JPH0431320A - Oxide superconductor and circuit wiring - Google Patents
Oxide superconductor and circuit wiringInfo
- Publication number
- JPH0431320A JPH0431320A JP2132516A JP13251690A JPH0431320A JP H0431320 A JPH0431320 A JP H0431320A JP 2132516 A JP2132516 A JP 2132516A JP 13251690 A JP13251690 A JP 13251690A JP H0431320 A JPH0431320 A JP H0431320A
- Authority
- JP
- Japan
- Prior art keywords
- superconductor
- circuit wiring
- oxide superconductor
- earth element
- mixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002887 superconductor Substances 0.000 title claims abstract description 28
- 229910052761 rare earth metal Inorganic materials 0.000 claims abstract description 10
- 239000000126 substance Substances 0.000 claims abstract description 4
- 229910015901 Bi-Sr-Ca-Cu-O Inorganic materials 0.000 claims abstract 3
- 238000006467 substitution reaction Methods 0.000 claims 1
- 239000000843 powder Substances 0.000 abstract description 5
- 239000000758 substrate Substances 0.000 abstract description 5
- 239000000203 mixture Substances 0.000 abstract description 3
- 239000003960 organic solvent Substances 0.000 abstract description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 abstract 2
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 abstract 2
- 150000001875 compounds Chemical class 0.000 abstract 2
- 229910000019 calcium carbonate Inorganic materials 0.000 abstract 1
- 235000010216 calcium carbonate Nutrition 0.000 abstract 1
- 229910003443 lutetium oxide Inorganic materials 0.000 abstract 1
- LEDMRZGFZIAGGB-UHFFFAOYSA-L strontium carbonate Chemical compound [Sr+2].[O-]C([O-])=O LEDMRZGFZIAGGB-UHFFFAOYSA-L 0.000 abstract 1
- 229910000018 strontium carbonate Inorganic materials 0.000 abstract 1
- 239000010408 film Substances 0.000 description 14
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- 238000010304 firing Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910052765 Lutetium Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 101100406583 Xenopus laevis osr2-a gene Proteins 0.000 description 1
- 101100406584 Xenopus laevis osr2-b gene Proteins 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Abstract
Description
【発明の詳細な説明】
〔概 要〕
酸化物超伝導体及び回路配線に係り、特に臨界温度と臨
界電流密度が高く、また経時変化が少ない良質な酸化物
超伝導体及び回路配線に関し、高い臨界温度、大きな臨
界電流密度を備えた超伝導膜を提供し、且つその膜から
なる回路配線を提供することを目的とし、
Ｂｉ −Ｓｒ −Ｃａ −Ｃｕ −０系超伝導体におい
て、前記Ｃａの一部を下記化学式で示されるように置換
してなること、
Ｂｉ２５ｒ２Ｃａｌ ｘＬ、、ＸＣｕ０ｙ（１）上式で
り、、：希土類元素、及び該酸化物超伝導体からなる回
路配線によって構成される。[Detailed Description of the Invention] [Summary] This invention relates to oxide superconductors and circuit wiring, especially high-quality oxide superconductors and circuit wiring that have high critical temperatures and high critical current densities, and have little change over time. The purpose of the present invention is to provide a superconducting film having a critical temperature and a large critical current density, and to provide a circuit wiring made of the film, and in a Bi-Sr-Ca-Cu-0 based superconductor, the above-mentioned Ca Bi25r2Cal xL, , XCu0y (1) The above formula is formed by substituting a part as shown in the following chemical formula, and is constituted by circuit wiring made of a rare earth element and the oxide superconductor.
本発明は酸化物超伝導体及び回路配線に係り、特に臨界
温度と臨界電流密度が高く、また経時変化が少ない良質
な酸化物超伝導体及び回路配線に関するものである。The present invention relates to oxide superconductors and circuit wiring, and particularly relates to high-quality oxide superconductors and circuit wiring that have high critical temperatures and high critical current densities, and have little change over time.
例えばＢｉ −５ｒ −Ｃａ−Ｃｕ−○からなるＢＩ系
超超伝導体少なくとも３種類の超伝導相（臨界温度Ｔｃ
が１０に、８０に、ｌｌ０Ｋの相）が知られている。そ
の１１０に相のＢｉ系超伝導体は臨界温度Ｔｃは高いが
その合成が非常に困難であり、しかも超伝導体結晶が合
成されるにつれて、臨界電流密度Ｊｃが減少するため高
臨界電流密度Ｔｃを達成しに（い。For example, a BI-based superconductor consisting of Bi-5r-Ca-Cu-○ has at least three types of superconducting phases (critical temperature Tc
10, 80, and 110K phases) are known. Although the 110-phase Bi-based superconductor has a high critical temperature Tc, its synthesis is very difficult, and as the superconductor crystal is synthesized, the critical current density Jc decreases, so the critical current density Tc is high. To achieve (I).
一方Ｔｃが８０に相のＢｉ系超伝導体の合成は比較的簡
単であり、Ｊｃの減少も殆どない。On the other hand, the synthesis of a Bi-based superconductor with a Tc of 80 is relatively simple, and there is almost no decrease in Jc.
上記の如＜ ｌｌ０Ｋ相のＢｉ系超伝導体は合成はしに
くいものの、スパッタ法、スクリーン印刷法等を利用し
て５ｒＴｉ０３あるいはＭｇＯ等の基板上に堆積した後
、熱処理することにより超伝導膜を得ている。Although it is difficult to synthesize the Bi-based superconductor in the <ll0K phase as described above, it is possible to form a superconducting film by depositing it on a substrate such as 5rTi03 or MgO using sputtering or screen printing, and then heat-treating it. It has gained.
一方、酸化物超伝導体厚膜の７７ＫにおけるＪｃはスパ
ッタ法等による薄膜よりも低く、デバイスや回路配線に
応用するに当たり、高臨界温度、高臨界電流密度を達成
する必要がある。On the other hand, the Jc of an oxide superconductor thick film at 77K is lower than that of a thin film made by sputtering or the like, and when applied to devices and circuit wiring, it is necessary to achieve a high critical temperature and a high critical current density.
本発明は高い臨界温度、大きな臨界電流密度を備えた酸
化物超伝導体を提供し、且つその膜を回路配線等に使用
することを目的とする。An object of the present invention is to provide an oxide superconductor having a high critical temperature and a large critical current density, and to use the film for circuit wiring and the like.
〔課題を解決するための手段〕
上記課題は本発明によればＢｉ −Ｓｒ −Ｃａ −Ｃ
Ｕ−○系超伝導体において、前記Ｃａの一部を下記化学
式で示されるように置換してなることを特徴とする酸化
物超伝導体。[Means for solving the problem] According to the present invention, the above problem can be solved by Bi-Sr-Ca-C
An oxide superconductor characterized in that, in a U-○ series superconductor, a part of the Ca is substituted as shown in the following chemical formula.
Ｂ１２５ｒ２Ｃａ１−ｘＬｎｘＣｕＯｙ
（１）上式でＬｎ：希土類元素
によって解決される。B125r2Ca1-xLnxCuOy
(1) Solved by Ln: rare earth element in the above equation.
本発明では上記希土類元素の置換基ＸをＱ＜ｘ〈０．３
に限定することが好ましい。このＸの範囲外であると臨
界温度が従来と同程度か、それ以下となる。In the present invention, the substituent X of the rare earth element is Q<x<0.3
It is preferable to limit it to . If X is outside the range, the critical temperature will be on the same level as the conventional one or lower.
また本発明では酸化物超伝導体からなる回路配線が提供
される。Further, the present invention provides circuit wiring made of an oxide superconductor.
本発明において希土類元素はＬａ 、Ｐｒ 、Ｎｄ。In the present invention, the rare earth elements are La, Pr, and Nd.
Ｌｕ ５Ｙ、Ｓｃ等が用いられるが特にＹ、Ｌｕがより
好ましく用いられる。Lu 5Y, Sc, etc. are used, but Y and Lu are particularly preferably used.
本発明によればＣａサイトに一部希土類元素を置換する
ことによって高い臨界温度、大きな臨界電流密度を備え
た超伝導膜を作製することができ、超伝導回路配線など
に応用することが可能となる。According to the present invention, a superconducting film with a high critical temperature and a large critical current density can be produced by substituting a portion of Ca sites with rare earth elements, which can be applied to superconducting circuit wiring, etc. Become.
以下本発明の実施例を図面にもとすいて説明する。 Embodiments of the present invention will be described below with reference to the drawings.
本発明の実施例ではＢ１２． ｏｓｒ２．ｏＣａｏ、
、、Ｌｕｏ、 ｌＣｕ２． ｏＯｙからなるＢｉ系超伝
導体を製造した。In the embodiment of the present invention, B12. osr2. oCao,
,,Luo, lCu2. A Bi-based superconductor consisting of oOy was manufactured.
まず出発原料としてＢｉ、［］３． Ｌｕ２［１，、５
ｒＣＱ３． ＣａＣ［１３゜ＣｕＯの各粉末を用いた
。各粉末はＢｉ ： Ｌｕ ： Ｓｒ ：Ｃａ：Ｃｕ＝
２．０ ＋０．１ ：２．０ ＋０．９ ：２．０（ｍ
ｏｌ）になるように秤量し、全粉末を混合し、８２０℃
の温度で１２時間、仮焼成を行った。その後各粉末をよ
り均質にするため再混合した後、８６０℃の温度で２４
時間本焼成を行った。First, Bi as a starting material, []3. Lu2[1,,5
rCQ3. Each powder of CaC[13°CuO was used. Each powder is Bi:Lu:Sr:Ca:Cu=
2.0 +0.1 :2.0 +0.9 :2.0(m
ol), mix all the powders, and heat at 820°C.
Temporary firing was performed at a temperature of 12 hours. Each powder was then remixed to make it more homogeneous and then heated to 860°C for 24 hours.
Main firing was performed for an hour.
本焼成後、得られた焼成体（バルク）をＸ線回折測定を
行った結果、低Ｔｃ相（８０Ｋ）のみが合成されている
ことがわかった。抵抗率の温度変化を測定した結果、Ｔ
ｃは９０にであり、７７にでのＪｃは２８ＯＡ／ｃｆＩ
ｌであった。After the main firing, X-ray diffraction measurement of the obtained fired body (bulk) revealed that only a low Tc phase (80K) was synthesized. As a result of measuring the temperature change in resistivity, T
c is 90 and Jc at 77 is 28OA/cfI
It was l.
作製したバルクを粉砕、混合した後、ＭＥＫ（メチルエ
チルケトン）、アセトン等の有機溶剤を混ぜ、ペースト
を作製した。このペーストを用いて、第１図に示すよう
にＭｇＯ基板１上に約１００戸厚さに酸化物超伝導厚膜
２の印刷を行った。After pulverizing and mixing the produced bulk, organic solvents such as MEK (methyl ethyl ketone) and acetone were mixed to produce a paste. Using this paste, an oxide superconducting thick film 2 was printed on an MgO substrate 1 to a thickness of approximately 100 mm, as shown in FIG.
８６０℃、１時間焼成を行った厚膜２の電気抵抗の温度
変化を第２図に示す。Ｔｃｅ＝９０にであり、７７にで
のＪｃは３５０Ａ／ｃ＋＋！であった。このＪｃ値はほ
とんどが１１０に相から成る厚膜で得られる臨界電流密
度Ｊｃ以上の高い値である。このようにして得られた厚
膜は回路配線として有効に利用される。FIG. 2 shows the temperature change in electrical resistance of the thick film 2 that was fired at 860° C. for 1 hour. Tce=90 and Jc at 77 is 350A/c++! Met. This Jc value is higher than the critical current density Jc obtained with a thick film consisting mostly of 110 phase. The thick film thus obtained can be effectively used as circuit wiring.
またスパッタ法よりＭｇＯ基板上に約１０Ｊ１１Ｉ＋以
下の本発明の酸化物超伝導薄膜の回路配線及びその回路
配線を有するデバイスも得られる。Moreover, a circuit wiring of the oxide superconducting thin film of the present invention having a thickness of about 10J11I+ or less and a device having the circuit wiring can also be obtained by sputtering on an MgO substrate.
以上説明したように、本発明によればＢｉ −Ｌｎ −
Ｓｒ −Ｃａ−Ｃｕ−○系（Ｌｎ＝希土類）厚膜におい
て、Ｔｃを７７に以上に保ちながら臨界電流密度を高め
ることができる。As explained above, according to the present invention, Bi −Ln −
In the Sr-Ca-Cu-○ (Ln=rare earth) thick film, the critical current density can be increased while maintaining Tc at 77 or higher.
第１図は本発明にかかる酸化物超伝導体からなる厚膜を
示す斜視図であり、
第２図は本発明に係る酸化物超伝導厚膜の電気抵抗の温
度変化を示す図である。
１・・・ＭｇＯ基板、 ２・・・酸化物超伝導厚膜
。FIG. 1 is a perspective view showing a thick film made of an oxide superconductor according to the present invention, and FIG. 2 is a diagram showing temperature changes in electrical resistance of the oxide superconductor thick film according to the present invention. 1... MgO substrate, 2... Oxide superconducting thick film.
Claims (1)
前記Ｃａの一部を下記化学式で示されるように置換して
なることを特徴とする酸化物超伝導体。 Ｂｉ＿２Ｓｒ＿２Ｃａ＿１＿−＿ｘＬｎ＿ｘＣｕＯ＿ｙ
（１）上式でＬｎ：希土類元素 ２、前記希土類元素の置換量ｘを０＜ｘ＜０．３にする
ことを特徴とする特許請求の範囲第１項記載の酸化物超
伝導体。 ３、請求項１記載の酸化物超伝導体からなる回路配線。[Claims] 1. In a Bi-Sr-Ca-Cu-O superconductor,
An oxide superconductor characterized in that a part of the Ca is substituted as shown in the following chemical formula. Bi_2Sr_2Ca_1_-_xLn_xCuO_y
(1) The oxide superconductor according to claim 1, wherein in the above formula, Ln: rare earth element 2, and the substitution amount x of the rare earth element satisfies 0<x<0.3. 3. Circuit wiring made of the oxide superconductor according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2132516A JPH0431320A (en) | 1990-05-24 | 1990-05-24 | Oxide superconductor and circuit wiring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2132516A JPH0431320A (en) | 1990-05-24 | 1990-05-24 | Oxide superconductor and circuit wiring |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0431320A true JPH0431320A (en) | 1992-02-03 |
Family
ID=15083158
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2132516A Pending JPH0431320A (en) | 1990-05-24 | 1990-05-24 | Oxide superconductor and circuit wiring |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0431320A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04198026A (en) * | 1990-11-29 | 1992-07-17 | Chodendo Hatsuden Kanren Kiki Zairyo Gijutsu Kenkyu Kumiai | Bi-sr-ca-cu-o superconductor material |
-
1990
- 1990-05-24 JP JP2132516A patent/JPH0431320A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04198026A (en) * | 1990-11-29 | 1992-07-17 | Chodendo Hatsuden Kanren Kiki Zairyo Gijutsu Kenkyu Kumiai | Bi-sr-ca-cu-o superconductor material |
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