JPH04354314A - Manufacture of laminated ceramic inductor - Google Patents
Manufacture of laminated ceramic inductorInfo
- Publication number
- JPH04354314A JPH04354314A JP3155151A JP15515191A JPH04354314A JP H04354314 A JPH04354314 A JP H04354314A JP 3155151 A JP3155151 A JP 3155151A JP 15515191 A JP15515191 A JP 15515191A JP H04354314 A JPH04354314 A JP H04354314A
- Authority
- JP
- Japan
- Prior art keywords
- ferrite
- sheet
- sheets
- magnetic field
- magnet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 16
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 229910000859 α-Fe Inorganic materials 0.000 claims abstract description 47
- 239000002002 slurry Substances 0.000 claims abstract description 20
- 238000000034 method Methods 0.000 claims abstract description 13
- 238000010304 firing Methods 0.000 claims description 15
- 239000000843 powder Substances 0.000 claims description 6
- 239000011230 binding agent Substances 0.000 claims description 5
- 238000010030 laminating Methods 0.000 claims description 5
- 238000005520 cutting process Methods 0.000 claims description 3
- 238000004898 kneading Methods 0.000 claims description 3
- 238000003475 lamination Methods 0.000 claims description 3
- 238000003825 pressing Methods 0.000 claims 1
- 238000001035 drying Methods 0.000 abstract description 3
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 abstract description 2
- -1 polyethylene terephthalate Polymers 0.000 abstract description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 abstract description 2
- 239000005020 polyethylene terephthalate Substances 0.000 abstract description 2
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000002788 crimping Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- WUOACPNHFRMFPN-SECBINFHSA-N (S)-(-)-alpha-terpineol Chemical compound CC1=CC[C@@H](C(C)(C)O)CC1 WUOACPNHFRMFPN-SECBINFHSA-N 0.000 description 1
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- OVKDFILSBMEKLT-UHFFFAOYSA-N alpha-Terpineol Natural products CC(=C)C1(O)CCC(C)=CC1 OVKDFILSBMEKLT-UHFFFAOYSA-N 0.000 description 1
- 229940088601 alpha-terpineol Drugs 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000006247 magnetic powder Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000009740 moulding (composite fabrication) Methods 0.000 description 1
Landscapes
- Hard Magnetic Materials (AREA)
- Soft Magnetic Materials (AREA)
- Manufacturing Cores, Coils, And Magnets (AREA)
- Coils Or Transformers For Communication (AREA)
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明は、品質係数およびインダ
クタンス値の優れた積層セラミックインダクタの製造方
法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a multilayer ceramic inductor having an excellent quality factor and inductance value.
【０００２】0002
【従来の技術】従来の積層セラミックインダクタの製造
方法では、例えばＮｉ・Ｚｎ系のフェライト磁性粉末と
有機バインダとを混合したスラリーをシート状に形成し
、得られたシートの各々の上に、積層されたときコイル
を構成するように配分された種々の異なるパターンを導
電ペーストでそれぞれ形成し、これら複数枚のシートを
積層圧着し、所定寸法に裁断して、対向する２つの端面
に前記コイルの端末がそれぞれ導出された状態で焼成し
、コイルの端末が導出された前記両端面にそれぞれ導電
性ペーストを塗布して焼き付け外部電極を構成している
。[Prior Art] In a conventional method for manufacturing a multilayer ceramic inductor, a slurry made by mixing, for example, Ni/Zn-based ferrite magnetic powder and an organic binder is formed into sheets, and a laminated layer is formed on each of the obtained sheets. The conductive paste is used to form various different patterns distributed so as to constitute a coil when the coil is assembled, and the plurality of sheets are laminated and crimped, cut to a predetermined size, and the coil is attached to two opposing end faces. The coil is fired with the terminals drawn out, and a conductive paste is applied to each of the end faces of the coil from which the terminals are drawn out, thereby forming a baked external electrode.
【０００３】前記コイルを構成する導電ペーストは、金
属の抵抗値が低いこととコスト面を考慮してＡｇペース
トが用いられている。このＡｇペーストはフェライト素
体とともに焼成される。[0003] As the conductive paste constituting the coil, Ag paste is used in consideration of the low metal resistance value and cost. This Ag paste is fired together with the ferrite body.
【０００４】0004
【発明が解決しようとする課題】しかしながら、Ａｇペ
ーストをコイル導体とした積層セラミックインダクタは
焼成温度を高くするとフェライトの焼成密度が高くなり
、インダクタンス（Ｌ）を高める効果があるが、Ａｇが
フェライト素体中に拡散して、フェライト素体の抵抗値
を低下させ、その結果品質係数（Ｑ）を低下させる。
したがって、Ｌ、Ｑの兼ね合いから焼成温度を決定し、
いずれか一方の特性を犠牲にしているのが現状で、Ｌ、
Ｑともに満足すべき値を持つ積層セラミックインダクタ
を得ることは困難であるという課題があった。[Problems to be Solved by the Invention] However, in a multilayer ceramic inductor using Ag paste as a coil conductor, increasing the firing temperature increases the firing density of ferrite, which has the effect of increasing inductance (L). It diffuses throughout the body, lowering the resistance value of the ferrite element body and, as a result, lowering the quality factor (Q). Therefore, the firing temperature is determined from the balance of L and Q,
The current situation is that one of the characteristics is sacrificed, L,
There has been a problem in that it is difficult to obtain a multilayer ceramic inductor with satisfactory values for both Q.
【０００５】本発明の目的は、上記積層セラミックイン
ダクタの製造方法を改善して、インダクタンス（Ｌ）を
高くすることができ、しかもＡｇのフェライト素体中へ
の拡散が抑制されるため品質係数Ｑの低下が生じない製
造方法を提供することにある。It is an object of the present invention to improve the method for manufacturing the multilayer ceramic inductor described above, to increase the inductance (L), and to suppress the diffusion of Ag into the ferrite element body, thereby reducing the quality factor Q. It is an object of the present invention to provide a manufacturing method that does not cause a decrease in performance.
【０００６】[0006]
【課題を解決するための手段】本発明者は上記目的を達
成すべく研究の結果、磁性フェライト粉末と有機バイン
ダーを混合したフェライトスラリーをフェライトグリー
ンシートに成形し、さらにコイルを形成する導電ペース
トを塗布し、積層、圧着、裁断、焼成し、これに外部端
子を形成する積層セラミックインダクタの製造方法にお
いて、上記フェライトグリーンシートを成形するに当っ
て相対向して配置された同極または異極の磁石によって
与えられる磁場中で成形すれば、成形密度が増大するの
でインダクタ素体が通常の焼成温度よりも数１０度（℃
）低い温度で焼成された場合でも従来と同等の焼成密度
が得られ、しかも品質係数Ｑを低下させないインダクタ
素子が得られることを見出し、本発明に到達した。[Means for Solving the Problem] As a result of research to achieve the above object, the present inventor formed a ferrite slurry obtained by mixing magnetic ferrite powder and an organic binder into a ferrite green sheet, and further applied a conductive paste to form a coil. In the method for manufacturing a multilayer ceramic inductor, which involves coating, laminating, crimping, cutting, and firing, and forming external terminals thereon, when forming the ferrite green sheets, the ferrite green sheets of the same or different polarities are placed opposite each other. When molded in a magnetic field provided by a magnet, the molding density increases, so the inductor element is heated to a temperature several tens of degrees (°C) higher than the normal firing temperature.
) The inventors have discovered that even when fired at a low temperature, an inductor element can be obtained that has the same firing density as the conventional one and does not reduce the quality factor Q, and has arrived at the present invention.
【０００７】すなわち本発明は、磁性フェライト粉末を
有機バインダーおよび有機溶剤と混練して得られたフェ
ライトスラリーをシート状に成形し、得られたフェライ
トグリーンシートにコイル形成用の導電ペーストを塗布
して積層用シートをつくり、これら積層用シートを複数
枚積層、圧着し、裁断、焼成して得られた素子に外部端
子を形成することからなる積層セラミックインダクタの
製造方法において、上記フェライトグリーンシートの成
形を、好ましくは該シートの厚み方向に直交する方向あ
るいは厚み方向と平行する方向に印加された磁場中で行
うことを特徴とする積層セラミックインダクタの製造方
法を提供するものである。That is, in the present invention, a ferrite slurry obtained by kneading magnetic ferrite powder with an organic binder and an organic solvent is formed into a sheet, and a conductive paste for forming a coil is applied to the obtained ferrite green sheet. In a method for manufacturing a multilayer ceramic inductor, which comprises forming a lamination sheet, laminating a plurality of these lamination sheets, crimping them, cutting them, and firing them to form external terminals on the obtained element, the above-mentioned ferrite green sheet is formed. The present invention provides a method for manufacturing a multilayer ceramic inductor, characterized in that the steps are performed in a magnetic field applied preferably in a direction perpendicular to the thickness direction of the sheet or in a direction parallel to the thickness direction.
【０００８】[0008]
【作用】磁場中で磁性フェライトのグリーンシートを成
形すると磁界方向の成形密度が向上する。このシートに
導電ペーストを塗布してコイルを形成し、圧着して焼成
すると、低温焼成でも焼成密度を高めることができるた
め、Ａｇの拡散を防いで焼成することができる。したが
って品質係数Ｑを低下させずに磁気特性の優れた積層セ
ラミックインダクタを製造することができる。[Operation] When a green sheet of magnetic ferrite is formed in a magnetic field, the forming density in the direction of the magnetic field is improved. When a conductive paste is applied to this sheet to form a coil, the sheet is pressed and fired, the firing density can be increased even when firing at a low temperature, so that the firing can be performed while preventing the diffusion of Ag. Therefore, a multilayer ceramic inductor with excellent magnetic properties can be manufactured without reducing the quality factor Q.
【０００９】[0009]
【実施例１】図１は本発明の１実施例において用いられ
たベースフィルム上へのフェライトスラリーの塗工装置
の模式断面図であって、以下、この図を参照して説明す
る。Embodiment 1 FIG. 1 is a schematic sectional view of an apparatus for coating a ferrite slurry onto a base film used in an embodiment of the present invention, and the following description will be made with reference to this figure.
【００１０】Ｆｅ２ Ｏ３ ：４９モル％、ＮｉＯ：２
１モル％、ＺｎＯ：２０モル％およびＣｕＯ：１０モル
％を秤量し、水とともにボールミルに投入して混合・分
散を行い、ボールミルから取り出して乾燥した後、大気
中 ８００℃で２時間加熱し仮焼した。その後再び水と
ともにボールミルに投入して１５時間解砕し、ボールミ
ルから取り出して乾燥してフェライト粉末を得た。この
フェライト粉末にポリブチラールを主成分とする有機バ
インダーと有機溶剤を加え、混練して粘度 ４，２００
ｃｐ のフェライトスラリーを得た。[0010] Fe2O3: 49 mol%, NiO: 2
1 mol%, ZnO: 20 mol%, and CuO: 10 mol% were weighed, put into a ball mill with water, mixed and dispersed, taken out from the ball mill, dried, heated in the air at 800°C for 2 hours, and temporarily suspended. Baked. Thereafter, it was put into a ball mill again together with water and crushed for 15 hours, and then taken out from the ball mill and dried to obtain ferrite powder. An organic binder mainly composed of polybutyral and an organic solvent are added to this ferrite powder and kneaded to a viscosity of 4,200.
A ferrite slurry of cp was obtained.
【００１１】これとは別に、Ａｇ粉末とエチルセルロー
スとα−ターピネオールとブチルカルビトールアセテー
トを混練したＡｇペーストを用意した。Separately, an Ag paste was prepared by kneading Ag powder, ethyl cellulose, α-terpineol, and butyl carbitol acetate.
【００１２】一方、図１に見られるように、上下に同極
が対向した所謂突き合わせ磁石５を設置し、その磁石の
磁極間を水平に通過するようにポリエチレンテレフタレ
ートのベースフィルム３を走行させ、前記ベースフィル
ムが走行する方向に見て磁石の後方にドクターブレード
６を配し、一方磁石の前方に乾燥炉（図示せず）を配し
、ベースフィルム３が支持板４上を連続して走行する塗
工装置を用意した。On the other hand, as shown in FIG. 1, a so-called butt magnet 5 with the same poles facing each other is installed, and a polyethylene terephthalate base film 3 is run horizontally between the magnetic poles of the magnet. A doctor blade 6 is arranged behind the magnet when viewed in the direction in which the base film runs, and a drying oven (not shown) is arranged in front of the magnet, so that the base film 3 runs continuously on the support plate 4. A coating device was prepared.
【００１３】前記塗工装置において、フェライトスラリ
ー溜り２を介してフェライトスラリーを塗工したベース
フィルムを搬送する速度を２ｍ／ｍｉｎに設定し、磁界
強度はシートの長手方向に ３，０００ Ｏｅ の磁界
を印加し（７は磁力線の方向を示す）、乾燥炉の温度設
定は、４０℃から １００℃に順次昇温する温度プロフ
ァイルに設定し、前記スラリーを塗工した結果、厚さ約
５０μｍのシートを得た。得られたシートの成形密度は
２．４ｇ／ｃｍ３ であった。In the coating device, the speed of conveying the base film coated with ferrite slurry through the ferrite slurry reservoir 2 is set to 2 m/min, and the magnetic field strength is 3,000 Oe in the longitudinal direction of the sheet. (7 indicates the direction of the magnetic field lines), and the temperature of the drying oven was set to a temperature profile that gradually increases from 40°C to 100°C. As a result of coating the slurry, a sheet with a thickness of approximately 50 μm was obtained. I got it. The molded density of the obtained sheet was 2.4 g/cm3.
【００１４】前記シートに前記Ａｇペーストを用いて、
略コの字状のパターンを印刷した。該パターンは、該シ
ートを積層・圧着することによって、スルーホールを介
して隣接するシート間の導電ペーストが接続してコイル
を形成するパターンである。このようなシートを複数枚
積層し、略７ターン巻回された積層セラミックインダク
タを形成し、 ８７０℃の温度で焼成した。該素子の両
端には前記コイルの端末が導出され、該端面に外部電極
を構成して積層セラミックインダクタを構成した。[0014] Using the Ag paste on the sheet,
A roughly U-shaped pattern was printed. This pattern is a pattern in which conductive paste between adjacent sheets is connected via through holes to form a coil by laminating and press-bonding the sheets. A plurality of such sheets were laminated to form a laminated ceramic inductor wound approximately seven turns, and fired at a temperature of 870°C. Terminals of the coil were led out from both ends of the element, and external electrodes were formed on the end faces to form a multilayer ceramic inductor.
【００１５】焼成後積層セラミックインダクタの密度は
３０個の平均値で５．３ｇ／ｃｍ３ であり、測定周波
数１０ＭＨｚｋにおけるインダクタンス（Ｌ）の平均値
は ２．４μＨであり、品質係数（Ｑ）は６０であった
。[0015] The density of the multilayer ceramic inductor after firing is 5.3 g/cm3 as an average value of 30 pieces, the average value of inductance (L) at a measurement frequency of 10 MHz is 2.4 μH, and the quality factor (Q) is 60. Met.
【００１６】なお、図２は本実施例におけるフェライト
スラリー中のフェライトの並び方を示す模式断面図であ
る。Note that FIG. 2 is a schematic cross-sectional view showing the arrangement of ferrite in the ferrite slurry in this example.
【００１７】[0017]
【実施例２】実施例１において、同極が対向した磁石５
を用いて磁界強度はシートの長手方向に ３，０００
Ｏｅ の磁界を印加したことに代えて、異極が対向し、
磁界の方向がシートの厚みの方向に ５，０００ Ｏｅ
の磁界を印加したこと以外は、実施例１と同様に行っ
た結果、焼成後の密度は ５．２ｇ／ｃｍ３ であり、
測定周波数１０ＭＨｚｋにおけるインダクタンス（Ｌ）
の平均値は ２．３μＨであり、品質係数（Ｑ）は５９
であった。[Example 2] In Example 1, magnets 5 with the same poles facing each other
The magnetic field strength is 3,000 in the longitudinal direction of the sheet.
Instead of applying a magnetic field of Oe, different poles face each other,
The direction of the magnetic field is in the direction of the sheet thickness. 5,000 Oe
The process was carried out in the same manner as in Example 1, except that a magnetic field of
Inductance (L) at measurement frequency 10MHzk
The average value of is 2.3μH, and the quality factor (Q) is 59
Met.
【００１８】なお、図４は本実施例におけるフェライト
スラリシート中のフェライトの並び方を示す模式断面図
である。Note that FIG. 4 is a schematic cross-sectional view showing the arrangement of ferrite in the ferrite slurry sheet in this example.
【００１９】[0019]
【比較例】実施例１において、フェライトグリーンシー
トを磁場中で成形しなかったことと、焼成温度を ８７
０℃に代えて ９２０℃としたこと以外は実施例１と同
様に行った結果、焼成後の密度は ５．３ｇ／ｃｍ３
であり、測定周波数１０ＭＨｚｋにおけるインダクタン
ス（Ｌ）の平均値は ２．２μＨであり、品質係数（Ｑ
）は４８であった。[Comparative example] In Example 1, the ferrite green sheet was not formed in a magnetic field, and the firing temperature was set to 87.
As a result of carrying out the same procedure as in Example 1 except that the temperature was changed to 920°C instead of 0°C, the density after firing was 5.3 g/cm3.
The average value of inductance (L) at a measurement frequency of 10 MHz is 2.2 μH, and the quality factor (Q
) was 48.
【００２０】なお、図３は本比較例におけるフェライト
スラリシート中のフェライトの並び方を示す模式断面図
である。Note that FIG. 3 is a schematic cross-sectional view showing how ferrite is arranged in a ferrite slurry sheet in this comparative example.
【００２１】[0021]
【発明の効果】以上説明したように、本発明の方法によ
れば、上記実施例に示したように数十度低い温度で焼成
して、従来と同等の焼成密度を得ることができる。した
がって、Ａｇの拡散を少なくしてＱ特性の低下を防止し
、高いインダクタンス（Ｌ）と大きな品質係数（Ｑ）を
同時に具備した積層セラミックインダクタを提供するこ
とができる。この効果は多大である。As explained above, according to the method of the present invention, it is possible to obtain a fired density equivalent to that of the conventional method by firing at a temperature several tens of degrees lower, as shown in the above embodiment. Therefore, it is possible to provide a multilayer ceramic inductor that simultaneously has high inductance (L) and a large quality factor (Q) by reducing diffusion of Ag and preventing deterioration of Q characteristics. This effect is significant.
【図１】本発明の１実施例に用いられたフェライトスラ
リーのベースフィルム上への塗工装置の主要部を示す模
式断面図である。FIG. 1 is a schematic cross-sectional view showing the main parts of a coating device for applying ferrite slurry onto a base film, which was used in one embodiment of the present invention.
【図２】ベースフィルム上に塗工されたフェライトスラ
リーに、本発明の方法によりシートの長手方向に磁場を
印加した際のフェライトの並び方を示す模式断面図であ
る。FIG. 2 is a schematic cross-sectional view showing how ferrite is arranged when a magnetic field is applied to the ferrite slurry coated on the base film in the longitudinal direction of the sheet according to the method of the present invention.
【図３】シート上に塗工されたフェライトスラリーに、
磁場を印加しなかった場合のフェライトスラリー中のフ
ェライトの並び方を示す模式断面図である。[Figure 3] Ferrite slurry coated on the sheet
FIG. 3 is a schematic cross-sectional view showing how ferrite is arranged in a ferrite slurry when no magnetic field is applied.
【図４】ベースフィルム上に塗工されたフェライトスラ
リーに、本発明の方法によりシートの厚み方向に磁場を
印加した際のフェライトの並び方を示す模式断面図であ
る。FIG. 4 is a schematic cross-sectional view showing how ferrite is arranged when a magnetic field is applied to the ferrite slurry coated on the base film in the thickness direction of the sheet according to the method of the present invention.
１ フェライト ２ フェライトスラリー溜り ３ ベースフィルム ４ 支持板 ５ 同極が対向した磁石 ６ ドクターブレード ７ 磁力線の向き 1 Ferrite 2 Ferrite slurry pool 3 Base film 4 Support plate 5 Magnet with the same poles facing each other 6 Doctor Blade 7 Direction of magnetic field lines
Claims (3)
等と混練して得られたフェライトスラリーを磁場中でシ
ート状に成形し、得られたフェライトグリーンシートに
コイル形成用の導電ペーストを塗布して積層用シートを
つくり、これら積層用シートを複数枚積層、圧着し、裁
断、焼成して得られた素子に外部端子を形成することか
らなる積層セラミックインダクタの製造方法。Claim 1: A ferrite slurry obtained by kneading magnetic ferrite powder with an organic binder, etc. is formed into a sheet in a magnetic field, and a conductive paste for forming a coil is applied to the obtained ferrite green sheet for lamination. A method for manufacturing a multilayer ceramic inductor, which comprises making sheets, laminating and pressing a plurality of these laminating sheets, cutting and firing them, and forming external terminals on the obtained element.
中成形における磁界の方向が該シートの厚み方向に直交
する方向である請求項１記載の方法。2. The method according to claim 1, wherein the direction of the magnetic field in forming the ferrite green sheet in a magnetic field is perpendicular to the thickness direction of the sheet.
中成形における磁界の方向が該シートの厚み方向と平行
する方向である請求項１記載の方法。3. The method according to claim 1, wherein the direction of the magnetic field in forming the ferrite green sheet in a magnetic field is parallel to the thickness direction of the sheet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3155151A JPH04354314A (en) | 1991-05-31 | 1991-05-31 | Manufacture of laminated ceramic inductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3155151A JPH04354314A (en) | 1991-05-31 | 1991-05-31 | Manufacture of laminated ceramic inductor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04354314A true JPH04354314A (en) | 1992-12-08 |
Family
ID=15599653
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3155151A Withdrawn JPH04354314A (en) | 1991-05-31 | 1991-05-31 | Manufacture of laminated ceramic inductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04354314A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999016089A1 (en) * | 1997-09-22 | 1999-04-01 | Tdk Corporation | Laminated ceramic parts |
| US6251299B1 (en) | 1998-12-28 | 2001-06-26 | Tdk Corporation | Magnetic material, inductance element using the same and manufacturing method thereof |
-
1991
- 1991-05-31 JP JP3155151A patent/JPH04354314A/en not_active Withdrawn
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999016089A1 (en) * | 1997-09-22 | 1999-04-01 | Tdk Corporation | Laminated ceramic parts |
| US6235221B1 (en) | 1997-09-22 | 2001-05-22 | Tdk Corporation | Multilayer ceramic part |
| US6251299B1 (en) | 1998-12-28 | 2001-06-26 | Tdk Corporation | Magnetic material, inductance element using the same and manufacturing method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Application deemed to be withdrawn because no request for examination was validly filed |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19980806 |