (en) * | 2005-11-01 | 2007-05-24 | Olympus Corp | Etalon device and method of manufacturing same |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02136722A (en) * | 1988-11-17 | 1990-05-25 | Hitachi Zosen Corp | High speed light frequency modulator |
-
1990
- 1990-06-28 JP JP17160090A patent/JPH0460428A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02136722A (en) * | 1988-11-17 | 1990-05-25 | Hitachi Zosen Corp | High speed light frequency modulator |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007127445A (en) * | 2005-11-01 | 2007-05-24 | Olympus Corp | Etalon device and method of manufacturing same |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0556041B1 (en) | Compact laser probe for profilometry | |
| JP5489538B2 (en) | Force sensor | |
| US4876524A (en) | Six-axis joystick control | |
| CN111510019B (en) | Two-dimensional rapid deflection adjusting device and method with sensing signal leveling function | |
| CN107393599A (en) | Integrate the quick deflection platform of two dimension and method of sensing unit and confinement element | |
| JPS60147682A (en) | Minute motion operating device | |
| EP0983481A2 (en) | Two piece mirror arrangement for interferometrically controlled stage | |
| JPH0460428A (en) | Mechanism for driving relative flat board | |
| CN106950673B (en) | Unbalanced optical fiber Michelson interferometer arm length adjusting device | |
| EP0702205A2 (en) | Interferometer | |
| JP4901533B2 (en) | Force sensor, load detection device, and shape measurement device | |
| CN103712553A (en) | Interference method with phase method and vertical scanning method compatible | |
| JP5218257B2 (en) | Drive device | |
| EP0013179A1 (en) | Light processing apparatus | |
| JPH03293565A (en) | Pwm electrostatic servo type accelerometer | |
| CN207689751U (en) | A kind of quick beat speculum of two dimension | |
| CN117781851B (en) | Multistage correction method for closed-loop piezoelectric driving phase shifter | |
| JPH06241899A (en) | Etalon driving mechanism | |
| JPH04140690A (en) | Stage micromotion mechanism | |
| CN110375642B (en) | Piezoelectric ceramic control device for interferometer and control method thereof | |
| JPH06241898A (en) | Etalon driving mechanism | |
| Takeshita et al. | Development of a piezo-driven mechanical stage integrated microdisplacement sensor for calibration of displacements | |
| JP3707700B2 (en) | Optical position detector | |
| KR20150076086A (en) | Precision return actuator | |
| SU1520484A1 (en) | Actuating mechanism for linear displacement |