JPH0449808U - - Google Patents
Info
- Publication number
- JPH0449808U JPH0449808U JP9251590U JP9251590U JPH0449808U JP H0449808 U JPH0449808 U JP H0449808U JP 9251590 U JP9251590 U JP 9251590U JP 9251590 U JP9251590 U JP 9251590U JP H0449808 U JPH0449808 U JP H0449808U
- Authority
- JP
- Japan
- Prior art keywords
- visible light
- film thickness
- substrate
- forming
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 239000012788 optical film Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 2
- 239000010408 film Substances 0.000 claims 1
- 238000011065 in-situ storage Methods 0.000 claims 1
- 238000012544 monitoring process Methods 0.000 claims 1
- 238000002834 transmittance Methods 0.000 claims 1
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9251590U JPH0449808U (ko) | 1990-09-03 | 1990-09-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9251590U JPH0449808U (ko) | 1990-09-03 | 1990-09-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0449808U true JPH0449808U (ko) | 1992-04-27 |
Family
ID=31829040
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9251590U Pending JPH0449808U (ko) | 1990-09-03 | 1990-09-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0449808U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008533452A (ja) * | 2005-03-09 | 2008-08-21 | ライボルト オプティクス ゲゼルシャフト ミット ベシュレンクテル ハフツング | 積層プロセスを光学的にモニタリングするための測定装置 |
-
1990
- 1990-09-03 JP JP9251590U patent/JPH0449808U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008533452A (ja) * | 2005-03-09 | 2008-08-21 | ライボルト オプティクス ゲゼルシャフト ミット ベシュレンクテル ハフツング | 積層プロセスを光学的にモニタリングするための測定装置 |
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