JPH0452668Y2 - - Google Patents
Info
- Publication number
- JPH0452668Y2 JPH0452668Y2 JP4119287U JP4119287U JPH0452668Y2 JP H0452668 Y2 JPH0452668 Y2 JP H0452668Y2 JP 4119287 U JP4119287 U JP 4119287U JP 4119287 U JP4119287 U JP 4119287U JP H0452668 Y2 JPH0452668 Y2 JP H0452668Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- analyzer
- span
- way solenoid
- zero
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 98
- 238000011144 upstream manufacturing Methods 0.000 claims description 15
- 238000004458 analytical method Methods 0.000 claims description 11
- 238000010586 diagram Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 238000004868 gas analysis Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000008685 targeting Effects 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Description
【考案の詳細な説明】
〔産業上の利用分野〕
本考案は、サンプルガス中の各種の成分を各別
に分析するためのガス分析装置に関するものであ
る。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a gas analyzer for individually analyzing various components in a sample gas.
上記のガス分析装置として、例えば第５図に示
すように、サンプルガスの供給管１に複数台の分
析計A1〜Aoをシリーズに介装すると共に、各分
析計校正のために、最上流の分析計A1の上流側
に、１本のゼロ校正用のガス供給管４と、分析計
A1〜Aoの数に対応した複数本のスパン校正用の
ガス供給管５……を接続したものがある。尚、図
中のＺはゼロガスの供給源、S1〜Soはスパンガス
の供給源であり、SV1は三方口電磁弁、V1〜
Vo+1は二方口電磁弁である。
As shown in Figure 5, for example, the above gas analyzer is equipped with a plurality of analyzers A1 to Ao installed in series in the sample gas supply pipe 1, and the most suitable analyzer is used for calibration of each analyzer. On the upstream side of the upstream analyzer A 1 , there is one gas supply pipe 4 for zero calibration and the analyzer
There is one in which a plurality of span calibration gas supply pipes 5 corresponding to the numbers A 1 to A o are connected. In addition, Z in the figure is a zero gas supply source, S 1 ~ S o is a span gas supply source, SV 1 is a three-way solenoid valve, and V 1 ~
V o+1 is a two-way solenoid valve.
かかるガス分析装置によれば、複数台の分析計
A1〜Aoがサンプルガス供給管１にシリーズに介
装されているので、特にサンプルガスの流量が少
ないフローを対象にする場合に有効であるが、分
析計A1〜Aoの校正に手間取る上、校正の制御が
複雑になる点で改善の余地があつたのである。
According to such a gas analyzer, multiple analyzers can be used.
Since A 1 to A o are installed in series in the sample gas supply pipe 1, it is particularly effective when targeting a flow with a small sample gas flow rate. There was room for improvement in that it was time consuming and the calibration control was complicated.
即ち、上記複数台の分析計A1〜Aoを校正する
に際して、先ず、前記三方口電磁弁SV1ならびに
ゼロガス用の二方口電磁弁V1をON（このときの
ガスの流れ方向を実線の矢符ｃで示す。）に切り
換えて、前記分析計A1〜Aoへのサンプルガスの
供給を停止し且つ前記ゼロガス供給源Ｚからゼロ
ガスをサンプルガス供給管１に供給し、該ゼロガ
スを前記シリーズに接続された分析計A1〜Aoに
供給して、このゼロガスを基にして各分析計A1
〜Aoのゼロ校正を行い、次いで、前記ゼロガス
用の二方口電磁弁V1のみをOFFに切り換えてゼ
ロガスの供給を停止すると共に、残りの二方口電
磁弁V2〜Vo+1を順次１個ずつON（このときのガ
スの流れ方向を仮想線の矢符ｄで示す。）にする
ように、分析計A1〜Aoのスパン校正完了毎に当
該二方口電磁弁V2〜Vo+1を順次ONに切り換え
て、夫々成分の異なるスパンガスをサンプルガス
供給管１を通して分析計A1〜Aoに順次供給し、
この線分の異なるスパンガスを基にして前記分析
計A1〜Aoのスパン校正を順次行うものである。
このときの弁開閉の制御手順図を第６図に示す。 That is, when calibrating the plurality of analyzers A 1 to A o , first turn on the three-way solenoid valve SV 1 and the two-way solenoid valve V 1 for zero gas (the flow direction of the gas at this time is indicated by the solid line). ), the supply of sample gas to the analyzers A 1 to A o is stopped, and zero gas is supplied from the zero gas supply source Z to the sample gas supply pipe 1, and the zero gas is The zero gas is supplied to the analyzers A 1 to A o connected to the series, and each analyzer A 1 is supplied based on this zero gas.
~ A o is zero-calibrated, and then only the two-way solenoid valve V 1 for zero gas is turned OFF to stop the supply of zero gas, and the remaining two-way solenoid valves V 2 ~ V o+1 are switched off. Each time the span calibration of the analyzers A 1 to A o is completed, the two-way solenoid valve V 2 to V o+1 are sequentially turned on, and span gases with different components are sequentially supplied to the analyzers A 1 to A o through the sample gas supply pipe 1,
Span calibration of the analyzers A 1 to A o is sequentially performed based on different span gases for this line segment.
A control procedure diagram for opening and closing the valve at this time is shown in FIG.
而して、この第６図に示す弁開閉の制御手順
図、並びに、第７図に示すガス切り換え供給のシ
ーケンス図面で明らかなように、上記スパン校正
を各分析計毎に行わねばならないことから、該分
析計A1〜Aoのスパン校正を順次完了するたびに、
前記二方口電磁弁V2〜Vo+1を所定通り順次１個
ずつON，OFF操作しなければならず、分析計A1
〜Aoの数量が多くなるほど、更には、先に流し
たスパンガスと次に流すスパンガスとの置換を完
全に行わせる上で、上記スパン校正の時間が長く
かかると共に、延いてはサンプルガスの成分分析
の測定が不能になる時間（欠測時間）が長くな
り、その上、前記スパンガスを順次分析計A1〜
Aoに供給させる点において、スパンガス用の二
方口電磁弁V2〜Vo+1に対する弁開閉の制御系が
複雑になる欠点があつたのである。 As is clear from the valve opening/closing control procedure diagram shown in Figure 6 and the gas switching and supply sequence diagram shown in Figure 7, the above span calibration must be performed for each analyzer. , each time the span calibration of the analyzers A 1 to A o is completed in sequence,
The two-way solenoid valves V 2 to V o+1 must be turned ON and OFF one by one as specified, and the analyzer A 1
~The larger the quantity of A o , the longer the above span calibration will take to completely replace the span gas that flowed first with the span gas that flows next, and the composition of the sample gas will increase. The time during which analytical measurements are impossible (missing measurement time) becomes longer, and in addition, the span gas is sequentially
In the point of supplying Ao , there was a drawback that the control system for opening and closing the two-way solenoid valves V2 to Vo+1 for span gas was complicated.
本考案は、かかる実情に鑑みて案出されたもの
であつて、極めて簡単な制御によつて複数台の分
析計に対するスパン校正を短時間で行えるガス分
析装置を提供せんとしている。 The present invention was devised in view of the above circumstances, and aims to provide a gas analyzer that can perform span calibration for a plurality of analyzers in a short time using extremely simple control.
上記の目的を達成するために本考案は、サンプ
ルガスの供給管に複数台の分析計をシリーズに介
装すると共に、最上流の分析計の上流側にはゼロ
ガスの供給管を接続する一方、夫々成分の異なる
スパンガスを各分析計の上流側に供給するための
スパンガスの供給管と、該スパンガスを各分析計
の下流側において分析系外に排気する排気管を、
夫々前記サンプルガス供給管に接続し、かつ、前
記サンプルガスを各分析計に供給する第１状態
と、前記ゼロガスを前記各分析計に供給する第２
状態、及び、前記スパンガスを前記各分析計に各
別に且つ時間的に同時に供給すると共に該スパン
ガスを各分析計の下流側において分析系外に排気
する第３状態を、夫々切り換え現出させる制御機
構を設けた点に特徴がある。
In order to achieve the above object, the present invention has a plurality of analyzers interposed in series in the sample gas supply pipe, and a zero gas supply pipe is connected to the upstream side of the most upstream analyzer. A span gas supply pipe for supplying span gases with different components to the upstream side of each analyzer, and an exhaust pipe for exhausting the span gas out of the analysis system on the downstream side of each analyzer.
a first state in which the sample gas is connected to the sample gas supply pipe and supplies the sample gas to each analyzer; and a second state in which the zero gas is supplied to each analyzer.
and a control mechanism for switching and displaying a third state in which the span gas is supplied to each of the analyzers separately and simultaneously in time, and the span gas is exhausted out of the analysis system on the downstream side of each analyzer. It is distinctive in that it has been established.
上記の特徴構成によれば、第１状態を現出する
ことで、複数台の分析計によるサンプルガスの成
分分析が行われ、かつ第２状態を現出することで
上記複数台の分析計に同時にゼロガスを流すゼロ
校正が行われ、そして第３状態を現出することで
前記複数台の分析計に各別に且つ時間的に同時に
スパンガスを流すスパン校正が行われる。
According to the above characteristic configuration, by manifesting the first state, component analysis of the sample gas is performed by the plurality of analyzers, and by manifesting the second state, the component analysis of the sample gas is performed by the plurality of analyzers. At the same time, zero calibration is performed by flowing zero gas, and by developing the third state, span calibration is performed by flowing span gas into each of the plurality of analyzers individually and temporally simultaneously.
以下、本考案の実施例を図面に基づいて説明す
ると、第１図は校正手段を備えたガス分析装置の
フロー図面を示し、１はサンプルガスの供給管
で、該サンプルガス供給管１には、前記サンプル
ガス中の各種の成分を分析するための複数台の分
析計A1〜Aoがシリーズに介装され、かつ当該各
分析計A1〜Aoの上流側には、三方口電磁弁SV1
〜SVoが設けられている。そして、この内の最上
流のものを除く三方口電磁弁SV2〜SVoの残りの
弁口にわたつて排気管２を接続すると共に、当該
排気管２を最下流の分析計Aoの下流側における
排気管３に連通接続してある。
Hereinafter, embodiments of the present invention will be described based on the drawings. FIG. 1 shows a flow diagram of a gas analyzer equipped with a calibration means, 1 is a sample gas supply pipe; , a plurality of analyzers A1 to Ao are installed in series for analyzing various components in the sample gas, and a three-way electromagnetic port is installed upstream of each of the analyzers A1 to Ao . Valve SV 1
~SV o is provided. Then, the exhaust pipe 2 is connected across the remaining valve ports of the three-way solenoid valves SV 2 to SV o excluding the most upstream one, and the exhaust pipe 2 is connected to the downstream of the most downstream analyzer A o . It is connected to the exhaust pipe 3 on the side.
Ｚはゼロガスの供給源、S1〜Soはスパンガスの
供給源で、これらの供給源Ｚ、S1〜Soに接続の供
給管４，５……の夫々には、二方口電磁弁V1〜
Vo+1が介装されている。 Z is a zero gas supply source, S 1 to S o are span gas supply sources, and each of the supply pipes 4, 5, etc. connected to these supply sources Z and S 1 to S o is equipped with a two-way solenoid valve. V1 ～
V o+1 is interposed.
この内のゼロガス供給源Ｚとスパンガス供給源
S1に接続の供給管４，５が互いに連通接続されて
いて、その連通管６が最上流の分析計A1の上流
側の三方口電磁弁SV1の残りの弁口に連通接続さ
れており、かつ、残りのスパンガス供給源S2〜So
に接続の供給管５……が、最上流から２番目の分
析計A2〜Aoとそれの上流側の三方口電磁弁SV2
〜SVoとの間のサンプルガス供給管１に連通接続
されている。 Of these, zero gas supply source Z and span gas supply source
Supply pipes 4 and 5 connected to S 1 are connected in communication with each other, and the communication pipe 6 is connected in communication with the remaining valve ports of the three-way solenoid valve SV 1 on the upstream side of the most upstream analyzer A 1 . and the remaining span gas supply source S 2 ~ S o
The supply pipe 5 connected to... is the second analyzer from the most upstream, A 2 to A o , and the three-way solenoid valve SV 2 upstream of it.
-SV o is connected to the sample gas supply pipe 1.
上記構成のガス分析装置において、それの二方
口電磁弁V1〜Vo+1ならびに三方口電磁弁SV1〜
SVoを第２図に示す弁開閉の制御図に基づいて開
閉させる制御機構７を設けてある。 In the gas analyzer having the above configuration, the two-way solenoid valves V 1 to V o+1 and the three-way solenoid valves SV 1 to
A control mechanism 7 is provided that opens and closes the SV o based on a valve opening and closing control diagram shown in FIG.
ずなわち、前記二方口電磁弁V1〜Vo+1ならび
に三方口電磁弁SV1〜SVoの全てをOFF（このと
きの三方口電磁弁SV1〜SVoのガスの流れ方向を
実線の矢符ａで示す。）にして、前記サンプルガ
スを各分析計A1〜Aoに順次供給するサンプルガ
ス分析の第１状態Ｘと、
上記二方口電磁弁V1〜Vo+1のうちのゼロガス
用の二方口電磁弁V1と三方口電磁弁SV1〜SVoの
うちの最上流の三方口電磁弁SV1のみをON（この
ときの三方口電磁弁SV1のガスの流れ方向を仮想
線の矢符ｂで示す。）にして、前記ゼロガスを前
記各分析計A1〜Aoに順次供給する第２状態Ｙ、
及び、前記ゼロガス用の二方口電磁弁V1を
OFFに且つ残りの二方口電磁弁V2〜Vo+1と三方
口電磁弁SV2〜SVoの全てをON（このときの三方
口電磁弁SV2〜SVoのガスの流れ方向も仮想線の
矢符ｂで示す。）にして、前記各分析計A1〜Aoに
対して成分の異なるスパンガスを各別に且つ時間
的に同時に供給すると共に、該スパンガスを各分
析計A1〜Aoの下流側から排気管２，３を通して
分析系外に排気する第３状態Ｚを、夫々切り換え
現出させるさせるように制御機構７を構成してあ
る。 That is, all of the two-way solenoid valves V 1 to V o+1 and the three-way solenoid valves SV 1 to SV o are turned off (at this time, the gas flow direction of the three-way solenoid valves SV 1 to SV o is A first state X of sample gas analysis in which the sample gas is sequentially supplied to each of the analyzers A 1 to A o (indicated by a solid arrow a), and the two-way solenoid valves V 1 to V o+ Turn on only the two-way solenoid valve V 1 for zero gas and the most upstream three-way solenoid valve SV 1 of the three-way solenoid valves SV 1 to SV o (at this time, the three-way solenoid valve SV 1 a second state Y in which the zero gas is sequentially supplied to each of the analyzers A 1 to A o , with the gas flow direction indicated by an imaginary arrow b; and a two-way solenoid valve for the zero gas. V 1
OFF, and turn on all of the remaining two-way solenoid valves V 2 to V o+1 and three-way solenoid valves SV 2 to SV o (at this time, the gas flow direction of the three-way solenoid valves SV 2 to SV o is also ), span gases having different components are supplied to each of the analyzers A 1 to A o separately and at the same time, and the span gas is supplied to each of the analyzers A 1 to A o at the same time. The control mechanism 7 is configured to switch over and bring about the third state Z in which the air is exhausted from the downstream side of A o to the outside of the analysis system through the exhaust pipes 2 and 3.
かかる構成によれば、上記第２及び第３状態
Ｙ，Ｚを現出させることで、分析計A1〜Aoのゼ
ロ校正ならびにスパン校正をおこなうことができ
る。 According to this configuration, by making the second and third states Y and Z appear, zero calibration and span calibration of the analyzers A 1 to A o can be performed.
このゼロ校正ならびにスパン校正に際してのガ
ス切り換えのシーケンスは第３図に示す通りであ
り、即ち従来のように、各分析計A1〜Aoのスパ
ン校正を完了するたびに二方口電磁弁V2〜Voを
順次１個ずつON，OFF操作することなく連続的
に、しかもガス置換の時間を待たずに、各分析計
A1〜Aoのスパン校正を行うことができるのであ
り、従来に比べて校正時間を短縮することができ
る。 The sequence of gas switching during this zero calibration and span calibration is as shown in Figure 3. That is, as in the past, each time the span calibration of each analyzer A 1 to A o is completed, the two-way solenoid valve V 2 to each analyzer without turning ON and OFF V o one by one, and without waiting for gas replacement.
Span calibration of A 1 to A o can be performed, and the calibration time can be shortened compared to the conventional method.
また、第２図の弁開閉の制御図から明らかなよ
うに、分析計A1〜Aoのゼロ校正に際しては、サ
ンプルガスの成分分析の状態から夫々１個の二方
口電磁弁V1と三方口電磁弁SV1のみをONに切り
換えるだけであり、そして、該ゼロ校正後におけ
るスパン校正に際しては、上記二方口電磁弁V1
をOFFに且つ残りの二方口電磁弁V2〜Vo+1と三
方口電磁弁SV2〜SVoをONに切り換えるだけで
あつて、ゼロ校正とスパン校正のための弁開閉の
制御系が極めて単純なものとなる。 Furthermore, as is clear from the valve opening/closing control diagram in Fig. 2, when zero-calibrating the analyzers A 1 to A o , one two-way solenoid valve V 1 and one two-way solenoid valve V 1 and one each are adjusted based on the state of component analysis of the sample gas. Only the three-way solenoid valve SV 1 is turned ON, and when span calibration is performed after the zero calibration, the two-way solenoid valve V 1 is turned ON.
OFF and the remaining two-way solenoid valves V 2 to V o+1 and three-way solenoid valves SV 2 to SV o are turned ON, and the valve opening/closing control system for zero calibration and span calibration is completed. becomes extremely simple.
尚、弁配置の構成は上記の通りに特定されるも
のではなく、例えば第４図に示すような変形が可
能である。この第４図において、二方口電磁弁を
Ｖ、三方口電磁弁をSVで示し、その他、第１図
に示すものと同じ構成部品には同符号を付して説
明を省略する。 Note that the configuration of the valve arrangement is not limited to the above-mentioned configuration, and may be modified as shown in FIG. 4, for example. In FIG. 4, a two-way solenoid valve is designated by V, a three-way solenoid valve is designated by SV, and other components that are the same as those shown in FIG. 1 are given the same reference numerals and their explanations will be omitted.
また本考案は、２台の分析計A1〜A2を備える
ガス分析装置や、それ以上の分析計A1〜Aoを備
えるガス分析装置を対象にしており、例えば２台
の分析計A1〜A2を備えるガス分析装置を構成す
るには、第４図において仮想線で囲つた範囲の構
成となる。 Furthermore, the present invention is intended for a gas analyzer equipped with two analyzers A 1 to A 2 or a gas analyzer equipped with more analyzers A 1 to A o , for example, a gas analyzer equipped with two analyzers A 1 to A 2 1 to A2 , the configuration is within the range surrounded by the imaginary line in FIG. 4.
以上説明したように本考案のガス分析装置によ
れば、サンプルガスの成分分析を行つている第１
状態から第２状態を切り換え現出させることで、
従来通り複数台の分析計に同時にゼロガスを流す
ゼロ校正が行われ、この後に第３状態を切り換え
現出させることで、上記複数台の分析計に各別に
且つ時間的に同時に線分の異なるスパンガスを流
すスパン校正が行われる。
As explained above, according to the gas analyzer of the present invention, the first
By switching from the state to the second state and making it appear,
As before, zero calibration is performed by flowing zero gas into multiple analyzers at the same time, and after this, by switching and making the third state appear, the multiple analyzers are supplied with different span gases for different line segments simultaneously and temporally. Span calibration is performed to flow the current.
而して従来のように、各分析計のスパン校正を
完了するたびに順次１個ずつ弁をON，OFF操作
することなく、しかも、ガス置換の時間を待たず
に、連続的に各分析計のスパン校正を行うことが
できるのであり、従来に比べて校正時間を大幅に
短縮することができる。 This allows you to continuously operate each analyzer without turning the valves ON and OFF one by one each time you complete the span calibration of each analyzer, as in the past, and without waiting for gas replacement. span calibration can be performed, and the calibration time can be significantly shortened compared to the conventional method.
また、分析計のゼロ校正ならびにスパン校正に
際しての弁開閉の制御系を極めて単純なON，
OFF構成のものにでき、全体として、極めて簡
単な制御によつて複数台の分析計の校正を短時間
で行い得るコスト的に安価なガス分析装置を提供
できるに至つたのである。 In addition, the valve opening/closing control system for zero calibration and span calibration of the analyzer is extremely simple.
This makes it possible to provide an inexpensive gas analyzer that can calibrate multiple analyzers in a short period of time with extremely simple control.
第１図はガス分析装置の形態図、第２図は弁開
閉の制御手順図、第３図はサンプルガスの成分分
析ならびに校正のシーケンス図面である。そして
第４図は別実施例のガス分析装置の形態図であ
る。第５図以降は従来例を示し、第５図はガス分
析装置の形態図、第６図は弁開閉の制御手順図、
第７図はサンプルガスの成分分析ならびに校正の
シーケンス図面である。
１……サンプルガス供給管、２，３……排気
管、４……ゼロガス供給管、５……スパンガス供
給管、７……制御機構、Ｘ……第１状態、Ｙ……
第２状態、Ｚ……第３状態。
FIG. 1 is a configuration diagram of a gas analyzer, FIG. 2 is a control procedure diagram for opening and closing a valve, and FIG. 3 is a sequence diagram for component analysis and calibration of a sample gas. FIG. 4 is a configuration diagram of a gas analyzer according to another embodiment. Fig. 5 and subsequent figures show conventional examples, Fig. 5 is a configuration diagram of a gas analyzer, Fig. 6 is a control procedure diagram of valve opening and closing,
FIG. 7 is a sequence drawing of sample gas component analysis and calibration. DESCRIPTION OF SYMBOLS 1... Sample gas supply pipe, 2, 3... Exhaust pipe, 4... Zero gas supply pipe, 5... Span gas supply pipe, 7... Control mechanism, X... First state, Y...
2nd state, Z...3rd state.
Claims (1)
ーズに介装すると共に、最上流の分析計の上流側
にはゼロガスの供給管を接続する一方、夫々成分
の異なるスパンガスを各分析計の上流側に供給す
るためのスパンガスの供給管と、該スパンガスを
各分析計の下流側において分析系外に排気する排
気管を、夫々前記サンプルガス供給管に接続し、
かつ、前記サンプルガスを各分析計に供給する第
１状態と、前記ゼロガスを前記各分析計に供給す
る第２状態、及び、前記スパンガスを前記各分析
計に各別に且つ時間的に同時に供給すると共に該
スパンガスを各分析計の下流側において分析系外
に排気する第３状態を、夫々切り換え現出させる
制御機構を設けて成るガス分析装置。 Multiple analyzers are connected in series to the sample gas supply pipe, and the zero gas supply pipe is connected to the upstream side of the most upstream analyzer, while span gases with different components are connected to the upstream side of each analyzer. A span gas supply pipe for supplying the span gas to the sample gas supply pipe and an exhaust pipe for exhausting the span gas out of the analysis system on the downstream side of each analyzer are respectively connected to the sample gas supply pipe,
and a first state in which the sample gas is supplied to each analyzer, a second state in which the zero gas is supplied to each analyzer, and a span gas is supplied to each analyzer separately and temporally simultaneously. A gas analyzer comprising a control mechanism for switching and displaying a third state in which the span gas is exhausted out of the analysis system on the downstream side of each analyzer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4119287U JPH0452668Y2 (en) | 1987-03-20 | 1987-03-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4119287U JPH0452668Y2 (en) | 1987-03-20 | 1987-03-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63148850U JPS63148850U (en) | 1988-09-30 |
| JPH0452668Y2 true JPH0452668Y2 (en) | 1992-12-10 |
Family
ID=30855966
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4119287U Expired JPH0452668Y2 (en) | 1987-03-20 | 1987-03-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0452668Y2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5084395B2 (en) * | 2007-08-10 | 2012-11-28 | 紀本電子工業株式会社 | Gas measuring instrument |
| JP4826570B2 (en) * | 2007-10-19 | 2011-11-30 | 株式会社島津製作所 | Gas flow switching device |
-
1987
- 1987-03-20 JP JP4119287U patent/JPH0452668Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63148850U (en) | 1988-09-30 |
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