JPH04335986A - Method and apparatus for drying - Google Patents

Method and apparatus for drying

Info

Publication number
JPH04335986A
JPH04335986A JP20156791A JP20156791A JPH04335986A JP H04335986 A JPH04335986 A JP H04335986A JP 20156791 A JP20156791 A JP 20156791A JP 20156791 A JP20156791 A JP 20156791A JP H04335986 A JPH04335986 A JP H04335986A
Authority
JP
Japan
Prior art keywords
drying
vacuum
workpiece
chamber
water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20156791A
Other languages
Japanese (ja)
Inventor
Kaichi Tsuruta
加一 鶴田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Senju Metal Industry Co Ltd
Original Assignee
Senju Metal Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Senju Metal Industry Co Ltd filed Critical Senju Metal Industry Co Ltd
Priority to JP20156791A priority Critical patent/JPH04335986A/en
Publication of JPH04335986A publication Critical patent/JPH04335986A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/227Drying of printed circuits

Landscapes

  • Drying Of Solid Materials (AREA)

Abstract

PURPOSE:To extremely shorten a vacuum drying time and to completely dry by blowing hot air upon a work after washing to preliminarily heat it, simultaneously removing most water by wind force and heat of the hot air, and then completely drying in vacuum. CONSTITUTION:A printed board of a work after washing is conveyed into a preliminarily heating chamber 2 by a conveyor 4, hot air is blown from above and below by a hot air unit 5 to blow OFF most water and to simultaneously preliminarily heat a printed board. The board heated to a predetermined temperature is conveyed into a vacuum chamber 3 by the conveyors 4, 11. Shutters 14, 14 at entrance/exit are closed, the air in the chamber 3 is discharged, and simultaneously heated by far infrared ray heaters 12,... Here, excess water is removed, preliminarily heated, and completely dried in vacuum of 40Torr or less of vacuum degree. Thus, after drying, the shutters 14, 14 of the entrance/ exist are opened, and conveyed to a next processing step on a conveyor 16 by a conveyor 11.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は,水洗後のワークを乾燥
させる方法及び装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for drying a workpiece after washing with water.

【0002】0002

【従来の技術】はんだ付け後のプリント基板,研磨後の
レンズ,切削加工後の精密機械部品,製造後の医療器具
等のワークは,これらに付着した異物,即ちプリント基
板ではフラックス残渣,レンズでは研磨粉,精密機械部
品では切削油等が付着しているが,これら異物は各種の
事故原因となるため完全に洗浄除去しておかなければな
らないものである。
[Prior Art] Works such as printed circuit boards after soldering, lenses after polishing, precision mechanical parts after cutting, and medical instruments after manufacturing have foreign substances attached to them, such as flux residue on printed circuit boards and flux residue on lenses. Polishing powder, cutting oil, etc. adhere to precision machine parts, but these foreign substances must be completely washed away as they can cause various accidents.

【0003】従来,洗浄を行うワークはフロンやトリク
レンのようなフッ素系,塩素系の溶剤で洗浄していたが
,フッ素系の溶剤は地球を取り巻くオゾン層を破壊し,
太陽からの有害な紫外線を多量に地球に到達させて皮膚
ガンの原因を作り,又塩素系の溶剤は地下水に混入して
飲料水を汚染することから,これらの溶剤の使用が規制
されるようになってきている。従って,近時,これらの
溶剤に代わって水溶性の洗剤を用いての水洗浄が行われ
るようになってきた。
Conventionally, workpieces to be cleaned have been cleaned with fluorine-based or chlorine-based solvents such as Freon or Trichloride, but fluorine-based solvents destroy the ozone layer surrounding the earth.
The use of chlorinated solvents has been regulated because large amounts of harmful ultraviolet rays from the sun reach the earth, causing skin cancer, and chlorinated solvents can get into groundwater and contaminate drinking water. It is becoming. Therefore, in recent years, instead of these solvents, water-soluble detergents have been used for water cleaning.

【0004】水は,水洗後の後処理さえ適切に行えば公
害問題も起こさず,しかも水自体は前述溶剤よりも安価
であるという長所を有している。しかしながら,水は洗
浄後,完全に乾燥を行わないと,電子部品では絶縁不良
を起こし,レンズや医療器具ではゴミやホコリを付着さ
せ,機械部品では錆の原因となる。故に,水洗後のワー
クは水を完全に乾燥させなければならないものである。
[0004] Water has the advantage that it does not cause any pollution problems as long as it is properly processed after washing, and water itself is cheaper than the above-mentioned solvents. However, if water is not completely dried after cleaning, it can cause insulation failure in electronic parts, dirt and dust on lenses and medical instruments, and rust on mechanical parts. Therefore, the work must be completely dried after being washed with water.

【0005】従来より水の乾燥方法としては,ワークを
加熱して水を蒸発させる加熱法,圧縮空気を吹き付けて
水を吹き飛ばすブロー法,真空中で加熱する真空法等が
あり,これらを採用した装置は多数提案されていた。
Conventional methods for drying water include a heating method in which the workpiece is heated to evaporate water, a blow method in which compressed air is blown to blow away the water, and a vacuum method in which water is heated in a vacuum. Many devices have been proposed.

【0006】ところで加熱法は,大気圧下で水を蒸発乾
燥するため比較的高温に加熱しなければならず,熱に弱
いワークは熱で変形したり機能が劣化する等の熱損傷を
受けるばかりでなく,狭間隙に侵入した水は蒸気になっ
ても出にくいことから十分な乾燥ができなかった。
However, in the heating method, water must be heated to a relatively high temperature in order to evaporate and dry it under atmospheric pressure, and workpieces that are sensitive to heat are susceptible to heat damage such as deformation and functional deterioration. However, the water that entered the narrow gap was difficult to escape even if it turned into steam, making it impossible to dry the product sufficiently.

【0007】ブロー法は,強力な圧縮空気をワークに直
接吹き付けるため,小さいものや繊細なものは吹き飛ば
されて破損する虞があるし,又狭間隙内の水は全く乾燥
が不可能であった。
[0007] In the blow method, powerful compressed air is blown directly onto the workpiece, so there is a risk that small or delicate items may be blown away and damaged, and water in narrow gaps cannot be dried at all. .

【0008】一方,真空法は,ワークを加熱するにして
も比較的低い温度で済むため,ワークを熱損傷すること
がないし,又狭間隙内の水も真空乾燥室の内部の空気を
引く時に,水が空気と共に引出されて乾燥しやすくなる
。しかもブロー法のようにワークを吹き飛ばすことがな
いため繊細なものでも安心して乾燥が行えるという長所
を有している。
On the other hand, in the vacuum method, even if the workpiece is heated, the temperature is relatively low, so the workpiece is not damaged by heat, and the water in the narrow gap is also removed when the air inside the vacuum drying chamber is drawn. , the water is drawn out along with the air, making it easier to dry. Moreover, unlike the blow method, the workpiece is not blown away, so it has the advantage that even delicate items can be dried safely.

【0009】[0009]

【発明が解決しようとする課題】しかしながら,従来の
真空法は,完全乾燥までに長い時間を要するものであり
,生産性に問題があった。又従来の乾燥装置は真空乾燥
室へのワークの出し入れ口が一箇所しかないという所謂
バッチ式であったため,連続した乾燥処理ができなかっ
た。つまり,プリント基板のようなものでは部品搭載装
置,自動はんだ付け装置,洗浄装置等で連続して処理が
行われており(インラインという),洗浄後の乾燥もこ
れらの装置と連続して処理を行えることが好ましいもの
であるが,従来のバッチ式乾燥装置は,この乾燥装置だ
けが連続処理に適していないため,これらの装置とのイ
ンライン化ができず,全体の生産性までも低下させてし
まうというものであった。
[Problems to be Solved by the Invention] However, the conventional vacuum method requires a long time for complete drying, which poses a problem in productivity. Furthermore, conventional drying equipment was a so-called batch type in which there was only one port for loading and unloading workpieces into the vacuum drying chamber, and therefore, continuous drying processing was not possible. In other words, for things like printed circuit boards, processing is performed continuously (in-line) using component mounting equipment, automatic soldering equipment, cleaning equipment, etc., and drying after cleaning is also processed continuously with these equipment. However, with conventional batch drying equipment, this drying equipment alone is not suitable for continuous processing, so in-line with these equipment is not possible, and the overall productivity is reduced. It was to be put away.

【0010】本発明は,従来の欠点に鑑みなされたもの
で,乾燥時間が短くて済む乾燥方法及び他の装置とのイ
ンライン化が可能な乾燥装置を提供することにある。
SUMMARY OF THE INVENTION The present invention has been made in view of the conventional drawbacks, and an object of the present invention is to provide a drying method that requires a short drying time and a drying device that can be installed in-line with other devices.

【0011】[0011]

【課題を解決するための手段】本発明者らは,水洗後の
ワークをそのまま真空乾燥するよりも,その前にワーク
から大部分の水を除去しておけば真空乾燥の時間が短く
て済み,又ワークの予備加熱を行っておけば,真空度が
低い状態でも効率よく乾燥できることに着目して本発明
を完成させた。
[Means for Solving the Problems] The present inventors have discovered that the vacuum drying time can be shortened by removing most of the water from the workpiece before vacuum drying the workpiece after washing with water. Furthermore, the present invention was completed by noting that if the workpiece is preheated, it can be dried efficiently even in a low degree of vacuum.

【0012】本発明は,水洗後のワークに熱風を吹き付
けてワークを60〜100℃に予備加熱すると同時に,
熱風の風力と熱でワークから大部分の水を除去し,その
後,真空度が40torr以下の真空中で完全乾燥する
ことを特徴とする乾燥方法であり,又本発明は,本体は
,予備加熱室及び真空乾燥室から成り,それぞれの室に
は独自に回動してワークを搬送する搬送装置が設置され
ているとともに,予備加熱室の上下部には熱風吹き出し
装置が設置され,しかも真空乾燥室は予備加熱室に隣接
するところが入口となっており,該入口の反対測が出口
となっていて,これらの出入口には開閉自在なシャッタ
ーが設置されていることを特徴とする乾燥装置である。
[0012] The present invention preheats the workpiece to 60 to 100°C by blowing hot air onto the workpiece after washing with water, and at the same time
The present invention is a drying method characterized by removing most of the water from the workpiece using wind power and heat of hot air, and then completely drying the workpiece in a vacuum with a degree of vacuum of 40 torr or less. It consists of a vacuum drying chamber and a vacuum drying chamber, and each chamber is equipped with a transport device that rotates independently to transport the workpiece, and hot air blowing devices are installed at the top and bottom of the preheating chamber. The drying device is characterized in that the chamber has an entrance adjacent to the preheating chamber, an outlet opposite the entrance, and shutters that can be opened and closed are installed at these entrances and exits. .

【0013】本発明の乾燥方法において,予備加熱時,
ワークの温度が60℃よりも低いと次の真空乾燥処理に
時間がかかてしまう。つまり,真空乾燥とは減圧するこ
とにより水の沸点を下げて水を低温度で沸騰させ,そし
て蒸発させるものであるが,ワークの温度が低いとワー
クに付着している水の沸点が高いままであるため,真空
度を高くしなければならない。そのためには真空ポンプ
に強力なものを使う必要があり,設備に費用がかかるば
かりでなく,高真空にするまでに時間がかかるため生産
性も低下する。従って,低真空,短時間で乾燥を行うた
めには真空乾燥前にワークを予備加熱してワークに付着
した水の沸点をさげるようにしておくものである。この
予備加熱温度が60℃よりも低いと後述真空度における
水の沸点があまり下がらず効率よい乾燥ができない。又
予備加熱温度が100℃を越えると熱に弱いワークを熱
損傷させてしまうため100℃を越えての予備加熱は不
要である。
[0013] In the drying method of the present invention, during preheating,
If the temperature of the workpiece is lower than 60°C, the next vacuum drying process will take time. In other words, vacuum drying lowers the boiling point of water by reducing pressure, boils the water at a low temperature, and evaporates it. However, if the temperature of the workpiece is low, the boiling point of the water attached to the workpiece will be high. Because of this, the degree of vacuum must be increased. To do this, it is necessary to use a powerful vacuum pump, which not only increases equipment costs but also reduces productivity because it takes time to achieve high vacuum. Therefore, in order to dry in a low vacuum and in a short time, the workpiece must be preheated before vacuum drying to lower the boiling point of the water adhering to the workpiece. If this preheating temperature is lower than 60° C., the boiling point of water at the degree of vacuum, which will be described later, will not fall too much and efficient drying will not be possible. Further, if the preheating temperature exceeds 100°C, the heat-sensitive workpiece will be thermally damaged, so preheating at a temperature exceeding 100°C is not necessary.

【0014】ワークを予備加熱しておいただけでは真空
乾燥時にワークの温度が下がってしまうが,真空乾燥時
にもワークを加熱しておくとワークを所定の温度に保こ
とができる。真空中でのワークの加熱は,遠赤外線のよ
うな輻射熱が適している。なぜならば,真空中では,空
気が存在しないため熱風のような空気を流動させるもの
は使用できないからである。
[0014] If the workpiece is only preheated, the temperature of the workpiece will drop during vacuum drying, but if the workpiece is heated also during vacuum drying, the workpiece can be maintained at a predetermined temperature. Radiant heat such as far-infrared rays is suitable for heating workpieces in a vacuum. This is because in a vacuum, there is no air, so it is not possible to use anything that moves air, such as hot air.

【0015】本発明における真空度が40torrより
も小さい(数値は大)と水の沸点も高くて乾燥に時間が
かかり過ぎてしまうため,40torr以下,好ましく
は20torr以下の真空度にする。しかしながら,ワ
ークを60〜100℃に予備加熱しておくため,生産性
の面からも余り大きな真空度は必要でなく1torr以
上あれば十分である。
If the degree of vacuum in the present invention is less than 40 torr (the numerical value is large), the boiling point of water will be high and drying will take too much time, so the degree of vacuum is set to 40 torr or less, preferably 20 torr or less. However, since the workpiece is preheated to 60 to 100[deg.] C., a vacuum degree of 1 torr or more is sufficient from the viewpoint of productivity.

【0016】[0016]

【実施例】以下,図面に基づいて本発明を説明する。図
1は本発明の乾燥装置の正面中央断面図,図2〜5は本
発明の乾燥方法を説明する図である。本発明の乾燥装置
は,本体1内に予備加熱室2と真空乾燥室3が設置され
ており,予備加熱室2には独自に回動する搬送装置4が
置かれている。搬送装置としては気体や熱を容易に通す
ことのできるメッシュベルトが適している。予備加熱室
2の上部及び搬送装置4の中間には熱風吹き出し装置5
が設置されている。熱風吹き出し装置とは,多数の穴が
穿設された箱状体であり,該箱状体はダクト6でブロッ
クヒータ7とブロワー8に接続されている。従って,ブ
ロワー8を駆動させると外気がブロワー8に吹込まれ,
ブロックヒータ7で加熱されてダクト6を通って箱状体
内に流入し,多数の穴から予備加熱室2内に上下方向か
ら吹き出るようになっている。真空乾燥室3はトンネル
状となっており,予備加熱室に隣接する側が入口9,そ
の反対側が出口10となっており,内部には独自に回動
する搬送装置11が設置されている。真空乾燥室3の上
部及び搬送装置11の中間には多数の赤外線ヒータ12
,・・・が取り付けられている。又真空乾燥室3の下部
は穴が穿設されていて,該穴は真空ポンプ13に接続さ
れている。真空乾燥室3の入口9及び出口10には開閉
自在なシャッター14,14が設置されている。シャッ
ター14,14はエアーリンダ15,15により上下動
するものであり,出入口を閉じた時にはシャッター14
の内側に貼られたゴムシールで出入口の気密を保持する
ようになっている。出口10の近傍にはワーク搬出用の
搬送装置16が設置されている。又予備加熱室2と真空
乾燥室3の上部,詳しくはそれぞれの搬送装置4,11
の進行方向先端上部に光センサー17,17が設置され
ている。予備加熱室の出入口に可撓性の耐熱カーテン1
8,18を吊設しておくと予備加熱室の熱が外部へ流出
する量を少なくでき,予備加熱をさらに効率良く行うこ
とができる。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be explained below based on the drawings. FIG. 1 is a front center sectional view of the drying apparatus of the present invention, and FIGS. 2 to 5 are diagrams for explaining the drying method of the present invention. The drying apparatus of the present invention has a preheating chamber 2 and a vacuum drying chamber 3 installed in a main body 1, and a conveying device 4 that rotates independently is placed in the preheating chamber 2. A mesh belt through which gas and heat can easily pass is suitable as the conveyance device. A hot air blowing device 5 is installed in the upper part of the preheating chamber 2 and in the middle of the conveying device 4.
is installed. The hot air blowing device is a box-shaped body with a large number of holes, and the box-shaped body is connected to a block heater 7 and a blower 8 through a duct 6. Therefore, when the blower 8 is driven, outside air is blown into the blower 8,
It is heated by the block heater 7, flows into the box-shaped body through the duct 6, and blows out from the top and bottom into the preheating chamber 2 through a number of holes. The vacuum drying chamber 3 is tunnel-shaped, with an inlet 9 on the side adjacent to the preheating chamber and an outlet 10 on the opposite side, and a conveying device 11 that rotates independently is installed inside. A large number of infrared heaters 12 are installed in the upper part of the vacuum drying chamber 3 and in the middle of the conveying device 11.
,... are attached. Further, a hole is bored in the lower part of the vacuum drying chamber 3, and the hole is connected to a vacuum pump 13. Shutters 14, 14 that can be opened and closed are installed at the entrance 9 and exit 10 of the vacuum drying chamber 3. The shutters 14, 14 are moved up and down by air cylinders 15, 15, and when the entrance/exit is closed, the shutters 14
A rubber seal affixed to the inside of the door keeps the entrance and exit airtight. A transport device 16 for transporting the workpiece is installed near the exit 10. Also, the upper parts of the preheating chamber 2 and the vacuum drying chamber 3, specifically the respective conveying devices 4 and 11.
Optical sensors 17, 17 are installed at the top of the leading edge in the direction of travel. Flexible heat-resistant curtain 1 at the entrance and exit of the preheating room
By suspending 8 and 18, the amount of heat from the preheating chamber flowing out to the outside can be reduced, and preheating can be performed more efficiently.

【0017】次に上記構造を有する本発明を用いた乾燥
方法について説明する。 図2:水洗後のワークであるプリント基板Pを搬送装置
4で予備加熱室2内に搬入する。ここに搬入されたプリ
ント基板を光センサー17が検出して搬送装置4を停止
させる。ここでは上方と下方から熱風装置5で熱風を吹
き付けて大部分の水を吹き飛ばすと同時にプリント基板
を約80℃に予備加熱する。
Next, a drying method using the present invention having the above structure will be explained. FIG. 2: The printed circuit board P, which is a workpiece after being washed with water, is carried into the preheating chamber 2 by the transport device 4. The optical sensor 17 detects the printed circuit board carried here, and the transport device 4 is stopped. Here, a hot air device 5 blows hot air from above and below to blow off most of the water and at the same time preheat the printed circuit board to about 80°C.

【0018】図3:予備加熱室2で大部分の水が除去さ
れ,所定の温度に加熱されたプリント基板Pは予備加熱
室の搬送装置4と真空乾燥室3の搬送装置11により,
シャッターの開いた入口9から真空乾燥室3内へ搬入さ
れる。そして真空乾燥室の上部に設置された光センサー
17がプリント基板を検出すると搬送装置11を停止さ
せる。この時,次のプリント基板が予備加熱室の搬送装
置4に乗せられて予備加熱室2に搬入される。
FIG. 3: Most of the water has been removed in the preheating chamber 2, and the printed circuit board P, which has been heated to a predetermined temperature, is transported by the transfer device 4 in the preheating chamber and the transfer device 11 in the vacuum drying chamber 3.
It is carried into the vacuum drying chamber 3 through the entrance 9 with the shutter open. When the optical sensor 17 installed at the top of the vacuum drying chamber detects a printed circuit board, the transport device 11 is stopped. At this time, the next printed circuit board is placed on the transport device 4 in the preheating chamber and carried into the preheating chamber 2.

【0019】図4:真空乾燥室3内のプリント基板Pが
所定の位置で停止したならば,出入口のシャッター14
,14を閉め,真空ポンプ13で真空乾燥室内の空気を
排気すると同時に遠赤外線ヒータ12,・・・を加熱状
態にする。この間,予備加熱室に搬入された次のプリン
ト基板は,ここで余分の水が除去され予備加熱が行われ
る。この時の乾燥状態は,真空度が20torrであり
,プリント基板の温度が75℃であった。この状態で3
分間乾燥処理を行った。
FIG. 4: Once the printed circuit board P in the vacuum drying chamber 3 has stopped at a predetermined position, the shutter 14 at the entrance and exit
, 14 are closed, and at the same time the air in the vacuum drying chamber is exhausted by the vacuum pump 13, the far-infrared heaters 12, . . . are heated. During this time, excess water is removed from the next printed circuit board carried into the preheating chamber, and preheating is performed. In the drying state at this time, the degree of vacuum was 20 torr and the temperature of the printed circuit board was 75°C. In this state 3
A drying process was performed for a minute.

【0020】図5:プリント基板Pを乾燥処理した後,
出入口のシャッター14,14を開け,全ての搬送装置
4,11,16を同時に回動させると,真空乾燥室3内
のプリント基板は搬出用の搬送装置16に乗って次の処
理工程に搬出され,予備加熱室2にあった次のプリント
基板は真空乾燥室3内に搬入され,また次の新しいプリ
ント基板が予備加熱室2に搬入される。
FIG. 5: After drying the printed circuit board P,
When the shutters 14, 14 at the entrance and exit are opened and all the transport devices 4, 11, 16 are rotated at the same time, the printed circuit boards in the vacuum drying chamber 3 are carried out on the transport device 16 for carrying out to the next processing step. , the next printed circuit board in the preheating chamber 2 is carried into the vacuum drying chamber 3, and the next new printed circuit board is carried into the preheating chamber 2.

【0021】このようにして乾燥させられたプリント基
板は,乾燥が困難な表面実装電子部品の搭載部,コネク
ターの内部,スルーホール等の水が全くなく,完全な乾
燥が行われていた。
[0021] The printed circuit board dried in this manner was completely dried, with no water present in the parts where surface-mounted electronic components were mounted, the insides of connectors, through holes, etc., which were difficult to dry.

【0022】[0022]

【発明の効果】本発明の乾燥方法は,予備加熱の段階で
多量に付着した水を吹き飛ばして付着量を少なくし,し
かもワークを低真空でも沸騰しやすいように予備加熱を
しておくため,真空乾燥時間が極めて短くなるばかりて
なく,狭間隙に存在する水も減圧時に気体と共に引出さ
れるため完全に乾燥できるものである。又,本発明の乾
燥装置は,予備加熱室,真空乾燥室に独自に回動する搬
送装置を設置し,真空乾燥室の相対向するところに出入
口を設置してあるため,他の装置と連続したインライン
化ができるという従来にない優れた効果を有するもので
ある。
[Effects of the Invention] The drying method of the present invention reduces the amount of adhering water by blowing off a large amount of adhering water during the preheating stage, and also preheats the workpiece so that it can easily boil even in a low vacuum. Not only does the vacuum drying time become extremely short, but the water present in the narrow gap is also drawn out along with the gas when the pressure is reduced, allowing for complete drying. In addition, the drying device of the present invention has a conveying device that rotates independently in the preheating chamber and the vacuum drying chamber, and entrances and exits are installed at opposite sides of the vacuum drying chamber, so that it can be connected to other devices in a continuous manner. It has an excellent effect that has not been seen before in that it can be inlined.

【図面の簡単な説明】[Brief explanation of drawings]

【図1】本発明の乾燥装置の正面中央断面図である。FIG. 1 is a front center sectional view of a drying device of the present invention.

【図2〜5】本発明の乾燥方法を説明する図である。FIGS. 2 to 5 are diagrams illustrating the drying method of the present invention.

【符号の説明】[Explanation of symbols]

1  本体 2  予備加熱室 3  真空乾燥室 4,11,16  搬送装置 5  熱風吹き出し装置 9  入口 10  出口 12  赤外線ヒータ 13  真空ポンプ 15  エアーシリンダ 18  可撓性の耐熱カーテン 1 Main body 2 Preheating chamber 3 Vacuum drying chamber 4, 11, 16 Conveyance device 5 Hot air blowing device 9 Entrance 10 Exit 12 Infrared heater 13 Vacuum pump 15 Air cylinder 18 Flexible heat-resistant curtain

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】  水洗後のワークに熱風を吹き付けてワ
ークを60〜100℃に予備加熱すると同時に,熱風の
風力と熱でワークから大部分の水を除去し,その後,真
空度が40torr以下の真空中で完全乾燥することを
特徴とする乾燥方法。
Claim 1: Preheat the workpiece to 60 to 100°C by blowing hot air onto the workpiece after washing with water, and at the same time remove most of the water from the workpiece using the wind power and heat of the hot air. A drying method characterized by complete drying in a vacuum.
【請求項2】  前記真空中での乾燥時,ワークに遠赤
外線を照射することを特徴とする請求項1記載の乾燥方
法。
2. The drying method according to claim 1, wherein the workpiece is irradiated with far infrared rays during drying in the vacuum.
【請求項3】  本体は,予備加熱室及び真空乾燥室か
ら成り,それぞれの室には独自に回動してワークを搬送
する搬送装置が設置されているとともに,予備加熱室の
上下部には熱風吹き出し装置が設置され,しかも真空乾
燥室は予備加熱室に隣接するところが入口となっており
,該入口の反対側が出口となっていて,これらの出入口
には開閉自在なシャッターが設置されていることを特徴
とする乾燥装置。
[Claim 3] The main body consists of a preheating chamber and a vacuum drying chamber, and each chamber is equipped with a conveying device that rotates independently to convey the workpiece. A hot air blowing device is installed, and the entrance of the vacuum drying room is adjacent to the preheating room, and the exit is on the opposite side of the entrance, and shutters that can be opened and closed are installed at these entrances. A drying device characterized by:
【請求項4】  前記真空乾燥室には,上下部に遠赤外
線ヒータが設置されていることを特徴とする請求項3記
載の乾燥装置。
4. The drying apparatus according to claim 3, wherein the vacuum drying chamber is provided with far-infrared heaters at the top and bottom.
【請求項5】  前記予備加熱室の出入口には可撓性の
耐熱カーテンが吊設されていることを特徴とする請求項
3記載の乾燥装置。
5. The drying apparatus according to claim 3, wherein a flexible heat-resistant curtain is hung at the entrance and exit of the preheating chamber.
【請求項6】  前記真空乾燥室の出口近傍には,乾燥
後のワークを搬出する搬送装置が設置されていることを
特徴とする請求項3記載の乾燥装置。
6. The drying apparatus according to claim 3, further comprising a conveying device installed near the exit of the vacuum drying chamber to carry out the dried workpiece.
JP20156791A 1991-05-11 1991-05-11 Method and apparatus for drying Pending JPH04335986A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20156791A JPH04335986A (en) 1991-05-11 1991-05-11 Method and apparatus for drying

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20156791A JPH04335986A (en) 1991-05-11 1991-05-11 Method and apparatus for drying

Publications (1)

Publication Number Publication Date
JPH04335986A true JPH04335986A (en) 1992-11-24

Family

ID=16443202

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20156791A Pending JPH04335986A (en) 1991-05-11 1991-05-11 Method and apparatus for drying

Country Status (1)

Country Link
JP (1) JPH04335986A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06300437A (en) * 1993-04-09 1994-10-28 Kurosaki Rokogyo Kk Vacuum dryer
JPH0684285U (en) * 1993-05-07 1994-12-02 株式会社今井製作所 Dryer
KR20030062767A (en) * 2002-01-18 2003-07-28 이현희 Dehydration Process by Using the Infra-red and Steam Heat Proceeded from Drying Materials.
KR100581669B1 (en) * 2005-12-13 2006-05-22 장종한 Vacuum dry method and the device that do for the sake of charcoal forming
JP2007271255A (en) * 2006-03-31 2007-10-18 Honda Motor Co Ltd Liquid removal method for body hem flange
KR101124139B1 (en) * 2011-12-28 2012-03-22 김재용 Drying apparatus of an all screw type bolt
KR101231076B1 (en) * 2011-01-12 2013-02-07 리젠아이(주) DRYING FURNACE FOR RECYCLING SYSTEM FOR SPENT CATALYST OF DE-NOx EQUIPMENT
CN104634080A (en) * 2015-02-10 2015-05-20 重庆三爱海陵实业有限责任公司 Valve drying device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0250071A (en) * 1988-08-09 1990-02-20 Nec Kyushu Ltd Vacuum oven device
JPH0325276A (en) * 1989-06-20 1991-02-04 Yuzuru Matsubara Continuous vacuum drying device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0250071A (en) * 1988-08-09 1990-02-20 Nec Kyushu Ltd Vacuum oven device
JPH0325276A (en) * 1989-06-20 1991-02-04 Yuzuru Matsubara Continuous vacuum drying device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06300437A (en) * 1993-04-09 1994-10-28 Kurosaki Rokogyo Kk Vacuum dryer
JPH0684285U (en) * 1993-05-07 1994-12-02 株式会社今井製作所 Dryer
KR20030062767A (en) * 2002-01-18 2003-07-28 이현희 Dehydration Process by Using the Infra-red and Steam Heat Proceeded from Drying Materials.
KR100581669B1 (en) * 2005-12-13 2006-05-22 장종한 Vacuum dry method and the device that do for the sake of charcoal forming
JP2007271255A (en) * 2006-03-31 2007-10-18 Honda Motor Co Ltd Liquid removal method for body hem flange
KR101231076B1 (en) * 2011-01-12 2013-02-07 리젠아이(주) DRYING FURNACE FOR RECYCLING SYSTEM FOR SPENT CATALYST OF DE-NOx EQUIPMENT
KR101124139B1 (en) * 2011-12-28 2012-03-22 김재용 Drying apparatus of an all screw type bolt
CN104634080A (en) * 2015-02-10 2015-05-20 重庆三爱海陵实业有限责任公司 Valve drying device

Similar Documents

Publication Publication Date Title
TW467786B (en) Compact reflow and cleaning apparatus
JPH04305929A (en) Washer
JPH04335986A (en) Method and apparatus for drying
KR20010102202A (en) Compact reflow and cleaning apparatus
JP2008160011A (en) Substrate treating equipment
KR101295791B1 (en) substrate processing apparatus and substrate processing method
JP3232575B2 (en) Semiconductor processing equipment
JPH05299818A (en) Drying equipment
JP5318327B2 (en) Heat treatment equipment
JP2008093546A (en) Tunnel type washing apparatus
JP2006019607A (en) Washing method of substrate component for electronics products, and washing device using same
JP2004293843A (en) Glass substrate surface drying device
JPH09113132A (en) Drying method and drying device applied for drying method
JP2894548B2 (en) Small article dryer
JP2001263944A (en) Conveyor furnace for drying sheet-form material
JPH05166789A (en) Cleaner/drier for substrate
JP3827370B2 (en) Method and apparatus for washing and drying glass plate
KR101467347B1 (en) Coating in-line automatic system for display panel
JP3084892U (en) Conveyor with self-cleaning and drying functions
JPH0613747A (en) Solder treatment of electronic component and device
JPH06302579A (en) Method and apparatus for drying semiconductor element
JPH04306482A (en) Vacuum drying device
JPH09246231A (en) Treatment equipment and method
JP2911570B2 (en) Washing and drying method for optical glass
JPH03101878A (en) Washing device