JPH04356037A - Vacuum contact printing device - Google Patents
Vacuum contact printing deviceInfo
- Publication number
- JPH04356037A JPH04356037A JP3030855A JP3085591A JPH04356037A JP H04356037 A JPH04356037 A JP H04356037A JP 3030855 A JP3030855 A JP 3030855A JP 3085591 A JP3085591 A JP 3085591A JP H04356037 A JPH04356037 A JP H04356037A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- contact
- negative plate
- original
- degree
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000002508 contact lithography Methods 0.000 title claims abstract description 26
- 239000000463 material Substances 0.000 claims abstract description 13
- 239000000758 substrate Substances 0.000 claims description 19
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 abstract 1
- 238000012856 packing Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明は、ＩＣのリードフレーム
やカラーＴＶのブラウン管に用いるシャドウマスク等を
製作するための真空密着焼付装置に関し、特に、真空密
着に要する時間を短縮して原版を速やかに感光基材に密
着させることができる真空密着焼付装置に関する。[Industrial Application Field] The present invention relates to a vacuum contact printing apparatus for producing shadow masks, etc. used for IC lead frames and color TV cathode ray tubes, and in particular, the present invention relates to a vacuum contact printing apparatus for manufacturing shadow masks, etc. used for IC lead frames and color TV cathode ray tubes. The present invention relates to a vacuum contact printing device that can be brought into close contact with a photosensitive substrate.
【０００２】0002
【従来の技術】一般にフィルムやガラス板等からなる透
過性の原版にかかれた絵柄を感光基材に密着焼付法で複
写する場合、高品位複写法として真空密着法が用いられ
ている
（例えば、特開昭５８−１３６０２６号）。2. Description of the Related Art Generally, when a picture printed on a transparent original plate made of a film or a glass plate is copied onto a photosensitive substrate by a contact printing method, a vacuum contact method is used as a high-quality copying method (for example, JP-A-58-136026).
【０００３】このような真空密着法を利用した密着焼付
装置の１例として、図４に示したようなものがある。こ
の密着焼付装置は、感光基材１の両側にそれぞれガラス
等からなる原版２、２を配置させるために、真空チャッ
ク等（図示せず）により原版２、２を固定した一対の枠
３、３と、各枠３、３の対向する面に取付られたパッキ
ング４、４と、一方の枠３に形成された排気口５に接続
された真空ポンプ（図示せず）と、各枠３、３を互いに
接近及び離間するように往復動可能に保持したベッド６
と、基材１の両側に配置された光源７、７等とを備えて
いる。An example of a contact printing apparatus using such a vacuum contact method is shown in FIG. 4. This contact printing apparatus has a pair of frames 3, 3 to which originals 2, 2 made of glass or the like are fixed on each side of a photosensitive substrate 1 using a vacuum chuck (not shown). , packings 4, 4 attached to opposing surfaces of each frame 3, 3, a vacuum pump (not shown) connected to an exhaust port 5 formed in one frame 3, and each frame 3, 3. A bed 6 which is held so as to be reciprocally movable so as to approach and separate from each other.
and light sources 7, 7, etc. arranged on both sides of the base material 1.
【０００４】この密着焼付装置による焼付動作は次のよ
うに行われる。すなわち、まず、感光基材１を原版２、
２間の所定位置に位置決めした後、一対の枠３、３を感
光基材１に接近する方向に移動させて、感光基材１を両
面の原版２、２で挟み、パッキング４、４により枠３、
３間をシールして、両面の原版２、２、枠３、３及びパ
ッキング４、４によって密閉された密閉室８が形成され
る。次に、密閉室８に連通した排気口５から内部の空気
を真空ポンプで吸引して、密閉室８内を真空にする。そ
の結果、両面の原版２、２が大気により押圧され、感光
基材１に密着する。その後、光源７、７を点灯させるこ
とにより、原版２、２の絵柄が感光基材１に焼き付けら
れる。The printing operation by this contact printing device is performed as follows. That is, first, the photosensitive substrate 1 is used as the original plate 2,
After positioning the pair of frames 3, 3 in a direction approaching the photosensitive substrate 1, the photosensitive substrate 1 is sandwiched between the original plates 2, 2 on both sides, and the frame is secured by the packings 4, 4. 3,
A sealed chamber 8 is formed by sealing between the original plates 2, 2, the frames 3, 3, and the packings 4, 4 on both sides. Next, the air inside the sealed chamber 8 is sucked by a vacuum pump through the exhaust port 5 communicating with the sealed chamber 8, and the inside of the sealed chamber 8 is evacuated. As a result, the original plates 2, 2 on both sides are pressed by the atmosphere and come into close contact with the photosensitive substrate 1. Thereafter, by turning on the light sources 7, 7, the designs of the original plates 2, 2 are printed onto the photosensitive substrate 1.
【０００５】[0005]
【発明が解決しようとする課題】しかし、このような真
空密着焼付装置においては、ベッド６上で一対の枠３、
３を感光基材１に接近する方向に移動させて感光基材１
を両面から原版２、２で挟み、パッキング４、４により
枠３、３間をシールして密閉室８を形成し、その後に原
版２、２を感光基材１に真空密着させるために、枠３に
設けられた排気口５に通じる真空ポンプにより与えられ
る高真空度（例えば、−７６０ｍｍＨｇ）で一気に減圧
されて、密閉室８内の空気が吸引排気されるが、排気口
５が原版２、２の外側にあるため、図４に示したように
、原版２、２の外周部が先に減圧され密着してしまい、
原版２、２の中心部に残された空気がぬけにくくなって
しまう。このように、外周がシールされるため、中心部
の空気が完全にぬけるまでに、例えば８００×６００ｍ
ｍ角の原版２、２の場合、３分以上の時間を要する。However, in such a vacuum contact printing apparatus, a pair of frames 3,
3 in the direction approaching the photosensitive substrate 1.
is sandwiched between the original plates 2, 2 from both sides, and the frames 3, 3 are sealed with packings 4, 4 to form a sealed chamber 8. After that, in order to vacuum-adhere the original plates 2, 2 to the photosensitive substrate 1, the frame is The air in the sealed chamber 8 is suctioned and exhausted by a high degree of vacuum (for example, -760 mmHg) provided by a vacuum pump that communicates with the exhaust port 5 provided in the original plate 2, 2, the outer periphery of the master plates 2 and 2 is first depressurized and brought into close contact with each other, as shown in Figure 4.
The air left in the center of the original plates 2 and 2 becomes difficult to escape. In this way, since the outer periphery is sealed, it takes a distance of, for example, 800 x 600 m before the air in the center completely escapes.
In the case of m-square original plates 2 and 2, it takes more than 3 minutes.
【０００６】このように真空排気時間が長いと、その分
生産性が落ちてしまうため、従来は、例えば原版の表面
に凹凸を付けてこの時間の短縮を若干図っているが、そ
の時間短縮は不十分である。[0006] If the evacuation time is long as described above, the productivity will be reduced accordingly, so conventionally, for example, by adding irregularities to the surface of the original plate, this time has been slightly shortened. Not enough.
【０００７】本発明はこのような問題点に鑑みてなされ
たものであり、その目的は、原版を感光基材に真空密着
させるための真空度を低い真空度から徐々に高めるよう
にすることにより、原版の中心部に空気が残らないよう
にして、原版中心部から外周まで均一にかつ高速に真空
密着させることができる真空密着焼付装置を提供するこ
とである。The present invention has been made in view of these problems, and its object is to gradually increase the degree of vacuum from a low degree of vacuum in order to vacuum-adhere the original plate to the photosensitive substrate. An object of the present invention is to provide a vacuum contact printing device that can uniformly and quickly vacuum adhere the original from the center to the outer periphery without leaving any air in the center of the original.
【０００８】[0008]
【課題を解決するための手段】上記目的を達成する本発
明の真空密着焼付装置は、感光材料を塗布してなる基材
の表面に絵柄が描かれた原版を真空排気により密着させ
、その原版上に光を照射することにより基材に絵柄を露
光焼付けする真空密着焼付装置において、真空排気を、
排気当初において原版の中心部が最初に密着する低真空
度において行い、その後段階的もしくは連続的に高真空
度まで排気の真空度を上げるように構成したことを特徴
とするものである。[Means for Solving the Problems] The vacuum contact printing apparatus of the present invention achieves the above object by bringing an original plate on which a pattern is drawn onto the surface of a base material coated with a photosensitive material into close contact by vacuum evacuation. In vacuum contact printing equipment that exposes and prints patterns on substrates by irradiating light onto them, vacuum evacuation is
At the beginning of the evacuation, the central part of the original is first brought into close contact with a low degree of vacuum, and then the degree of vacuum is increased stepwise or continuously to a high degree of vacuum.
【０００９】この場合、基材の両面に原版を密着するよ
うに構成することもできる。[0009] In this case, it is also possible to configure the original plate to be in close contact with both sides of the base material.
【００１０】0010
【作用】本発明においては、真空排気を、排気当初にお
いて原版の中心部が最初に密着する低真空度において行
い、その後段階的もしくは連続的に高真空度まで排気の
真空度を上げるように構成しているので、最初の低真空
度と大気圧との差により、原版の中心部が最も内側に撓
み、最初に基材に密着する。したがって、原版の外周部
が先に減圧され密着することが防止され、原版の中心部
に空気が残ることはなくなり、原版中心部から外周まで
均一にかつ高速に真空密着させることができる。[Operation] In the present invention, vacuum evacuation is performed at a low vacuum level where the center of the original first comes into close contact with the original plate, and then the vacuum level is increased stepwise or continuously to a high vacuum level. Therefore, due to the difference between the initial low degree of vacuum and atmospheric pressure, the center of the original flexes inwardly and comes into close contact with the base material first. Therefore, the outer periphery of the original is prevented from being depressurized first and brought into close contact with each other, air is not left in the center of the original, and the original can be vacuum-adhered uniformly and quickly from the center to the outer periphery.
【００１１】[0011]
【実施例】次に、本発明による真空密着焼付装置を実施
例に基づいて説明する。図１は本発明の真空密着焼付装
置の１実施例の構成を示す概略断面図であり、図４の従
来のものと同様な構成要素は同じ符号で示す。すなわち
、感光基材１の両側にそれぞれガラス等からなる原版２
、２を配置させるために、真空チャック等（図示せず）
により原版２、２を固定した一対の枠３、３と、各枠３
、３の対向する面に取付られたパッキング４、４と、一
方の枠３に形成された排気口５に接続された真空ポンプ
１０と、真空ポンプ１０と排気口５の間に設けられた圧
力調整バルブ１１と、真空ポンプ１０及び圧力調整１１
とを制御する制御装置１２と、各枠３、３を互いに接近
及び離間するように往復動可能に保持したベッド６と、
基材１の両側に配置された光源７、７等とを備えている
。EXAMPLES Next, the vacuum contact printing apparatus according to the present invention will be explained based on examples. FIG. 1 is a schematic sectional view showing the structure of one embodiment of the vacuum contact printing apparatus of the present invention, and components similar to those of the conventional apparatus shown in FIG. 4 are designated by the same reference numerals. That is, original plates 2 made of glass or the like are placed on both sides of a photosensitive substrate 1.
, 2, a vacuum chuck, etc. (not shown)
A pair of frames 3, 3 to which original plates 2, 2 are fixed, and each frame 3
, 3, a vacuum pump 10 connected to an exhaust port 5 formed in one frame 3, and a pressure provided between the vacuum pump 10 and the exhaust port 5. Adjustment valve 11, vacuum pump 10 and pressure adjustment 11
a bed 6 that holds the frames 3, 3 in a reciprocating manner so as to approach and separate them from each other;
It includes light sources 7, 7, etc. arranged on both sides of the base material 1.
【００１２】以上、概略の構成について説明したように
、本発明の真空密着焼付装置は、真空ポンプ１０と排気
口５の間に制御装置１２により制御される圧力調整バル
ブ１１を設けた点以外は、従来のものと同様である。As described above, the vacuum contact printing apparatus of the present invention has the following features except that a pressure regulating valve 11 controlled by a control device 12 is provided between the vacuum pump 10 and the exhaust port 5. , similar to the conventional one.
【００１３】ところで、密閉室８内の真空度は、制御装
置１２によって圧力調整バルブ１１を経時的に調節する
ことにより、例えば図２に示したように制御される。す
なわち、本発明による真空密着焼付装置においては、真
空排気のために、従来のように真空ポンプの起動と共に
いきなり高真空とせず、圧力調整バルブ１１を介して、
排気当初は例えば−５０ｍｍＨｇの低真空度で排気する
。こうすると、この真空度と大気圧との差により、図１
に示したように、原版２、２の中心部が最も内側に撓み
、最初に感光基材１に密着する。この点が本発明の最も
重要なポイントであり、最初に低真空度で排気すること
により、原版２、２の外周部が先に減圧され密着するこ
とを防止し、最初にその中心部を密着させるようにする
ものである。したがって、原版２、２の中心部に空気が
残ることはなくなる。中心部が密着するまでに要する時
間（８００×６００ｍｍ角の原版で約５秒）を経た後（
図２の■）、圧力調整バルブ１１をより開き（電磁弁を
使用する場合、駆動電圧を変更すればよい。）、排気の
ための真空度を例えば−１５０〜−２００ｍｍＨｇの圧
力に上げる。この状態で原版２、２の外周まで完全に密
着した後（１５〜２０秒、図２の■）、圧力調整バルブ
１１を全開にし、高真空度で感光基材１を原版２、２に
密着させる（図２の■）。By the way, the degree of vacuum in the sealed chamber 8 is controlled by the control device 12 by adjusting the pressure regulating valve 11 over time, as shown in FIG. 2, for example. That is, in the vacuum contact printing apparatus according to the present invention, for evacuation, instead of suddenly creating a high vacuum when the vacuum pump is started as in the conventional case, the pressure adjustment valve 11 is used to
At the beginning of evacuation, evacuation is performed at a low degree of vacuum, for example, -50 mmHg. In this way, due to the difference between this degree of vacuum and atmospheric pressure, Figure 1
As shown in FIG. 2, the center portions of the original plates 2, 2 are bent inwardly and come into close contact with the photosensitive substrate 1 first. This is the most important point of the present invention; by first evacuating at a low degree of vacuum, the outer periphery of the master plates 2 and 2 is prevented from being depressurized and brought into close contact with each other first, and the central part is brought into close contact with each other first. It is intended to make it possible. Therefore, no air remains in the center of the originals 2, 2. After the time required for the centers to stick together (approximately 5 seconds for an 800 x 600 mm square original),
2), the pressure regulating valve 11 is further opened (if a solenoid valve is used, the drive voltage may be changed), and the degree of vacuum for evacuation is increased to, for example, -150 to -200 mmHg. In this state, after the originals 2, 2 are completely adhered to the outer periphery (15 to 20 seconds, ■ in Figure 2), the pressure adjustment valve 11 is fully opened, and the photosensitive substrate 1 is brought into close contact with the originals 2, 2 under high vacuum. (■ in Figure 2).
【００１４】なお、図２のように段階的に真空度を上げ
る代わりに、図３に示すように、低真空度（例えば−５
０ｍｍＨｇ）で原版２、２の中心部が密着してから後は
連続的に高真空度にするようにしてもよい。しかし、低
真空度にて原版２、２の中心部を密着させた後、直ぐに
高真空とすると、外周部が一気に密着し、一部空気が原
版２、２間に密閉されて残るため、せっかく密着してい
た中心部が剥がれてしまうので、上記図２又は図３のよ
うに中間の真空度を経て徐々に高真空度にする必要があ
る。また、中間の−１５０〜−２００ｍｍＨｇで原版２
、２外周まで密着しただけでは、ニュートンリングで見
ると明らかであるが、高真空度で吸引した場合よりも密
着性が悪い。Note that instead of increasing the degree of vacuum stepwise as shown in FIG. 2, as shown in FIG.
After the centers of the originals 2 and 2 are brought into close contact with each other at a pressure of 0 mmHg), the degree of vacuum may be continuously increased. However, if the center parts of the master plates 2 and 2 are brought into close contact with each other under a low degree of vacuum, and then immediately brought to a high vacuum, the outer periphery will be brought into close contact with each other at once, and some air will remain sealed between the master plates 2 and 2. Since the center part that was in close contact will peel off, it is necessary to go through an intermediate degree of vacuum and then gradually increase the degree of vacuum to a high degree, as shown in FIG. 2 or 3 above. Also, at the intermediate level of -150 to -200 mmHg, the original plate 2
, 2. It is clear from the Newton's ring that the adhesion is poorer than when suction is carried out at a high degree of vacuum if only the outer periphery is in close contact.
【００１５】以上のように、図１の本発明の真空密着焼
付装置の場合の真空密着に要する時間は、図４の従来の
ものの約半分となり、良好な結果が得られた。As described above, the time required for vacuum contact printing in the case of the vacuum contact printing apparatus of the present invention shown in FIG. 1 was about half that of the conventional one shown in FIG. 4, and good results were obtained.
【００１６】以上、実施例について本発明の真空密着焼
付装置を説明してきたが、本発明はこれら実施例に限定
されず種々の変形が可能である。例えば、圧力調整バル
ブ１１の開閉により真空度を変える代わりに、真空ポン
プとしてその真空排気度を任意に変更できるものを用い
てもよい。また、感光基材の片面にのみ１枚の原版を真
空密着させる焼付装置においても、同様に適用できる。Although the vacuum contact printing apparatus of the present invention has been described above with reference to embodiments, the present invention is not limited to these embodiments and can be modified in various ways. For example, instead of changing the degree of vacuum by opening and closing the pressure regulating valve 11, a vacuum pump that can arbitrarily change the degree of evacuation may be used. Further, the present invention can be similarly applied to a printing apparatus in which one original plate is vacuum-adhered to only one side of a photosensitive substrate.
【００１７】[0017]
【発明の効果】以上説明したように、本発明の真空密着
焼付装置によれば、真空排気を、排気当初において原版
の中心部が最初に密着する低真空度において行い、その
後段階的もしくは連続的に高真空度まで排気の真空度を
上げるように構成しているので、最初の低真空度と大気
圧との差により、原版の中心部が最も内側に撓み、最初
に基材に密着する。したがって、原版の外周部が先に減
圧され密着することが防止され、原版の中心部に空気が
残ることはなくなり、原版中心部から外周まで均一にか
つ高速に真空密着させることができる。As explained above, according to the vacuum contact printing apparatus of the present invention, evacuation is performed at a low degree of vacuum where the center of the original first comes into close contact at the beginning of evacuation, and then stepwise or continuously. Since the vacuum level is increased to a high vacuum level, the center of the original plate bends inwardly due to the difference between the initial low vacuum level and the atmospheric pressure, and is the first to adhere to the base material. Therefore, the outer periphery of the original is prevented from being depressurized first and brought into close contact with each other, air is not left in the center of the original, and the original can be vacuum-adhered uniformly and quickly from the center to the outer periphery.
【図１】本発明の真空密着焼付装置の１実施例の構成を
示す概略断面図である。FIG. 1 is a schematic cross-sectional view showing the configuration of one embodiment of a vacuum contact printing apparatus of the present invention.
【図２】経時的に制御される密閉室内の真空度の推移の
１例を示す図である。FIG. 2 is a diagram showing an example of changes in the degree of vacuum in a sealed chamber that is controlled over time.
【図３】他の例の真空度の推移を示す図である。FIG. 3 is a diagram showing changes in the degree of vacuum in another example.
【図４】従来の真空密着焼付装置の構成を示す概略断面
図である。FIG. 4 is a schematic cross-sectional view showing the configuration of a conventional vacuum contact printing apparatus.
１…感光基材 ２…原版 ３…枠 ４…パッキング ５…排気口 ６…ベッド ７…光源 ８…密閉室 １０…真空ポンプ １１…圧力調整バルブ １２…制御装置 1...Photosensitive base material 2...Original version 3...Frame 4...Packing 5...Exhaust port 6...Bed 7...Light source 8... Closed room 10...Vacuum pump 11...Pressure adjustment valve 12...Control device
Claims (2)
絵柄が描かれた原版を真空排気により密着させ、その原
版上に光を照射することにより基材に絵柄を露光焼付け
する真空密着焼付装置において、真空排気を、排気当初
において原版の中心部が最初に密着する低真空度におい
て行い、その後段階的もしくは連続的に高真空度まで排
気の真空度を上げるように構成したことを特徴とする真
空密着焼付装置。Claim 1: Vacuum adhesion, in which an original plate with a pattern drawn on the surface of a substrate coated with a photosensitive material is brought into close contact with the surface of the substrate by vacuum evacuation, and the pattern is exposed and printed onto the substrate by irradiating light onto the original plate. The printing apparatus is characterized in that the vacuum evacuation is performed at a low vacuum level where the center of the original first comes into close contact with the original during the initial stage of evacuation, and then the vacuum level is increased stepwise or continuously to a high vacuum level. Vacuum contact printing equipment.
徴とする請求項１記載の真空密着焼付装置。2. The vacuum contact printing apparatus according to claim 1, wherein the original plate is brought into close contact with both sides of the base material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3030855A JP2959855B2 (en) | 1991-02-26 | 1991-02-26 | Vacuum contact baking method and vacuum contact baking device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3030855A JP2959855B2 (en) | 1991-02-26 | 1991-02-26 | Vacuum contact baking method and vacuum contact baking device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04356037A true JPH04356037A (en) | 1992-12-09 |
| JP2959855B2 JP2959855B2 (en) | 1999-10-06 |
Family
ID=12315331
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3030855A Expired - Lifetime JP2959855B2 (en) | 1991-02-26 | 1991-02-26 | Vacuum contact baking method and vacuum contact baking device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2959855B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001194801A (en) * | 2000-01-14 | 2001-07-19 | Toshiba Corp | Exposure device |
-
1991
- 1991-02-26 JP JP3030855A patent/JP2959855B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001194801A (en) * | 2000-01-14 | 2001-07-19 | Toshiba Corp | Exposure device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2959855B2 (en) | 1999-10-06 |
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