JPH0429578A - Driving circuit of oscillatory wave motor - Google Patents

Driving circuit of oscillatory wave motor

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Publication number
JPH0429578A
JPH0429578A JP2135880A JP13588090A JPH0429578A JP H0429578 A JPH0429578 A JP H0429578A JP 2135880 A JP2135880 A JP 2135880A JP 13588090 A JP13588090 A JP 13588090A JP H0429578 A JPH0429578 A JP H0429578A
Authority
JP
Japan
Prior art keywords
frequency
speed
phase
circuit
phase difference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2135880A
Other languages
Japanese (ja)
Inventor
Akio Atsuta
暁生 熱田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2135880A priority Critical patent/JPH0429578A/en
Publication of JPH0429578A publication Critical patent/JPH0429578A/en
Pending legal-status Critical Current

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To obtain a driving circuit of simple algorism by a simple construction, by changing a frequency sequentially in a state of a phase of a frequency voltage being different from that in actual driving, when a power source is made, by storing the frequency at which the speed of a moving body is maximum, and by making a drive at a frequency higher than the frequency thereafter with a phase difference returned to the one in an actual state of driving. CONSTITUTION:A switch SW is connected to 6-4 of a shifter 6 and frequency signals being different in a phase by 30 deg. are impressed on electrodes 1-1 and 1-2. A speed detected by an arithmetic circuit 15 from a signal sent from a speed detecting means 14 at that time is stored. When the same operation is repeated with a frequency lowered sequentially, the maximum speed is attained at a certain frequency, and when this frequency is exceeded, the speed lowers rapidly. This state is detected and the frequency at the maximum speed is stored. Next, an input to an ex-or gate 9 is changed over by the switch SW to a signal 6-3 shifted by 90 deg.. The speed is detected, and when a target speed is reached, a drive is made at the frequency of that speed.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、振動体に生ぜしめた進行性振動波により振動
体と接している移動体を摩擦駆動する、いわゆる振動波
モータ特にその駆動回路に関するものである。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a so-called vibration wave motor, particularly a drive circuit thereof, which frictionally drives a moving body in contact with the vibrating body by progressive vibration waves generated in the vibrating body. It is related to.

[従来の技術] 従来振動波モータの駆動回路は第4図の如く構成されて
いた。
[Prior Art] A drive circuit for a conventional vibration wave motor was constructed as shown in FIG.

図中1は振動子を示しこの振動子上に電歪素子又は圧電
素子か配されている。1−1゜1−2か駆動用電極で、
それぞれ駆動信号を電歪素子に印加する。1−3か検出
用電極て電歪素子の出力電圧を検知する。l−4か共通
電極である。
In the figure, numeral 1 indicates a vibrator, and an electrostrictive element or a piezoelectric element is arranged on this vibrator. 1-1゜1-2 or driving electrode,
A drive signal is applied to each electrostrictive element. The output voltage of the electrostrictive element is detected using the detection electrode 1-3. l-4 or common electrode.

2は十入力端を前記検出用電極1−3に接続すると共に
一入力端に基準電圧vAか入力されるレベルコンパレー
タである。
Reference numeral 2 designates a level comparator having one input terminal connected to the detection electrode 1-3 and one input terminal receiving a reference voltage vA.

12はその一方の入力端を前記コンパレータ2の出力と
接続すると共に他方の入力をコンパレータ16と接続す
るフェイズコンパレータ(位相比較回路)である、該フ
エイズコンパレータは例えばU S P 429127
4号て周知てあり、その詳細な説明は省略するか入力信
号の位相差を検知して位相差か存在する場合のみ出力を
発生するものである。
Reference numeral 12 denotes a phase comparator (phase comparison circuit) having one input terminal connected to the output of the comparator 2 and the other input connected to the comparator 16.
No. 4 is well known, and its detailed explanation will be omitted.It detects a phase difference between input signals and generates an output only when a phase difference exists.

6は位相シフタて6−1は電圧制御発振器(VCO)5
の出力かつながれておりVCO出力の周波数信号か00
と90°の位相間係て2系列作られ、それぞれ出力端6
−2.6−3から出力される。
6 is a phase shifter and 6-1 is a voltage controlled oscillator (VCO) 5
The output of the VCO is connected and the frequency signal of the VCO output is 00.
Two series are created with a phase difference of 90° and output terminal 6.
-2. Output from 6-3.

7は出力回路てその入力はシフター6の出力端6−2に
接続され、その出力はコイル10を経て1−1の駆動電
極に接続されている。
7 is an output circuit whose input is connected to the output terminal 6-2 of the shifter 6, and whose output is connected to the drive electrode 1-1 via the coil 10.

9はエクスクルシブオアゲートex−orてその入力は
シフター6の出力端6−3及び回転方向を制御端子に接
続されておりその出力は出力回路8を経てコイル11に
接続され、さらにコイルから1−2の駆動電極に接続さ
れている。尚上記コイル10.11は電極1−1゜1−
2と共に電気的共振回路を構成している。
9 is an exclusive or gate ex-or whose input is connected to the output terminal 6-3 of the shifter 6 and the rotation direction control terminal, whose output is connected to the coil 11 via the output circuit 8, and further from the coil to the 1 -2 drive electrode. In addition, the above coil 10.11 is connected to the electrode 1-1゜1-
2 constitutes an electrical resonant circuit.

又、上記出力回路7.8における入力と出力間の位相関
係は同位相となる様構成されている。
Further, the phase relationship between the input and output of the output circuit 7.8 is configured to be in the same phase.

16はコンパレータてその十人力に電極1−2、−人力
に基準電圧vAか接続されている。
A comparator 16 is connected to the electrodes 1-2 and 1-2 to the reference voltage vA.

又その出力はフェイズコンパレータ12のS入力端12
につなかれている。
Also, its output is the S input terminal 12 of the phase comparator 12.
is connected to.

フェイズコンパレータの出力は、制御用マイコン4に入
力される。14は例えば振動子lにて回動される可動部
材に連動して回転するパルス板にて構成される速度検出
手段てあり、その信号は速度演算回路15を経て制御用
マイクロコンピュータ(マイコン)4に入力される。
The output of the phase comparator is input to the control microcomputer 4. Reference numeral 14 denotes a speed detection means composed of a pulse plate that rotates in conjunction with a movable member rotated by a vibrator 1, and its signal is sent to a control microcomputer 4 via a speed calculation circuit 15. is input.

次に該第4図の動作について説明する。Next, the operation shown in FIG. 4 will be explained.

初期状態ては、制御用マイコン4か共振周波数より充分
高い周波数を出力する様にVCO5に指令を与える。
In the initial state, the control microcomputer 4 gives a command to the VCO 5 to output a frequency sufficiently higher than the resonance frequency.

該VCO5の出力パルスは位相シフター6にて位相差か
90″のパルスを出力端6−2゜6−3からそれぞれ送
出する。該シフター6の出力端6−2からのパルスは出
力回路7、コイルlOを介して駆動電極1−1へ印加さ
れる。
The output pulses of the VCO 5 are sent out from the output terminals 6-2 and 6-3, respectively, with a phase difference of 90" by the phase shifter 6. The pulses from the output terminal 6-2 of the shifter 6 are sent to the output circuit 7, It is applied to the drive electrode 1-1 via the coil IO.

コイルlOのインダクタンス、電極1−1゜1−4間の
キャパシタンスと抵抗にて直列共振を起こすため、上記
シフターの出力か方形波(パルス)てあっても、電極1
−1における駆動波形は正弦波である。
Since series resonance occurs due to the inductance of the coil IO, the capacitance and resistance between electrodes 1-1 and 1-4, even if the output of the shifter is a square wave (pulse), the electrode 1
The drive waveform at -1 is a sine wave.

今、正転モートか選択されているものとするとex−o
r9の一方の入力にはL(ロー)か入力され、出力回路
8への入力パルスは位相か90°進んだパルスか印加さ
れコイル11を経て、電極1−1に対し90″進んだ正
弦波力1電極1−2に印加される。これにて電極1−1
゜1−2には互いに90°位相の異なる正弦波が印加さ
れることになり、振動子の表面には進行性振動波が生じ
、摩擦、接触しているロータか該振動波にて回転させら
れる。
Now, assuming that normal rotation mode is selected, ex-o
L (low) is input to one input of r9, and the input pulse to the output circuit 8 is a sine wave whose phase is advanced by 90 degrees or passed through the coil 11 and which is advanced by 90'' with respect to the electrode 1-1. Force 1 is applied to electrode 1-2.
Sine waves with a phase difference of 90 degrees are applied to ゜1-2, and progressive vibration waves are generated on the surface of the vibrator, causing friction and causing the rotor in contact to rotate due to the vibration waves. It will be done.

この様にして、振動体の表面に振動波か発生すると、電
極1−3からは振動状態を表わす出力波形(正弦波)が
発生し、これがコンパレータ2に印加され基準レベルV
Aにてロジックレベルの電圧にリミットされ、フェイズ
コンパレータ12の一方の入力端Rに上記電極l−3に
発生した正弦波の周波数と位相を有するパルスとして印
加される。
In this way, when a vibration wave is generated on the surface of the vibrating body, an output waveform (sine wave) representing the vibration state is generated from the electrodes 1-3, which is applied to the comparator 2 and is applied to the reference level V.
A is limited to a logic level voltage and is applied to one input terminal R of the phase comparator 12 as a pulse having the frequency and phase of the sine wave generated at the electrode l-3.

又、一方電極1−1の駆動波形も同様にコンパレータ1
6によりパルスに変換され、フェイズコンパレータ12
の入力端Sに印加される。
Similarly, the driving waveform of one electrode 1-1 is also the same as that of comparator 1.
6 converts it into a pulse, and the phase comparator 12
is applied to the input terminal S of.

フェイズコンパレータ12は入力端RとSにされたパル
スの位相信号を制御用マイコン4に入力する。
The phase comparator 12 inputs the phase signals of the pulses applied to the input terminals R and S to the control microcomputer 4.

該位相差信号により、現在の周波数かどれたけ共振から
ずれているかわかるのて制御用マイコン4は該位相差信
号かある値になったか否かを判断し、その値になるまて
周波数を下げるようにvcosへ指令を与える。そしで
ある値(共振近傍の値)になると、周波数を変えないよ
うに制御する。
The control microcomputer 4 determines whether or not the phase difference signal has reached a certain value since it can be determined by the phase difference signal how much the current frequency deviates from resonance, and lowers the frequency until it reaches that value. Give commands to vcos as follows. Then, when it reaches a certain value (a value near resonance), the frequency is controlled so as not to change.

又、制御用マイコン4には速度検出手段により得られた
速度信号も入力され、速度制御も可能となっている。
Further, the speed signal obtained by the speed detection means is also input to the control microcomputer 4, so that speed control is also possible.

以上の従来例は駆動電圧と、振動体に貼りあわせた検出
器との位相を見るものであるか、このほかにも検出器の
出力の大きさを見るものや、該モータに流れ込む電流を
見るものなとかある。
The conventional examples above check the phase of the drive voltage and a detector attached to the vibrating body, or there are other methods that check the magnitude of the output of the detector or check the current flowing into the motor. There are things.

[発明か解決しようとしている課題] 上記従来例ては周波数を下げていったときに急に速度ダ
ウンするということをなくするために、駆動波形と振動
検出電極からの信号との位相差から、周波数を下げて行
なったときに、急に速度か落ちる周波数になる手前(共
振周波数近傍)で、周波数を下げるのをやめるようにし
ているのだか、これては正弦波をパルスに変える回路、
パルスとパルスの位相差を検出する回路、該位相差より
、周波数を決定するアルゴリズムなど構成か複雑になっ
てしまう。
[Problem to be solved by the invention] In the above conventional example, in order to prevent sudden speed reduction when lowering the frequency, the phase difference between the drive waveform and the signal from the vibration detection electrode is When the frequency is lowered, the frequency is stopped before the speed suddenly drops (near the resonance frequency).This is a circuit that converts a sine wave into a pulse.
The circuit for detecting the phase difference between pulses and the algorithm for determining the frequency based on the phase difference become complicated.

また速度信号のみから、速度か落ちる周波数を得るには
、1回周波数をスキャンしなければならず移動体か大き
く動いてしまうという欠点があった。
In addition, in order to obtain the frequency at which the speed decreases from only the speed signal, the frequency must be scanned once, which causes the moving object to move significantly.

[課題を解決するための手段] 本発明は、上記事項に鑑みなされたものて振動体を接触
させた電歪素子に位相の異なる周波電圧を印加して、該
振動体に生ずる進行性振動波によって、該振動体と接触
させた移動体を駆動させる振動波モータの駆動回路にお
いて電源投入詩に前記周波電圧の位相を実際の駆動と異
なった状態て周波数を順次変動させ、その変動させた各
周波数での該移動体の駆動速度を計測し、その計測値が
最大となる周波数を記憶し、以後は該位相差を実際の駆
動状態に戻し該周波数より高い周波数て駆動するように
した振動波モータの駆動回路を提供するものである。
[Means for Solving the Problems] The present invention has been made in view of the above-mentioned matters.The present invention applies frequency voltages with different phases to an electrostrictive element that is in contact with a vibrating body, and generates progressive vibration waves in the vibrating body. In the drive circuit of the vibration wave motor that drives the movable body brought into contact with the vibrating body, when the power is turned on, the phase of the frequency voltage is made different from the actual drive, and the frequency is sequentially varied, and each of the fluctuated A vibration wave that measures the driving speed of the moving body at a frequency, stores the frequency at which the measured value is maximum, and thereafter returns the phase difference to the actual driving state and drives at a higher frequency than the frequency. This provides a motor drive circuit.

[実施例] 第1図は本発明に係る振動波モータの駆動回路の一実施
例を示す回路図である。図において第4図示回路と同一
構成部には同一記号を付しである。この第1図実施例て
は速度演算回路15の出力によってマイコン4を制御し
、vcosの出力を上記演算回路15の出力にのみ基き
決定している点とスイッチSWを設け。
[Embodiment] FIG. 1 is a circuit diagram showing an embodiment of a drive circuit for a vibration wave motor according to the present invention. In the figure, the same components as those in the fourth illustrated circuit are given the same symbols. In this embodiment of FIG. 1, the microcomputer 4 is controlled by the output of the speed calculation circuit 15, and the output of VCOS is determined only based on the output of the calculation circuit 15, and a switch SW is provided.

位相シフターの出力6−3と6−4を切り換えている点
のみ第4図回路と異なっている。
The only difference from the circuit of FIG. 4 is that the outputs 6-3 and 6-4 of the phase shifter are switched.

次いて、第2図のフローチャート図に従って本実施例を
説明する。
Next, the present embodiment will be explained according to the flowchart shown in FIG.

電源を投入すると、#1が実行され#2に進み、スイッ
チSWをシフター6の6−4と接続する。#4にてに=
Oとして#5て(fo+△fxn)の周波数に決定する
。このときf。はとの温度でも振動波モータか最高速度
て回るときの周波数より低く、(f、+△fxn)は振
動波モータの共振周波数より十分に高い周波数である。
When the power is turned on, #1 is executed and the process proceeds to #2, where the switch SW is connected to 6-4 of the shifter 6. At #4=
As #5, the frequency of (fo+Δfxn) is determined. At this time f. Even at the temperature of the dove, it is lower than the frequency at which the vibration wave motor rotates at its maximum speed, and (f, +Δfxn) is a frequency that is sufficiently higher than the resonance frequency of the vibration wave motor.

これにより位相か30°異なる周波数fo+△fXnの
周波信号を電極1−1゜1−2に印加される。又、#6
てはその時の速度検出手段14からの信号にて演算回路
15にて検出された速度(No)を記憶する。
As a result, a frequency signal having a frequency fo+ΔfXn whose phase is different by 30° is applied to the electrodes 1-1°1-2. Also, #6
Then, the speed (No) detected by the arithmetic circuit 15 based on the signal from the speed detecting means 14 at that time is stored.

次に#7. #8.#5を実行し周波数を1段下げ(f
o+△t x (n−1) )にて駆動し、#6てその
時の速度N1を検出する。その後#7、#9.#10を
実行しN1≧N0てあれば#11.#5にてまた周波数
を1段下げる。
Next #7. #8. Execute #5 to lower the frequency by one step (f
o+Δt x (n-1) ), and #6 detects the speed N1 at that time. After that #7, #9. Execute #10 and if N1≧N0, #11. In #5, lower the frequency by one step again.

(fo+△f x (n−2) ) 以上の動作を繰り返していくと、ある周波数(fo+△
f x (n−2) )て最高速となり、この周波数を
越えると、急激に速度かタウンする。
(fo+△f x (n-2)) By repeating the above operation, a certain frequency (fo+△f x (n-2))
f x (n-2) ) and reaches the maximum speed, and when this frequency is exceeded, the speed suddenly drops.

よって、この状態な#10にて検出し、#12にて最高
速のときの周波数(fsax)を記憶し、#lに戻る。
Therefore, this state is detected in #10, the frequency (fsax) at the highest speed is stored in #12, and the process returns to #l.

これにより、振動波モータの初期設定か終了する。This completes the initial setting of the vibration wave motor.

2回目以降の動作は、以下の通りである。The operations from the second time onwards are as follows.

#1に次いて#3か実行されスイッチSWにてex−o
rゲート9への入力を906シフトした信号6−3に切
り換える。この後#4゜#5にてスタート周波数(to
十△fxn)てモータを駆動し#6にて速度(No)を
検出する。この後#8.#5.#6.#7.#9.#1
3にて(fo+△f x (n−1) )の周波数にお
ける速度(N1)か目標速度(NC)に達しているか否
かを判断し、目標速度(Nc)に達していれば、#14
にてその周波数て駆動する。
After #1, #3 is executed and ex-o is executed at switch SW.
The input to the r gate 9 is switched to the signal 6-3 shifted by 906. After this, start frequency (to
10Δfxn) to drive the motor and detect the speed (No) at #6. After this #8. #5. #6. #7. #9. #1
In step 3, it is determined whether the speed (N1) at the frequency of (fo+△f x (n-1)) or the target speed (NC) has been reached, and if the target speed (Nc) has been reached, #14
Drive at that frequency.

目標速度Ncに達していなければ#15にて周波数か最
高速のときの周波a(f wax)よりまた高いことを
確認して#8.#5を実行し周波数を1段下げる。Ct
o+△f x (n−2) )次にこの時の検出速度(
N2)と目標速度(NC)を比較する。Nt <Ncて
あれば、このときの周波数(fo十△f X (n−2
) )が最高速のときの周波fif■axより高ければ
、周波数をまた1段下げる。以後NK  (K=1.2
゜3・・・)くNcでそのときの周波数が最高速の周波
数(f■aX )に達していないときは、以上の動作を
繰り返す。そして、#13検出速度(NK)≧目標速度
(Nc)になったときに、周波数のスキャンを止め、そ
の周波数て駆動する。(第3図−(a)) もし、目標速度CNC)に達する前に最高速の周波数(
fsax)になったときは、その周波数でスキャンを止
めその周波数て駆動する。
If the target speed Nc has not been reached, check in #15 that the frequency is still higher than the frequency a (f wax) at the maximum speed, and #8. Execute #5 to lower the frequency by one step. Ct
o+△f x (n-2) ) Next, the detection speed at this time (
N2) and the target speed (NC). If Nt <Nc, the frequency at this time (fo+△f
) ) is higher than the frequency fif■ax at maximum speed, lower the frequency by one step. From now on NK (K=1.2
If the frequency at that time does not reach the highest speed frequency (f*aX) at Nc (゜3...), repeat the above operation. Then, when #13 detected speed (NK)≧target speed (Nc), frequency scanning is stopped and driving is performed at that frequency. (Figure 3-(a)) If the maximum speed frequency (
fsax), scanning is stopped at that frequency and driving is performed at that frequency.

(第3図−(b)) 以上の様に、最高速の周波数を求めるときに、通常の駆
動時に電極1−1.1−2へ入力される位相差90″に
対して位相差を30°にしているので、さほど動くこと
なくその周波数が求められる。
(Figure 3-(b)) As described above, when determining the highest frequency, the phase difference is 30" compared to the 90" phase difference input to electrode 1-1.1-2 during normal driving. Since it is set to °, the frequency can be found without much movement.

又、本実施例ては最高速を求めるとき、電極1−1.1
−2への入力位相差を306にしているかO″以上あれ
ば、何度ても良い。
In addition, in this embodiment, when determining the maximum speed, electrode 1-1.1
As long as the input phase difference to -2 is 306 or more than O'', it may be repeated any number of times.

又、本実施例は周波電圧の位相差を変えて、移動体の送
り速度を減らしているか、低電圧で駆動することにより
、送り速度を減らすことも可能である。
Further, in this embodiment, the feeding speed of the moving body is reduced by changing the phase difference of the frequency voltage, or it is possible to reduce the feeding speed by driving with a low voltage.

また、本実施例の制御法か用いられる振動波モータは円
環型、円板型、その他共振を利用するものてあればどれ
にでも利用できる。
Furthermore, the vibration wave motor to which the control method of this embodiment is applied can be of any type, such as an annular type, a disk type, or any other type that utilizes resonance.

[発明の効果] 以上説明したように、本発明のように速度検知手段を利
用した制御法を用いれば、共振検知のための回路やアル
ゴリズムがなくなり、簡単な構成て、単純なアルゴリズ
ムの駆動回路を供給てきる。
[Effects of the Invention] As explained above, if a control method using a speed detection means as in the present invention is used, there is no need for a circuit or algorithm for resonance detection, and a drive circuit with a simple configuration and a simple algorithm can be realized. will be supplied.

また、周波数スイープして最高速の周波数を求めるとき
移動体を大きく動かすことなく最高速の得られる周波数
を見つけ出すことかてきる。
Furthermore, when searching for the fastest frequency by frequency sweeping, it is possible to find the frequency that provides the fastest speed without moving the moving body significantly.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明に係る振動波モータの駆動回路の一実施
例を示す回路図。 第2図は第1図回路におけるフローチャートを示す説明
図。 第3図は第1図実施例での周波数に対する速度特性を示
す波形図。 第4図は従来例を示す回路図である。 1−1〜l−4・・・振動波モータの電極2.16−・
・コンパレータ 4・・・制御用マイコン(CPU) 5・・・電圧制御発振器 6・・・位相シック 7.8・・・出力回路 9・・・ex−orゲート回路 10.11・・・コイル 12・・・フェイスコンパレータ 14・・・速度検出器 15・・・速度検出回路
FIG. 1 is a circuit diagram showing an embodiment of a drive circuit for a vibration wave motor according to the present invention. FIG. 2 is an explanatory diagram showing a flowchart in the circuit of FIG. 1. FIG. 3 is a waveform diagram showing speed characteristics versus frequency in the embodiment of FIG. 1. FIG. 4 is a circuit diagram showing a conventional example. 1-1 to l-4... Vibration wave motor electrode 2.16-.
・Comparator 4... Control microcomputer (CPU) 5... Voltage controlled oscillator 6... Phase thick 7.8... Output circuit 9... Ex-or gate circuit 10.11... Coil 12 ...Face comparator 14...Speed detector 15...Speed detection circuit

Claims (1)

【特許請求の範囲】  電気−機械エネルギー変換素子に互いに位相の異なる
周波電圧を印加することにて、固定子表面に進行性振動
波を発生させ、該振動波にてロータを駆動する振動波モ
ータにおいて、 駆動回路への電源投入時に、前記周波電圧 の位相差を実際にロータを駆動するときとは異なった状
態にし、各周波数でのロータの駆動速度を計測しその計
測値を順次比較演算 し、該計測値が最大となる周波数を記憶し、駆動時には
該周波電圧の位相差を通常の位相差にもどし、該周波数
より高い周波数の周波電圧で駆動することを特徴とする
振動波モータの駆動回路。
[Claims] A vibration wave motor that generates progressive vibration waves on the surface of a stator by applying frequency voltages with different phases to electric-mechanical energy conversion elements, and drives a rotor with the vibration waves. In this method, when power is applied to the drive circuit, the phase difference of the frequency voltage is set to a state different from that when actually driving the rotor, the rotor drive speed at each frequency is measured, and the measured values are sequentially compared and calculated. , a vibration wave motor drive characterized by storing a frequency at which the measured value is maximum, returning the phase difference of the frequency voltage to a normal phase difference during driving, and driving with a frequency voltage higher than the frequency. circuit.
JP2135880A 1990-05-24 1990-05-24 Driving circuit of oscillatory wave motor Pending JPH0429578A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2135880A JPH0429578A (en) 1990-05-24 1990-05-24 Driving circuit of oscillatory wave motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2135880A JPH0429578A (en) 1990-05-24 1990-05-24 Driving circuit of oscillatory wave motor

Publications (1)

Publication Number Publication Date
JPH0429578A true JPH0429578A (en) 1992-01-31

Family

ID=15161935

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2135880A Pending JPH0429578A (en) 1990-05-24 1990-05-24 Driving circuit of oscillatory wave motor

Country Status (1)

Country Link
JP (1) JPH0429578A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008268227A (en) * 1998-12-08 2008-11-06 Emerson Electric Co Coriolis mass flow sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008268227A (en) * 1998-12-08 2008-11-06 Emerson Electric Co Coriolis mass flow sensor

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