JPH0442296U - - Google Patents

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の１実施例の縦断面図、第２図
は複合気体軸受のロータの平面図、第３図は要部
の拡大断面図、第４図は従来の例の縦断面図であ
る。 １……筺体、３……ねじ溝真空ポンプ部、３ａ
……ねじ溝、４……回転体、４ａ……回転軸、５
……動圧気体軸受、５ｂ……ステータ、７……ね
じサール溝。 Fig. 1 is a longitudinal sectional view of one embodiment of the present invention, Fig. 2 is a plan view of the rotor of a composite gas bearing, Fig. 3 is an enlarged sectional view of the main parts, and Fig. 4 is a longitudinal sectional view of a conventional example. It is. 1... Housing, 3... Thread groove vacuum pump part, 3a
...Screw groove, 4...Rotating body, 4a...Rotating shaft, 5
...Dynamic pressure gas bearing, 5b...Stator, 7...Threaded surl groove.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 筺体内に、少なくともねじ溝真空ポンプ部のね
じ溝が外周面に形成されている回転体の回転軸を
、動圧気体軸受により軸支する式の真空ポンプに
おいて、前記回転体をキヤツプ状に形成すると共
に該回転体の内周面に前記動圧気体軸受のステー
タの外周面を近接し、これら内周面又は外周面の
いずれか一方にねじシール溝を形成したことを特
徴とする真空ポンプのシール装置。 In a vacuum pump of a type in which a rotating shaft of a rotating body, in which at least a thread groove of a thread groove vacuum pump part is formed on the outer peripheral surface thereof, is supported in a housing by a dynamic pressure gas bearing, the rotating body is formed in a cap shape. At the same time, the outer circumferential surface of the stator of the dynamic pressure gas bearing is brought close to the inner circumferential surface of the rotating body, and a threaded seal groove is formed on either the inner circumferential surface or the outer circumferential surface. sealing device.