JPH0429571A - Motor with rotation detector - Google Patents
Motor with rotation detectorInfo
- Publication number
- JPH0429571A JPH0429571A JP2132889A JP13288990A JPH0429571A JP H0429571 A JPH0429571 A JP H0429571A JP 2132889 A JP2132889 A JP 2132889A JP 13288990 A JP13288990 A JP 13288990A JP H0429571 A JPH0429571 A JP H0429571A
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- motor
- rotation detector
- light
- detector according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims abstract description 10
- 230000003287 optical effect Effects 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 claims 1
- 230000004907 flux Effects 0.000 abstract description 5
- 238000001514 detection method Methods 0.000 description 12
- 238000010586 diagram Methods 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、回転子（ロータ）および固定子（ステータ）
を有するモータにおいて、ロータとステータの相対回転
を検出する回転検出器を備えたものに関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a rotor and a stator.
The present invention relates to a motor having a rotation detector that detects relative rotation between a rotor and a stator.
（従来の技術）
近年、進行性振動波によって駆動する振動波回転型モー
タ（振動波モータ）が、低速回転、無騒音、消費電力小
といった特長を生かし、工業製品において、各方面で広
く採用されている。(Conventional technology) In recent years, vibration wave rotary motors (vibration wave motors) driven by progressive vibration waves have been widely adopted in various fields in industrial products, taking advantage of their features such as low speed rotation, no noise, and low power consumption. ing.
第４図（ａ）、（ｂ）、（Ｃ）は振動波モータの従来例
の概略図を示す。FIGS. 4(a), (b), and (C) show schematic diagrams of conventional examples of vibration wave motors.
同図で１は振動体を示し、真ちゅうなとの弾性体にて構
成されている。２は圧電又は電歪素子（例えばＰＺＴ
（チタン酸ジルコン鉛））で振動体】と接合されている
。この電歪素子は例えは第４図（ｃ）に示すように分極
処理かなされ円環あるいは円環状に配列した個々の圧電
又は電歪素子である。圧電又は電歪素子は２群に分かれ
ており、−群２−ａの素子に対しもう一群の素子２ｂは
与えるべき振動波の波長λの局たけすれたピッチではい
てされる。又、各群内ても素子は波長λの％のピッチで
相隣り合うものの極性か逆になるように配置されている
。図中の＋、−の符合は分極処理の符合で＋とあるもの
は電極側か的、弾性体側か十的になっていて、−とある
ものはこれらの逆になる。第４図（ｂ）の３及び４は各
群に対応した電極膜であり、圧電又は電歪素子２に電圧
か印加てぎるようになっている。５は共振状態を検知す
る電極である。６は１〜５の固定子（ステータ）に加圧
接触している回転子（ロータ）である。In the figure, numeral 1 indicates a vibrating body, which is made of an elastic body made of brass. 2 is a piezoelectric or electrostrictive element (for example, PZT
(zirconium titanate lead)) is bonded to the vibrating body. The electrostrictive elements are, for example, individual piezoelectric or electrostrictive elements that have been polarized and arranged in a ring or in a ring, as shown in FIG. 4(c). The piezoelectric or electrostrictive elements are divided into two groups, and the elements of the -group 2-a and the elements 2b of the other group are inserted at a localized pitch of the wavelength λ of the vibration wave to be applied. Furthermore, within each group, the elements are arranged at a pitch of % of the wavelength λ so that the polarities of adjacent elements are opposite. The + and - signs in the figure are the polarization processing signs, and + indicates the electrode side and the elastic body side, and - indicates the opposite. Reference numerals 3 and 4 in FIG. 4(b) are electrode films corresponding to each group, to which a voltage is applied to the piezoelectric or electrostrictive element 2. 5 is an electrode for detecting a resonance state. A rotor 6 is in pressurized contact with the stators 1 to 5.
このような構成の振動波回転型モータで一群の素子の電
極３にＶ。ｓｉｎωｔの交流電圧を印加し、もう一方の
群の素子の電極４にＶ。ＣＯＳωｔの交流電圧を印加す
ると、各群内の素子は相隣り合うものとうし９０°位相
かずれて伸縮運動をする。なおこれらの素子は弾性体１
に接合されており、各素子の伸縮はステータ全体の曲げ
振動に変換され、円環の表面に屈曲波か生ずることにな
る。その結果、ステータに接触しているロータ６か回転
運動を起こすことになる。In a vibration wave rotary motor having such a configuration, V is applied to the electrodes 3 of a group of elements. An AC voltage of sinωt is applied to the electrodes 4 of the other group of elements. When an AC voltage of COS ωt is applied, the elements in each group expand and contract with a phase shift of 90° from the adjacent elements. Note that these elements are elastic body 1
The expansion and contraction of each element is converted into bending vibration of the entire stator, producing bending waves on the surface of the ring. As a result, the rotor 6 in contact with the stator will undergo rotational movement.
なお、一般のモータては、ロータに一足間隔て磁性体を
設け、磁気抵抗素子により、磁性体通過数をカウントし
回転検出を行う方式か採用されている。In general, motors employ a method in which magnetic bodies are provided on the rotor at one-foot intervals, and rotation is detected by counting the number of times the magnetic bodies have passed using a magnetic resistance element.
（発明が解決しようとする課題）
振動波モータの様に比較的低速回転のモータではイナー
シャかｉＪｚさいために、高分解能の回転検出を行わな
ければ一定回転速度に高精度制御することかてきす、前
記方式では分解能か充分ではない
本発明の目的は、モータの回転を高分解・高精度に検出
てきる回転検出器を提供するものである。(Problem to be solved by the invention) Since the inertia of a motor that rotates at a relatively low speed, such as a vibration wave motor, is small, it is difficult to control the rotation speed with high precision to a constant speed unless high-resolution rotation detection is performed. However, the resolution of the above method is insufficient.An object of the present invention is to provide a rotation detector that can detect the rotation of a motor with high resolution and high precision.
（課題を解決するための手段）
上記目的を達成するために、本発明では、ロータの回転
状態を検出する回転検出器が、光源と、前記光源からの
光の波長λの変化に応してロータ回転面への入射角θか
変化し、ｓｉｎθ／λをほぼ一定として、前記ロータ回
転面に前記光源からの光を入射させる光学系と、前記ロ
ータの回転状態に応してドツプラーシフトした前記ロー
タからの光を検出する検出器を備えることを特徴とする
。(Means for Solving the Problems) In order to achieve the above object, in the present invention, a rotation detector for detecting the rotational state of a rotor is configured to detect a rotation state of a rotor in response to a change in a light source and a wavelength λ of light from the light source. An optical system that makes the light from the light source enter the rotor rotating surface while changing the incident angle θ to the rotor rotating surface and keeping sin θ/λ almost constant, and a Doppler shift according to the rotational state of the rotor. The present invention is characterized in that it includes a detector that detects light from the rotor.
第１図（ａ）、（ｂ）は、本発明の第１実施例の説明図
である。FIGS. 1(a) and 1(b) are explanatory diagrams of a first embodiment of the present invention.
第１図（ａ）、（ｂ）において、７はロータ６の上面に
施した散乱面、９は波長λの半導体レザ、１０はコリメ
ータレンズ、１１は格子ピッチｄの透過型回折格子、１
２ａ、１２ｂはミラー１３は集光レンズ、１４は光検出
器である。In FIGS. 1(a) and (b), 7 is a scattering surface provided on the upper surface of the rotor 6, 9 is a semiconductor laser with wavelength λ, 10 is a collimator lens, 11 is a transmission type diffraction grating with grating pitch d, 1
2a and 12b, the mirror 13 is a condenser lens, and 14 is a photodetector.
半導体レーザ９を出射した光束はコリメータレンズ１０
によってほぼ平行な光束となって透過型回折格子１１に
垂直に入射される。入射された光束は＋１次、−１次の
回折光にヒームスブリットされ、出射角θ。は、次式て
表わされる。The light beam emitted from the semiconductor laser 9 passes through the collimator lens 10
As a result, the light beam becomes a substantially parallel light beam and enters the transmission type diffraction grating 11 perpendicularly. The incident light flux is Heams-blended into +1st-order and -1st-order diffracted lights, and the output angle is θ. is expressed as the following formula.
θ、＝ｓｉｎ−’（λ／ｄ） −（１）＋１次、
−１次の回折光はそれぞれ、平行に配置されたミラー１
２ａ、１２ｂにより折り返され、ロータ６の上面に施し
た散乱面７て２光束か重なる様にＩ枦射される。そして
、散乱面７からのドツプラーシフトした散乱光を集光レ
ンズ１３を介して光検出器１４によりドツプラー信号を
得る。ここて、散乱面７への２光束の入射角は、それぞ
れθ。どなるため、検出部での回転接線方向の速度を■
とすると
で表わされる。このとき（１）式よりｄｓｉｎθ。＝λ
であることから、（２）式は、Ｆ ＝ ２ ｖ ／ ｄ
・・・（３）となる。θ,=sin-'(λ/d)-(1)+1st order,
- Each of the first-order diffracted lights is mirror 1 arranged in parallel.
2a and 12b, and the two beams of light are reflected by the scattering surface 7 provided on the upper surface of the rotor 6 so that the two beams overlap each other. Then, Doppler-shifted scattered light from the scattering surface 7 is passed through a condenser lens 13 to a photodetector 14 to obtain a Doppler signal. Here, the angles of incidence of the two beams of light onto the scattering surface 7 are each θ. Because of this, the speed in the rotation tangential direction at the detection unit is
It is expressed as . At this time, from equation (1), dsinθ. =λ
Therefore, equation (2) is F = 2 v / d
...(3).
これは、半導体レーザ９の波長λか例えは温度によって
変化したとしても、ドツプラー信号Ｆには影響を与えず
、安定した信号か得られ、これより角速度か検出される
ことを意味する。This means that even if the wavelength λ of the semiconductor laser 9 changes, for example due to temperature, it will not affect the Doppler signal F, a stable signal will be obtained, and the angular velocity will be detected from this.
また、検出部て１格子ピツチｄたけ変位すると、２回の
明暗変化を受ける。これは（３）式を時間積分してＮを
パルス数、Ｌを変位量とするとき
Ｎ ＝ ２ Ｌ／ｄ ・・
・ （４）が成立することより理解される。これより角
度か検出される。Furthermore, when the detection section is displaced by one grating pitch d, it undergoes two changes in brightness and darkness. This is calculated by integrating equation (3) over time, and when N is the number of pulses and L is the amount of displacement, N = 2 L/d...
・This can be understood from the fact that (4) holds true. The angle can be detected from this.
いま回折格子１１の格子ピッチｄをπ／４３２岬７．３
μｍとし、検出位置の直径を５０ｍｍとすると、１格子
ピツチｄの変位は、角度１分変位に相当する。１格子ピ
ツチｄの変位に対し、２回の明暗信号が得られることか
ら、分解能は３０秒つまり１回転に４３２００個の信号
か得られる。Now, the grating pitch d of the diffraction grating 11 is π/432 7.3
μm and the diameter of the detection position is 50 mm, the displacement of one grating pitch d corresponds to the displacement of one minute of angle. Since two bright and dark signals are obtained for a displacement of one grating pitch d, the resolution is 30 seconds, or 43,200 signals are obtained per rotation.
そして、この１３号を振動波モータの駆動回路にフィー
ドバックして、高精度な角速度制御あるいは角度制御を
可能にしている。Then, this No. 13 is fed back to the drive circuit of the vibration wave motor to enable highly accurate angular velocity control or angle control.
第２図（ａ）、（ｂ）は、本発明の第２実施例を示すも
ので、８は第１図で示した実施例におけるロータ６の上
面の散乱面７を格子総本数を２１６００本とする回折格
子に置き換えたもので、他の部材は第１図と同一である
、回折格子８は回折格子１１と同一のピッチで同一の温
度膨張係数を備えるものであり、同一の材質か好ましい
。第２図実施例では第１図実施例て示したドツプラー信
号Ｆか正弦波として得られ、ドツプラ信号ＦのＳ／Ｈが
良好となり、高精度な角速度制御又は角度制御を可能に
する。なお、ロータ６か低速状態でもロータ６に回折格
子を配設した本実施例によれば、ドツプラー信号がきれ
いな正弦波信号として得られるため角速度又は角度か正
確に検出され好ましい制御を行なうことができる。FIGS. 2(a) and 2(b) show a second embodiment of the present invention. Reference numeral 8 indicates a scattering surface 7 on the upper surface of the rotor 6 in the embodiment shown in FIG. The other members are the same as those shown in FIG. . In the embodiment of FIG. 2, the Doppler signal F shown in the embodiment of FIG. 1 is obtained as a sine wave, and the S/H of the Doppler signal F is good, making highly accurate angular velocity control or angle control possible. According to this embodiment in which the rotor 6 is provided with a diffraction grating even when the rotor 6 is at low speed, the Doppler signal can be obtained as a clean sine wave signal, so the angular velocity or angle can be accurately detected and preferred control can be performed. .
又、第２図（ｂ）に示すように、集光レンズ１３、光検
出器１４とコリメータレンズ１０、半導体レーザ９の配
置を逆にしても、第２図（ａ）の場合と同等の信号が得
られ、同等の効果を得る。なお、第２図（ｂ）において
回折格子１１の位置に散乱面を設け、集光レンズ１３、
光検出器１４を散乱面の下方に設けて検出しても良い。Furthermore, as shown in FIG. 2(b), even if the arrangement of the condenser lens 13, photodetector 14, collimator lens 10, and semiconductor laser 9 is reversed, the same signal as in the case of FIG. 2(a) can be obtained. is obtained, and the same effect can be obtained. In addition, in FIG. 2(b), a scattering surface is provided at the position of the diffraction grating 11, and a condensing lens 13,
A photodetector 14 may be provided below the scattering surface for detection.
次に第３図（ａ）、（ｂ）に検出系の異なる実施例を示
す。なお、第１図と同一の記号は同一の部材を示す。Next, FIGS. 3(a) and 3(b) show different embodiments of the detection system. Note that the same symbols as in FIG. 1 indicate the same members.
第３図（ａ）、（ｂ）において、１５は位相を進ませる
図波長板、１６は位相を遅らせる図波長板、１７はビー
ムスプリッタ、１８ａ、１８ｂは偏光板で、偏光方位か
互いに４５°傾いている。In FIGS. 3(a) and 3(b), 15 is a wave plate that advances the phase, 16 is a wave plate that retards the phase, 17 is a beam splitter, and 18a and 18b are polarizing plates, and the polarization directions are 45 degrees to each other. It's leaning.
同図において、回折格子８で反射した光は、干渉光とな
って、直線偏光となり、ビームスプリッタ１７て透過光
束と反射光束に２分割され、偏光板１８ａ、１８ｂを介
して光検出器１４ａ、１４ｂに入射する。偏光板１８ａ
、１８ｂは互いに偏光方位が４５°ずれているので、回
折格子８の変位に伴って、受光素子１４ａ、１４ｂから
は、位相か９０°すれた正弦波信号か出力され、ロータ
６の回転方向の判別も可能となる。In the figure, the light reflected by the diffraction grating 8 becomes interference light and becomes linearly polarized light, which is split into two by a beam splitter 17 into a transmitted light beam and a reflected light beam, and is transmitted to a photodetector 14a and a light beam via polarizing plates 18a and 18b. 14b. Polarizing plate 18a
, 18b have their polarization directions shifted by 45 degrees from each other, so as the diffraction grating 8 is displaced, the light receiving elements 14a and 14b output sine wave signals whose phases are shifted by 90 degrees, and the direction of rotation of the rotor 6 is shifted. Discrimination is also possible.
なお、第３図（ｂ）は第３図（ａ）のミラ１２ａ、１２
ｂの替わりに回折格子１９ａ、１９ｂを用いた検出系を
示す。Note that FIG. 3(b) shows the mirrors 12a and 12 in FIG. 3(a).
A detection system using diffraction gratings 19a and 19b in place of b is shown.
回折格子１９ａ、１９ｂは回折格子１１の格子ピッチｄ
の％の格子ピッチを有し、回折格子１１に平行に配置さ
れる。The diffraction gratings 19a and 19b have a grating pitch d of the diffraction grating 11.
% of the grating pitch, and is arranged parallel to the diffraction grating 11.
回折格子１９ａ、１９ｂからの光としては光学系の中心
方向の一次回折光か使用され、回折格子１９ａ及び１９
ｂの入射角と回折角か等しくなる。回折格子１９ａ、１
９ｂとしては回折光エネルギーの大部分が特定（この場
合光学系の中心方向の一次回折）の次数に集中するよう
な例えばブレーズド回折格子が望ましい。As the light from the diffraction gratings 19a and 19b, first-order diffracted light toward the center of the optical system is used.
The incident angle of b and the diffraction angle are equal. Diffraction grating 19a, 1
For example, a blazed diffraction grating is desirable as the grating 9b, in which most of the energy of the diffracted light is concentrated on a specific order (in this case, the first-order diffraction toward the center of the optical system).
以上、各実施例において、ロータ６の上面に散ハ 孔面又は回折格子を施してもよい。As described above, in each embodiment, the top surface of the rotor 6 is A hole surface or a diffraction grating may also be provided.
なお、上述した実施例では振動波モータについて述べた
が、本発明はこのモータに限定されるものではない。Note that although the above-mentioned embodiments have described a vibration wave motor, the present invention is not limited to this motor.
又、上述の実施例においては、回折格子１１は±１次の
回折光を出射する様にしである力釈±ｎ次光（ｎは自然
数）を用いてもよく、また、次数の異なる例えば０次光
とｎ次光の２光束を用いてもよい。また、２光束のうち
一光束をロータ６に照射し、そのロータ６からの光とロ
ータ６に照射されないもう一つの光束とを干渉させてト
ラフラー信号を得る参照光法を用いても、ｓｉｎθ／λ
か一定の検出系を実現しつる。In the above-described embodiment, the diffraction grating 11 may be configured to emit diffracted light of ±1st order, and may use ±nth order light (n is a natural number), or may use a diffraction grating 11 that outputs diffracted light of ±1st order. Two light beams of order light and n-order light may be used. Furthermore, even if a reference beam method is used in which one of the two beams is irradiated onto the rotor 6 and the light from the rotor 6 is made to interfere with the other beam that is not irradiated on the rotor 6 to obtain a troughler signal, sin θ/ λ
Or realize a certain detection system.
又、上述した実施例においては回折格子として透過型の
ものを示したが、反射型の回折格子を用い、例えは半導
体レーザのような光源をロータ側に近づけた配置とする
、更にはロータ側にミラーを設は該ミラーで反射される
紙面垂直方向に該光源を設けた配置としても良い。これ
らの配置によれは、例えは半導体レーザを検出系の余空
間に設定し、検出系のコンパクト化を図ることかできる
。In addition, although a transmission type diffraction grating is shown as the diffraction grating in the above embodiment, a reflection type diffraction grating may be used, and a light source such as a semiconductor laser may be placed close to the rotor side. Alternatively, a mirror may be provided, and the light source may be provided in a direction perpendicular to the plane of the paper where it is reflected by the mirror. Depending on these arrangements, for example, a semiconductor laser may be set in an extra space of the detection system, thereby making the detection system more compact.
（発明の効果）
以上、本発明によれは、光源か例えは半導体レーザのよ
うに波長変動するものであっても回転検出信号か安定し
、又光源の波長−足止のための温度コントロールを行な
う必要かない。(Effects of the Invention) As described above, according to the present invention, even if the wavelength of the light source fluctuates, such as a semiconductor laser, the rotation detection signal can be stabilized, and the temperature control for stopping the wavelength of the light source can be performed. There's no need to do it.
第１図（ａ）、（ｂ）は、本発明の第１の実施例を説明
する図、
第２図（ａ）、（ｂ）は、本発明の第２の実施例を説明
する図、
第３図（ａ）、（ｂ）は、検出系の異なる実施例の図、
第４図（ａ）、（ｂ）、（Ｃ）は、振動波モータの説明
図、
図中、１・・・振動体、２・・・圧電又は電歪素子、３
．４．５・・・電極、６・・・ロータ、７・・・散乱面
、８・・・回折格子、９・・・半導体レーザ、】０・・
・コリメータレンズ、１１．１９ａ１１９ｂ・・・回折
格子、１２ａ、１２ｂ・・・ミラー、１３・・・集光レ
ンズ、１４．１４ａ、１４ｂ・・・光検出器、１５．１
６・・・図波長板、１７・・・ビームスプリッタ、１８
ａ、１８ｂ・・・偏光板である。FIGS. 1(a) and (b) are diagrams explaining a first embodiment of the present invention, FIGS. 2(a) and (b) are diagrams explaining a second embodiment of the present invention, Figures 3 (a) and (b) are diagrams of different embodiments of the detection system, Figures 4 (a), (b), and (C) are explanatory diagrams of the vibration wave motor. - Vibrating body, 2... Piezoelectric or electrostrictive element, 3
．． 4.5... Electrode, 6... Rotor, 7... Scattering surface, 8... Diffraction grating, 9... Semiconductor laser, ]0...
- Collimator lens, 11.19a119b... Diffraction grating, 12a, 12b... Mirror, 13... Condensing lens, 14.14a, 14b... Photodetector, 15.1
6... Wave plate, 17... Beam splitter, 18
a, 18b... are polarizing plates.
Claims (16)
タにおいて、前記回転検出器は、光源と、該光源からの
光の波長λの変化に応じて前記ロータの回転面への入射
角θが変化し、ｓｉｎθ／λを略一定として前記ロータ
回転面に前記光源からの光を入射させる光学系と、前記
ロータの回転状態に応じてドツプラーシフトした前記ロ
ータからの光を検出する光検出器を有することを特徴と
する回転検出器付きモータ。(1) In a motor with a rotation detector that detects the rotational state of a rotor, the rotation detector includes a light source and an angle of incidence θ on the rotating surface of the rotor according to a change in the wavelength λ of the light from the light source. an optical system that allows light from the light source to enter the rotor rotational surface with sin θ/λ substantially constant; and a photodetector that detects light from the rotor that is Doppler-shifted in accordance with the rotational state of the rotor. A motor with a rotation detector, characterized in that it has a rotation detector.
が配設される請求項１記載の回転検出器付きモータ。(2) The motor with a rotation detector according to claim 1, wherein a diffraction grating along the rotational direction is arranged on the rotational surface of the rotor.
回転検出器付きモータ。(3) The motor with a rotation detector according to claim 1, wherein the rotor rotation surface is a scattering surface.
タにおいて、前記ロータの回転面に回転方向に沿った回
折格子が配設され、前記回転検出器は、光源と、該光源
からの光の波長λの変化に応して前記ロータの回転面か
らの回折角θが変化し、ｓｉｎθ／λを略一定として所
定面に入射させる光学系と、前記ロータの回転状態に応
してドツプラーシフトした前記所定面からの光を検出す
る光検出器を有することを特徴とする回転検出器付きモ
ータ。(4) In a motor equipped with a rotation detector that detects the rotational state of a rotor, a diffraction grating is arranged along the rotational direction on the rotating surface of the rotor, and the rotation detector includes a light source and a light source from the light source. An optical system in which the diffraction angle θ from the rotating surface of the rotor changes in accordance with a change in the wavelength λ, and makes the diffraction angle θ incident on a predetermined surface with substantially constant sin θ/λ, and a Doppler shift in accordance with the rotational state of the rotor. A motor with a rotation detector, comprising a photodetector for detecting light from the predetermined surface.
の回転検出器付きモータ。(5) The motor with a rotation detector according to claim 4, wherein a diffraction grating is disposed on the predetermined surface.
出器付きモータ。(6) The motor with a rotation detector according to claim 4, wherein the predetermined surface is a scattering surface.
格子と、該回折格子からの回折角と略同一の入射角で前
記ロータの回転面に入射させる光伝達手段を備える請求
項１乃至３記載の回転検出器付きモータ。(7) The optical system includes a diffraction grating that diffracts the light from the light source, and a light transmission means that causes the light to be incident on the rotating surface of the rotor at an incident angle that is substantially the same as the diffraction angle from the diffraction grating. 3. The motor with a rotation detector described in 3.
ｎ次光（ｎは自然数）を前記回折角と各々同一の入射角
で前記ロータの回転面に入射させる請求項７記載の回転
検出器付きモータ。(8) The light transmission means is diffracted from the diffraction grating.
8. The motor with a rotation detector according to claim 7, wherein the n-th order light (n is a natural number) is made to enter the rotating surface of the rotor at the same incident angle as the diffraction angle.
８記載の回転検出器付きモータ。(9) The motor with a rotation detector according to any one of claims 1 to 8, wherein the light source is a semiconductor laser.
に交流電圧を印加することによって、振動体に加圧接触
した部材を相対回転させるようにした振動波モータのロ
ータである請求項１乃至９記載の回転検出器付きモータ
。(10) The rotor is a vibration wave motor rotor in which a member in pressure contact with a vibrating body is relatively rotated by applying an alternating voltage to an electro-mechanical energy conversion element. Motor with rotation detector.
速度情報を検出する請求項１乃至１０記載の回転検出器
付きモータ。(11) The motor with a rotation detector according to any one of claims 1 to 10, wherein angular velocity information of the rotor is detected based on the output of the photodetector.
度情報を検出する請求項１乃至１０記載の回転検出器付
きモータ。(12) The motor with a rotation detector according to any one of claims 1 to 10, wherein angle information of the rotor is detected based on the output of the photodetector.
速度情報及び角度情報を検出する請求項１乃至１０記載
の回転検出器付きモータ。(13) The motor with a rotation detector according to any one of claims 1 to 10, wherein angular velocity information and angle information of the rotor are detected based on the output of the photodetector.
るために２箇設けられる請求項１乃至１３記載の回転検
出器付きモータ。(14) The motor with a rotation detector according to any one of claims 1 to 13, wherein two photodetectors are provided to detect the rotational direction of the rotor.
ータを所定の回転状態に制御する制御系を有する請求項
１１乃至１４記載の回転検出器付きモータ。(15) The motor with a rotation detector according to any one of claims 11 to 14, further comprising a control system that controls the rotor to a predetermined rotational state based on the angular velocity information or the angle information.
の温度膨張係数を有する請求項５又は７記載の回転検出
器付きモータ。(16) The motor with a rotation detector according to claim 5 or 7, wherein the two diffraction gratings have the same pitch and the same coefficient of thermal expansion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2132889A JPH0429571A (en) | 1990-05-22 | 1990-05-22 | Motor with rotation detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2132889A JPH0429571A (en) | 1990-05-22 | 1990-05-22 | Motor with rotation detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0429571A true JPH0429571A (en) | 1992-01-31 |
Family
ID=15091922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2132889A Pending JPH0429571A (en) | 1990-05-22 | 1990-05-22 | Motor with rotation detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0429571A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6035488A (en) * | 1997-11-11 | 2000-03-14 | Tokai Rubber Industries, Ltd. | Vehicle sliding door stopper having concavities formed therein |
| WO2001017686A1 (en) * | 1999-09-09 | 2001-03-15 | Siemens Aktiengesellschaft | Ore mill and method for operating said ore mill |
| JP2002209392A (en) * | 2001-01-09 | 2002-07-26 | Canon Inc | Drive circuit for oscillatory wave motor |
| CN106247947A (en) * | 2016-08-11 | 2016-12-21 | 哈尔滨工业大学 | A kind of heterodyne system two/three-dimensional grating displacement is thick/carefully measure system |
-
1990
- 1990-05-22 JP JP2132889A patent/JPH0429571A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6035488A (en) * | 1997-11-11 | 2000-03-14 | Tokai Rubber Industries, Ltd. | Vehicle sliding door stopper having concavities formed therein |
| WO2001017686A1 (en) * | 1999-09-09 | 2001-03-15 | Siemens Aktiengesellschaft | Ore mill and method for operating said ore mill |
| JP2002209392A (en) * | 2001-01-09 | 2002-07-26 | Canon Inc | Drive circuit for oscillatory wave motor |
| JP4677103B2 (en) * | 2001-01-09 | 2011-04-27 | キヤノン株式会社 | Drive circuit for vibration wave motor |
| CN106247947A (en) * | 2016-08-11 | 2016-12-21 | 哈尔滨工业大学 | A kind of heterodyne system two/three-dimensional grating displacement is thick/carefully measure system |
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