JPH04289541A - Magneto-optical pickup device - Google Patents
Magneto-optical pickup deviceInfo
- Publication number
- JPH04289541A JPH04289541A JP150191A JP150191A JPH04289541A JP H04289541 A JPH04289541 A JP H04289541A JP 150191 A JP150191 A JP 150191A JP 150191 A JP150191 A JP 150191A JP H04289541 A JPH04289541 A JP H04289541A
- Authority
- JP
- Japan
- Prior art keywords
- magneto
- light
- beam splitter
- light receiving
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000001514 detection method Methods 0.000 claims description 28
- 230000010287 polarization Effects 0.000 claims description 23
- 238000002834 transmittance Methods 0.000 claims description 4
- 239000012528 membrane Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 abstract description 11
- 239000004065 semiconductor Substances 0.000 abstract description 10
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 230000003287 optical effect Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
Landscapes
- Optical Head (AREA)
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明は光磁気ピックアップ装置
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magneto-optical pickup device.
【０００２】0002
【従来の技術】従来の光磁気ピックアップ装置では、Ａ
Ｎｅｗ ＦｏｃｕｓＳｓｅｖｏ Ｍｅｔｈｏｄ ｆｏ
ｒ Ｍａｇｎｅｔｏ−Ｏｐｔｉｃａｌ Ｄｉｓｃ Ｓｙ
ｓｔｅｍｓ（Ｊａｐａｎｅｓｅ Ｊｏｕｒｎａｌ ｏｆ
Ａｐｐｌｉｅｄ Ｐｈｙｓｉｃｓ，Ｖｏｌ．２６（１
９８７））に記載されているように、光磁気記録媒体か
らの反射光を２個の受光素子に入射させるために、複雑
な形状を有する微小なマイクロプリズムにより形成され
た偏光ビームスプリッタを用いている。[Prior Art] In a conventional magneto-optical pickup device, A
New FocusSsevo Method for
r Magneto-Optical Disc Sy
stems (Japanese Journal of
Applied Physics, Vol. 26 (1
987)), a polarizing beam splitter formed by minute microprisms with a complicated shape is used to make the reflected light from the magneto-optical recording medium incident on two light receiving elements. There is.
【０００３】0003
【発明が解決しようとする課題】光磁気記録媒体からの
反射光を２個の受光素子に夫々正確に入射させるために
は、偏光ビームスプリッタであるマイクロプリズムと受
光素子との正確な位置合わせが必要であり、前記マイク
ロプリズムの加工精度を厳しくしなければならず、製作
コストの低減が困難となる。[Problem to be Solved by the Invention] In order to make the reflected light from the magneto-optical recording medium enter the two light-receiving elements accurately, it is necessary to accurately align the microprism, which is a polarizing beam splitter, with the light-receiving element. Therefore, the processing precision of the microprism must be made strict, making it difficult to reduce manufacturing costs.
【０００４】本発明の目的は、偏光ビームスプリッタと
受光素子との正確な位置合わせを行わなくても受光素子
への光ビームの正確な入射が可能であり、加工性を向上
させることができ、製作コストの低減が容易な光磁気ピ
ックアップ装置を提供することにある。[0004] An object of the present invention is to enable a light beam to be accurately incident on a light receiving element without performing accurate alignment between a polarizing beam splitter and a light receiving element, and to improve processability. An object of the present invention is to provide a magneto-optical pickup device whose manufacturing cost can be easily reduced.
【０００５】[0005]
【課題を解決するための手段】本発明による光磁気ピッ
クアップ装置においては、光源から発射された光ビーム
を集光レンズによって光磁気記録媒体上に集光させ、前
記光磁気記録媒体からの反射光の一部をビームスプリッ
タで受光素子へ導くものであり、入射する光ビームを透
過する第１の平行平板及び第２の平行平板と、これら第
１の平行平板と第２の平行平板との間に設けられ偏光方
向によって透過率が異なる偏光選択膜と、第２の平行平
板に設けられた反射膜とを有する偏光ビームスプリッタ
と、この偏光ビームスプリッタの前記反射膜の反対側の
面に設けられた２個以上の受光素子とを備える光磁気信
号検出素子を具備することを特徴とする[Means for Solving the Problems] In a magneto-optical pickup device according to the present invention, a light beam emitted from a light source is focused onto a magneto-optical recording medium by a condenser lens, and reflected light from the magneto-optical recording medium is collected. A part of the light beam is guided to a light receiving element by a beam splitter, and a first parallel plate and a second parallel plate transmit the incident light beam, and a space between the first parallel plate and the second parallel plate. A polarizing beam splitter having a polarization selective film provided on the surface and having a transmittance different depending on the polarization direction, and a reflective film provided on a second parallel plate; and a magneto-optical signal detection element having two or more light receiving elements.
【０００６】[0006]
【作用】本発明の光磁気ピックアップ装置においては、
光源から発射された光ビームは集光レンズによって光磁
気記録媒体上に集光される。光磁気記録媒体からの反射
光の一部は、ビームスプリッタによって光磁気信号検出
素子の受光素子へ導かれる。光ビームは偏光ビームスプ
リッタの第１の平行平板に達する。この後光ビームは偏
光選択膜によって一部が透過され、一部が反射される。
透過された一部は、偏光ビームスプリッタの第２の平行
平板の反射膜によって反射され、受光素子のうちの１個
に入射する。一方、反射された一部は、別の受光素子に
入射する。各受光素子は入射した光ビームを信号として
検出する。[Operation] In the magneto-optical pickup device of the present invention,
A light beam emitted from a light source is focused onto a magneto-optical recording medium by a focusing lens. A portion of the reflected light from the magneto-optical recording medium is guided by the beam splitter to the light receiving element of the magneto-optical signal detection element. The light beam reaches the first parallel plate of the polarizing beam splitter. A portion of this rear light beam is transmitted by the polarization selective film, and a portion is reflected. A portion of the transmitted light is reflected by the reflective film of the second parallel plate of the polarizing beam splitter and enters one of the light receiving elements. On the other hand, the reflected part enters another light receiving element. Each light receiving element detects the incident light beam as a signal.
【０００７】[0007]
【実施例】以下に、本発明の一実施例を図１乃至図３を
用いて詳細に説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to FIGS. 1 to 3.
【０００８】図１において符号２は光源であるレーザ素
子を示す。このレーザ素子２から発射されたレーザ光は
、コリメータレンズ４によって平行光束となる。この平
行光束となったレーザ光は、ビームスプリッタ６を透過
し、集光レンズ８によって光磁気記録媒体である光磁気
ディスク１０上に集光される。光磁気ディスク１０から
の反射光は、ビームスプリッタ６によって全反射ミラー
１２の方向に反射され、２分の１波長板１４を通過した
後に収束レンズ１６によって光磁気信号検出素子１８の
方向に集光される。In FIG. 1, reference numeral 2 indicates a laser element which is a light source. The laser beam emitted from the laser element 2 is turned into a parallel beam by the collimator lens 4. This collimated laser beam passes through a beam splitter 6 and is focused by a condenser lens 8 onto a magneto-optical disk 10 which is a magneto-optical recording medium. The reflected light from the magneto-optical disk 10 is reflected in the direction of the total reflection mirror 12 by the beam splitter 6, and after passing through the half-wave plate 14, it is focused by the converging lens 16 in the direction of the magneto-optical signal detection element 18. be done.
【０００９】図１に示すように、この光磁気信号検出素
子１８は、側面から見て光路に対して所定の角度をもつ
ように設置されている。又、図２の（Ｂ）に示すように
、この光磁気信号検出素子１８は、カー回転が生じてい
ない状態の光ビームの偏光面に対して光磁気信号検出素
子１８の入射面が４５度傾くように設置されている。As shown in FIG. 1, the magneto-optical signal detecting element 18 is installed at a predetermined angle with respect to the optical path when viewed from the side. Further, as shown in FIG. 2B, the magneto-optical signal detection element 18 has an incident surface of 45 degrees with respect to the polarization plane of the light beam in a state where Kerr rotation has not occurred. It is set up so that it is tilted.
【００１０】この光磁気信号検出素子１８は半導体基板
２０を有する。この半導体基板２０には、光を入射する
ための貫通孔２２が設けられている。又、半導体基板２
０の上面には、２個の受光素子２４，２６が形成されて
いる。これら受光素子２４，２６は、図２の（Ｂ）に示
すように３つの領域から構成されている。図２の（Ｂ）
においてこれら領域を、受光素子２４のものについては
ａ，ｂ，ｃの符号で、受光素子２６のものについてはｅ
，ｆ，ｇの符号で夫々示す。そしてこれら受光素子２４
，２６は、中央の領域に光ビームの光軸が当たるように
設定されている。受光素子２４，２６が形成された半導
体基板２０の上には、ガラスよりなる第１の平行平板２
８が接合されている。この第１の平行平板２８の上面に
は、ガラスよりなる第２の平行平板３０が接合されてい
る。これら第１の平行平板２８と第２の平行平板３０と
の間には、偏光方向によって透過率が異なる偏光選択膜
（例えばＰ成分の透過率が１００％）３２が設けられて
いる。この偏光選択膜３２に対向する第２の平行平板３
０の面には、入射した光を反射する反射膜３４が設けら
れている。This magneto-optical signal detection element 18 has a semiconductor substrate 20. This semiconductor substrate 20 is provided with a through hole 22 through which light enters. Moreover, the semiconductor substrate 2
Two light-receiving elements 24 and 26 are formed on the top surface of 0. These light receiving elements 24 and 26 are composed of three regions as shown in FIG. 2(B). (B) in Figure 2
These areas are denoted by a, b, c for the light receiving element 24, and e for the light receiving element 26.
, f, and g, respectively. And these light receiving elements 24
, 26 are set so that the optical axis of the light beam hits the central region. A first parallel flat plate 2 made of glass is placed on the semiconductor substrate 20 on which the light receiving elements 24 and 26 are formed.
8 are joined. A second parallel flat plate 30 made of glass is bonded to the upper surface of the first parallel flat plate 28. Between the first parallel plate 28 and the second parallel plate 30, there is provided a polarization selective film 32 whose transmittance varies depending on the polarization direction (for example, the transmittance of the P component is 100%). A second parallel plate 3 facing this polarization selective film 32
A reflective film 34 that reflects incident light is provided on the 0 surface.
【００１１】光磁気信号検出素子１８の方向に集光され
た光は半導体基板２０の貫通孔２２を通り、第１の平行
平板２８を透過して、偏光選択膜３２に達する。偏光選
択膜３２に達した光のうち、Ｐ成分は偏光選択膜３２を
透過し、Ｓ成分は偏光選択膜３２に反射される。反射さ
れたＳ成分は受光素子２４に入射する。一方、偏光選択
膜３２を透過したＰ成分は第２の平行平板３０を透過し
、反射膜３４に反射され、偏光選択膜３２と第１の平行
平板２８とを透過した後、受光素子２６に入射する。
受光素子２４，２６の各々の３つの領域、即ちａ，ｂ，
ｃ及びｄ，ｅ，ｆの領域の出力信号を以下の２式で演算
して検出するのである。
焦点検出信号……（ａ＋ｃ−ｂ）−（ｄ＋ｆ−ｅ）光磁
気信号………（ａ＋ｂ＋ｃ）−（ｄ＋ｅ＋ｆ）上述した
光磁気信号検出素子１８の製作工程を、図３の（Ａ）乃
至（Ｃ）を用いて以下に説明する。The light focused in the direction of the magneto-optical signal detection element 18 passes through the through hole 22 of the semiconductor substrate 20, passes through the first parallel plate 28, and reaches the polarization selection film 32. Of the light that has reached the polarization selective film 32, the P component is transmitted through the polarization selective film 32, and the S component is reflected by the polarization selective film 32. The reflected S component enters the light receiving element 24. On the other hand, the P component that has passed through the polarization selective film 32 passes through the second parallel flat plate 30, is reflected by the reflective film 34, passes through the polarization selective film 32 and the first parallel flat plate 28, and then reaches the light receiving element 26. incident. Three areas of each of the light receiving elements 24 and 26, namely a, b,
The output signals in the regions c, d, e, and f are calculated and detected using the following two equations. Focus detection signal...(a+c-b)-(d+fe-e) Magneto-optical signal...(a+b+c)-(d+e+f) The manufacturing process of the magneto-optical signal detection element 18 described above is shown in FIGS. This will be explained below using C).
【００１２】まず第１工程において、ガラスにより第１
及び第２の平行平板２８，３０を形成する。第１の平行
平板２８には偏光選択膜３２を、第２の平行平板３０に
は反射膜３４を夫々コートする。次に、偏光選択膜３２
及び反射膜３４をコートした第１及び第２の平行平板２
８，３０を接合し、偏光ビームスプリッタ４０を形成す
る。第２程においては、図３の（Ａ）に示すように、半
導体基板２０の元となるシリコンウエハ３６に、受光素
子２４，２６を所定の個数、所定の数の列に並べるよう
に形成する。第３工程においては、図３の（Ｂ）に示す
ように、貫通孔２２をプレスもしくはエッチングにより
形成する。貫通孔２２の位置精度は、貫通孔２２の中心
が受光素子２４，２６のほぼ中心にくるような程度で良
い。第４工程においては、図３の（Ｃ）に示すように、
あらかじめ形成しておいた、第１及び第２の平行平板２
８，３０よりなる偏光ビームスプリッタ４０を前記貫通
孔２２及び受光素子２４，２６よりも少し大きい幅の短
冊状に切断し、受光素子２４，２６及び貫通孔２２に合
わせてシリコンウエハ３６上に接着する。そして第５工
程においては、図３の（Ｃ）に示すように、シリコンウ
エハ３６を前記短冊状の偏光ビームスプリッタ４０の幅
よりも少し大きめの幅の短冊状に切断した後、図中左側
に示すように個々の素子に合わせて切断する。First, in the first step, the first
and second parallel flat plates 28, 30 are formed. The first parallel plate 28 is coated with a polarization selective film 32, and the second parallel plate 30 is coated with a reflective film 34, respectively. Next, the polarization selective film 32
and first and second parallel flat plates 2 coated with a reflective film 34
8 and 30 are joined to form a polarizing beam splitter 40. In the second step, as shown in FIG. 3A, a predetermined number of light receiving elements 24 and 26 are formed on a silicon wafer 36, which is the source of the semiconductor substrate 20, so as to be arranged in a predetermined number of rows. . In the third step, as shown in FIG. 3B, a through hole 22 is formed by pressing or etching. The positional accuracy of the through hole 22 may be such that the center of the through hole 22 is approximately at the center of the light receiving elements 24 and 26. In the fourth step, as shown in FIG. 3(C),
First and second parallel flat plates 2 formed in advance
A polarizing beam splitter 40 consisting of 8 and 30 is cut into strips having a width slightly larger than the through-hole 22 and the light-receiving elements 24 and 26, and is glued onto the silicon wafer 36 in alignment with the light-receiving elements 24 and 26 and the through-hole 22. do. In the fifth step, as shown in FIG. 3C, the silicon wafer 36 is cut into strips with a width slightly larger than the width of the strip-shaped polarizing beam splitter 40, and then Cut into individual elements as shown.
【００１３】前記２個の受光素子２４，２６間の間隔は
、光磁気信号検出素子１８を光路に対して設置する角度
と、第１及び第２の平行平板２８，３０の厚みとによっ
て任意に設定することができる。即ち、貫通孔２２から
入射する光ビームの光軸が、２個の受光素子２４，２６
の中心に来るように、光磁気信号検出素子１８を設置す
る角度と、第１及び第２の平行平板２８，３０の厚みと
、２個の受光素子２４，２６間の間隔とを設定する。
又、偏光選択膜３２も、前記光磁気信号検出素子１８を
光路に対して設置する角度に適した特性を有するものを
使用する。以上説明したことを最適に調節することによ
って、光磁気信号の最適な検出が可能となる。The distance between the two light-receiving elements 24 and 26 can be determined arbitrarily depending on the angle at which the magneto-optical signal detection element 18 is installed with respect to the optical path and the thickness of the first and second parallel plates 28 and 30. Can be set. That is, the optical axis of the light beam entering from the through hole 22 is aligned with the two light receiving elements 24 and 26.
The angle at which the magneto-optical signal detection element 18 is installed, the thicknesses of the first and second parallel flat plates 28 and 30, and the spacing between the two light receiving elements 24 and 26 are set so that the magneto-optical signal detection element 18 is located at the center of the light receiving element 18. Also, the polarization selection film 32 used has characteristics suitable for the angle at which the magneto-optical signal detection element 18 is installed with respect to the optical path. Optimal detection of magneto-optical signals becomes possible by optimally adjusting the things described above.
【００１４】この様にして光磁気信号検出素子１８を形
成すれば、第１及び第２の平行平板２８，３０よりなる
偏光ビームスプリッタ４０と、受光素子である受光素子
２４，２６との位置合わせが不要となる。又、偏光ビー
ムスプリッタ４０によって分けられた２つの光ビームの
光軸のずれは、第１及び第２の平行平板２８，３０の平
行度による。個々の光ビームの光軸と受光素子２４，２
６の光軸とのずれは、光磁気信号検出素子１８の設定角
度のずれ、各平行平板２８，３０の平行度及びその厚み
のバラツキ、第１及び第２の平行平板２８，３０よりな
る偏光ビームスプリッタ４０と基板である半導体基板２
０との接合時の平行度などによる。平行平板２８，３０
を平行度高く加工するのは極めて容易であり、接合によ
る平行度を高くすることも非常に簡単である。従って、
個々の素子又は個々の部材の平行度を高くするだけで、
光磁気信号検出素子１８中の全ての光軸のずれは最小限
に食い止められる。もし平行平板２８，３０の厚みのバ
ラツキがあっても、光磁気信号検出素子１８の設定角度
を調節するだけで光軸ずれの補正を行うことができる。
さらに、偏光ビームスプリッタ４０の半導体基板２０へ
の接合の精度は余り必要無いので、製作が容易になる。
特に、受光素子２４，２６及び貫通孔２２が形成された
シリコンウエハ３６上に短冊状の偏光ビームスプリッタ
４０を接着するとき、個々の受光素子２４，２６及び貫
通孔２２の中心を結んだ中心線と、前記偏光ビームスプ
リッタ４０の長手方向の中心線とのずれはある程度許容
できるので、製作が容易になる。If the magneto-optical signal detection element 18 is formed in this manner, the polarization beam splitter 40 made up of the first and second parallel flat plates 28, 30 and the light receiving elements 24, 26, which are light receiving elements, can be aligned. becomes unnecessary. Furthermore, the deviation of the optical axes of the two light beams separated by the polarizing beam splitter 40 depends on the parallelism of the first and second parallel plates 28 and 30. Optical axes of individual light beams and light receiving elements 24, 2
The deviation from the optical axis of 6 is due to the deviation in the setting angle of the magneto-optical signal detection element 18, the variation in the parallelism and thickness of each parallel plate 28, 30, and the polarization caused by the first and second parallel plates 28, 30. Beam splitter 40 and semiconductor substrate 2 as a substrate
Depends on the parallelism when joining with 0. Parallel plate 28, 30
It is extremely easy to process the material to have a high degree of parallelism, and it is also very easy to increase the degree of parallelism by joining. Therefore,
By simply increasing the parallelism of individual elements or individual members,
All optical axis deviations in the magneto-optical signal detection element 18 are kept to a minimum. Even if there is variation in the thickness of the parallel plates 28 and 30, the optical axis deviation can be corrected simply by adjusting the set angle of the magneto-optical signal detection element 18. Furthermore, since there is no need for great precision in bonding the polarizing beam splitter 40 to the semiconductor substrate 20, manufacturing becomes easier. In particular, when bonding the strip-shaped polarizing beam splitter 40 onto the silicon wafer 36 in which the light receiving elements 24, 26 and the through hole 22 are formed, the center line connecting the centers of the individual light receiving elements 24, 26 and the through hole 22 Since a certain degree of deviation from the longitudinal center line of the polarizing beam splitter 40 can be tolerated, manufacturing is facilitated.
【００１５】又、図２の（Ｃ），図２の（Ｄ）に示すよ
うな変形例も可能である。この変形例においては、偏光
ビームスプリッタ４０の受光素子が設けられた面、即ち
、半導体基板２０の下面に、２分の１波長板３２を接合
したものである。この場合光磁気信号検出素子１８の入
射面を、第１実施例のようにカー回転が生じていない状
態の光ビームの偏光面に対して４５度傾けず、前記偏光
面に対し平行、又は図３の（Ｄ）に示すように垂直に設
置する。この２分の１波長板は、製作工程においては、
第３工程で貫通孔２２を形成した後に、シリコンウエハ
３６に接着される。他の工程は第１実施例と同様である
。Modifications as shown in FIGS. 2(C) and 2(D) are also possible. In this modification, a half-wave plate 32 is bonded to the surface of the polarizing beam splitter 40 on which the light receiving element is provided, that is, the lower surface of the semiconductor substrate 20. In this case, the incidence plane of the magneto-optical signal detection element 18 is not tilted by 45 degrees with respect to the polarization plane of the light beam in a state where Kerr rotation has not occurred as in the first embodiment, but is parallel to the polarization plane or Install it vertically as shown in 3 (D). In the manufacturing process of this half-wave plate,
After forming the through hole 22 in the third step, it is bonded to the silicon wafer 36. Other steps are the same as in the first embodiment.
【００１６】本発明は上記２つの実施例に限定されるも
のではなく、幾多の変形例が可能である。例えば、第１
実施例において第１の平行平板２８に２分の１波長板を
用いることも可能である。又、この光磁気ピックアップ
装置は、検出系をパッケージ化することもでき、このパ
ッケージ化により、光磁気検出素子１８がさらに回転し
易くなり、調節が容易となる。The present invention is not limited to the above two embodiments, and many modifications are possible. For example, the first
In the embodiment, it is also possible to use a half wavelength plate as the first parallel plate 28. Further, in this magneto-optical pickup device, the detection system can be packaged, and this packaging makes it easier to rotate the magneto-optical detection element 18 and facilitate adjustment.
【００１７】[0017]
【発明の効果】本発明によれば、偏光ビームスプリッタ
と受光素子との正確な位置合わせを行わなくても受光素
子への光ビームの正確な入射が可能であり、加工性を向
上させることができ、製作コストの低減が容易な光磁気
ピックアップ装置を提供することができる。[Effects of the Invention] According to the present invention, it is possible to accurately input a light beam to a light receiving element without performing accurate alignment between the polarizing beam splitter and the light receiving element, and it is possible to improve workability. Therefore, it is possible to provide a magneto-optical pickup device that can easily reduce manufacturing costs.
【図１】本発明の一実施例の光磁気ピックアップ装置を
示す概略図である。FIG. 1 is a schematic diagram showing a magneto-optical pickup device according to an embodiment of the present invention.
【図２】図２は本発明の一実施例の装置の光磁気信号検
出素子を示す図であって、（Ａ），（Ｂ），（Ｃ），（
Ｄ）を含み、（Ａ）は第１実施例の光磁気信号検出素子
を示す側面図、（Ｂ）は第１実施例の光磁気信号検出素
子を光ビームの方向から見た斜視図、（Ｃ）は第２実施
例の光磁気信号検出素子を示す側面図、（Ｄ）は第１実
施例の光磁気信号検出素子を光ビームの方向から見た斜
視図である。FIG. 2 is a diagram showing a magneto-optical signal detection element of an apparatus according to an embodiment of the present invention, (A), (B), (C), (
D), (A) is a side view showing the magneto-optical signal detection element of the first embodiment, (B) is a perspective view of the magneto-optical signal detection element of the first embodiment seen from the direction of the light beam, ( C) is a side view showing the magneto-optical signal detection element of the second embodiment, and (D) is a perspective view of the magneto-optical signal detection element of the first embodiment as viewed from the direction of the light beam.
【図３】図３は本発明の光磁気信号検出素子の製作工程
を示す図であって、（Ａ），（Ｂ），（Ｃ），（Ｄ）を
含み、（Ａ）はその第２工程を示す図、（Ｂ）は第３工
程を示す図、（Ｃ）は第４工程を示す図、（Ｄ）は第５
工程を示す図である。FIG. 3 is a diagram showing the manufacturing process of the magneto-optical signal detection element of the present invention, including (A), (B), (C), and (D), and (A) is the second Diagrams showing the steps, (B) is a diagram showing the third step, (C) is a diagram showing the fourth step, (D) is a diagram showing the fifth step.
It is a figure showing a process.
２…レーザ素子、６…ビームスプリッタ、８…集光レン
ズ、１０…光磁気ディスク、１８…光磁気信号検出素子
、２４，２６…受光素子、２８…第１の平行平板、３０
…第２の平行平板、３２…偏光選択膜、３４…反射膜、
４０…偏光ビームスプリッタ。2... Laser element, 6... Beam splitter, 8... Condensing lens, 10... Magneto-optical disk, 18... Magneto-optical signal detection element, 24, 26... Light receiving element, 28... First parallel plate, 30
...Second parallel flat plate, 32...Polarization selective film, 34...Reflection film,
40...Polarizing beam splitter.
Claims (3)
ンズによって光磁気記録媒体上に集光させ、前記光磁気
記録媒体からの反射光の一部をビームスプリッタで受光
素子へ導く光磁気ピックアップ装置において、入射する
光ビームを透過する第１の平行平板及び第２の平行平板
と、これら第１の平行平板と第２の平行平板との間に設
けられ偏光方向によって透過率が異なる偏光選択膜と、
第２の平行平板に設けられた反射膜とを有する偏光ビー
ムスプリッタと、この偏光ビームスプリッタの前記反射
膜の反対側の面に設けられた２個以上の受光素子とを備
える光磁気信号検出素子を具備することを特徴とする光
磁気ピックアップ装置。1. A magneto-optical pickup that focuses a light beam emitted from a light source onto a magneto-optical recording medium using a condenser lens, and guides a part of the reflected light from the magneto-optical recording medium to a light receiving element using a beam splitter. In the device, a first parallel plate and a second parallel plate that transmit an incident light beam, and a polarization selection device that is provided between the first parallel plate and the second parallel plate and whose transmittance varies depending on the polarization direction. a membrane;
A magneto-optical signal detection element comprising a polarizing beam splitter having a reflective film provided on a second parallel flat plate, and two or more light receiving elements provided on the opposite surface of the polarizing beam splitter to the reflective film. A magneto-optical pickup device comprising:
板であることを特徴とする、請求項１に記載の光磁気ピ
ックアップ装置。2. The magneto-optical pickup device according to claim 1, wherein the first parallel plate is a half wavelength plate.
素子が設けられた面には、２分の１波長板が接合されて
いることを特徴とする、請求項１に記載の光磁気ピック
アップ装置。3. The magneto-optical pickup device according to claim 1, wherein a half wavelength plate is bonded to a surface of the polarizing beam splitter on which the light receiving element is provided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP150191A JPH04289541A (en) | 1991-01-10 | 1991-01-10 | Magneto-optical pickup device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP150191A JPH04289541A (en) | 1991-01-10 | 1991-01-10 | Magneto-optical pickup device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04289541A true JPH04289541A (en) | 1992-10-14 |
Family
ID=11503214
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP150191A Withdrawn JPH04289541A (en) | 1991-01-10 | 1991-01-10 | Magneto-optical pickup device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04289541A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0840305A2 (en) * | 1991-12-27 | 1998-05-06 | Sony Corporation | Optical apparatus |
| US5796701A (en) * | 1995-06-23 | 1998-08-18 | Sony Corporation | Optical pickup and opto-magnetic signal reproducing apparatus |
-
1991
- 1991-01-10 JP JP150191A patent/JPH04289541A/en not_active Withdrawn
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0840305A2 (en) * | 1991-12-27 | 1998-05-06 | Sony Corporation | Optical apparatus |
| EP0840305A3 (en) * | 1991-12-27 | 1999-01-27 | Sony Corporation | Optical apparatus |
| US5796701A (en) * | 1995-06-23 | 1998-08-18 | Sony Corporation | Optical pickup and opto-magnetic signal reproducing apparatus |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5309422A (en) | Light separation element and light receiving optical device using same | |
| JPH01317250A (en) | Apparatus for optically scanning magneto- optic recording carrier | |
| JP3029541B2 (en) | Optical pickup device | |
| JPH04274717A (en) | Polarized-light detecting apparatus | |
| JPH0266733A (en) | Optical system for optical information recording and reproducing device | |
| JPH04289541A (en) | Magneto-optical pickup device | |
| JP3167171B2 (en) | Light head | |
| JP2869318B2 (en) | Optical pickup device | |
| JP3366017B2 (en) | Light head | |
| JP2704684B2 (en) | Light separation element and light receiving optical device using the same | |
| JPH02193347A (en) | Optical head structure for magneto-optical recorder | |
| JPH03252928A (en) | Optical pickup device | |
| JP2707361B2 (en) | Optical device for optical pickup | |
| JP3477214B2 (en) | Optical unit for magneto-optical | |
| JP2709090B2 (en) | Waveguide type optical head | |
| JP2748052B2 (en) | Light separation element and light receiving optical device using the same | |
| JPH04167236A (en) | Optical disk apparatus | |
| JPS63140426A (en) | Optical pick-up device | |
| JP2578589B2 (en) | Optical head device | |
| JPH02148428A (en) | Optical pickup device | |
| JPS63187440A (en) | Optical head | |
| JPH07182712A (en) | Optical pickup device | |
| JPH07169128A (en) | Optical pickup device | |
| JPH08102106A (en) | Optical pickup device | |
| JPS63229639A (en) | Optical information recording and reproducing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Application deemed to be withdrawn because no request for examination was validly filed |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19980514 |