JPH04265813A - Optical measuring method of angle - Google Patents
Optical measuring method of angleInfo
- Publication number
- JPH04265813A JPH04265813A JP2695491A JP2695491A JPH04265813A JP H04265813 A JPH04265813 A JP H04265813A JP 2695491 A JP2695491 A JP 2695491A JP 2695491 A JP2695491 A JP 2695491A JP H04265813 A JPH04265813 A JP H04265813A
- Authority
- JP
- Japan
- Prior art keywords
- linearly polarized
- polarized light
- wavelength
- light
- analyzer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000003287 optical effect Effects 0.000 title claims description 28
- 238000000034 method Methods 0.000 title claims description 7
- 239000013307 optical fiber Substances 0.000 abstract description 11
- 238000000691 measurement method Methods 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明は、例えば回転角情報或い
は位置情報を回転角に変えた回転角情報を、電気的な絶
縁を保って測定する光学的角度測定方法に関するもので
ある。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical angle measuring method for measuring, for example, rotation angle information or rotation angle information obtained by converting position information into a rotation angle while maintaining electrical insulation.
【０００２】0002
【従来の技術】従来のこの種の光学的角度測定方法は、
パターンのこの書き込まれたディスクを、被測定物に連
動して回転させ、該ディスクの後方にスリット板を配置
し、前記ディスクのパターンに従って該スリット板のス
リットを通過した光をその位置で受光素子アレイにより
パルス信号列として取り出し、該パルス信号列のパルス
の並び方を電子回路で判定して被測定物の角度を求めて
いた。[Prior Art] This type of conventional optical angle measurement method is
The disk on which the pattern has been written is rotated in conjunction with the object to be measured, a slit plate is placed behind the disk, and the light passing through the slit of the slit plate according to the pattern of the disk is sent to a light receiving element at that position. A pulse signal train is extracted by an array, and an electronic circuit determines the arrangement of the pulses in the pulse signal train to determine the angle of the object to be measured.
【０００３】0003
【発明が解決しようとする課題】しかしながら、このよ
うな従来の光学的角度測定方法では、サージ性ノイズ等
の発生源の近くの場所で電気信号であるパルス信号列を
作らざるを得ず、該パルス列信号の形成時及び該パルス
信号列を処理する電子回路に該パルス信号列を導く間に
、該パルス信号列中にサージ性ノイズ等が入り込む問題
点があった。該電子回路は、サージ性ノイズに弱いため
、重電機器のようにスイッチの開閉サージの大きな機器
への従来の光学的角度測定方法の適用は困難な問題点が
あった。[Problems to be Solved by the Invention] However, in such conventional optical angle measurement methods, it is necessary to generate a pulse signal train, which is an electrical signal, near the source of surge noise, etc. There is a problem in that surge noise or the like enters the pulse signal train during formation of the pulse train signal and while guiding the pulse signal train to an electronic circuit that processes the pulse signal train. Since the electronic circuit is susceptible to surge noise, there is a problem in that it is difficult to apply the conventional optical angle measurement method to equipment such as heavy electrical equipment that generates large switch opening/closing surges.
【０００４】本発明の目的は、耐サージ性のある光学的
角度測定方法を提供することにある。An object of the present invention is to provide a surge-resistant optical angle measurement method.
【０００５】[0005]
【課題を解決するための手段】上記の目的を達成するた
めの本発明の手段を説明すると、本発明は、波長に応じ
た旋光角度を有する直線偏光を、被測定物に連動して回
転する検光子に照射し、該検光子が検出した前記直線偏
光の波長を検出し、得られた波長から前記被測定物の角
度を得ることを特徴とする。[Means for Solving the Problems] To explain the means of the present invention for achieving the above object, the present invention rotates linearly polarized light having an optical rotation angle depending on the wavelength in conjunction with an object to be measured. The linearly polarized light is irradiated onto an analyzer, the wavelength of the linearly polarized light detected by the analyzer is detected, and the angle of the object to be measured is obtained from the obtained wavelength.
【０００６】[0006]
【作用】このように波長に応じた旋光角度を有する直線
偏光を用い、被測定物に連動して回転する検光子に該直
線偏光を入射させると、該検光子がキャッチした直線偏
光の波長から該被測定物の角度を求めることができる。
この場合、被測定物が存在する現場には検光子を置き、
該検光子がキャッチした直線偏光をサージ性ノイズ等に
影響されない箇所に導いて電気信号に変換できるので、
サージ性ノイズ等に影響されないで被測定物の角度を求
めることができる。[Operation] When linearly polarized light with an optical rotation angle corresponding to the wavelength is used and the linearly polarized light is incident on an analyzer that rotates in conjunction with the measured object, the wavelength of the linearly polarized light caught by the analyzer is The angle of the object to be measured can be determined. In this case, an analyzer is placed at the site where the object to be measured is located.
The linearly polarized light caught by the analyzer can be guided to a location unaffected by surge noise and converted into an electrical signal.
The angle of the object to be measured can be determined without being affected by surge noise, etc.
【０００７】[0007]
【実施例】図１は、本発明に係る光学的角度測定方法を
実施する装置の第１実施例を示したものである。図にお
いて、１は広帯域の光（例えば、 ４００ｎｍ〜 ７８
０ｎｍ）を出す白色光源、２は該白色光源１からの光を
導く光ファイバ、３は光ファイバ２から出される光のう
ち特定方向の直線偏光４を取り出す偏光板、５は直線偏
光４をその波長に応じた角度で回転させて出力する旋光
子である。該旋光子５としては、水晶等よりなるものを
用いる。水晶よりなる長さ１０ｍｍの旋光子５の場合で
は、波長λ＝４１０．１７ｎｍで ４７５°、λ＝ ７
９４ｎｍで １１６°だけ直線偏光４を回転させ、その
差が約 ３６０°となる。６は旋光子５から波長λ１
，λ２ ，λ３ …に応じた角度でそれぞれ回転されて
出力された直線偏光６１ ，６２ ，６３ …の集合体
である直線偏光群、７は被測定物８に連動して回転して
その回転角θと旋光角が一致した直線偏光を通過させる
偏光板よりなる検光子である。これら偏光板３，旋光子
５，検光子７にてセンサ部９を構成している。DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows a first embodiment of an apparatus for carrying out the optical angle measurement method according to the present invention. In the figure, 1 indicates broadband light (e.g., 400 nm to 78 nm).
0 nm), 2 is an optical fiber that guides the light from the white light source 1, 3 is a polarizing plate that takes out the linearly polarized light 4 in a specific direction from the light emitted from the optical fiber 2, and 5 is the polarizing plate that takes out the linearly polarized light 4 in a specific direction from the light emitted from the optical fiber 2. It is an optical rotator that outputs by rotating it at an angle according to the wavelength. The optical rotator 5 is made of quartz or the like. In the case of the optical rotator 5 made of crystal and having a length of 10 mm, at wavelength λ = 410.17 nm, the angle is 475°, and λ = 7.
The linearly polarized light 4 is rotated by 116° at 94 nm, and the difference is approximately 360°. 6 is the wavelength λ1 from the optical rotator 5
, λ2, λ3..., and the linearly polarized light group 7 is a collection of linearly polarized lights 61, 62, 63... which are rotated at angles corresponding to λ2, λ3..., respectively. This is an analyzer made of a polarizing plate that allows linearly polarized light whose optical rotation angle matches θ to pass through. These polarizing plate 3, optical rotator 5, and analyzer 7 constitute a sensor section 9.
【０００８】１０は検光子７を通過した直線偏光を導く
光ファイバ、１１は光ファイバ１０からの直線偏光を回
折させる凹面回折格子、１２は回折格子１１で回折され
た回折光を受光して各波長毎の出力を得る光受光素子ア
レイよりなるアレイセンサである。該光受光素子アレイ
としては、例えばＣＣＤセンサ、ホトダイオードアレイ
等を用いる。これら回折格子１１及びアレイセンサ１２
にて受光部１３を構成している。該受光部１３は、サー
ジ性ノイズ等の影響のない箇所に設置し、該受光部１３
まで光ファイバ１０によって検光子７からの直線偏光を
導いてくる。Reference numeral 10 is an optical fiber that guides the linearly polarized light that has passed through the analyzer 7, 11 is a concave diffraction grating that diffracts the linearly polarized light from the optical fiber 10, and 12 is a concave diffraction grating that receives the diffracted light diffracted by the diffraction grating 11. This is an array sensor consisting of a light receiving element array that obtains output for each wavelength. As the light receiving element array, for example, a CCD sensor, a photodiode array, etc. are used. These diffraction gratings 11 and array sensor 12
A light receiving section 13 is configured. The light receiving section 13 is installed in a location that is not affected by surge noise, etc.
The linearly polarized light from the analyzer 7 is guided through the optical fiber 10 to
【０００９】１４はアレイセンサ１２の出力を解析して
一番大きな波長成分を特定することにより被測定物８の
回転角θを得るＣＰＵ（中央処理装置）である。Reference numeral 14 denotes a CPU (central processing unit) that obtains the rotation angle θ of the object to be measured 8 by analyzing the output of the array sensor 12 and identifying the largest wavelength component.
【００１０】次に、このような光学的角度測定装置を用
いた被測定物の回転角度の測定について説明する。Next, the measurement of the rotation angle of an object to be measured using such an optical angle measuring device will be explained.
【００１１】白色光源１からの白色光を光ファイバ２を
経て偏光板３に入射すると、該偏光板３からは特定向き
の直線偏光４が出力される。この直線偏光４を旋光子５
に入射させると、該直線偏光４の波長λ１ ，λ２ ，
λ３ …に応じた回転角で旋光した直線偏光６１ ，６
２，６３ …からなる直線偏光群６が得られる。When white light from a white light source 1 is incident on a polarizing plate 3 through an optical fiber 2, the polarizing plate 3 outputs linearly polarized light 4 in a specific direction. This linearly polarized light 4 is converted into an optical rotator 5
When the wavelengths of the linearly polarized light 4 are λ1, λ2,
Linearly polarized light 61,6 rotated with a rotation angle corresponding to λ3...
A linearly polarized light group 6 consisting of 2, 63 . . . is obtained.
【００１２】一方、検光子７は被測定物８に連動して回
転して待機している。旋光子５から直線偏光群６が該検
光子７に入射されると、該検光子７の回転角θと直線偏
光群６の旋光角が一致した直線偏光が通り抜ける。この
直線偏光は、光ファイバ１０を経て凹面回折格子１１に
入射され、回折されて波長の順に並んでアレイセンサ１
２に至る。これにより、各波長毎の出力がアレイセンサ
１２から得られる。該アレイセンサ１２の出力をＣＰＵ
１４で解析し、出力の一番大きな波長成分を特定するこ
とにより、被測定物８の回転角θを求める。On the other hand, the analyzer 7 rotates in conjunction with the object to be measured 8 and is on standby. When the linearly polarized light group 6 is incident on the analyzer 7 from the optical rotator 5, the linearly polarized light whose rotation angle θ of the analyzer 7 matches the optical rotation angle of the linearly polarized light group 6 passes through. This linearly polarized light enters the concave diffraction grating 11 through the optical fiber 10, is diffracted, and is arranged in the order of wavelength to the array sensor 11.
2. Thereby, an output for each wavelength can be obtained from the array sensor 12. The output of the array sensor 12 is sent to the CPU.
The rotation angle θ of the object to be measured 8 is determined by analyzing it in step 14 and identifying the wavelength component with the largest output.
【００１３】図２は、本発明の第２実施例を示したもの
である。本実施例では、光源１Ａとしてλ１ ，λ２
，…λｎ の発光波長を出すＬＥＤを用い、該ＬＥＤよ
りなる光源１ＡをＣＰＵ１４でコントロールして順次点
滅させ、波長λ１ ，λ２ ，…λｎ の受光感度の違
いにより被測定物１３の回転角θをＣＰＵ１４の計算で
出すようにしている。FIG. 2 shows a second embodiment of the invention. In this embodiment, λ1 and λ2 are used as the light source 1A.
,...λn, the light source 1A made up of the LEDs is controlled by the CPU 14 to blink sequentially, and the rotation angle θ of the object to be measured 13 is determined by the difference in light receiving sensitivity of the wavelengths λ1, λ2,...λn. It is calculated by CPU14.
【００１４】この第２実施例と前述の第１実施例との違
いは、波長λ１ ，λ２ ，λ３ …λｎ のＬＥＤよ
りなる光源１Ａの波長幅が有限であり、発光側で特定波
長を選択できる点である。The difference between this second embodiment and the first embodiment described above is that the wavelength width of the light source 1A consisting of LEDs with wavelengths λ1, λ2, λ3...λn is finite, and a specific wavelength can be selected on the light emitting side. It is a point.
【００１５】図３は、本発明の第３実施例を示したもの
である。本実施例では、白色光源１とセンサ部９との間
に分光器１５を設け、該分光器１５をＣＰＵ１４により
コントロールすることにより、白色光の発光波長を１ｎ
ｍオーダの波長幅でスキャニングして、一番受光感度の
高い点を求めて被測定物８の回転角θを求めるようにし
ている。FIG. 3 shows a third embodiment of the present invention. In this embodiment, a spectroscope 15 is provided between the white light source 1 and the sensor section 9, and the spectroscope 15 is controlled by the CPU 14 to adjust the emission wavelength of white light to 1n.
The rotation angle θ of the object to be measured 8 is determined by scanning with a wavelength width of m order to find the point with the highest light receiving sensitivity.
【００１６】なお、一般に受光素子は波長の短い青色側
の感度が小さいが、これらはＣＰＵ１４側で予め補正し
ておく。[0016] Generally, the light receiving element has low sensitivity on the blue side, which has a short wavelength, but these are corrected in advance on the CPU 14 side.
【００１７】また、旋光子５としては、水晶に限らずＢ
ＳＯがあり、特に材料が限定されるものではない。[0017] In addition, the optical rotator 5 is not limited to quartz, but B
There is SO, and the material is not particularly limited.
【００１８】[0018]
【発明の効果】以上説明したように本発明に係る光学的
角度測定方法は、波長に応じた旋光角度を有する直線偏
光を用い、測定現場で被測定物に連動して回転する検光
子に該直線偏光を入射させるので、該検光子がキャッチ
した直線偏光の波長から被測定物の回転角を求めること
ができる。この場合、本発明では、検光子がキャッチし
た直線偏光をサージ性ノイズ等に関係ない位置までその
サージ性ノイズ等に影響されずに導くことができるので
、例えば重量機器等であってもサージ性ノイズ等に影響
されずに被測定物の回転角を求めることができる。Effects of the Invention As explained above, the optical angle measurement method according to the present invention uses linearly polarized light having an optical rotation angle according to the wavelength, and uses an analyzer that rotates in conjunction with the object to be measured at the measurement site. Since linearly polarized light is incident, the rotation angle of the object to be measured can be determined from the wavelength of the linearly polarized light caught by the analyzer. In this case, in the present invention, the linearly polarized light caught by the analyzer can be guided to a position unrelated to surge noise, etc., without being affected by the surge noise, etc., so even if heavy equipment etc. The rotation angle of the object to be measured can be determined without being affected by noise or the like.
【図１】本発明の方法を実施する光学的角度測定装置の
第１実施例の概略構成を示す斜視図である。FIG. 1 is a perspective view showing the schematic configuration of a first embodiment of an optical angle measuring device that implements the method of the present invention.
【図２】本発明の方法を実施する光学的角度測定装置の
第２実施例のブロック図である。FIG. 2 is a block diagram of a second embodiment of an optical angle measuring device implementing the method of the invention;
【図３】本発明の方法を実施する光学的角度測定装置の
第３実施例のブロック図である。FIG. 3 is a block diagram of a third embodiment of an optical angle measuring device implementing the method of the invention;
１ 白色光源
１Ａ ＬＥＤよりなる光源２
光ファイバ
３ 偏光板
４ 直線偏光
５ 旋光子
６１ 〜６３ 旋光した直線偏光
６ 直線偏光群
７ 検光子
８ 被測定物
９ センサ部
１０ 光ファイバ
１１ 凹面回折格子
１２ アレイセンサ
１３ 受光部
１４ ＣＰＵ
１５ 分光器1 White light source 1A Light source 2 consisting of LED
Optical fiber 3 Polarizing plate 4 Linearly polarized light 5 Optical rotators 61 to 63 Rotated linearly polarized light 6 Linearly polarized light group 7 Analyzer 8 Measured object 9 Sensor part 10 Optical fiber 11 Concave diffraction grating 12 Array sensor 13 Light receiving part 14 CPU 15 Spectrometer
Claims (1)
光を、被測定物に連動して回転する検光子に照射し、該
検光子が検出した前記直線偏光の波長を検出し、得られ
た波長から前記被測定物の角度を得ることを特徴とする
光学的角度測定方法。[Claim 1] Linearly polarized light having an optical rotation angle corresponding to the wavelength is irradiated onto an analyzer that rotates in conjunction with the measured object, and the wavelength of the linearly polarized light detected by the analyzer is detected. An optical angle measuring method characterized in that the angle of the object to be measured is obtained from the wavelength.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2695491A JPH04265813A (en) | 1991-02-21 | 1991-02-21 | Optical measuring method of angle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2695491A JPH04265813A (en) | 1991-02-21 | 1991-02-21 | Optical measuring method of angle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04265813A true JPH04265813A (en) | 1992-09-22 |
Family
ID=12207551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2695491A Withdrawn JPH04265813A (en) | 1991-02-21 | 1991-02-21 | Optical measuring method of angle |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04265813A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008018665A1 (en) * | 2006-08-09 | 2008-02-14 | Geumsuk Lee | Apparatus and method for measuring convergence using fiber bragg grating sensor |
-
1991
- 1991-02-21 JP JP2695491A patent/JPH04265813A/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008018665A1 (en) * | 2006-08-09 | 2008-02-14 | Geumsuk Lee | Apparatus and method for measuring convergence using fiber bragg grating sensor |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Application deemed to be withdrawn because no request for examination was validly filed |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19980514 |