JPH0450914A - Dynamic pressure fluid bearing type optical deflector - Google Patents
Dynamic pressure fluid bearing type optical deflectorInfo
- Publication number
- JPH0450914A JPH0450914A JP15719090A JP15719090A JPH0450914A JP H0450914 A JPH0450914 A JP H0450914A JP 15719090 A JP15719090 A JP 15719090A JP 15719090 A JP15719090 A JP 15719090A JP H0450914 A JPH0450914 A JP H0450914A
- Authority
- JP
- Japan
- Prior art keywords
- dynamic pressure
- elastic member
- thrust
- bearing
- optical deflector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 title claims description 23
- 230000003287 optical effect Effects 0.000 title claims description 17
- 229920001971 elastomer Polymers 0.000 claims abstract description 4
- 229920006311 Urethane elastomer Polymers 0.000 claims abstract description 3
- 229920002379 silicone rubber Polymers 0.000 claims abstract description 3
- 239000004945 silicone rubber Substances 0.000 claims abstract description 3
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 229920001973 fluoroelastomer Polymers 0.000 claims description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 abstract 1
- 229910052731 fluorine Inorganic materials 0.000 abstract 1
- 239000011737 fluorine Substances 0.000 abstract 1
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000002079 cooperative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
Landscapes
- Sliding-Contact Bearings (AREA)
- Support Of The Bearing (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Exposure Or Original Feeding In Electrophotography (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は情報機器、画像機器、計測機器に用いられる動
圧流体軸受型光偏向器に関するものであり、主として組
立時におけるスラスト動圧軸受の高精度保持機構に関す
る。Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a dynamic pressure fluid bearing type optical deflector used in information equipment, imaging equipment, and measuring equipment, and mainly relates to a thrust dynamic pressure bearing type optical deflector used in information equipment, imaging equipment, and measuring equipment. Regarding high precision holding mechanism.
（従来の技術） 以下、第４図〜第７図を用いて従来例を説明する。(Conventional technology) Hereinafter, a conventional example will be explained using FIGS. 4 to 7.
第４図は従来の一実施例を示すものであり、１はケース
基台９に設けた固定軸、２は固定軸ｌに外嵌する中空回
転軸、３は中空回転軸２の下側とケース基台９との間に
設けたスラスト動圧軸受、４は回転軸２の外周に設けた
回転多面鏡、５は回転軸２に設けた駆動用磁石、６はコ
イル１０を巻回したステータで、駆動用磁石５に対面す
るようにケース側壁８に配設される。７はケースのカバ
部材である。固定軸１の外周面には、第５図に示すよう
な動圧発生用溝ａ、ａが、又スラスト動圧軸受３の上面
にも、第６図に示すような動圧発生用溝す、ｂがそれぞ
れ刻設されている。FIG. 4 shows a conventional embodiment, in which 1 is a fixed shaft provided on the case base 9, 2 is a hollow rotating shaft that is fitted onto the fixed shaft l, and 3 is the lower side of the hollow rotating shaft 2. A thrust dynamic pressure bearing provided between the case base 9, 4 a rotating polygon mirror provided on the outer periphery of the rotating shaft 2, 5 a driving magnet provided on the rotating shaft 2, and 6 a stator around which a coil 10 is wound. It is arranged on the case side wall 8 so as to face the driving magnet 5. 7 is a cover member of the case. The outer peripheral surface of the fixed shaft 1 has grooves a, a for generating dynamic pressure as shown in FIG. 5, and the upper surface of the thrust dynamic pressure bearing 3 has grooves for generating dynamic pressure as shown in FIG. , b are respectively engraved.
ステータ６に設けられたコイル１０に通電すると、コイ
ル１０の励磁作用と中空回転軸２の外周に固着した駆動
用磁石５との共働作用によりトルクが発生し、回転軸２
が回転するので、同時に回転多面鏡３も回転する。固定
軸ｌは中空回転軸２と半径方向に数ミクロンという微少
すきまを有した状態で外嵌されている。このため、微少
すきま内の流体は、溝ａ、ａを流れラジアル方向へ圧力
を発生し、固定軸に対し中空回転軸２を非接触状態〒支
持することになる。When the coil 10 provided in the stator 6 is energized, torque is generated due to the excitation action of the coil 10 and the cooperative action of the driving magnet 5 fixed to the outer periphery of the hollow rotating shaft 2.
rotates, so the rotating polygon mirror 3 also rotates at the same time. The fixed shaft 1 is fitted onto the hollow rotary shaft 2 with a minute gap of several microns in the radial direction. Therefore, the fluid within the minute gap flows through the grooves a, a and generates pressure in the radial direction, supporting the hollow rotating shaft 2 in a non-contact manner with respect to the fixed shaft.
スラスト動圧軸受３についても同様である。スラスト動
圧軸受３は中空回転軸２の底面と対向するように設置さ
れており、中空回転軸２の回転に伴ない、第６図に示す
ように、溝す、ｂにより流体を軸の中心へ送り込む。こ
のため圧力を発生し、スラスト方向を非接触で支持する
ことになる。The same applies to the thrust dynamic pressure bearing 3. The thrust dynamic pressure bearing 3 is installed so as to face the bottom surface of the hollow rotating shaft 2, and as the hollow rotating shaft 2 rotates, as shown in FIG. send to. Therefore, pressure is generated and the thrust direction is supported without contact.
このようにして、中空回転軸２を非接触状態で回転する
ことにより、回転多面鏡４の円滑回転が実施される。By rotating the hollow rotating shaft 2 in a non-contact manner in this manner, the rotating polygon mirror 4 is rotated smoothly.
（発明の解決しようとする課題）
しかしながら、前記従来例の構成では、発生する圧力と
いうものは小さいものであり、特にスラスト動圧軸受に
関しては、回転体の浮上量が数ミクロンというオーダー
であるため、安定した回転体の浮上量を得るのには組立
時の精度（固定軸とスラスト動圧軸受の直角度等）もそ
れ以下に押えなくてはならず、従って組立時に関係部材
の高精度な調整が必要となり、技術的困難性を伴う等の
問題点があった。(Problem to be Solved by the Invention) However, in the configuration of the conventional example, the pressure generated is small, especially in the case of thrust dynamic pressure bearings, since the flying height of the rotating body is on the order of several microns. In order to obtain a stable floating height of the rotating body, the accuracy during assembly (such as the perpendicularity between the fixed shaft and the thrust dynamic pressure bearing) must be kept below that level, and therefore the high precision of the related components must be maintained during assembly. There were problems such as the need for adjustments and technical difficulties.
本発明は前記の技術的困難性を克服して問題点を解決す
ることを目的とする。The present invention aims to overcome the above-mentioned technical difficulties and solve the problems.
（問題点を解決するための手段） 本発明は、前記課題を解決すべく以下構成を提供する。(Means for solving problems) The present invention provides the following configuration to solve the above problems.
基台に一端が固定された固定軸と、固定軸に外嵌する中
空回転軸と、固定軸の外周面にラジアル方向へ流体圧力
を発生するように設けた動圧発生溝と、回転軸の底面に
対向してスラスト方向へ流体圧力を発生する動圧発生用
溝を具えたスラスト動圧軸受とを有する動圧流体軸受型
光偏向器において、スラスト動圧軸受の下側と、基台と
の間に弾性部材を配設したことを特徴とする動圧流体軸
受型光偏向器であり５又基台に一端が固定された固定軸
と固定軸に外嵌する中空回転軸と固定軸の外周面にラジ
アル方向へ流体圧力を発生するように刻設した動圧発生
溝と中空回転軸と固定軸との間に収容され、固定軸に対
向するように設けられ、スラスト方向へ流体圧力を発生
する溝を具えたスラスト動圧軸受とを有する動圧流体軸
受型光偏向器において、中空回転軸の内側面とスラスト
動圧軸受との間に弾性部材を設けたことを特徴とする動
圧流体軸受型光偏向器である。A fixed shaft with one end fixed to the base, a hollow rotating shaft that fits onto the fixed shaft, a dynamic pressure generation groove provided on the outer peripheral surface of the fixed shaft to generate fluid pressure in the radial direction, and a rotary shaft of the rotating shaft. In a dynamic pressure fluid bearing type optical deflector having a thrust dynamic pressure bearing having a hydrodynamic pressure generation groove facing the bottom surface and generating fluid pressure in the thrust direction, the lower side of the thrust dynamic pressure bearing, the base and This is a dynamic pressure fluid bearing type optical deflector characterized by having an elastic member disposed between the fixed shaft, which has one end fixed to a five-pronged base, a hollow rotating shaft that fits around the fixed shaft, and a fixed shaft. It is housed between a dynamic pressure generation groove carved on the outer circumferential surface to generate fluid pressure in the radial direction, the hollow rotating shaft, and the fixed shaft, and is provided opposite to the fixed shaft to generate fluid pressure in the thrust direction. A dynamic pressure fluid bearing type optical deflector having a thrust dynamic pressure bearing equipped with a groove that generates a dynamic pressure, characterized in that an elastic member is provided between the inner surface of the hollow rotating shaft and the thrust dynamic pressure bearing. It is a fluid bearing type optical deflector.
（作 用）
本発明によれば、スラスト動圧軸受と基台の間に設けた
弾性部材、又は固定軸に対向するようにスラスト動圧溝
を具えたスラスト動圧軸受と中空回転軸との間に弾性部
材を配設することにより組立時に起きるスラスト動圧軸
受と固定軸との直角度等の精度を前記弾性部材の弾性変
形により修正することができる。(Function) According to the present invention, the elastic member provided between the thrust dynamic pressure bearing and the base, or the thrust dynamic pressure bearing provided with the thrust dynamic pressure groove facing the fixed shaft and the hollow rotating shaft. By arranging an elastic member between them, the accuracy of the perpendicularity between the thrust dynamic pressure bearing and the fixed shaft that occurs during assembly can be corrected by elastic deformation of the elastic member.
（実施例） 以下、本発明の一実施例を第１図を参照して説明する。(Example) An embodiment of the present invention will be described below with reference to FIG.
図中、弾性部材２０を除いては、従来例を図示する第４
図、第５図と同一の構成であり、同一符号を用いた部材
の説明を省略する。また、スラスト動圧軸受３、ラジア
ル方向への圧力発生溝ａ。In the figure, except for the elastic member 20, the fourth
The structure is the same as that in FIG. 5 and FIG. 5, and explanations of members using the same reference numerals will be omitted. Further, the thrust dynamic pressure bearing 3 has a pressure generating groove a in the radial direction.
ａについても、その動作は従来例と同様であるため、そ
の説明を省略する。Since the operation of a is also the same as that of the conventional example, its explanation will be omitted.
弾性部材２０は、基台９とスラスト動圧軸受３との間に
介装する。この弾性部材２０はゴム例えばウレタンゴム
、フッ素ゴム、シリコンゴム等よりなり、外部からの荷
重に対して融通性が良好であり、第２図に示すように、
固定軸１とスラスト動圧軸受３との直角度に狂いが生じ
ていても、動圧による剛性に比較して弾性部材の方が剛
性が小さいので、弾性部材２０が弾性変形をなし、自動
的に調整可能である。The elastic member 20 is interposed between the base 9 and the thrust dynamic pressure bearing 3. The elastic member 20 is made of rubber such as urethane rubber, fluororubber, silicone rubber, etc., and has good flexibility against external loads, and as shown in FIG.
Even if the perpendicularity between the fixed shaft 1 and the thrust dynamic pressure bearing 3 is out of alignment, the elastic member 20 will deform elastically and automatically It can be adjusted to
その結果、固定軸１とスラスト動圧軸受３との直角度お
よび、スラスト動圧軸受３の動圧発生溝すと対向する中
空回転軸２の底面との面精度も調整でき、安定した浮上
量を確保できる。As a result, it is possible to adjust the perpendicularity between the fixed shaft 1 and the thrust dynamic pressure bearing 3 and the surface precision between the dynamic pressure generation groove of the thrust dynamic pressure bearing 3 and the bottom surface of the hollow rotary shaft 2, which is opposite to the bottom surface of the hollow rotary shaft 2, resulting in a stable flying height. can be secured.
更に別の実施例として、スラスト動圧軸受３を中空回転
軸２の内側の固定軸１の上方に設けたものを第３図に示
す。スラスト動圧軸受３の動圧発生溝すは、固定軸１に
対向する面に刻設され、弾性部材２２は前記動圧発生溝
すを設けた面と反対側つまり中空回転軸２の内側に配設
されている。As yet another embodiment, a thrust dynamic pressure bearing 3 is provided above the fixed shaft 1 inside the hollow rotary shaft 2, as shown in FIG. The dynamic pressure generating grooves of the thrust dynamic pressure bearing 3 are carved on the surface facing the fixed shaft 1, and the elastic member 22 is formed on the opposite side to the surface where the dynamic pressure generating grooves are provided, that is, on the inside of the hollow rotating shaft 2. It is arranged.
この様にして、弾性部材２２をスラスト軸受３と中空回
転軸２の内側との間に設置することにより、前述第１実
施例と同じ作用効果を得ることができる。By installing the elastic member 22 between the thrust bearing 3 and the inside of the hollow rotating shaft 2 in this manner, the same effects as in the first embodiment can be obtained.
（発明の効果）
本発明においては、弾性部材をスラスト軸受と基台の間
又は固定軸と中空回転軸との間に設けたスラスト軸受の
中空回転軸側に設けることにより、組立時における中空
回転軸とスラスト動圧軸受の直角度等の精度を向上せし
めると共に本発明に係る光偏向器の軸部材の安定したス
ラスト浮上量を達成し、光偏向器の性使向上に資するも
のである。(Effects of the Invention) In the present invention, by providing an elastic member on the hollow rotating shaft side of the thrust bearing provided between the thrust bearing and the base or between the fixed shaft and the hollow rotating shaft, hollow rotation during assembly is achieved. This improves the accuracy of the perpendicularity between the shaft and the thrust dynamic pressure bearing, achieves a stable thrust flying height of the shaft member of the optical deflector according to the present invention, and contributes to improving the usability of the optical deflector.
第１図〜第２図は本発明に係る動圧流体軸受型光偏向器
の一実施例を図示するものである。
第１図は一実施例の断面図、第２図は組立時の調整状態
を示す断面図、第３図は別の実施例の断面図、第４図〜
第７図は従来例の光偏向器を図示する。第４図は断面図
、第５図はラジアル溝での流体流れを示す断面図。第６
図はスラスト動圧軸受の平面図。第７図は中空回転軸の
安定した浮上状態を示す断面図。
１・・・固定軸、２・・・中空回転軸、３・・・スラス
ト動圧軸受、４・・・回転多面鏡、５・・・駆動用磁石
、６・・・ステータ、９・・・基台、２０．２２・・・
弾性部材、ａ・・・固定軸の溝、ｂ・・・スラスト動圧
軸受の溝
図
第２図
出 願 人 コバル電子株式会社代理人 弁理士
小 林 榮５−、 、ＪＩｌ！！勧用渇五
七
第
図
２２・−３隼１を幹へ′
第
図
第
図1 and 2 illustrate an embodiment of a dynamic pressure fluid bearing type optical deflector according to the present invention. Fig. 1 is a sectional view of one embodiment, Fig. 2 is a sectional view showing the adjusted state during assembly, Fig. 3 is a sectional view of another embodiment, and Figs.
FIG. 7 illustrates a conventional optical deflector. FIG. 4 is a sectional view, and FIG. 5 is a sectional view showing fluid flow in a radial groove. 6th
The figure is a plan view of a thrust hydrodynamic bearing. FIG. 7 is a sectional view showing a stable floating state of the hollow rotating shaft. DESCRIPTION OF SYMBOLS 1... Fixed shaft, 2... Hollow rotating shaft, 3... Thrust dynamic pressure bearing, 4... Rotating polygon mirror, 5... Driving magnet, 6... Stator, 9... Base, 20.22...
Elastic member, a...Groove of fixed shaft, b...Groove diagram of thrust dynamic pressure bearing Figure 2 Applicant Kobal Electronics Co., Ltd. Agent Patent attorney Sakae Kobayashi 5-, , JIl! ! Figure 22-3 Hayabusa 1 to the trunk' Figure Figure
Claims (1)
る中空回転軸と、固定軸の外周面にラジアル方向へ流体
圧力を発生するように設けた動圧発生溝と、回転軸の底
面に対向するようにスラスト方向へ流体圧力を発生する
溝を具えたスラスト動圧軸受とを有する動圧流体軸受型
光偏向器において、スラスト動圧軸受と、基台との間に
弾性部材を配設したことを特徴とする動圧流体軸受型光
偏向器。 ２、基台に一端が固定された固定軸と固定軸に外嵌する
中空回転軸と固定軸の外周面にラジアル方向へ流体圧力
を発生するように刻設した動圧発生溝と中空回転軸と固
定軸との間に収容され、固定軸に対向するようにスラス
ト方向へ流体圧力を発生する溝を具えたスラスト動圧軸
受とを有する動圧流体軸受型光偏向器において、中空回
転軸の内側面とスラスト動圧軸受との間に弾性部材を設
けたことを特徴とする動圧流体軸受型光偏向器。 ３、前記弾性部材は前記スラスト動圧軸受より発生する
圧力の剛性よりも小さい剛性を有する請求項１又は２記
載の動圧流体軸受型光偏向器。 ４、前記弾性部材はゴム例えばウレタンゴム、フッ素ゴ
ム、シリコンゴム等よりなることを特徴とする請求項１
又は２記載の動圧流体軸受型光偏向器。[Scope of Claims] 1. A fixed shaft having one end fixed to a base, a hollow rotating shaft fitted onto the fixed shaft, and a movable shaft provided on the outer peripheral surface of the fixed shaft to generate fluid pressure in the radial direction. In a dynamic pressure fluid bearing type optical deflector having a pressure generating groove and a thrust dynamic pressure bearing having a groove that generates fluid pressure in the thrust direction so as to face the bottom surface of a rotating shaft, the thrust dynamic pressure bearing and a base are provided. A dynamic pressure fluid bearing type optical deflector, characterized in that an elastic member is disposed between the base and the base. 2. A fixed shaft with one end fixed to the base, a hollow rotating shaft that fits onto the fixed shaft, a dynamic pressure generating groove carved on the outer peripheral surface of the fixed shaft to generate fluid pressure in the radial direction, and a hollow rotating shaft. In a dynamic pressure fluid bearing type optical deflector, the thrust dynamic pressure bearing is housed between a fixed shaft and a groove that generates fluid pressure in the thrust direction so as to face the fixed shaft. A dynamic pressure fluid bearing type optical deflector, characterized in that an elastic member is provided between an inner surface and a thrust dynamic pressure bearing. 3. The dynamic pressure fluid bearing type optical deflector according to claim 1 or 2, wherein the elastic member has a rigidity smaller than the rigidity of the pressure generated by the thrust dynamic pressure bearing. 4. Claim 1, wherein the elastic member is made of rubber such as urethane rubber, fluororubber, silicone rubber, etc.
or the dynamic pressure fluid bearing type optical deflector according to 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15719090A JPH0450914A (en) | 1990-06-15 | 1990-06-15 | Dynamic pressure fluid bearing type optical deflector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15719090A JPH0450914A (en) | 1990-06-15 | 1990-06-15 | Dynamic pressure fluid bearing type optical deflector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0450914A true JPH0450914A (en) | 1992-02-19 |
Family
ID=15644172
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15719090A Pending JPH0450914A (en) | 1990-06-15 | 1990-06-15 | Dynamic pressure fluid bearing type optical deflector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0450914A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011022245A (en) * | 2009-07-14 | 2011-02-03 | Konica Minolta Business Technologies Inc | Light deflection apparatus |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63176814A (en) * | 1987-01-13 | 1988-07-21 | Matsushita Electric Ind Co Ltd | Supporting device for rotary body |
-
1990
- 1990-06-15 JP JP15719090A patent/JPH0450914A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63176814A (en) * | 1987-01-13 | 1988-07-21 | Matsushita Electric Ind Co Ltd | Supporting device for rotary body |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011022245A (en) * | 2009-07-14 | 2011-02-03 | Konica Minolta Business Technologies Inc | Light deflection apparatus |
| US8531749B2 (en) | 2009-07-14 | 2013-09-10 | Konica Minolta Business Technologies, Inc. | Light deflection apparatus |
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