JPH0459819U - - Google Patents
Info
- Publication number
- JPH0459819U JPH0459819U JP10162990U JP10162990U JPH0459819U JP H0459819 U JPH0459819 U JP H0459819U JP 10162990 U JP10162990 U JP 10162990U JP 10162990 U JP10162990 U JP 10162990U JP H0459819 U JPH0459819 U JP H0459819U
- Authority
- JP
- Japan
- Prior art keywords
- semi
- transparent mirror
- light
- sample surface
- reflected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Optical Elements Other Than Lenses (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Microscoopes, Condenser (AREA)
- Lenses (AREA)
Description
第1図は本考案の半透鏡反射光学系の概略構成
図、第2図〜第5図はそれぞれ半透鏡の傾きを説
明するための図、第6図は顕微鏡の半透鏡周辺の
縦断面図、第7図はその平面図、第8図はユニバ
ーサルジヨイント機構の概略図、第9図は従来の
半透鏡反射光学系の概略構成図である。
2……光源、4……集光レンズ、6……半透鏡
、8……試料、10……対物レンズ、12……結
像、20……半透鏡面角度変化手段、50……ユ
ニバーサルジヨイント機構。
Fig. 1 is a schematic diagram of the semi-transparent reflective optical system of the present invention, Figs. 2 to 5 are diagrams for explaining the inclination of the semi-transparent mirror, and Fig. 6 is a vertical cross-sectional view of the vicinity of the semi-transparent mirror of the microscope. , FIG. 7 is a plan view thereof, FIG. 8 is a schematic diagram of a universal joint mechanism, and FIG. 9 is a schematic diagram of a conventional semi-transparent reflective optical system. 2...Light source, 4...Condensing lens, 6...Semi-transparent mirror, 8...Sample, 10...Objective lens, 12...Image formation, 20...Semi-transparent mirror angle changing means, 50...Universal mirror Into mechanism.
Claims (1)
の試料面からの反射光を再び前記半透鏡を透過さ
せた後、対物レンズ系によつて前記試料面の像を
結像させる半透鏡反射光学系において、 前記半透鏡に前記試料面に照射させる光の方向
及び角度を変化させる半透鏡面角度変化手段を備
えたことを特徴とする半透鏡反射光学系。[Claims for Utility Model Registration] Light is reflected by a semi-transparent mirror surface, irradiated onto a sample, the reflected light from the sample surface is transmitted through the semi-transparent mirror again, and then the light is reflected from the sample surface by an objective lens system. A semi-transparent mirror reflective optical system for forming an image of the sample surface, the semi-transparent mirror reflective optical system comprising a semi-transparent mirror surface angle changing means for changing the direction and angle of light irradiated onto the sample surface by the semi-transparent mirror. .
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10162990U JPH0459819U (en) | 1990-09-29 | 1990-09-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10162990U JPH0459819U (en) | 1990-09-29 | 1990-09-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0459819U true JPH0459819U (en) | 1992-05-22 |
Family
ID=31845255
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10162990U Pending JPH0459819U (en) | 1990-09-29 | 1990-09-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0459819U (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004354283A (en) * | 2003-05-30 | 2004-12-16 | Miyota Kk | Lighting unit of imaging device for surface inspection and its control method |
CN102411200A (en) * | 2010-09-21 | 2012-04-11 | 安鹏科技股份有限公司 | Coaxial light-extraction-type digital microscope |
EP2431773A3 (en) * | 2010-09-15 | 2012-04-18 | AnMo Electronics Corporation | Digital microscope with coaxial light output |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4326706Y1 (en) * | 1967-07-14 | 1968-11-06 | ||
JPS5830720A (en) * | 1981-08-19 | 1983-02-23 | Fujitsu Ltd | Coaxial illumination device for stereoscopic microscope |
JPH02143215A (en) * | 1988-10-05 | 1990-06-01 | Carl Zeiss:Fa | Two operation microscopes coupled optically and mechanically |
JPH02290536A (en) * | 1989-04-28 | 1990-11-30 | Olympus Optical Co Ltd | Microspectral measuring instrument |
JPH0262410B2 (en) * | 1986-08-06 | 1990-12-25 | Isamu Nakamura |
-
1990
- 1990-09-29 JP JP10162990U patent/JPH0459819U/ja active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4326706Y1 (en) * | 1967-07-14 | 1968-11-06 | ||
JPS5830720A (en) * | 1981-08-19 | 1983-02-23 | Fujitsu Ltd | Coaxial illumination device for stereoscopic microscope |
JPH0262410B2 (en) * | 1986-08-06 | 1990-12-25 | Isamu Nakamura | |
JPH02143215A (en) * | 1988-10-05 | 1990-06-01 | Carl Zeiss:Fa | Two operation microscopes coupled optically and mechanically |
JPH02290536A (en) * | 1989-04-28 | 1990-11-30 | Olympus Optical Co Ltd | Microspectral measuring instrument |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004354283A (en) * | 2003-05-30 | 2004-12-16 | Miyota Kk | Lighting unit of imaging device for surface inspection and its control method |
EP2431773A3 (en) * | 2010-09-15 | 2012-04-18 | AnMo Electronics Corporation | Digital microscope with coaxial light output |
CN102411200A (en) * | 2010-09-21 | 2012-04-11 | 安鹏科技股份有限公司 | Coaxial light-extraction-type digital microscope |