JPH0427498B2 - - Google Patents
Info
- Publication number
- JPH0427498B2 JPH0427498B2 JP56059664A JP5966481A JPH0427498B2 JP H0427498 B2 JPH0427498 B2 JP H0427498B2 JP 56059664 A JP56059664 A JP 56059664A JP 5966481 A JP5966481 A JP 5966481A JP H0427498 B2 JPH0427498 B2 JP H0427498B2
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic
- sample
- microscope
- receiving element
- moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007246 mechanism Effects 0.000 claims description 21
- 230000003287 optical effect Effects 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 5
- 230000000052 comparative effect Effects 0.000 claims description 3
- 238000002604 ultrasonography Methods 0.000 description 14
- 230000000694 effects Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Microscoopes, Condenser (AREA)
Description
【発明の詳細な説明】
本発明は超音波顕微鏡に関し、特に光学顕微鏡
による像と超音波顕微鏡による像とを簡単に切換
えて比較観察できるようにしたものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an ultrasonic microscope, and in particular, to an ultrasonic microscope that enables comparative observation by easily switching between an image obtained by an optical microscope and an image obtained by an ultrasonic microscope.
超音波顕微鏡と光学顕微鏡とを組合わせ試料の
像の位置出しを容易にし、両者の像の比較を可能
にした装置としては実開昭55−79309号公報に示
されているものがある。この明細書によれば第１
図に示すように超音波顕微鏡１のレボルバー２に
光学顕微鏡用の対物レンズ３と超音波顕微鏡用の
集束超音波送受素子４とを設け、試料台５上に載
置した試料６に対向する位置へレボルバー２を回
転することにより対物レンズ３と集束超音波送受
素子４とを切換えて配置するようになつている。
この試料台５はアーム７を介して図に示すＸ方向
駆動機構８に連結しており、Ｘ方向駆動機構８は
Ｙ方向移動台９に固定されこの移動台９と共にＹ
方向駆動機構１０に連結されている。このような
構成の超音波顕微鏡の動作は、集束超音波送受素
子４は、レボルバー２に固定されているため、試
料６の試料面にわたる超音波ビームによる走査
は、試料台５を駆動機構８によりＸ方向に高速往
復運動させ、かつ、Ｙ方向に低速移動させて行な
つている。しかし、この試料台の運動により試料
を移動する方法では、試料は試料台上に載るよう
な大きさおよび重量でなければならず、また、試
料台の高速往復運動によつて振動や変形をおこさ
ないものでなければならず、さらに試料台の運動
に耐えるよう試料台に取付けしておかなければな
らない。 An apparatus that combines an ultrasonic microscope and an optical microscope to facilitate positioning of an image of a sample and to compare the images is disclosed in Japanese Utility Model Application Publication No. 79309/1983. According to this specification, the first
As shown in the figure, a revolver 2 of an ultrasonic microscope 1 is provided with an objective lens 3 for an optical microscope and a focused ultrasound transmitting/receiving element 4 for an ultrasonic microscope at a position facing a sample 6 placed on a sample stage 5. By rotating the revolver 2, the objective lens 3 and the focused ultrasound transmitting/receiving element 4 can be switched and arranged.
This sample stage 5 is connected to an X-direction drive mechanism 8 shown in the figure via an arm 7, and the X-direction drive mechanism 8 is fixed to a Y-direction moving stage 9, and together with this moving stage 9,
It is connected to a directional drive mechanism 10. The operation of the ultrasonic microscope with such a configuration is that since the focused ultrasonic transmitting/receiving element 4 is fixed to the revolver 2, scanning of the sample surface of the sample 6 by the ultrasonic beam is performed by moving the sample stage 5 by the drive mechanism 8. It performs high-speed reciprocating motion in the X direction and low-speed movement in the Y direction. However, in this method of moving the sample by the movement of the sample stage, the sample must be large enough and heavy enough to be placed on the sample stage, and the high-speed reciprocating motion of the sample stage must not cause vibration or deformation. In addition, it must be attached to the sample stage in such a way that it can withstand movement of the sample stage.
このような問題を解決するものとして集束超音
波送受素子の側を高速往復運動させるものがあ
る。 To solve this problem, there is a method in which the focused ultrasonic transmitting/receiving element side is moved back and forth at high speed.
第２図に示すようにＹ方向移動レール１１上
に、この移動レール１１の溝１２に沿つてＹ方向
に移動する試料台１３を溝１２に摺動自在に嵌合
させ、この試料台１３の上に試料６が載置してあ
る。また、移動レール１１の一方には光学顕微鏡
１４が、他方には超音波顕微鏡用の集束超音波送
受素子４がアーム１５を介してＸ方向駆動機構８
に連結して配置されており、試料台１３上の試料
６を観察できるようになつている。このような構
成の超音波顕微鏡によれば試料台１３を移動レー
ル１１に沿つて一方に移動して光学顕微鏡で試料
６の光学像を観察した後、試料台１３を試料のこ
の光学像と同一部分が集束超音波送受素子４と対
向するよう移動レール１１に沿つて、所定の移動
量だけ移動し、超音波顕微鏡の観察状態にして、
集束超音波送受素子４を駆動機構８によりＸ方向
に高速往復運動をさせ、図示しない駆動機構によ
り試料台１３をＹ方向に低速移動させることによ
り超音波ビームの二次元走査を行なつている。し
かしこのような機構では光学顕微鏡の観察状態か
ら超音波顕微鏡による観察状態への切換えを試料
台をあらかじめ設定された所定量だけ移動させる
ことにより行なつており、この移動量の精密な調
整が必要となるため構造が複雑となると共に装置
全体が大型となる。また、試料台の移動に時間が
かかるという欠点もある。 As shown in FIG. 2, a sample stand 13 that moves in the Y direction along the groove 12 of the moving rail 11 is slidably fitted onto the Y-direction moving rail 11, and the sample stand 13 is slidably fitted into the groove 12. A sample 6 is placed on top. Further, an optical microscope 14 is mounted on one side of the moving rail 11, and a focused ultrasound transmitting/receiving element 4 for an ultrasound microscope is mounted on the other side of the moving rail 11 via an arm 15 to an X-direction drive mechanism 8.
The sample 6 on the sample stage 13 can be observed. According to the ultrasonic microscope with such a configuration, after moving the sample stage 13 in one direction along the moving rail 11 and observing an optical image of the sample 6 with the optical microscope, the sample stage 13 is moved to one side along the moving rail 11, and then the sample stage 13 is moved to one side along the moving rail 11 to observe the optical image of the sample 6. The part is moved by a predetermined amount of movement along the moving rail 11 so that it faces the focused ultrasound transmitting/receiving element 4, and is placed in an observation state with an ultrasound microscope.
Two-dimensional scanning of the ultrasound beam is performed by causing the focused ultrasound transmitting/receiving element 4 to reciprocate at high speed in the X direction by a drive mechanism 8, and by moving the sample stage 13 at low speed in the Y direction by a drive mechanism (not shown). However, in such a mechanism, switching from an optical microscope observation state to an ultrasonic microscope observation state is performed by moving the sample stage by a preset amount, and this movement amount must be precisely adjusted. Therefore, the structure becomes complicated and the entire device becomes large. Another drawback is that it takes time to move the sample stage.
本発明の目的は上述した欠点を除去し、超音波
顕微鏡と光学顕微鏡とを組合わせ試料の像の位置
出しを容易にし、両者の像の比較を可能にした超
音波顕微鏡を提供することにある。 An object of the present invention is to eliminate the above-mentioned drawbacks, and to provide an ultrasonic microscope that combines an ultrasonic microscope and an optical microscope, facilitates positioning of the image of a sample, and enables comparison of the images of the two. .
本発明は試料を光学顕微鏡と超音波顕微鏡とに
より切換えて比較観察を行なう超音波顕微鏡にお
いて、光学顕微鏡の対物レンズと超音波顕微鏡の
超音波送受素子とを被測定面上に選択的に位置せ
しめるための切換部材を備え、この切換部材に超
音波送受素子を一方向に高速往復運動させる第１
の駆動機構を設け、試料を載置する移動ステージ
を上記一方向と直交する方向に低速移動させる第
２の駆動機構を設け、上記第１及び第２の駆動機
構の駆動により超音波送受素子から発生する超音
波ビームを試料に対して２次元的に走査すること
を特徴とするものである。 The present invention is an ultrasonic microscope that performs comparative observation of a sample by switching between an optical microscope and an ultrasonic microscope, in which the objective lens of the optical microscope and the ultrasonic transmitting/receiving element of the ultrasonic microscope are selectively positioned on a surface to be measured. a switching member for causing the switching member to reciprocate the ultrasonic transmitting and receiving element at high speed in one direction;
A second drive mechanism is provided for moving the moving stage on which the sample is placed at a low speed in a direction orthogonal to the one direction, and the first and second drive mechanisms drive the ultrasonic transmitting/receiving element. This method is characterized by scanning the sample two-dimensionally with the generated ultrasonic beam.
以下図面を参照して本発明を詳細に説明する。 The present invention will be described in detail below with reference to the drawings.
第３図は本発明による超音波顕微鏡の一実施例
の構成を一部を断面にして示す線図的斜視図であ
る。光学顕微鏡の本体に回転自在に装着されたレ
ボルバー２に集束超音波送受素子４の一次元走査
部１６を取付ける。この走査部１６では集束超音
波送受素子４をアーム１８を介して小型の駆動機
構１７に連結しており集束超音波送受素子４をＸ
方向に高速往復運動させるようになつている。こ
の走査部１６とレボルバー２との取付けは、走査
部１６側の取付け部１９を通常の光学顕微鏡の対
物レンズと同様のRMSネジとし、これをレボル
バーのレンズマウントに螺合することにより行な
い、全ての光学顕微鏡のレボルバーに取付けられ
るようにする。また、光学顕微鏡の移動ステージ
２０の所定位置に試料６を載置した試料台５を載
せる。この移動ステージ２０を図示しない駆動機
構により小型モータで顕微鏡本体に対してＹ方向
に低速移動できるようにする。このような構成の
超音波顕微鏡によればレボルバー２に取付けた対
物レンズ３により試料６の光学像を観察した後、
レボルバー２を回転し走査部１６の集束超音波送
受素子４を試料６に対向させ、超音波顕微鏡によ
る観察状態とすれば、集束超音波送受素子４を駆
動機構１７によりＸ方向に高速往復運動をさせ、
移動ステージ２０を図示しない駆動機構によりＹ
方向には低速移動させることにより、試料６を超
音波ビームで二次元走査することができる。 FIG. 3 is a diagrammatic perspective view showing the configuration of an embodiment of the ultrasonic microscope according to the present invention, with a portion thereof being cut in section. A one-dimensional scanning section 16 of a focused ultrasound transmitting/receiving element 4 is attached to a revolver 2 rotatably mounted on the main body of an optical microscope. In this scanning unit 16, the focused ultrasound transmitting/receiving element 4 is connected to a small drive mechanism 17 via an arm 18, and the focused ultrasound transmitting/receiving element 4 is
It is designed to perform high-speed reciprocating motion in the direction. The scanning section 16 and the revolver 2 are attached by using the mounting section 19 on the scanning section 16 side as an RMS screw similar to that of the objective lens of a normal optical microscope, and screwing this into the lens mount of the revolver. to be mounted on the revolver of an optical microscope. Further, the sample stage 5 on which the sample 6 is placed is placed at a predetermined position on the moving stage 20 of the optical microscope. This moving stage 20 can be moved at low speed in the Y direction with respect to the microscope body using a small motor by a drive mechanism (not shown). According to the ultrasonic microscope with such a configuration, after observing the optical image of the sample 6 with the objective lens 3 attached to the revolver 2,
When the revolver 2 is rotated and the focused ultrasonic wave transmitting/receiving element 4 of the scanning section 16 faces the sample 6 to be observed using an ultrasonic microscope, the focused ultrasonic wave transmitting/receiving element 4 is caused to undergo high-speed reciprocating motion in the X direction by the drive mechanism 17. let me,
The moving stage 20 is moved to Y by a drive mechanism (not shown).
By moving the sample 6 at a low speed in the direction, the sample 6 can be two-dimensionally scanned with the ultrasonic beam.
移動ステージ２０の駆動機構としては光学顕微
鏡用の駆動機構がモータ式によるものであればそ
れを使用してもよく、手動式のものであれば小型
のモータを装備するという簡単な改造でよい。こ
のような構成の超音波顕微鏡では、走査部の取付
部にRMSネジを採用したのでこのネジを有する
光学顕微鏡のレボルバーのレンズマウントに適合
することができる。 As the drive mechanism for the moving stage 20, if the drive mechanism for an optical microscope is a motor type, it may be used, or if it is a manual type, a simple modification of equipping it with a small motor may be sufficient. In an ultrasonic microscope with such a configuration, an RMS screw is used in the attachment part of the scanning unit, so that it can be adapted to a lens mount of an optical microscope's revolver that has this screw.
なお、レボルバーに取付ける集束超音波送受素
子に例えば発生周波数や集束方式の異なる多種多
様なものを用意すれば超音波顕微鏡のシステム化
が可能となる。また、レボルバー２に取付ける対
物レンズも多種多様なものを用意して装備すれば
いろいろな比較が可能となる。 Note that if a wide variety of focused ultrasonic transmitting/receiving elements with different generation frequencies and focusing methods are prepared to be attached to the revolver, it becomes possible to systemize the ultrasonic microscope. Furthermore, if a wide variety of objective lenses are prepared and equipped to be attached to the revolver 2, various comparisons can be made.
本発明によれば、試料を載置した移動ステージ
が低速移動するので、走査中に試料が移動した
り、変形したりする不具合がなく、試料像を正確
に観察することができる。また、光学顕微鏡の観
察状態から超音波顕微鏡による観察状態へ簡単に
かつ正確に切換えることができるので両者の像の
位置あわせや像の比較が容易となる効果もある。 According to the present invention, since the moving stage on which the sample is placed moves at a low speed, there is no problem that the sample moves or deforms during scanning, and the sample image can be observed accurately. Furthermore, since it is possible to easily and accurately switch from the observation state using an optical microscope to the observation state using an ultrasonic microscope, there is also the effect that alignment and comparison of the two images is facilitated.
第１図は従来の超音波顕微鏡の一例の構成を示
す斜視図、第２図は従来の超音波顕微鏡の他の例
の構成を線図的に示す斜視図、第３図は本発明に
よる超音波顕微鏡の一実施例の構成を一部を断面
にして示す線図的斜視図である。
１…超音波顕微鏡、２…レボルバー、３…対物
レンズ、４…集束超音波送受素子、５…試料台、
６…試料、１６…走査部、１７…駆動機構、２０
…移動テーブル。
FIG. 1 is a perspective view showing the configuration of an example of a conventional ultrasound microscope, FIG. 2 is a perspective view diagrammatically showing the configuration of another example of a conventional ultrasound microscope, and FIG. FIG. 1 is a diagrammatic perspective view showing the configuration of an embodiment of a sonic microscope, with a portion thereof being in cross section. 1... Ultrasonic microscope, 2... Revolver, 3... Objective lens, 4... Focused ultrasound transmitting/receiving element, 5... Sample stage,
6... Sample, 16... Scanning section, 17... Drive mechanism, 20
…Moving table.
Claims (1)
換えて比較観察を行う超音波顕微鏡において、光
学顕微鏡の対物レンズと超音波顕微鏡の超音波送
受素子とを被測定面上に選択的に位置せしめるた
めの切換部材を備え、この切換部材に超音波送受
素子を一方向に高速往復運動させる第１の駆動機
構を設け、試料を載置する移動ステージを上記一
方向と直交する方向に低速移動させる第２の駆動
機構を設け、上記第１及び第２の駆動機構の駆動
により超音波送受素子から発生する超音波ビーム
を試料に対して２次元的に走査することを特徴と
する超音波顕微鏡。1. In an ultrasonic microscope in which a sample is switched between an optical microscope and an ultrasonic microscope for comparative observation, a method for selectively positioning the objective lens of the optical microscope and the ultrasonic transmitting/receiving element of the ultrasonic microscope on the surface to be measured. a switching member, a first driving mechanism for reciprocating the ultrasonic transmitting/receiving element in one direction at high speed, and a second driving mechanism for moving the moving stage on which the sample is placed at low speed in a direction orthogonal to the one direction; An ultrasonic microscope characterized in that a drive mechanism is provided, and an ultrasonic beam generated from an ultrasonic transmitting/receiving element is two-dimensionally scanned with respect to a sample by driving the first and second drive mechanisms.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56059664A JPS57176016A (en) | 1981-04-22 | 1981-04-22 | Ultrasonic microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56059664A JPS57176016A (en) | 1981-04-22 | 1981-04-22 | Ultrasonic microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57176016A JPS57176016A (en) | 1982-10-29 |
| JPH0427498B2 true JPH0427498B2 (en) | 1992-05-12 |
Family
ID=13119684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56059664A Granted JPS57176016A (en) | 1981-04-22 | 1981-04-22 | Ultrasonic microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57176016A (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6070350A (en) * | 1983-09-28 | 1985-04-22 | Hitachi Ltd | Focal distance confirming method and apparatus therefor |
| DE3335480A1 (en) * | 1983-09-30 | 1985-04-18 | Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar | METHOD AND DEVICE FOR CARRYING OUT MULTIPLE MICROSCOPIC EXAMINATIONS |
| DE10135320A1 (en) * | 2001-07-19 | 2003-03-13 | Zeiss Carl Jena Gmbh | Microscope objective and use of such a microscope objective in a microscope |
| JP4954321B2 (en) * | 2010-08-18 | 2012-06-13 | キヤノン株式会社 | microscope |
| JP5208292B2 (en) * | 2012-03-12 | 2013-06-12 | キヤノン株式会社 | Object processing method |
| US11187527B2 (en) | 2019-10-07 | 2021-11-30 | The Boeing Company | Multi-probe non-destructive inspection system |
-
1981
- 1981-04-22 JP JP56059664A patent/JPS57176016A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57176016A (en) | 1982-10-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE69908120T2 (en) | OPTICAL GRID MICROSCOPE WITH A LARGE FIELD OF VIEW AND HIGH GRID SPEED | |
| JP4871264B2 (en) | Microscope image capturing device | |
| AU2012306571B2 (en) | Focus and imaging system and techniques using error signal | |
| JP2909828B2 (en) | Compound scanning tunneling microscope | |
| EP0406413A4 (en) | Scanning type tunnel microscope | |
| US6300618B1 (en) | High speed 3-dimensional confocal microscopic equipment | |
| CN100427926C (en) | Biochip imaging method splitted with laser cofocus scanning combined image and its device | |
| US7564625B2 (en) | Systems and methods for a scanning boom microscope | |
| JPH0427498B2 (en) | ||
| US4726229A (en) | Microscope having an optical head and an additional head | |
| DE60132280T2 (en) | Microscope with a device for vibration damping | |
| EP0139967B1 (en) | Method and apparatus for the performance of several complementary microscopic investigations | |
| JPH0427908A (en) | Visual field searching device for scan type microscope | |
| JP2003014611A (en) | Scanning type probe microscope | |
| JP2564985Y2 (en) | Large substrate inspection microscope | |
| CN218446218U (en) | Ultrahigh-power large-beam galvanometer with moving mechanism | |
| CN217007843U (en) | Depth imaging system | |
| JPS63271158A (en) | Sample moving device | |
| JP2568488B2 (en) | microscope | |
| JPH0228446Y2 (en) | ||
| JPH0112192Y2 (en) | ||
| JP3002714B2 (en) | Reciprocating transmission type confocal laser microscope | |
| JPH0973031A (en) | Movable lens barrel microscope | |
| JPS61259161A (en) | Ultrasonic microscope apparatus | |
| JPH04126159U (en) | ultrasound microscope |