JPH0456034A - Discharge lamp for vacuum and light cvd device - Google Patents
Discharge lamp for vacuum and light cvd deviceInfo
- Publication number
- JPH0456034A JPH0456034A JP2164599A JP16459990A JPH0456034A JP H0456034 A JPH0456034 A JP H0456034A JP 2164599 A JP2164599 A JP 2164599A JP 16459990 A JP16459990 A JP 16459990A JP H0456034 A JPH0456034 A JP H0456034A
- Authority
- JP
- Japan
- Prior art keywords
- discharge lamp
- vacuum
- power supply
- cement
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004568 cement Substances 0.000 claims abstract description 24
- 238000006243 chemical reaction Methods 0.000 claims description 18
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 3
- 238000004891 communication Methods 0.000 claims description 2
- 238000001816 cooling Methods 0.000 abstract description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 14
- 230000015556 catabolic process Effects 0.000 abstract description 7
- 230000004308 accommodation Effects 0.000 abstract 2
- 239000002826 coolant Substances 0.000 abstract 2
- 230000006866 deterioration Effects 0.000 description 9
- 239000000758 substrate Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 239000003566 sealing material Substances 0.000 description 7
- 239000010409 thin film Substances 0.000 description 7
- 239000000498 cooling water Substances 0.000 description 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 238000001259 photo etching Methods 0.000 description 4
- 239000012495 reaction gas Substances 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000006552 photochemical reaction Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000002542 deteriorative effect Effects 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Curing Cements, Concrete, And Artificial Stone (AREA)
- Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は真空用放電灯及び光ＣＶＤ装置に係り、特に紫
外線灯の高エネルギー放射放電灯を真空中で点灯し、そ
の放射エネルギーを安定に供給するのに好適な真空用放
電灯及びその真空用放電灯を備えた光ＣＶＤ装置に関す
る。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a vacuum discharge lamp and a photo-CVD device, and in particular to a method for lighting a high-energy radiant discharge lamp such as an ultraviolet lamp in a vacuum and stabilizing its radiant energy. The present invention relates to a vacuum discharge lamp suitable for supplying vacuum discharge lamps and a photoCVD apparatus equipped with the vacuum discharge lamp.
従来の発光封入物を用いた放電灯（例えば、低圧水銀灯
、高圧水銀灯等）は放射エネルギーを安定に引き出す目
的で発光封入物の蒸気圧を放電灯の端部の最冷点部（放
電灯の最も温度の低い箇所）を温度制御することにより
一定に制御していた。Conventional discharge lamps using luminescent encapsulations (e.g., low-pressure mercury lamps, high-pressure mercury lamps, etc.) are designed to reduce the vapor pressure of the luminescent encapsulation to the coldest point at the end of the discharge lamp (the lowest point of the discharge lamp) in order to stably extract radiant energy. The temperature was kept constant by controlling the temperature at the lowest temperature point.
しかしながら、従来の放電灯では、光強度が低いために
、光励起を利用した光ＣＶ Ｄ （ＣｈｅｍｉｃａｌＶ
ａｐｏｒ Ｄｅｐｏｓｉｔｉｏｎ）又は光エッチング
においては、成膜速度又はエツチング速度が遅い。そこ
で、光ＣＶＤ又は光エンチングにおける成膜速度又はエ
ツチング速度を速めるための光強度を高める手段として
、放電灯を反応容器内に内蔵する方法が種々提案されて
いる。しかしながら、この方法では、放射エネルギーを
一定にするために必要な最冷点部の温度の制御１（以下
、最冷点制御という）ができず、また、放電灯への電力
供給線を真空容器（反応容器）内に入れて気密にシール
し、真空外に取り出していたが、放電灯が高出力化し、
放電灯への供給電圧が高くなってくると、真空容器内の
圧力が０．１〜１０ｍＨＨのときに真空容器内の電力供
給線間で空間絶縁破壊を引き起こすという問題があった
。However, since the light intensity of conventional discharge lamps is low, optical CV D (Chemical V
In apor deposition or photoetching, the film formation rate or etching rate is slow. Therefore, various methods have been proposed in which a discharge lamp is built into a reaction vessel as a means of increasing light intensity to increase the film forming rate or etching rate in photo-CVD or photo-etching. However, with this method, it is not possible to control the temperature at the coldest point (hereinafter referred to as coldest point control) necessary to keep the radiant energy constant, and the power supply line to the discharge lamp cannot be connected to the vacuum vessel. (reaction vessel), sealed airtight, and taken out outside the vacuum, but as discharge lamps became more powerful,
As the voltage supplied to the discharge lamp becomes higher, there is a problem in that space dielectric breakdown occurs between power supply lines within the vacuum vessel when the pressure within the vacuum vessel is 0.1 to 10 mHH.
そこで、第５図に示すような絶縁破壊に強い構造の放電
灯で提案されている。この放電灯は、４放電灯容器ｌの
端部が真空気密林６ｃを介して真空用フランジ２内に配
置されており、放電灯容器１内のステム３に搭載された
電極に接続されている電力供給線５は、エポキシ樹脂等
からなるシール材２３内を貫通して真空外に取り出され
ている。Therefore, a discharge lamp having a structure resistant to dielectric breakdown as shown in FIG. 5 has been proposed. In this discharge lamp, the ends of four discharge lamp containers 1 are arranged in a vacuum flange 2 via a vacuum jungle 6c, and are connected to an electrode mounted on a stem 3 in the discharge lamp container 1. The power supply line 5 passes through a sealing material 23 made of epoxy resin or the like and is taken out to the outside of the vacuum.
したがって、電力供給線５は、真空容器内では露出して
いない構造となっている。また、図示していないが、真
空用フランジ２の外側に冷却水が導入される水冷部が配
設されている。Therefore, the power supply line 5 is not exposed inside the vacuum container. Further, although not shown, a water cooling section into which cooling water is introduced is provided outside the vacuum flange 2.
しかしながら、第５図に示す放電灯の場合、真空気密材
６ｃが紫外線及び熱により劣化してリークを生じ、また
、真空気密材６ｃの熱膨張等により放電灯容！ｉｉｌの
端部がひび割れが住して不点灯が生じ、真空用放電灯と
して使用できない事態を発生しやすい。However, in the case of the discharge lamp shown in FIG. 5, the vacuum sealing material 6c deteriorates due to ultraviolet rays and heat, causing leakage, and the discharge lamp capacity decreases due to thermal expansion of the vacuum sealing material 6c. The ends of the lamp tend to crack, causing the lamp to not light up, making it impossible to use it as a vacuum discharge lamp.
なお、この種の放電灯としては、例えば、特開昭６２−
５１２２５号公報が挙げられる。Note that this type of discharge lamp is, for example, disclosed in Japanese Patent Application Laid-open No. 1986-
No. 51225 is mentioned.
本発明の目的は、上記した従来技術の課題を解決し、最
冷点制御を的確に行なうことができ、かつ電力供給線の
空間絶縁破壊を防止できると共に放電灯端部に設けられ
る真空気密材等のシール材の劣化及び熱膨張等による放
電灯端部のひび割れを防止し安定して最大照度を得るこ
とができる放電灯及びこの放電灯を備えた光ＣＶＤ装置
を提供することにある。It is an object of the present invention to solve the problems of the prior art described above, to be able to accurately control the coldest point, to prevent space dielectric breakdown of the power supply line, and to provide a vacuum sealing member provided at the end of the discharge lamp. An object of the present invention is to provide a discharge lamp that can stably obtain maximum illuminance by preventing deterioration of the sealing material and cracking of the ends of the discharge lamp due to thermal expansion, etc., and a photoCVD apparatus equipped with this discharge lamp.
上記した目的を達成するために、本発明の真空用放電灯
は、放電灯端部とこの放電灯端部を収納する収納部内壁
との間隙の少なくとも一部に熱伝導率が０．０１〜０．
４Ｗ／ｃｍ−ｄ ｅ ｇに調整された、例えば、アルミ
ナを主成分とするセメント、又はジルコニアを主成分と
するセメントを充填したものである。In order to achieve the above object, the vacuum discharge lamp of the present invention has a thermal conductivity of 0.01 to 0.01 in at least a part of the gap between the end of the discharge lamp and the inner wall of the storage part that accommodates the end of the discharge lamp. 0.
It is filled with, for example, cement mainly composed of alumina or cement mainly composed of zirconia, which is adjusted to 4 W/cm-d e g.
また、さらに望ましくは、放電灯端部に連接して該端部
よりも縮径された細管を設け、細管内に電力供給線を内
蔵させ、細管を収納部に形成された孔を貫通して収納部
外部の大気中に取り出し、細管と収納部に形成された孔
部との間隙にシール部を形成したものである。More preferably, a thin tube connected to the end of the discharge lamp and having a smaller diameter than the end is provided, a power supply line is built in the thin tube, and the thin tube is passed through a hole formed in the housing. It is taken out into the atmosphere outside the storage part, and a seal part is formed in the gap between the thin tube and the hole formed in the storage part.
さらに本発明の光ＣＶＤ装置は、反応容器内を交換可能
な光透過窓を介して、光源室と反応室とに区画して光源
室に真空用放電灯を配置し、光源室に放電灯容器を配置
させ、光源室に連通して収納部を設けて電力供給線を光
源室外部の大気中に取り出し、収納部内壁と放電灯端部
との間隙の少なくとも一部に熱伝導率が０．Ｏ１〜０．
４Ｗ／ｃｍ−ｄｅｇに調整されたセメントを充填したも
のである。Further, in the optical CVD apparatus of the present invention, the inside of the reaction vessel is divided into a light source chamber and a reaction chamber through a replaceable light transmission window, a vacuum discharge lamp is disposed in the light source chamber, and a discharge lamp container is placed in the light source chamber. A storage section is provided in communication with the light source chamber, and the power supply line is taken out into the atmosphere outside the light source chamber, and at least a portion of the gap between the inner wall of the storage section and the end of the discharge lamp has a thermal conductivity of 0. O1~0.
It is filled with cement adjusted to 4W/cm-deg.
本発明の真空用放電灯では、電力供給線は、真空領域内
に配置されることなく、真空領域外の大気中に取り出さ
れているから、放電灯への供給電圧が高くなった場合に
も電力供給線間の空間絶縁破壊が防止される。In the vacuum discharge lamp of the present invention, the power supply line is not placed in the vacuum region but is taken out into the atmosphere outside the vacuum region, so even if the supply voltage to the discharge lamp becomes high, Spatial dielectric breakdown between power supply lines is prevented.
また、放電灯端部は熱転′導性に優れたセメントを介し
て収納部に接触しているので、収納部外部での温度調整
により放電灯内部の発光封入物の蒸気圧制御が適正に働
くような温度に調整することが可能となる。In addition, since the end of the discharge lamp is in contact with the housing via cement, which has excellent thermal conductivity, temperature adjustment outside the housing allows for appropriate vapor pressure control of the luminescent filling inside the discharge lamp. It is possible to adjust the temperature to a working temperature.
また、細管に電力供給線を内蔵させ、細管と収納部に形
成された孔部との間にシール部を形成しているから、シ
ール部の面積が少なく、しかもシール部は放電灯から離
間しており、紫外線の影響による劣化が極めて少なく、
かつ前記セメントを介して冷却される放電灯端部に連接
しているから、温度上昇が低く、熱による劣化が少なく
なる。したがって、シール部の劣化に伴うリークがなく
、真空領域を所定の真空度に保持できることになり、か
つ紫外線及び熱の影響による熱膨張によって、放電灯端
部のひび割れを生じることもない。In addition, since the power supply line is built into the capillary tube and a seal is formed between the capillary tube and the hole formed in the storage section, the area of the seal section is small and the seal section can be separated from the discharge lamp. This means that there is extremely little deterioration due to the effects of ultraviolet rays.
In addition, since it is connected to the end of the discharge lamp which is cooled via the cement, the temperature rise is low and deterioration due to heat is reduced. Therefore, there is no leakage due to deterioration of the seal portion, the vacuum region can be maintained at a predetermined degree of vacuum, and cracks at the ends of the discharge lamp do not occur due to thermal expansion due to the influence of ultraviolet rays and heat.
また、本発明の光ＣＶＤ装置では、真空用放電灯が、最
大照度となる条件に維持できるから、基板に対して効率
的に薄膜を形成することができると共にシール部の劣化
に伴うリークがなく、反応室及び光源室を所定の真空度
にできるから、安定した光化学反応を実施できることに
なる。In addition, in the photo-CVD apparatus of the present invention, the vacuum discharge lamp can be maintained at the maximum illuminance condition, so that a thin film can be efficiently formed on the substrate and there is no leakage due to deterioration of the seal part. Since the reaction chamber and the light source chamber can be kept at a predetermined degree of vacuum, stable photochemical reactions can be carried out.
以下、本発明の実施例を図面に基づいて説明する。 Embodiments of the present invention will be described below based on the drawings.
第１図は本発明の放電灯の一実施例を示す外観概略図、
第２図は第１図の要部拡大断面図である。FIG. 1 is a schematic external view showing an embodiment of the discharge lamp of the present invention;
FIG. 2 is an enlarged sectional view of the main part of FIG. 1.
この放電灯は、短波長の紫外線を透過する石英管からな
る放電灯容器ｌと、フランジ２と一体に形成されると共
に放電灯の端部が収納される収納部９と、収納部９内に
配設された放電灯端部に接続される電力供給線５と、を
備えている。This discharge lamp consists of a discharge lamp container l made of a quartz tube that transmits short-wavelength ultraviolet rays, a storage part 9 that is integrally formed with a flange 2 and stores an end of the discharge lamp, and A power supply line 5 connected to the disposed end of the discharge lamp is provided.
放電灯容器１は、第２図に示すようにその両端の電極が
一方に集中する構造となっており、放電灯容器ｌの両端
部には、それぞれステム３に搭載された電極１１の先端
部にゲッター１２が設けられている。As shown in FIG. 2, the discharge lamp container 1 has a structure in which the electrodes at both ends are concentrated on one side, and the ends of the electrodes 11 mounted on the stem 3 are located at both ends of the discharge lamp container 1. A getter 12 is provided at.
放電灯容器１内は、大気を十分に加熱脱ガスしてから、
電極１１を活性化し、囲い状をしたゲッター１２の加熱
脱ガスを十分に行なった後に、例えば、発光原子の水銀
の他に始動ガスとしてのアルゴン、ネオン等のイナート
ガスが単独又は混合して封入されている。After the atmosphere inside the discharge lamp container 1 is sufficiently heated and degassed,
After activating the electrode 11 and sufficiently degassing the getter 12 by heating, for example, in addition to mercury as a light-emitting atom, an inert gas such as argon or neon as a starting gas is sealed alone or in combination. ing.
また、放電灯容器１は気密接続部１ｏと放電灯容器１の
径よりも小さい径からなる細管４と一体的に形成されて
おり、したがって、気密接続部１０及び細管４は、放電
灯容器１同様に石英によって構成されている。そして、
この細管４は各々収納部９に形成された孔を貫通して収
納部９の外側に突出している。さらに放電灯容器１端部
の管内に装着された電極１１に接続された電力供給１５
は細管４内を経て収納部９の外に突出した細管４から外
部に取り出されている。Further, the discharge lamp vessel 1 is integrally formed with the airtight connection portion 1o and the thin tube 4 having a smaller diameter than the diameter of the discharge lamp vessel 1. Therefore, the airtight connection portion 10 and the thin tube 4 are It is also made of quartz. and,
Each of the thin tubes 4 passes through a hole formed in the storage section 9 and projects to the outside of the storage section 9. Furthermore, a power supply 15 connected to an electrode 11 mounted inside the tube at the end of the discharge lamp vessel 1
is taken out to the outside from the thin tube 4 which passes through the thin tube 4 and protrudes outside the storage section 9.
さらに、前記細管４と収納部９との間は、Ｑ ＩＪソン
グ１，２２によってシールされており、放電灯容器ｌ端
部の気密接続部１０の外面と、収納部９の内壁との間隙
部の一部には、セメント２８が充填されている。Further, the space between the thin tube 4 and the housing part 9 is sealed by Q IJ songs 1 and 22, and the gap between the outer surface of the airtight connection part 10 at the end of the discharge lamp container l and the inner wall of the housing part 9 is sealed. A part of it is filled with cement 28.
このセメント２日は、例えば、Ａｊ！ｇｏｓ（アルミナ
）又はＺｒ０ｔ（ジルコニア）を主成分とし、熱伝導率
が０． ０１〜０． ４Ｗ／ｃｍ ・ｄ ｅ ｇの範囲
内に調整されたセメントからなっている。This cement 2nd day, for example, Aj! The main component is gos (alumina) or Zr0t (zirconia), and the thermal conductivity is 0. 01~0. It consists of cement adjusted within the range of 4W/cm ・d e g.
このセメント２８に先端部が埋設され、気密接続部１０
に接する状態で熱電対３Ｉが設けられ、この熱電対３１
と収納部９に設けられた孔との間隙は、シール材６ｂに
よって密封されている。また、セメント２８が設けられ
た収納部９の側壁面には、水冷バイブ３３からの冷却水
が流動可能な水冷部３２が設置されていると共に水冷パ
イプ３３の回路の途中に電磁弁３４が介設されている。The tip part is buried in this cement 28, and the airtight connection part 10
A thermocouple 3I is provided in contact with the thermocouple 31.
The gap between the hole provided in the housing portion 9 and the hole provided in the housing portion 9 is sealed with a sealing material 6b. Furthermore, a water cooling section 32 through which cooling water from a water cooling vibrator 33 can flow is installed on the side wall surface of the storage section 9 in which the cement 28 is provided, and a solenoid valve 34 is interposed in the circuit of the water cooling pipe 33. It is set up.
熱電対３１からの信号は、温度調整器３５に入力され、
温度調整器３５からの制御信号に基づいて電磁弁３４の
開閉動作が行われるようになっている。The signal from the thermocouple 31 is input to the temperature regulator 35,
The solenoid valve 34 is opened and closed based on a control signal from the temperature regulator 35.
次に上記のように構成される放電灯の作用効果について
説明する。Next, the effects of the discharge lamp configured as described above will be explained.
電力供給線５を介して電力が供給されると、放電灯容器
１内の発光封入物が蒸発し、放電灯が点灯する。この場
合、放電灯による最大照度を得るためには、最冷点の温
度を５０〜５５℃に保持して放電灯内部の蒸気の圧力を
制御することが要求される。When power is supplied via the power supply line 5, the luminescent filling in the discharge lamp container 1 evaporates, and the discharge lamp lights up. In this case, in order to obtain the maximum illuminance from the discharge lamp, it is required to maintain the temperature of the coldest point at 50 to 55° C. and control the pressure of the steam inside the discharge lamp.
本実施例においては、熱電対３１によって、放電灯端部
に接したセメント２日の温度を検出し、この検出信号が
温度調整器３５に入力される。温度調整器３５では、予
め最冷点の温度を５０〜５５°Ｃに調整するための水冷
部３２に対する冷却水流量が設定されており、電磁弁３
４に動作信号を出力する。In this embodiment, the thermocouple 31 detects the temperature of the cement in contact with the end of the discharge lamp for two days, and this detection signal is input to the temperature regulator 35. In the temperature regulator 35, the flow rate of cooling water for the water cooling section 32 is set in advance to adjust the temperature of the coldest point to 50 to 55°C, and the solenoid valve 3
An operation signal is output to 4.
したがって、水冷部３２に対する冷却水流量によって、
収納部９の側壁面の温度が調整される。Therefore, depending on the cooling water flow rate to the water cooling section 32,
The temperature of the side wall surface of the storage section 9 is adjusted.
この場合、放電灯端部と収納部９との間には熱伝導率が
０．０１＝０．４Ｗ／ｃｍ−ｄ ｅ ｇの範囲内に調整
されたセメント２８が充填されており、収納部９側壁面
の熱が放電灯端部に確実に伝達されるために、最冷点の
温度制御を水冷のみで行なって、最冷点の温度を５０〜
５５°Ｃに保持することができ、放電灯の最大照度を安
定に得ることができる。In this case, cement 28 whose thermal conductivity is adjusted within the range of 0.01 = 0.4 W/cm-d e g is filled between the end of the discharge lamp and the housing part 9. 9. In order to ensure that the heat on the side wall surface is transferred to the end of the discharge lamp, the temperature of the coldest point is controlled by water cooling only, and the temperature of the coldest point is kept at 50~50°C.
The temperature can be maintained at 55°C, and the maximum illuminance of the discharge lamp can be stably obtained.
すなわち、セメント２８の熱伝導率が０．４Ｗ／ ｃ
ｍ−ｄ ｅ ｇよりも高いと、水冷部３２による冷却が
ききすぎて適正な最冷点温度５０〜５５°Ｃよりも低く
なり、充分な放電灯出力を得ることが困難となる。一方
、セメン）・２ Ｂの熱伝導率が０゜ＱＩＷ／ｃｍ−ｄ
ｅｇよりも低いと、適正な最冷点温度５０〜５５°Ｃよ
りも高くなり、放電灯の最大照度を得ることが困難とな
る。したがって、熱伝導率が０．０１〜０．４Ｗ／ｃｍ
−ｄｅｇの範囲外のセメント２８が放電灯端部と収納部
９との間に充填されると、放電灯の照度が不安定となる
。That is, the thermal conductivity of cement 28 is 0.4 W/c
If it is higher than m-d e g, the cooling by the water cooling section 32 is too strong and the temperature becomes lower than the appropriate coldest point temperature of 50 to 55°C, making it difficult to obtain a sufficient discharge lamp output. On the other hand, the thermal conductivity of cement)・2B is 0゜QIW/cm-d
If it is lower than eg, it will be higher than the appropriate coldest point temperature of 50 to 55°C, making it difficult to obtain the maximum illuminance of the discharge lamp. Therefore, the thermal conductivity is 0.01 to 0.4 W/cm
If the cement 28 outside the -deg range is filled between the end of the discharge lamp and the housing portion 9, the illuminance of the discharge lamp becomes unstable.
また、電力供給ｌｌＡ３は、真空容器内では、細管４に
内蔵されて収納部９外部の大気中で露出した状態で配置
されている。このため、放電灯に高周波の電圧をかけた
場合にも、電力供給線５間で空間放電破壊を起こすおそ
れがない。In addition, the power supply 11A3 is housed in a thin tube 4 in the vacuum container and is exposed to the atmosphere outside the storage section 9. Therefore, even when a high frequency voltage is applied to the discharge lamp, there is no risk of space discharge damage occurring between the power supply lines 5.
さらに、電力供給ｋｌＡ５を細管４に内蔵した状態で真
空容器外の大気中に引き出しており、収納部９と細管４
との間を０リング２１．２２でシールしており、放電灯
から離間した位１にＱ ＩＪソング１．２２があるため
、放電灯からの紫外線の影響が少なく、０リングの劣化
及び劣化に伴う真空容器内へのガスのリークが防止され
る。Furthermore, the power supply klA5 is built into the capillary tube 4 and drawn out into the atmosphere outside the vacuum container, and the storage section 9 and the capillary tube 4
Since the Q IJ song 1.22 is located far away from the discharge lamp, there is less influence of ultraviolet rays from the discharge lamp, and it prevents the O-ring from deteriorating and deteriorating. This prevents gas from leaking into the vacuum container.
さらに、細管４は水冷部３２を介して冷却される放電灯
端部に連接されており、０リング２１２２は冷却された
細管４に接触し、かつ放電灯から離間しているから、温
度上昇が少なく、熱による劣化が少な（なる。Furthermore, the thin tube 4 is connected to the end of the discharge lamp which is cooled via the water cooling part 32, and the O-ring 2122 is in contact with the cooled thin tube 4 and is spaced apart from the discharge lamp, so that the temperature rise is prevented. There is less deterioration due to heat.
第３図は本発明における真空放電灯の端部の他の実施例
を示す断面図である。FIG. 3 is a sectional view showing another embodiment of the end portion of the vacuum discharge lamp according to the present invention.
この真空放電灯において、第２図に示す放電灯端部の構
造と異なる点は、収納部９に設けられた孔を貫通する細
管４と収納部９との間にシール材６ａにより密封されて
いることである。したがって、第３図において、第２図
に示す部材と同一乃至相当部材は、同一符号で示し構成
上の説明は省略する。This vacuum discharge lamp differs from the structure of the end of the discharge lamp shown in FIG. It is that you are. Therefore, in FIG. 3, the same or equivalent members as those shown in FIG. 2 are denoted by the same reference numerals, and the explanation of the structure will be omitted.
第３図に示す実施例においても、第２図に示す実施例の
効果と同様な効果を奏すると共に、特にシール材６ａに
よるシールのみでシール部を構成するので構造的に簡略
化できる。The embodiment shown in FIG. 3 also provides the same effects as the embodiment shown in FIG. 2, and can be structurally simplified, especially since the seal portion is formed only by the sealing material 6a.
第４図は、前記した放電灯を備えた光ＣＶＤ装置の一実
施例を示す概略的構成図である。FIG. 4 is a schematic configuration diagram showing an embodiment of a photo-CVD apparatus equipped with the above-mentioned discharge lamp.
この光ＣＶＤ装置は、反応容器５１内に水平方向に突出
する部材に載置された光透過窓５２によって、光源室５
３と反応室５４に区画されている。This optical CVD apparatus uses a light source chamber 5 by a light transmitting window 52 placed on a member that projects horizontally into a reaction vessel 51.
3 and a reaction chamber 54.
光源室５３には、第２図及び第３図に示す放電灯端部構
造を有する真空用放電灯が設置されており、光源室５３
の側壁面に収納部９が設けられている。A vacuum discharge lamp having the discharge lamp end structure shown in FIGS. 2 and 3 is installed in the light source chamber 53.
A storage section 9 is provided on the side wall surface of the housing.
したがって、第２図及び第３図における真空フランジ２
は光源室５３の側壁面に相当し、放電灯容器ｌ、気密接
続部１０及び細管４は、光源室５３内に配置された状態
である。そして、前記収納部９の外部に電力供給線５及
び水冷パイプ３３が設けられ、熱電対３１（第２図及び
第３図参照）、温度調整器３５と共に電磁弁３４が設け
られている。Therefore, the vacuum flange 2 in FIGS. 2 and 3
corresponds to the side wall surface of the light source chamber 53, and the discharge lamp container 1, the airtight connection part 10, and the thin tube 4 are arranged in the light source chamber 53. A power supply line 5 and a water cooling pipe 33 are provided outside the storage section 9, and a thermocouple 31 (see FIGS. 2 and 3), a temperature regulator 35, and a solenoid valve 34 are provided.
反応室５４の一側面部側には、ガス吹き出し口が多孔体
からなる反応ガスノズル５５が設けられており、その他
方の側面側の反応室５１の底部に排気口５６が設けられ
ている。また、反応室５４には、図示していない駆動機
構によって回転すると共にその底部に加熱機構５７を有
するサセプタ５８が設置されており、このサセプタ５８
に基板５９が載置されるようになっている。A reaction gas nozzle 55 whose gas outlet is made of a porous material is provided on one side of the reaction chamber 54, and an exhaust port 56 is provided at the bottom of the reaction chamber 51 on the other side. Further, a susceptor 58 is installed in the reaction chamber 54 and is rotated by a drive mechanism (not shown) and has a heating mechanism 57 at its bottom.
A substrate 59 is placed on.
この先ＣＶＤ装置において、光化学反応により基板５９
上に薄膜を堆積させる場合、排気口５６により反応室５
１内を減圧する。このとき、光源室５３内も減圧される
。したがって、放電灯容器Ｉ、気密接続部１０及び細管
４の各々の外部雰囲気は、真空状態となる。また、反応
ガスノズル５５から反応ガスが反応室５１内に導入され
ると共に真空放電灯（紫外線ランプ）Ｉが点灯される。In the CVD apparatus, the substrate 59 will be removed by a photochemical reaction.
When depositing a thin film on the reaction chamber 5, the exhaust port 56
Reduce the pressure inside 1. At this time, the pressure inside the light source chamber 53 is also reduced. Therefore, the external atmosphere of each of the discharge lamp container I, the airtight connection part 10, and the capillary tube 4 is in a vacuum state. Further, a reaction gas is introduced into the reaction chamber 51 from the reaction gas nozzle 55, and the vacuum discharge lamp (ultraviolet lamp) I is turned on.
このような、光化学反応において、最冷点温度制御によ
って放電灯からの紫外線の最大照度を高くすることがで
きるため、基板５９上に効率的に薄膜を堆積させること
できる。また、０リング２１．２２又はシール材６ａ、
６ｂの劣化が極めて少なく、これらの劣化に伴うリーク
が防止されるため、基板５９に対する薄膜の堆積を安定
して行なうことができる。In such a photochemical reaction, the maximum illuminance of the ultraviolet rays from the discharge lamp can be increased by controlling the coldest spot temperature, so that a thin film can be efficiently deposited on the substrate 59. In addition, the O-ring 21.22 or the sealing material 6a,
Since the deterioration of the thin film 6b is extremely small and leakage caused by such deterioration is prevented, the thin film can be deposited stably on the substrate 59.
なお、本発明において、所定の熱伝導率を有するセメン
ト２８は、放電灯端部は収納部９との間の周方向間隙に
充填してもよいが、その間隙の一部でもよい。また、収
納部９の外部の水冷部３２には、冷却水の代わりに他の
冷媒を使用すること冷却部とすることももできる。In the present invention, the cement 28 having a predetermined thermal conductivity may be filled in the circumferential gap between the end portion of the discharge lamp and the housing portion 9, or may be filled in a part of the gap. Further, the water cooling section 32 outside the storage section 9 may be configured as a cooling section by using another refrigerant instead of cooling water.
また、本発明の光ＣＶＤ装置では、基板上に薄膜を堆積
させる場合の放電灯の効果について説明したが、光エツ
チング用の装置において、本発明の真空用放電灯を使用
することによって、光エッチングの速度を高めることが
でき、かつ光エッチングの操作を安定して実施できる。Furthermore, in the photo-CVD apparatus of the present invention, the effect of the discharge lamp in depositing a thin film on a substrate has been explained. The speed of photo-etching can be increased, and the photo-etching operation can be performed stably.
（発明の効果〕
以上のように本発明の真空用放電灯によれば、真空容器
内においては電力供給線が露出して配置されることなく
、大気中に電力供給線が取り出されているため、電力供
給線間の空間絶縁破壊が防止されると共に放電灯端部と
この放電灯端部を収納する収納部との間は一定の範囲の
熱伝導率を有するセメントが充填されており、このセメ
ントを介して収納部外部の冷却部から最大照度を得るの
に有効な最冷点温度に制御が可能となり放電灯内部の蒸
気の圧力制御を適正に行な・うことができる。(Effects of the Invention) As described above, according to the vacuum discharge lamp of the present invention, the power supply line is not exposed and placed inside the vacuum container, but is taken out into the atmosphere. , space dielectric breakdown between the power supply lines is prevented, and the space between the end of the discharge lamp and the storage part that houses the end of the discharge lamp is filled with cement having a thermal conductivity within a certain range. It becomes possible to control the temperature of the coldest point effective for obtaining the maximum illuminance from the cooling section outside the housing via the cement, and the pressure of steam inside the discharge lamp can be appropriately controlled.
また、放電灯端部に連接して電力供給線を内蔵する細管
を設け、この細管と収納部との間をシールした構造とす
れば、紫外線及び熱によるシール部の劣化を防止できる
と共に劣化に伴うリークを防止できるから、機械的な耐
圧力保持の点が有効となる。In addition, if a thin tube containing a built-in power supply line is connected to the end of the discharge lamp and a seal is created between the thin tube and the housing, it is possible to prevent deterioration of the sealed portion due to ultraviolet rays and heat. Mechanical pressure resistance is effective because leaks can be prevented.
また、本発明の光ＣＶＤ装置によれば、前記した効果を
有する真空放電灯を備えているので、光源室に設置した
真空放電灯を介して最大照度の紫外線を反応室内に照射
することができる。このため、反応室に配置された基板
上に効率的に薄膜を堆積させることができる。Further, according to the photoCVD apparatus of the present invention, since it is equipped with a vacuum discharge lamp having the above-described effects, it is possible to irradiate the reaction chamber with ultraviolet rays of maximum illuminance via the vacuum discharge lamp installed in the light source chamber. . Therefore, a thin film can be efficiently deposited on the substrate placed in the reaction chamber.
【図面の簡単な説明】
第１図は本発明の真空用放電灯の一実施例を示す外観構
成図、第２図は第１図の要部拡大断面図、第３図は第１
図の要部の他の実施例を示す拡大断面図、第４図は本発
明の光ＣＶＤ装置の一実施例を示す概略的構成図、第５
図は従来の真空用放電灯の要部を示す断面図である。
１・・・・・・放電灯容器、
２・・・・・・真空フランジ、
３・・・・・・ステム、
４・・・・・・細管、
５・・・・・・電力供給線、
６ａ、６ｂ・・・・・・シール材、
９・・・・・・収納部、
１０・・・・・・気密接続部、
】１・・・・・・電極、
１２・・・・・・ゲッター
２１．２２・・・・・・Ｏリング、
２８・・・・・・セメント、
３１・・・・・・熱電対、
３２・・・・・・水冷部、
３３・・・・・・水冷パイプ、
３４・・・・・・電磁弁、
３５・・・・・・温度調整器、
５１・・・・・・反応容器、
５２・・・・・・光透過窓、
５３・・・・・・光源室、
５４・・・・・・反応室、
５５・・・・・・反応ガスノ
５６・・・・・・排気口、
５７・・・・・・加熱機構、
５８・・・・・・サセプタ、
５９・・・・・・基板。
ズル、[Brief Description of the Drawings] Fig. 1 is an external configuration diagram showing one embodiment of the vacuum discharge lamp of the present invention, Fig. 2 is an enlarged sectional view of the main part of Fig. 1, and Fig. 3 is an enlarged sectional view of the main part of Fig.
FIG. 4 is a schematic configuration diagram showing one embodiment of the optical CVD apparatus of the present invention; FIG.
The figure is a sectional view showing the main parts of a conventional vacuum discharge lamp. DESCRIPTION OF SYMBOLS 1...Discharge lamp container, 2...Vacuum flange, 3...Stem, 4...Thin tube, 5...Power supply line, 6a, 6b... Seal material, 9... Storage section, 10... Airtight connection part, ]1... Electrode, 12... Getter 21.22...O ring, 28...Cement, 31...Thermocouple, 32...Water cooling section, 33...Water cooling Pipe, 34...Solenoid valve, 35...Temperature regulator, 51...Reaction container, 52...Light transmission window, 53...・Light source chamber, 54...Reaction chamber, 55...Reaction gas outlet 56...Exhaust port, 57...Heating mechanism, 58... Susceptor, 59...Substrate. Cheating,
Claims (4)
置され、前記放電灯端部はその内部が真空領域を形成す
る収納部に配置されると共に放電灯端部に接続される電
力供給線が前記真空領域外側に取り出されているものに
おいて、前記放電灯端部と前記収納部内壁との間隙の少
なくとも一部に熱伝導率が０．０１〜０．４Ｗ／ｃｍ・
ｄｅｇに調整されたセメントが充填されていることを特
徴とする真空用放電灯。(1) The discharge lamp container and the end of the discharge lamp are each arranged in a vacuum region, and the end of the discharge lamp is arranged in a storage part whose inside forms the vacuum region, and the electric power is connected to the end of the discharge lamp. In the case where the supply line is taken out to the outside of the vacuum region, at least a part of the gap between the end of the discharge lamp and the inner wall of the storage part has a thermal conductivity of 0.01 to 0.4 W/cm.
A vacuum discharge lamp characterized by being filled with cement adjusted to deg.
トであることを特徴とする請求項（１）記載の真空用放
電灯。(2) The vacuum discharge lamp according to claim (1), wherein the cement is a cement whose main component is alumina.
た細管を設け、該細管内に電力供給線が内蔵されると共
に細管を前記収納部に形成された孔を貫通して収納部外
部の大気中に取り出し、前記細管と収納部に形成された
孔部との間隙にシール部を形成したことを特徴とする請
求項（１）記載の真空用放電灯。(3) A thin tube connected to the end of the discharge lamp and having a diameter smaller than that of the end is provided, and a power supply line is built in the thin tube, and the thin tube is passed through a hole formed in the housing part. 2. The vacuum discharge lamp according to claim 1, wherein the vacuum discharge lamp is taken out into the atmosphere outside the storage portion, and a seal portion is formed in a gap between the thin tube and a hole formed in the storage portion.
室と反応室とに区画し、前記光源室に真空用放電灯を配
置したものにおいて、前記光源室に放電灯容器が配置さ
れ、前記光源室に連通して収納部が設けられ、電力供給
線が光源室外部の大気中に取り出されており、前記収納
部内壁と放電灯端部との間隙の少なくとも一部に熱伝導
率が０．０１〜０．４Ｗ／ｃｍ・ｄｅｇに調整されたセ
メントが充填されていることを特徴とする光ＣＶＤ装置
。(4) The inside of the reaction vessel is divided into a light source chamber and a reaction chamber through a replaceable light transmission window, and a vacuum discharge lamp is disposed in the light source chamber, and the discharge lamp vessel is disposed in the light source chamber. A storage section is provided in communication with the light source chamber, a power supply line is taken out to the atmosphere outside the light source chamber, and a heat conduction section is provided in at least a part of the gap between the inner wall of the storage section and the end of the discharge lamp. A photo-CVD device characterized in that it is filled with cement whose rate is adjusted to 0.01 to 0.4 W/cm·deg.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2164599A JPH0456034A (en) | 1990-06-21 | 1990-06-21 | Discharge lamp for vacuum and light cvd device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2164599A JPH0456034A (en) | 1990-06-21 | 1990-06-21 | Discharge lamp for vacuum and light cvd device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0456034A true JPH0456034A (en) | 1992-02-24 |
Family
ID=15796243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2164599A Pending JPH0456034A (en) | 1990-06-21 | 1990-06-21 | Discharge lamp for vacuum and light cvd device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0456034A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109053047A (en) * | 2018-09-04 | 2018-12-21 | 唐山市金羿仪器仪表有限公司 | Fast thermocouple idol head accessory and preparation method thereof |
-
1990
- 1990-06-21 JP JP2164599A patent/JPH0456034A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109053047A (en) * | 2018-09-04 | 2018-12-21 | 唐山市金羿仪器仪表有限公司 | Fast thermocouple idol head accessory and preparation method thereof |
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