JPH0430323A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH0430323A JPH0430323A JP13413590A JP13413590A JPH0430323A JP H0430323 A JPH0430323 A JP H0430323A JP 13413590 A JP13413590 A JP 13413590A JP 13413590 A JP13413590 A JP 13413590A JP H0430323 A JPH0430323 A JP H0430323A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic recording
- recording medium
- layer
- film
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 claims abstract description 37
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 17
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 17
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 13
- 239000010409 thin film Substances 0.000 claims abstract description 8
- 239000010410 layer Substances 0.000 claims description 24
- 239000011241 protective layer Substances 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 239000000314 lubricant Substances 0.000 abstract description 5
- 230000002195 synergetic effect Effects 0.000 abstract description 2
- 238000003475 lamination Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 229910017052 cobalt Inorganic materials 0.000 description 3
- 239000010941 cobalt Substances 0.000 description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 229910000531 Co alloy Inorganic materials 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000010687 lubricating oil Substances 0.000 description 2
- 239000006247 magnetic powder Substances 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- IGOJDKCIHXGPTI-UHFFFAOYSA-N [P].[Co].[Ni] Chemical compound [P].[Co].[Ni] IGOJDKCIHXGPTI-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- ZGDWHDKHJKZZIQ-UHFFFAOYSA-N cobalt nickel Chemical compound [Co].[Ni].[Ni].[Ni] ZGDWHDKHJKZZIQ-UHFFFAOYSA-N 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- SIBIBHIFKSKVRR-UHFFFAOYSA-N phosphanylidynecobalt Chemical compound [Co]#P SIBIBHIFKSKVRR-UHFFFAOYSA-N 0.000 description 1
- OFNHPGDEEMZPFG-UHFFFAOYSA-N phosphanylidynenickel Chemical compound [P].[Ni] OFNHPGDEEMZPFG-UHFFFAOYSA-N 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- KZUNJOHGWZRPMI-UHFFFAOYSA-N samarium atom Chemical compound [Sm] KZUNJOHGWZRPMI-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は磁気記録媒体に関するものであり、例えばコン
ピュータ等の外部記憶装置（磁気ディスク装置）におけ
る磁気記憶体などに用いることのできる磁気記録媒体に
関するものである。Detailed Description of the Invention (Industrial Application Field) The present invention relates to a magnetic recording medium, which can be used, for example, as a magnetic storage body in an external storage device (magnetic disk device) of a computer or the like. It is related to.
（従来の技術）
コンピュータなどの記憶媒体として磁気記録媒体が用い
られており、従来磁性粉を塗布したテープなどが広く用
いられていたが、この記憶テープは記憶密度が小さく、
アクセス時間が長いなどの欠点があるため、テープにか
わりランダムアクセスが可能な円板状の磁気ディスクが
用いられてきている。なかでもアルミニウムなどの堅い
基板上に、厚さ１μｍ程度の磁気記録層を形成して構成
された磁気ディスクが磁気記録媒体として使用されはじ
めている。このような磁気記録媒体の磁気記録層は、酸
化鉄などの磁性粉末をバインダと混合し、これを基板上
にスピンコードなどの手法で塗布することにより得られ
ていたが、この磁気記録層には飽和磁化の大きさに限界
があるため、記録密度に限界があった。そこで最近では
、高記録密度の磁気記録媒体を得るために、より大きい
飽和磁化を有する金属薄膜を磁気記録層として用いた磁
気記録媒体が開発されており、このような磁気記録層は
コバルト・あるいはコバルト系合金からなる薄膜を真空
蒸着法、スパッタリング法などの真空成膜技術により形
成したり、コバルト−リン、コバルト−ニッケルーリン
などの合金薄膜を無電解メツキなどの湿式法により形成
することにより得られている。(Prior Art) Magnetic recording media are used as storage media in computers, etc., and conventionally tape coated with magnetic powder has been widely used, but this storage tape has a low storage density and
Due to drawbacks such as long access times, disk-shaped magnetic disks that allow random access have been used instead of tapes. Among these, magnetic disks constructed by forming a magnetic recording layer with a thickness of about 1 μm on a hard substrate such as aluminum are beginning to be used as magnetic recording media. The magnetic recording layer of such magnetic recording media was obtained by mixing magnetic powder such as iron oxide with a binder and applying it onto a substrate using a technique such as a spin cord. Since there is a limit to the magnitude of saturation magnetization, there is a limit to the recording density. Recently, in order to obtain magnetic recording media with high recording density, magnetic recording media using metal thin films with higher saturation magnetization as the magnetic recording layer have been developed, and such magnetic recording layers are made of cobalt or cobalt. A thin film made of a cobalt-based alloy can be formed by a vacuum film forming technique such as a vacuum evaporation method or a sputtering method, or a thin film of an alloy such as cobalt-phosphorus or cobalt-nickel-phosphorus can be formed by a wet method such as electroless plating. It is being
ところで、一般に使用されている磁気記録媒体のドライ
ブ装置には、ドライブ装置の停止、駆動に伴ないドライ
ブ装置のヘッドが磁気記録媒体に接触、こすれ合う、コ
ンタクト・スタート・ストップ（Ｃ３Ｓ）方式が採用さ
れているため、磁気記録媒体には上記のドライブ装置に
おけるＣ８Ｓに対する耐久性（ＣＳＳ耐久性）が要求さ
れる。By the way, drive devices for magnetic recording media that are commonly used employ the contact start-stop (C3S) method, in which the head of the drive device contacts and rubs against the magnetic recording medium as the drive device stops and drives. Therefore, the magnetic recording medium is required to have durability against C8S (CSS durability) in the above drive device.
そこで、磁気記録媒体にはその磁気記録層上に保護層が
設けられており、この保護層によって磁気記録媒体にＣ
８Ｓ耐久性を付与している。通常この保護層としては厚
み３００Å以上の炭素膜が用いられているが、その一方
でより高い記録密度を達成するためにこの保護層の厚み
を薄くし、磁気記録媒体の使用の際にドライブ装置のヘ
ッドと磁気記録層のスペーシングロスを小さくすること
により磁気記録媒体の記録密度を向上させることが提案
されている。しかしながら、保護層として厚みの薄い炭
素膜を有する磁気記録媒体は、ＣＳＳ耐久性が十分では
ないという問題ある。従って、このような磁気記録媒体
においては、使用に伴ないその炭素膜からなる保護層は
ヘッドの接触、こすれ合いにより磨耗してしまう。また
、このような保護層の磨耗はヘッドと磁気記録層とが衝
突するヘッド・クラッシュを引き起こし、これによって
磁気記録媒体あるいはドライブ装置のヘッドの損傷が生
じる。Therefore, magnetic recording media are provided with a protective layer on the magnetic recording layer, and this protective layer protects the magnetic recording medium from carbon dioxide.
Provides 8S durability. Normally, a carbon film with a thickness of 300 Å or more is used as this protective layer, but on the other hand, in order to achieve higher recording density, the thickness of this protective layer is reduced, and when using magnetic recording media, the drive device It has been proposed to improve the recording density of a magnetic recording medium by reducing the spacing loss between the head and the magnetic recording layer. However, magnetic recording media having a thin carbon film as a protective layer have a problem in that they do not have sufficient CSS durability. Therefore, in such a magnetic recording medium, as the magnetic recording medium is used, the protective layer made of a carbon film is worn out due to head contact and rubbing. Further, such abrasion of the protective layer causes a head crash in which the head collides with the magnetic recording layer, resulting in damage to the magnetic recording medium or the head of the drive device.
（発明が解決しようとする課題）
本発明の目的は、Ｃ８ｓ耐久性に優れ、がっ高記録密度
を達成し得る磁気記録媒体を提供することにある。(Problems to be Solved by the Invention) An object of the present invention is to provide a magnetic recording medium that has excellent C8s durability and can achieve a much higher recording density.
（課題を解決するための手段）
本発明者らは上記課題を解決するために鋭意検討を行っ
た結果、炭化珪素膜と炭素膜を積層してなる保護層を有
する磁気記録媒体はＣ８Ｓ耐久性に優れるものとなるこ
とを見出だし本発明に至った。すなわち本発明は、非磁
性下地層を被覆した基板、その上に設けた磁性金属薄膜
からなる磁気記録層及び該磁気記録層を保護するための
保護層を含んでなる磁気記録媒体において、保護層が前
記磁気記録層側から炭化珪素膜と炭素膜を積層してなる
二層構造を有することを特徴とする磁気記録媒体である
。本発明の磁気記録媒体は、特に保護層が炭化珪素膜と
炭素膜を積層してなる二層構造を有するところに特徴の
あるものであるが、このことにより磁気記録媒体のＣ８
Ｓ耐久性が向上し、また保護層の厚みを薄くしても十分
なＣ８Ｓ耐久性を有するものとなる。その理由は明らか
ではないが、炭化珪素膜の硬いという特性及びその上に
形成する炭素膜の優れた潤滑性の両者の相乗効果による
ものと考えられる。(Means for Solving the Problems) As a result of intensive studies to solve the above problems, the present inventors found that a magnetic recording medium having a protective layer formed by laminating a silicon carbide film and a carbon film has C8S durability. The present inventors have discovered that the present invention provides excellent properties. That is, the present invention provides a magnetic recording medium comprising a substrate coated with a non-magnetic underlayer, a magnetic recording layer made of a magnetic metal thin film provided thereon, and a protective layer for protecting the magnetic recording layer. is a magnetic recording medium characterized in that it has a two-layer structure in which a silicon carbide film and a carbon film are laminated from the magnetic recording layer side. The magnetic recording medium of the present invention is particularly characterized in that the protective layer has a two-layer structure formed by stacking a silicon carbide film and a carbon film.
S durability is improved, and even if the thickness of the protective layer is made thinner, sufficient C8S durability can be achieved. The reason for this is not clear, but it is thought to be due to the synergistic effect of the hardness of the silicon carbide film and the excellent lubricity of the carbon film formed thereon.
以下、図面を参照して本発明の詳細な説明する。Hereinafter, the present invention will be described in detail with reference to the drawings.
第１図は本発明の磁気記録媒体の一例の部分断面図であ
る。本発明の磁気記録媒体は第１図に示すように基板１
上に磁気記録層２及び保護層を形成した構成される。こ
の基板１としてはニッケルーリンメツキ膜、陽極酸化ア
ルマイト膜などを被覆したアルミニウム合金、窒化珪素
焼結体、酸化アルミ焼結体などのセラミックスやステン
レス、チタン合金などの金属、ガラスあるいは樹脂など
が用いられる。また、基板１上には磁気記録媒体の磁気
特性を向上させる目的でクロムなどの非磁性金属薄膜な
どからなる非磁性下地層２を形成してもよく、その厚み
は５００〜５０００人とすることが好ましい。次に基板
１の上には磁気記録層３が形成される。この磁気記録層
としては、例えばコバルト、コバルトニッケル合金から
なる磁性金属あるいはこれら磁性金属にプラチナ、ロジ
ウム、クロム、サマリウム、タンタル、レニウム及びタ
ングステンから選ばれる少なくとも一種以上の金属を添
加したものなどが用いられ、その厚みは３００〜１００
０人に形成される。さらにその上に炭化珪素膜４及び炭
素膜５を積層してなる保護層が形成される。この保護層
の厚みが厚い場合、スペーシングロスが大きくなり、磁
気記録媒体の高記録密度領域での特性が悪くなるおそれ
があり、一方、薄い場合は得られる磁気記録媒体のＣ８
Ｓ耐久性が向上しないおそれがあるので、炭化珪素膜４
、炭素膜５とも各々２０〜３００人とすることが好まし
く、５０〜１００人とすることが更に好ましい。なお本
発明の磁気記録媒体の使用にあたっては、必要に応じて
保護層上に液体潤滑剤、固体潤滑剤あるいはこれらの複
合潤滑剤を塗布し、潤滑層６を形成して使用することが
できる。FIG. 1 is a partial cross-sectional view of an example of the magnetic recording medium of the present invention. The magnetic recording medium of the present invention has a substrate 1 as shown in FIG.
The structure includes a magnetic recording layer 2 and a protective layer formed thereon. As the substrate 1, ceramics such as aluminum alloys coated with nickel-phosphorous plating films, anodized alumite films, etc., silicon nitride sintered bodies, aluminum oxide sintered bodies, stainless steel, metals such as titanium alloys, glass, or resins are used. It will be done. Further, a non-magnetic underlayer 2 made of a thin film of a non-magnetic metal such as chromium may be formed on the substrate 1 for the purpose of improving the magnetic properties of the magnetic recording medium, and the thickness thereof should be 500 to 5000. is preferred. Next, a magnetic recording layer 3 is formed on the substrate 1. This magnetic recording layer is made of, for example, a magnetic metal such as cobalt, cobalt-nickel alloy, or a magnetic metal to which at least one metal selected from platinum, rhodium, chromium, samarium, tantalum, rhenium, and tungsten is added. and its thickness is 300-100
Formed into 0 people. Furthermore, a protective layer formed by laminating silicon carbide film 4 and carbon film 5 is formed thereon. If this protective layer is thick, the spacing loss will increase and the characteristics of the magnetic recording medium in the high recording density region may deteriorate.On the other hand, if it is thin, the resulting magnetic recording medium may have a C8
Since there is a risk that S durability may not improve, silicon carbide film 4
, and the carbon film 5 are preferably made up of 20 to 300 people, and more preferably 50 to 100 people. When using the magnetic recording medium of the present invention, a liquid lubricant, a solid lubricant, or a combination of these lubricants may be applied on the protective layer to form a lubricant layer 6, if necessary.
以上、非磁性下地層２から炭素膜５までの金属あるいは
無機物質の薄膜の形成にあたってはＤＣあるいはＲＦス
パッタリング法あるいは真空蒸着法などの真空成膜技術
が有効に用いられる。As described above, in forming the thin films of metal or inorganic substances from the non-magnetic underlayer 2 to the carbon film 5, vacuum film forming techniques such as DC or RF sputtering or vacuum evaporation are effectively used.
（実施例）
以下、本発明を実施例に基づき説明するが、本発明はこ
れら実施例に限定されるものではない。(Examples) Hereinafter, the present invention will be explained based on Examples, but the present invention is not limited to these Examples.
実施例
第１図に示す磁気記録媒体を作製した。基板１としてニ
ッケルーリンメツキ膜を被覆した円板状アルミニウム合
金を用い、この基板１の上にＤＣスパッタリング法によ
り３０００人のクロム膜からなる非磁性下地層２を形成
した。次にこの上に磁気記録層３としてニッケル２０原
子％、クロム１０原子％を含むコバルト合金膜をＤＣス
パッタリング法により６００人の厚みに形成した。更に
、この上に保護層として厚み１００人の炭化珪素膜４及
び厚み１００人の炭素膜５をそれぞれＤＣスパッタリン
グ法により積層して形成し、次いで、この保護層上に液
体潤滑剤からなる潤滑層６をディッピング法により形成
することにより磁気記録媒体を作製した。Example A magnetic recording medium shown in FIG. 1 was produced. A disc-shaped aluminum alloy coated with a nickel-phosphorus plating film was used as the substrate 1, and a non-magnetic underlayer 2 made of a 3000 chrome film was formed on the substrate 1 by DC sputtering. Next, a cobalt alloy film containing 20 atom % of nickel and 10 atom % of chromium was formed thereon as a magnetic recording layer 3 to a thickness of 600 mm by DC sputtering. Furthermore, a silicon carbide film 4 with a thickness of 100 ml and a carbon film 5 with a thickness of 100 ml as a protective layer are laminated thereon by DC sputtering, and then a lubricating layer made of a liquid lubricant is formed on this protective layer. A magnetic recording medium was manufactured by forming 6 by a dipping method.
磁気記録媒体の作製後、得られた磁気記録媒体のＣ８Ｓ
耐久性を測定した。この耐久性の測定はＣ８Ｓ測定装置
を用いて行ない、磁気記録媒体上でヘッドをスタート−
ストップさせ、これを１サイクルとし、所定のサイクル
後の磁気記録媒体上の摩擦係数を求めることにより行な
った。その結果を表１に示す。表１から本発明の磁気記
録媒体は摩擦係数の増加が小さく、Ｃ８Ｓ耐久性に優れ
ていることがわかる。After manufacturing the magnetic recording medium, C8S of the obtained magnetic recording medium
Durability was measured. This durability measurement was performed using a C8S measuring device, and the head was started on the magnetic recording medium.
The measurement was performed by stopping the magnetic recording medium, making this one cycle, and determining the coefficient of friction on the magnetic recording medium after a predetermined cycle. The results are shown in Table 1. It can be seen from Table 1 that the magnetic recording medium of the present invention has a small increase in the coefficient of friction and is excellent in C8S durability.
比較例 １
保護層を厚み２００人の炭素膜だけで形成した以外は、
実施例と同様の方法で、磁気記録媒体を作製し、Ｃ８Ｓ
耐久性を測定した。その結果を表１に示す。Comparative Example 1 Except that the protective layer was formed only with a carbon film with a thickness of 200 mm,
A magnetic recording medium was produced in the same manner as in the example, and C8S
Durability was measured. The results are shown in Table 1.
比較例 ２
保護層を厚み２００人の炭化珪素膜だけで形成した以外
は、実施例と同様の方法で、磁気記録媒体を作製し、Ｃ
８Ｓ耐久性を測定した。その結果を表１に示す。Comparative Example 2 A magnetic recording medium was manufactured in the same manner as in Example except that the protective layer was formed using only a silicon carbide film with a thickness of 200 mm.
8S durability was measured. The results are shown in Table 1.
表１
（発明の効果）
以上の述べたとおり、本発明の磁気記録媒体は、Ｃ８Ｓ
耐久性が著しく向上するので、この磁気記録媒体はヘッ
ド・クラッシュが生じる可能性が低くなり、信頼性の高
い磁気記録媒体となる。更に、本発明の磁気記録媒体は
保護層の厚みを薄くしても十分なＣ８Ｓ耐久性を示すの
で、高記録密度を達成し得るものとなる。Table 1 (Effects of the invention) As described above, the magnetic recording medium of the present invention has C8S
Since the durability is significantly improved, this magnetic recording medium is less likely to cause a head crash and becomes a highly reliable magnetic recording medium. Furthermore, since the magnetic recording medium of the present invention exhibits sufficient C8S durability even when the thickness of the protective layer is reduced, high recording density can be achieved.
第１図は本発明の磁気記録媒体の一例の部分断面図であ
る。
図中、
１・・・基板 ２・・・下地層３・・・磁
気記録層 ４・・・珪素炭化物膜５・・・炭素膜
６・・・潤滑層を各々示す。FIG. 1 is a partial cross-sectional view of an example of the magnetic recording medium of the present invention. In the figure, 1...Substrate 2...Underlayer 3...Magnetic recording layer 4...Silicon carbide film 5...Carbon film 6...Lubricant layer, respectively.
Claims (1)
性金属薄膜からなる磁気記録層及び該磁気記録層を保護
するための保護層を含んでなる磁気記録媒体において、
保護層が前記磁気記録層側から炭化珪素膜と炭素膜を積
層してなる二層構造を有することを特徴とする磁気記録
媒体。(1) A magnetic recording medium comprising a substrate coated with a non-magnetic underlayer, a magnetic recording layer made of a magnetic metal thin film provided thereon, and a protective layer for protecting the magnetic recording layer,
A magnetic recording medium characterized in that the protective layer has a two-layer structure in which a silicon carbide film and a carbon film are laminated from the magnetic recording layer side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13413590A JPH0430323A (en) | 1990-05-25 | 1990-05-25 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13413590A JPH0430323A (en) | 1990-05-25 | 1990-05-25 | Magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0430323A true JPH0430323A (en) | 1992-02-03 |
Family
ID=15121290
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13413590A Pending JPH0430323A (en) | 1990-05-25 | 1990-05-25 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0430323A (en) |
-
1990
- 1990-05-25 JP JP13413590A patent/JPH0430323A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4898774A (en) | Corrosion and wear resistant magnetic disk | |
| JP2010218610A (en) | Magnetic recording medium and magnetic recording device | |
| US6238780B1 (en) | Magnetic recording medium comprising multilayered carbon-containing protective overcoats | |
| JPH0430323A (en) | Magnetic recording medium | |
| JP2952967B2 (en) | Magnetic recording media | |
| JPS61199224A (en) | Magnetic recording medium | |
| JPS626425A (en) | Magnetic recording medium | |
| JP3030990B2 (en) | Magnetic recording media | |
| JPH0514325B2 (en) | ||
| JP3044571B2 (en) | Magnetic recording media | |
| JP2814630B2 (en) | Magnetic recording media | |
| JP2000348334A (en) | Magnetic recording medium and magnetic disk device | |
| JPH0196820A (en) | Magnetic recording medium | |
| JPS6342021A (en) | Magnetic recording medium | |
| JPH02121116A (en) | Magnetic recording medium | |
| JP2861081B2 (en) | Magnetic recording media | |
| JPH0467252B2 (en) | ||
| JPH0467251B2 (en) | ||
| JPS60167117A (en) | Magnetic recording medium | |
| JPH02139709A (en) | Magnetic recording medium and its production | |
| JPH0334122A (en) | Magnetic recording medium and production thereof | |
| JPH04285727A (en) | Magnetic disk device | |
| JPH03102616A (en) | Magnetic recording medium | |
| JPH0467250B2 (en) | ||
| JPH0581658A (en) | Magnetic recording medium |