JPH045646U - - Google Patents
Info
- Publication number
- JPH045646U JPH045646U JP4584690U JP4584690U JPH045646U JP H045646 U JPH045646 U JP H045646U JP 4584690 U JP4584690 U JP 4584690U JP 4584690 U JP4584690 U JP 4584690U JP H045646 U JPH045646 U JP H045646U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- fixing
- suction
- semiconductor wafer
- divisions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
Description
第１図はこの考案の一実施例を示すステージの
上面図、第２図は第１図ステージの断面図、第３
図ａ〜ｅは本考案の動作状況を示すステージの断
面図、第４図は従来のステージの上面図、第５図
は第４図ステージの断面図である。
１……外周ステージ、２……中央ステージ、３
，１０……真空吸引孔、４，１１……吸着溝、６
……上下駆動ソレノイド、７……上下駆動スライ
ドローラ、８，１３……半導体ウエーハ、９……
電磁バルブ、１２……ステージ。
Fig. 1 is a top view of a stage showing an embodiment of this invention, Fig. 2 is a sectional view of the stage shown in Fig. 1, and Fig. 3 is a sectional view of the stage shown in Fig. 1.
Figures a to e are cross-sectional views of the stage showing operating conditions of the present invention, Figure 4 is a top view of the conventional stage, and Figure 5 is a cross-sectional view of the stage shown in Figure 4. 1... Outer stage, 2... Center stage, 3
, 10... Vacuum suction hole, 4, 11... Suction groove, 6
... Vertical drive solenoid, 7... Vertical drive slide roller, 8, 13... Semiconductor wafer, 9...
Electromagnetic valve, 12... stage.
Claims (1)
ジにおいて、 前記ステージを同心円状に多分割し、分割した
中央側のステージを上下動できる機構としたこと
を特徴とする吸着固定ステージ。[Claims for Utility Model Registration] A suction fixing stage for fixing a semiconductor wafer by vacuum suction, characterized in that the stage is divided into multiple concentric circles, and the central stage of the divisions has a mechanism that can move up and down. stage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4584690U JPH045646U (en) | 1990-04-27 | 1990-04-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4584690U JPH045646U (en) | 1990-04-27 | 1990-04-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH045646U true JPH045646U (en) | 1992-01-20 |
Family
ID=31560386
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4584690U Pending JPH045646U (en) | 1990-04-27 | 1990-04-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH045646U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017112343A (en) * | 2015-12-18 | 2017-06-22 | 日本特殊陶業株式会社 | Substrate holding device and substrate holding method |
| WO2017209051A1 (en) * | 2016-06-01 | 2017-12-07 | キヤノン株式会社 | Chuck, substrate holding device, pattern forming device, and method for manufacturing article |
| WO2021070265A1 (en) * | 2019-10-08 | 2021-04-15 | 株式会社日立ハイテク | Sample stage and optical inspection device |
-
1990
- 1990-04-27 JP JP4584690U patent/JPH045646U/ja active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017112343A (en) * | 2015-12-18 | 2017-06-22 | 日本特殊陶業株式会社 | Substrate holding device and substrate holding method |
| WO2017209051A1 (en) * | 2016-06-01 | 2017-12-07 | キヤノン株式会社 | Chuck, substrate holding device, pattern forming device, and method for manufacturing article |
| JP2017216375A (en) * | 2016-06-01 | 2017-12-07 | キヤノン株式会社 | Chuck, substrate holding device, pattern forming device, and article manufacturing method |
| KR20190015414A (en) * | 2016-06-01 | 2019-02-13 | 캐논 가부시끼가이샤 | Chuck, substrate holding device, pattern forming device, and method of manufacturing article |
| US10754262B2 (en) | 2016-06-01 | 2020-08-25 | Canon Kabushiki Kaisha | Chuck, substrate-holding apparatus, pattern-forming apparatus, and method of manufacturing article |
| WO2021070265A1 (en) * | 2019-10-08 | 2021-04-15 | 株式会社日立ハイテク | Sample stage and optical inspection device |
| JPWO2021070265A1 (en) * | 2019-10-08 | 2021-04-15 |