JPH0451138U

JPH0451138U -

Info

Publication number: JPH0451138U
Application number: JP9305790U
Authority: JP
Priority date: 1990-09-04
Filing date: 1990-09-04
Publication date: 1992-04-30

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は実施例の正面図、第２図は第１図の
−断面図である。１……板状基板、３ａ，３ｂ……カセツト、４
……テーブル、５……リフタ、７……搬送手段、
８……レール、９……台座、１０……ガイド、１
１……保持具、１２……コイルばね。 FIG. 1 is a front view of the embodiment, and FIG. 2 is a cross-sectional view taken from FIG. 1. 1... Plate substrate, 3a, 3b... Cassette, 4
... table, 5 ... lifter, 7 ... conveyance means,
8...Rail, 9...Pedestal, 10...Guide, 1
1... Holder, 12... Coil spring.

Claims

【実用新案登録請求の範囲】１一対のカセツトを載せるテーブルと、このテ
ーブルの上方に配置され板状基板の外周を保持可
能な複数対の保持具と、この保持具を板厚方向に
摺動させるガイドと、前記保持具の各ピツチを等
ピツチで変化させる可変等ピツチ手段と、前記複
数対の保持具を前記一対のカセツト間で移動させ
る搬送手段とからなることを特徴とする板状基板
のカセツト間の積替装置。２請求項１記載の板状基板のカセツト間の積替
装置において、前記カセツトを上下に貫通し前記板状基板を保
持して昇降するリフトを前記テーブルに設けるこ
とを特徴とする板状基板のカセツト間の積替装置
。３請求項１又は２記載の板状基板のカセツト間
の積替装置において、前記可変等ピツチ手段は、前記保持具に係合し
て前記ガイドと平行なコイルばねと、このコイル
ばねの一端を伸縮させる直線運動機構とからなる
ことを特徴とする板状基板のカセツト間の積替装
置。４請求項１又は２記載の板状基板のカセツト間
の積替装置において、前記可変等ピツチ手段は、前記保持具に係合し
て前記ガイドと平行な円筒溝カムと、この円筒溝
カムを回転させる回転運動機構とからなることを
特徴とする板状基板のカセツト間の積替装置。[Claims for Utility Model Registration] 1. A table on which a pair of cassettes are placed, a plurality of pairs of holders arranged above the table and capable of holding the outer periphery of a plate-shaped substrate, and a sliding movement of the holders in the thickness direction of the plate. a variable pitch means for changing the pitch of each of the holders at equal pitches; and a conveyance means for moving the plurality of pairs of holders between the pair of cassettes. Transfer equipment between cassettes. 2. The device for transferring plate-shaped substrates between cassettes according to claim 1, wherein the table is provided with a lift that vertically passes through the cassettes and moves up and down while holding the plate-shaped substrates. Transfer device between cassettes. 3. The device for transferring between cassettes of plate-like substrates according to claim 1 or 2, wherein the variable pitch means engages with the holder and connects a coil spring parallel to the guide and one end of the coil spring. A device for transferring plate-like substrates between cassettes, characterized by comprising a linear motion mechanism that expands and contracts. 4. The device for transferring plate-shaped substrates between cassettes according to claim 1 or 2, wherein the variable pitch means includes a cylindrical groove cam that engages with the holder and is parallel to the guide, and a cylindrical groove cam that is parallel to the guide. 1. A transfer device between cassettes of plate-like substrates, characterized by comprising a rotational movement mechanism for rotating plate-like substrates.