JPH0447228A - Flow velocity sensor and fluidic flowmeter therewith - Google Patents
Flow velocity sensor and fluidic flowmeter therewithInfo
- Publication number
- JPH0447228A JPH0447228A JP2157098A JP15709890A JPH0447228A JP H0447228 A JPH0447228 A JP H0447228A JP 2157098 A JP2157098 A JP 2157098A JP 15709890 A JP15709890 A JP 15709890A JP H0447228 A JPH0447228 A JP H0447228A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- sensor
- temperature
- flow velocity
- gas composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000203 mixture Substances 0.000 claims abstract description 38
- 238000001514 detection method Methods 0.000 claims abstract description 21
- 230000035945 sensitivity Effects 0.000 claims abstract description 11
- 238000005259 measurement Methods 0.000 claims description 7
- 230000005855 radiation Effects 0.000 abstract description 5
- 230000000630 rising effect Effects 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、熱式流速センサ（以下「フローセンサ」とい
う）及びこのフローセンサを低流量域での計測用に組み
込んだフルイディック流量計に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a thermal flow rate sensor (hereinafter referred to as a "flow sensor") and a fluidic flowmeter incorporating this flow sensor for measurement in a low flow rate range. It is something.
［従来の技術］
フローセンサは、第３図に示すように、被測定ガスの流
路ｌ内にヒータ２と温度センサ３．３ａ及びガス温度を
検出するための周囲温度センサ４を挿入し、温度センサ
４て検出されるガス温から一定の温度だけヒータ２の温
度を上昇させ、温度センサ３．３ａの温度変化を検知す
ることにより、流速を計測する方式である。図中５はヒ
ータ駆動回路、６は流量検出回路である。[Prior Art] As shown in FIG. 3, a flow sensor includes a heater 2, a temperature sensor 3.3a, and an ambient temperature sensor 4 for detecting gas temperature inserted into a flow path l of a gas to be measured. This method measures the flow velocity by increasing the temperature of the heater 2 by a fixed temperature from the gas temperature detected by the temperature sensor 4, and detecting the temperature change by the temperature sensor 3.3a. In the figure, 5 is a heater drive circuit, and 6 is a flow rate detection circuit.
［従来技術の課題］
このため、ガスの組成（ガス種）が異なると、ヒータの
放熱量も異なることから、所謂感度が変化して計測誤差
を生む。[Problems with the Prior Art] For this reason, if the gas composition (gas type) differs, the amount of heat released by the heater also differs, so the so-called sensitivity changes and measurement errors occur.
そこで、従来はあらかしめガス種に合わせて二ローセン
サの感度調整を行っているが、この手表か面倒である。Therefore, in the past, the sensitivity of the two-row sensor was adjusted according to the type of gas, but this procedure was cumbersome.
又、都市ガスの場合にはカロリー調整のために数種類の
ガスを混合しており、こジ混合種か違ってくると感度に
影響することにな２か、その都度フローセンサの感度調
整を行うこきは実際上不可能である。In addition, in the case of city gas, several types of gas are mixed to adjust the calorie content, and if the mixture is different, the sensitivity will be affected, so the sensitivity of the flow sensor is adjusted each time. This is practically impossible.
斯る点から、その都度感度調整を行わないでがむ所謂自
動感度調整機能付フローセンサの提案力望まれている。From this point of view, it is desired to propose a flow sensor with a so-called automatic sensitivity adjustment function that does not require sensitivity adjustment each time.
［課題を解決するための手段］
本発明は、斯る点に鑑みて提案されるもので、その構成
は以下のとおりである。[Means for Solving the Problems] The present invention is proposed in view of the above points, and its configuration is as follows.
１、被測定ガスの流速の影響を受けない位置にガス組成
検出温度センサを挿入し、このガス組成検出温度センサ
で検出されるガス組成に基づいてヒータの上昇温度を制
御することにより、ガス組成の変動て計測誤差を生じな
いように工夫した自動感度調整機能付流速センサ。1. By inserting a gas composition detection temperature sensor in a position that is not affected by the flow rate of the gas to be measured, and controlling the rising temperature of the heater based on the gas composition detected by this gas composition detection temperature sensor, the gas composition can be determined. A flow velocity sensor with an automatic sensitivity adjustment function designed to prevent measurement errors due to fluctuations in flow rate.
２、一定流量以上の流量はフルイディック素子にて計測
し、以下の流量についてはフルイディック素子のノズル
部に挿入した流速センサて計測するように構成したフル
イディック流量計において、この流量計の一部であって
流速を感しない位置にガス組成検出温度センサを挿入し
、この温度センサで識別された組成に基づいて流速セン
サのヒータ温度の上昇を制御することにより、ガス組成
の変動で計測誤差を生じないように構成した流速センサ
付フルイディック流量計。2. In a fluidic flowmeter configured so that a flow rate above a certain flow rate is measured by a fluidic element, and a flow rate below a certain level is measured by a flow velocity sensor inserted into the nozzle part of the fluidic element, one part of this flowmeter is By inserting a gas composition detection temperature sensor in a position where the flow velocity is not sensitive, and controlling the increase in the heater temperature of the flow velocity sensor based on the composition identified by this temperature sensor, measurement errors due to fluctuations in gas composition can be reduced. A fluidic flow meter with a flow velocity sensor configured to prevent the occurrence of
流量計。Flowmeter.
なお、上記構成において、組成検出温度センサはガス流
によっても放熱量が変化するので、ガス流の影響を受け
ないような工夫が必要である。この手段としては、組成
検出温度センサの上流側に防風カバーをつけるとか、非
常に細い金網で覆う等の手段か考えられる。In the above configuration, since the amount of heat released by the composition detection temperature sensor changes depending on the gas flow, it is necessary to devise a method to avoid being affected by the gas flow. Possible means for this include attaching a windproof cover to the upstream side of the composition detection temperature sensor, or covering it with a very thin wire mesh.
［作用］
組成検出温度センサには、僅かに電圧を印加してその抵
抗値からセンサ周囲の温度つまりガスの温度を測定する
。次に、この温度にしたがって温度センサをガスの温度
から一定温度たけ上昇するように電圧を印加する。この
ときセンサに投入される電力は、センサ表面における放
熱量の違いを反映するため、ガスの種類（組成）によっ
て放熱量か異なると、投入する電力が異なり、この値か
らガス種を判定できる。一方、フローセンサは、ヒータ
の上昇温度に比例した出力信号か得られることから、組
成検出温度センサへの投入電力にしたかってヒータの上
昇温度を制御すれば、フローセンサの出力信号は、ガス
の種類（組成）の影響を受けない。[Operation] A slight voltage is applied to the composition detection temperature sensor, and the temperature around the sensor, that is, the temperature of the gas, is measured from the resistance value. Next, according to this temperature, a voltage is applied to the temperature sensor so that the temperature rises by a certain amount from the gas temperature. The power input to the sensor at this time reflects the difference in the amount of heat radiation on the sensor surface, so if the amount of heat radiation differs depending on the type (composition) of the gas, the power input will differ, and the type of gas can be determined from this value. On the other hand, since a flow sensor can obtain an output signal proportional to the rising temperature of the heater, if the rising temperature of the heater is controlled using the power input to the composition detection temperature sensor, the output signal of the flow sensor will be the same as that of the gas. Not affected by type (composition).
［実施例コ 第１図に本発明の実施例を示す。[Example code] FIG. 1 shows an embodiment of the present invention.
１は都市ガスの流路、２はこの流路ｌ内に挿入されたフ
ローセンサのヒータ、３．３ａは温度センサ、７は流路
１内において、窪み８と金網９により形成された靜雰囲
気空間１０内に挿入された組成検出温度センサである。1 is a flow path for city gas, 2 is a heater for a flow sensor inserted into this flow path l, 3.3a is a temperature sensor, and 7 is a quiet atmosphere formed by a depression 8 and a wire mesh 9 in the flow path 1. This is a composition detection temperature sensor inserted into the space 10.
５はヒータ駆動回路、６は流量検出回路、１１はガス組
成判定回路にして、前記組成検出温度センサ７て検出さ
れたデータを基にガスの組成を判定し、この判定値に基
づいてヒータ駆動回路５に対してヒータ２の上昇温度を
制御（補正）する信号を送信する。5 is a heater drive circuit, 6 is a flow rate detection circuit, and 11 is a gas composition determination circuit, which determines the composition of the gas based on the data detected by the composition detection temperature sensor 7, and drives the heater based on this determination value. A signal for controlling (correcting) the temperature increase of the heater 2 is transmitted to the circuit 5.
第２図はフルイディック素子１２内に本発明に係るフロ
ーセンサａを組み込んだ実施例にして、フルイディック
素子１２のノズル部１４内に７０−センサａを挿入し、
組成検出温度センサ７をノズル部１４の上流側コーナに
防風カバー１６て覆って形成した静雰囲気空間１５内に
挿入した構成である。１３は流体振動発生室である。な
お、図中からヒータ駆動回路５、流量検出回路６、ガス
組成判定回路１２は省略しであるが、各作用はすべて前
記第１図に示した実施例と同しである。FIG. 2 shows an embodiment in which the flow sensor a according to the present invention is incorporated into the fluidic element 12, and the 70-sensor a is inserted into the nozzle part 14 of the fluidic element 12.
The composition detection temperature sensor 7 is inserted into a static atmosphere space 15 formed by covering the upstream corner of the nozzle portion 14 with a windproof cover 16. 13 is a fluid vibration generating chamber. Although the heater drive circuit 5, flow rate detection circuit 6, and gas composition determination circuit 12 are omitted from the figure, all their functions are the same as in the embodiment shown in FIG. 1 above.
［本発明の効果］
本発明は以上のように、ガスの組成を検出し、この組成
に基づいて自動的にヒータの温度を制御するようにした
。[Effects of the Present Invention] As described above, the present invention detects the composition of the gas and automatically controls the temperature of the heater based on this composition.
この結果、ガス種ごとに感度調整をいちいち行う必要か
ないと共に常時ガス組成を検出してヒー夕温度の制御を
行うことにより、例えば都市ガスのカロリー調整により
ガスの組成か変化したような場合でも、自動的に感度調
整か行われて流量の計測誤差を生じる心配がない。As a result, there is no need to adjust the sensitivity for each gas type, and by constantly detecting the gas composition and controlling the heater temperature, even if the gas composition changes due to calorie adjustment of city gas, for example, Sensitivity is automatically adjusted, so there is no need to worry about flow rate measurement errors.
第１図は本発明に係るフローセンサの実施例図、第２図
はノズル部に本発明に係るフローセンサを組み込んだフ
ルイディック素子の平面図、第３図はフローセンサの原
理説明図である。
１ ・・・ 流路 ２ ・・・ ヒータ３．
３ａ ・−温度センサ
４ ・・・ 周囲温度センサ
５ ・・・ ヒータ駆動回路 ６ ・・・ 流量検出回
路７ ・・・ 組成検出温度センサ
１１・・・ 組成判定回路
１３・・−フルイディック素子
１４・・・ ノズル部 ａ ・・・ フローセン
サ第１ｍ１
ｊ１２ｒＩ！ＪFIG. 1 is an embodiment of the flow sensor according to the present invention, FIG. 2 is a plan view of a fluidic element incorporating the flow sensor according to the present invention in a nozzle part, and FIG. 3 is a diagram illustrating the principle of the flow sensor. . 1... Channel 2... Heater 3.
3a - Temperature sensor 4 - Ambient temperature sensor 5 - Heater drive circuit 6 - Flow rate detection circuit 7 - Composition detection temperature sensor 11 - Composition determination circuit 13 - Fluidic element 14 - ... Nozzle part a ... Flow sensor No. 1 m1 j12rI! J
Claims (1)
検出温度センサを挿入し、このガス組成検出温度センサ
で検出されるガス組成に基づいてヒータの上昇温度を制
御することにより、ガス組成の変動で計測誤差を生じな
いように工夫した自動感度調整機能付流速センサ。 ２、一定流量以上の流量はフルイディック素子にて計測
し、以下の流量についてはフルイディック素子のノズル
部に挿入した流速センサで計測するように構成したフル
イディック流量計において、この流量計の一部であって
流速を感じない位置にガス組成検出温度センサを挿入し
、この温度センサで識別された組成に基づいて流速セン
サのヒータ温度の上昇を制御することにより、ガス組成
の変動で計測誤差を生じないように構成した流速センサ
付フルイディック流量計。[Claims] 1. A gas composition detection temperature sensor is inserted in a position not affected by the flow velocity of the gas to be measured, and the temperature rise of the heater is controlled based on the gas composition detected by the gas composition detection temperature sensor. This is a flow rate sensor with an automatic sensitivity adjustment function that prevents measurement errors from occurring due to changes in gas composition. 2. In a fluidic flowmeter configured so that a flow rate above a certain flow rate is measured by a fluidic element, and a flow rate below a certain level is measured by a flow velocity sensor inserted into the nozzle part of the fluidic element, one part of this flowmeter is By inserting a gas composition detection temperature sensor in a position where the flow velocity is not felt, and controlling the rise in the heater temperature of the flow velocity sensor based on the composition identified by this temperature sensor, measurement errors due to fluctuations in gas composition can be reduced. A fluidic flow meter with a flow velocity sensor configured to prevent the occurrence of
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2157098A JP2798184B2 (en) | 1990-06-14 | 1990-06-14 | Flow sensor and fluidic flow meter with flow sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2157098A JP2798184B2 (en) | 1990-06-14 | 1990-06-14 | Flow sensor and fluidic flow meter with flow sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0447228A true JPH0447228A (en) | 1992-02-17 |
| JP2798184B2 JP2798184B2 (en) | 1998-09-17 |
Family
ID=15642202
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2157098A Expired - Lifetime JP2798184B2 (en) | 1990-06-14 | 1990-06-14 | Flow sensor and fluidic flow meter with flow sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2798184B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6474138B1 (en) | 2000-11-28 | 2002-11-05 | Honeywell International Inc. | Adsorption based carbon monoxide sensor and method |
| JP2007206083A (en) * | 1997-10-15 | 2007-08-16 | Matsushita Electric Ind Co Ltd | Gas interrupting device |
| WO2012147586A1 (en) * | 2011-04-28 | 2012-11-01 | オムロン株式会社 | Flow rate measuring device |
-
1990
- 1990-06-14 JP JP2157098A patent/JP2798184B2/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007206083A (en) * | 1997-10-15 | 2007-08-16 | Matsushita Electric Ind Co Ltd | Gas interrupting device |
| JP4552952B2 (en) * | 1997-10-15 | 2010-09-29 | パナソニック株式会社 | Gas shut-off device |
| US6474138B1 (en) | 2000-11-28 | 2002-11-05 | Honeywell International Inc. | Adsorption based carbon monoxide sensor and method |
| WO2012147586A1 (en) * | 2011-04-28 | 2012-11-01 | オムロン株式会社 | Flow rate measuring device |
| US9068871B2 (en) | 2011-04-28 | 2015-06-30 | Omron Corporation | Flow rate measuring device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2798184B2 (en) | 1998-09-17 |
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