JPH04261777A - Polishing tool - Google Patents
Polishing toolInfo
- Publication number
- JPH04261777A JPH04261777A JP4237091A JP4237091A JPH04261777A JP H04261777 A JPH04261777 A JP H04261777A JP 4237091 A JP4237091 A JP 4237091A JP 4237091 A JP4237091 A JP 4237091A JP H04261777 A JPH04261777 A JP H04261777A
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- glass beads
- resin
- polished
- spherical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 52
- 239000011521 glass Substances 0.000 claims abstract description 49
- 239000011324 bead Substances 0.000 claims abstract description 47
- 229920005989 resin Polymers 0.000 claims abstract description 31
- 239000011347 resin Substances 0.000 claims abstract description 31
- 239000011230 binding agent Substances 0.000 claims abstract description 21
- 239000000463 material Substances 0.000 claims abstract description 15
- 239000002356 single layer Substances 0.000 claims abstract description 15
- 239000002245 particle Substances 0.000 claims description 30
- 239000003082 abrasive agent Substances 0.000 claims description 7
- 239000010410 layer Substances 0.000 claims description 6
- -1 polyethylene terephthalate Polymers 0.000 abstract description 9
- 229920000139 polyethylene terephthalate Polymers 0.000 abstract description 7
- 239000005020 polyethylene terephthalate Substances 0.000 abstract description 7
- 230000003746 surface roughness Effects 0.000 abstract description 6
- 239000011888 foil Substances 0.000 abstract description 3
- 238000000227 grinding Methods 0.000 abstract description 3
- 239000002985 plastic film Substances 0.000 abstract description 3
- 229920006255 plastic film Polymers 0.000 abstract description 3
- 239000000853 adhesive Substances 0.000 abstract description 2
- 230000001070 adhesive effect Effects 0.000 abstract description 2
- 238000005520 cutting process Methods 0.000 abstract description 2
- 239000004744 fabric Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 description 13
- 239000011248 coating agent Substances 0.000 description 12
- 238000009826 distribution Methods 0.000 description 11
- 239000002904 solvent Substances 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 229920000178 Acrylic resin Polymers 0.000 description 5
- 239000004925 Acrylic resin Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000006061 abrasive grain Substances 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000003973 paint Substances 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000004745 nonwoven fabric Substances 0.000 description 2
- 229920001225 polyester resin Polymers 0.000 description 2
- 239000004645 polyester resin Substances 0.000 description 2
- 229920005862 polyol Polymers 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 2
- 229920005992 thermoplastic resin Polymers 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229920000459 Nitrile rubber Polymers 0.000 description 1
- 239000000020 Nitrocellulose Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 229920006311 Urethane elastomer Polymers 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000002730 additional effect Effects 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 229920000180 alkyd Polymers 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000013522 chelant Substances 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 229920001973 fluoroelastomer Polymers 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229920001220 nitrocellulos Polymers 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000000123 paper Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920001200 poly(ethylene-vinyl acetate) Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920005596 polymer binder Polymers 0.000 description 1
- 239000002491 polymer binding agent Substances 0.000 description 1
- 229920005672 polyolefin resin Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920005749 polyurethane resin Polymers 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 239000004753 textile Substances 0.000 description 1
Abstract
Description
【０００１】0001
【技術分野】本発明は精密機器、精密部品、例えばハー
ドディスク（磁気記録媒体）のテクスチャリング、シリ
コン等の金属の研磨、ガラス、セラミックス、プラスチ
ック等のポリシングラッピング等の仕上げ加工の分野に
利用出来る研磨具に関する。本発明の研磨具は特に、ハ
ードディスクのテクスチャリングに有効である。[Technical field] The present invention can be used in the field of finishing processing such as texturing of precision instruments and precision parts, such as texturing of hard disks (magnetic recording media), polishing of metals such as silicon, polishing and lapping of glass, ceramics, plastics, etc. Regarding ingredients. The polishing tool of the present invention is particularly effective for texturing hard disks.
【０００２】0002
【従来の技術】研磨具には従来ＰＥＴフィルム上に電融
アルミナやシリコンカーバイド、ダイヤモンドの様な硬
質な研磨材がバインダー樹脂により連続又は不連続に研
磨層を形成したものが用いられている。特にハードディ
スクのテクスチャリングにおいては、均一な幅と深さを
有する研磨面が要求されている。ハードディスクのテク
スチャリングの様に研磨テープの表面構造が直接研磨面
として転写される様な研磨方式の場合、研磨フィルムの
研磨面の均一性が最も重要となってくる。又ハードディ
スクの高記録密度化が進むにつれその表面粗さも小さく
制御されなくてはならない。又この様な平滑表面では擦
傷は尚一層抑制する必要がある。2. Description of the Related Art Conventionally, polishing tools have been used in which a hard abrasive material such as fused alumina, silicon carbide, or diamond is formed on a PET film with a continuous or discontinuous polishing layer using a binder resin. Particularly in hard disk texturing, a polished surface with uniform width and depth is required. In the case of a polishing method in which the surface structure of the polishing tape is directly transferred as a polishing surface, such as texturing of a hard disk, the uniformity of the polishing surface of the polishing film is most important. Furthermore, as the recording density of hard disks increases, the surface roughness must also be kept small. Furthermore, it is necessary to further suppress scratches on such a smooth surface.
【０００３】本発明者はこの問題を解決するために、先
に特願昭６３−５８３９２、特願平１−２３１７２４等
により通常の研磨剤（電融アルミナ粉砕粉）等を用いポ
リエステルフィルム上に砠粒が単層程度存在してなる構
造の研磨フィルムを提案した。[0003] In order to solve this problem, the inventor of the present invention previously disclosed in Japanese Patent Application No. 63-58392, Japanese Patent Application No. 1-231724, etc., that a conventional abrasive (electro-fused alumina pulverized powder) was used to coat a polyester film. We proposed a polishing film with a structure consisting of a single layer of abrasive grains.
【０００４】0004
【発明が解決すべき課題】しかしながら砥粒の形状及び
粒度分布によりその研磨性能は充分とは云えない。本発
明の目的は被研磨面、特にハードディスクのテクスチャ
リング面の表面粗さが２０〜１００Åの範囲に入り、し
かも深い傷や不連続なライン又はスクラッチ等の損傷を
与えないで、テクスチャリング加工において研磨ライン
の幅及び深さの制御が容易となる研磨具の提供にある。However, the polishing performance cannot be said to be sufficient due to the shape and particle size distribution of the abrasive grains. The purpose of the present invention is to process the surface to be polished, especially the textured surface of a hard disk, so that the surface roughness is within the range of 20 to 100 Å, and in addition, the texturing process can be carried out without causing damage such as deep scratches, discontinuous lines, or scratches. An object of the present invention is to provide a polishing tool that allows easy control of the width and depth of a polishing line.
【０００５】[0005]
【課題を解決するための手段】本発明は、球状ガラスビ
ーズを研磨材として、可撓性を有する支持体上にバイン
ダー樹脂により固着してなることを特徴とする研磨具に
より上記の課題を解決する。[Means for Solving the Problems] The present invention solves the above problems with a polishing tool characterized by using spherical glass beads as an abrasive and fixed to a flexible support with a binder resin. do.
【０００６】本発明は、電融アルミナやシリコンカーバ
イド、ダイヤモンドの様な硬質な研磨材に代えて、球状
ガラスビーズを研磨材として採用することを特徴とする
。球状ガラスビーズはこれ迄研磨材料としては用いられ
たことはなく、上記の一般の砥粒と比較し低い硬度を有
しいわゆる研磨材の範ちゅうには入らないが、球状であ
るためか研磨材として有効に作用し球状であるために均
一な研磨ラインを生じる。さらに、球状のためガラスビ
ーズの前樹脂中における分散性も高く粒子が凝集する事
なく作用する。しかも、球状である為ガラスビーズと被
研磨材とが点接触する為極圧が高く研削効率が向上する
。また、球状ビーズと被研磨材との接触点が均一である
為チップポケットが大きく、研磨くずの排出が容易であ
り目づまりが防止される。また球状ビーズと被研磨材と
の接触点が少ないため、被研磨材との摩擦が低くなる為
切れ味が良くなる。The present invention is characterized in that spherical glass beads are used as the abrasive instead of hard abrasives such as fused alumina, silicon carbide, and diamond. Spherical glass beads have never been used as an abrasive material until now, and have a lower hardness than the general abrasive grains mentioned above, so they do not fall into the category of so-called abrasives, but perhaps because of their spherical shape, they are used as abrasives. The spherical shape produces uniform polishing lines. Furthermore, because of the spherical shape, the glass beads have high dispersibility in the pre-resin and work without agglomeration of the particles. Furthermore, since the glass beads are spherical, the glass beads and the material to be polished come into point contact, resulting in high extreme pressure and improved grinding efficiency. Furthermore, since the contact points between the spherical beads and the material to be polished are uniform, the chip pocket is large, making it easy to discharge polishing debris and preventing clogging. In addition, since there are fewer contact points between the spherical beads and the material to be polished, friction with the material to be polished is reduced, resulting in better cutting performance.
【０００７】本発明で使用できるガラスとしてはモース
硬度７前後の球状ガラスが使用できる。一般に光学用硬
質のガラスが好適である。例えば、現在交通標識に使用
される回帰反射板に広く使用されている球状ビーズは粒
度がそろっており好適である。ガラスビーズの粒子直径
はテキスチユアリングの用途あるいは目的によって規定
されるが、一般に平均粒子直径で１〜２００μｍのもの
、好ましくは２０〜５０μｍのものが好適である。例え
ば、最近では磁気デイスクのテクスチャリング面の表面
粗さを２０〜１００ÅＲａの範囲に制御しなければなら
ない（下限値は磁気ヘッドの走行開始時にヘッドのハー
ドディスクへの張付きを回避するのに必要な表面粗さ）
ので、それに応じた直径を選択する。意外なことに、テ
クスチャリングの研磨筋はガラスビーズの直径の数十分
の１程度であり、その理由ははっきり説明できない。特
願昭６３−５８３９２号あるいは特願平１−２３１７２
４号に記載されているように、好ましくは球状ガラスビ
ーズを単層に離散的にまたは互いに接触させて並べる。
これにより優れた研磨効果が得られる。別法として球状
ガラスビーズを多層に配列してもまた粒子が不揃いであ
っても実質的な支障はない。その理由は、表面に露出す
るビーズが球状であるため被研磨剤に接触する点が互い
にほぼ均一に離間するためと推定される。[0007] As the glass that can be used in the present invention, spherical glass having a Mohs hardness of about 7 can be used. Generally, optical hard glass is suitable. For example, spherical beads, which are currently widely used in retroreflectors used in traffic signs, have uniform particle sizes and are suitable. The particle diameter of the glass beads is determined depending on the use or purpose of the textile ring, but generally an average particle diameter of 1 to 200 μm, preferably 20 to 50 μm is suitable. For example, recently, the surface roughness of the textured surface of a magnetic disk must be controlled within the range of 20 to 100 ÅRa (the lower limit is the roughness required to avoid the head from sticking to the hard disk when the magnetic head starts running). Surface roughness)
So, choose the diameter accordingly. Surprisingly, the textured polishing streaks are about a few tenths of the diameter of the glass beads, and the reason for this cannot be clearly explained. Patent Application No. 1983-58392 or Patent Application No. 1-23172
As described in No. 4, the spherical glass beads are preferably arranged discretely in a monolayer or in contact with each other. This provides an excellent polishing effect. Alternatively, spherical glass beads may be arranged in multiple layers, and even if the particles are irregular, there is no substantial problem. The reason for this is presumed to be that since the beads exposed on the surface are spherical, the points of contact with the polishing material are spaced almost uniformly from each other.
【０００８】図１及び図２はそれぞれ本発明の粒度分布
が鋭いすなわち粒径が揃ったガラスビーズを使用した単
層型の研磨具の一部を示す断面図と平面図であり、図３
及び図４それぞれ本発明の粒度分布が広いガラスビーズ
を使用した単層型の研磨具の断面図と平面図であり、図
５は本発明の粒度分布が広いガラスビーズを使用した多
層型の研磨具の断面図である。FIGS. 1 and 2 are a cross-sectional view and a plan view, respectively, showing a part of a single-layer type polishing tool using glass beads having a sharp particle size distribution, that is, having uniform particle sizes, according to the present invention, and FIG.
and FIG. 4 are a cross-sectional view and a plan view of a single-layer type polishing tool using the glass beads with a wide particle size distribution of the present invention, respectively, and FIG. 5 is a multi-layer type polishing tool using the glass beads with a wide particle size distribution of the present invention. It is a sectional view of a tool.
【０００９】図１〜２において、研磨具は、プラスチッ
クフィルム、不織布、金属箔、金属板、ガラス板等、特
に好ましくは約２５〜５０μｍのポリエチレンテレフタ
レートフィルム（ＰＥ）のベース３の上に、バインダー
樹脂２を接着剤として使用して球状ガラスビーズ１を実
質的に単一層となるように配列した構造を有するもので
ある。例えば、まずバインダーを溶剤と共にベースに塗
布し、バインダーが未だ乾燥しないうちにガラスビーズ
をバインダー状の全面に散布し固着する。ここに単一層
とは粒子の重畳が実質的に無いことを意味する。これに
より、研磨材粒子の平均粒子径で定まる被研磨物の研磨
面の表面粗さに対して、単粒子による通常の研磨筋とは
異質な傷（より深い及び／又は広い傷）ないし擦傷は発
生する確率が大幅に減少し、高精度の研磨が達成し得る
。In FIGS. 1 and 2, the polishing tool has a binder on a base 3 of a plastic film, nonwoven fabric, metal foil, metal plate, glass plate, etc., particularly preferably a polyethylene terephthalate film (PE) of about 25 to 50 μm. It has a structure in which spherical glass beads 1 are arranged substantially in a single layer using resin 2 as an adhesive. For example, first, a binder is applied to a base together with a solvent, and before the binder dries, glass beads are scattered over the entire surface of the binder and fixed. A single layer here means that there is substantially no overlapping of particles. As a result, scratches (deeper and/or wider scratches) or abrasions that are different from normal polishing streaks caused by single particles can be removed from the surface roughness of the polished surface of the workpiece, which is determined by the average particle diameter of the abrasive particles. The probability of occurrence is significantly reduced, and high-precision polishing can be achieved.
【００１０】別法として図６のようにバインダー中に球
状ガラスビーズを分散したものを塗布することにより、
バインダー樹脂がガラスビーズの表面層に薄く被ってい
てもよいが、できるだけ図１の様にバインダー樹脂より
露出するとよい。したがって、この場合には比較的多量
の溶剤を使用して球状ガラスビーズ分散樹脂塗料を製造
し、塗布乾燥後に樹脂分がガラスビーズの表面にほとん
ど残留しないようにする。このような単層構造の研磨材
層は特殊な方法を用いなくても適当な高分子バインダー
、溶剤、分散剤、それらの配合比、塗布手段、塗布量等
を調節することによって比較的容易に実現できることが
分かった。Alternatively, as shown in FIG. 6, by applying spherical glass beads dispersed in a binder,
Although the binder resin may cover the surface layer of the glass beads thinly, it is preferable to expose the binder resin as much as possible as shown in FIG. 1. Therefore, in this case, a relatively large amount of solvent is used to produce a spherical glass bead-dispersed resin coating so that almost no resin remains on the surface of the glass beads after coating and drying. Such a single-layer abrasive layer can be produced relatively easily without using special methods by adjusting the appropriate polymer binder, solvent, dispersant, their blending ratio, coating means, coating amount, etc. I found out that it can be achieved.
【００１１】図３〜４は粒度がばらついたガラスビーズ
を使用した場合の研磨具の例であり、製造方法は第１〜
２図に示した例と変わりがない。[0011] Figures 3 and 4 show examples of polishing tools using glass beads with varying particle sizes, and the manufacturing methods are as follows.
There is no difference from the example shown in Figure 2.
【００１２】図５の例は塗布工程で塗料厚く塗布した場
合であり、この場合はバインダー中に球状ガラスビーズ
を分散した場合であり、あるいはこれと粉末散布を併用
してもよい。The example shown in FIG. 5 shows the case where the paint is applied thickly in the coating process, and in this case, spherical glass beads are dispersed in the binder, or powder scattering may be used in combination with this.
【００１３】いずれの例でもガラスビーズは球状である
ので頂面側に露出する粒子は互いに重畳することなく常
に被研磨材との接触点は離散的になる。ベースはテープ
、シート、ディスク状任意の形に加工して使用出来るも
のである。In any case, since the glass beads are spherical, the particles exposed on the top surface do not overlap each other, and the points of contact with the material to be polished are always discrete. The base can be processed into any shape such as a tape, sheet, or disk.
【００１４】バインダー樹脂としては熱硬化性樹脂及び
熱可塑性樹脂が使用でき熱硬化性樹脂としてはポリエス
テル又はアクリルポリオールウレタン系樹脂、塩素化ポ
リプロピレン変性アクリルポリオールウレタン系樹脂、
アクリル−キレート硬化型樹脂、エポキシ又はエポキシ
ペンダントアクリル樹脂＋アミンペンダントアクリル系
樹脂、ポリオルガノシロキサン系樹脂、各種ＵＶ硬化型
樹脂、ウレタン化油系樹脂、湿気硬化ポリウレタン系樹
脂、ふっ素系樹脂等１００℃以下で硬化反応が進行する
ものが適している。As the binder resin, thermosetting resins and thermoplastic resins can be used. Examples of the thermosetting resins include polyester or acrylic polyol urethane resins, chlorinated polypropylene modified acrylic polyol urethane resins,
Acrylic-chelate curable resin, epoxy or epoxy pendant acrylic resin + amine pendant acrylic resin, polyorganosiloxane resin, various UV curable resins, urethanized oil resin, moisture curable polyurethane resin, fluorine resin, etc. 100℃ It is suitable that the curing reaction proceeds in the following manner.
【００１５】熱可塑性樹脂としては純アクリル系樹脂、
塩化ビニル系樹脂、ニトロセルロース系樹脂、ニトロセ
ルロース−アクリル系樹脂、変性アクリル系樹脂、アル
キッド系、ポリオレフィン系樹脂、ポリエステル系樹脂
、ゴム系樹脂であるウレタンエラストマー、ニトリルゴ
ム、シリコンゴム、エチレン酢ビゴム、ふっ素ゴム系樹
脂、その他水溶性樹脂、エマルジョン系樹脂のものが使
用される。ベースフィルム基体としてはプラスチックフ
ィルムとしてポリエチレンテレフタレート、ポリイミド
、ポリカーボネート及びそれらの表面処理したフィルム
その他合成紙、不織布その他金属箔等が用いられる。[0015] As the thermoplastic resin, pure acrylic resin,
Vinyl chloride resin, nitrocellulose resin, nitrocellulose-acrylic resin, modified acrylic resin, alkyd resin, polyolefin resin, polyester resin, urethane elastomer which is a rubber resin, nitrile rubber, silicone rubber, ethylene vinyl acetate rubber , fluororubber resin, other water-soluble resins, and emulsion resins are used. As the base film substrate, plastic films such as polyethylene terephthalate, polyimide, polycarbonate, surface-treated films thereof, synthetic paper, nonwoven fabric, metal foil, etc. are used.
【００１６】ある例では、球状ガラスビーズはバインダ
ー樹脂及び溶剤と混合されたうえ、適当な塗布手段によ
り研磨材粒子の粒度分布により適当な塗布厚に調整され
フィルム等の基体に塗布される。他の例では球状ガラス
ビーズを混合しないバインダー樹脂及び溶剤の混合物は
、適当な塗布手段により適当な塗布厚に調整されフィル
ム等の基体に塗布される。ここに塗布手段としては、例
えばメイヤバーコーター、グラビアコーター、リバース
ロールコーター、ナイフコーター等が使用し得る。こう
して得られた被膜は乾燥又は硬化処理により基体に固着
される。In one example, spherical glass beads are mixed with a binder resin and a solvent, and then coated onto a substrate such as a film using an appropriate coating means to adjust the coating thickness to an appropriate coating thickness depending on the particle size distribution of the abrasive particles. In another example, a mixture of a binder resin and a solvent without spherical glass beads mixed therein is adjusted to an appropriate coating thickness by an appropriate coating means and applied to a substrate such as a film. As the coating means, for example, a Meyer bar coater, a gravure coater, a reverse roll coater, a knife coater, etc. can be used. The film thus obtained is fixed to the substrate by drying or curing.
【００１７】[0017]
【発明の効果】本発明は上記の構成を採用するので次の
効果を生じる。
（１）ガラスビーズは球状ではあるが、ガラスビーズと
被研磨材とが点接触する為極圧が高く研削効率が向上研
磨材として有効に作用する。また被研磨材との摩擦が低
くなる為切れ味が良くなる
（２）ガラスビーズは球状であるために均一な研磨ライ
ンを生じる。
上記の主要効果のほか、付随する効果としては、粒形が
球状のためガラスビーズの前樹脂中における分散性も高
く粒子が凝集する事なく作用する。また、球状ビーズと
被研磨材との接触点が均一である為チップポケットが大
きく、研磨くずの排出が容易であり目づまりが防止され
る。以下に本発明の実施例を説明する。Advantages of the Invention Since the present invention employs the above configuration, the following effects are produced. (1) Although glass beads are spherical, since the glass beads and the material to be polished come into point contact, the extreme pressure is high and the grinding efficiency is improved.They act effectively as an abrasive. In addition, the friction with the material to be polished is reduced, resulting in better sharpness.(2) Glass beads are spherical, so they produce uniform polishing lines. In addition to the above-mentioned main effects, an additional effect is that because the particles are spherical, the glass beads have high dispersibility in the pre-resin and work without particles agglomerating. Furthermore, since the contact points between the spherical beads and the material to be polished are uniform, the chip pocket is large, making it easy to discharge polishing debris and preventing clogging. Examples of the present invention will be described below.
【００１８】[0018]
【実施例の説明】実施例１
厚さ５０μｍのポリエチレンテレフタレート（ＰＥＴ）
フイルム上にポリエステル系樹脂バインダーを球状ガラ
スビーズの各種粒径の応じた塗布厚で塗布した後、表２
に示す平均粒径の異なる球状ガラスビーズを未乾燥のバ
インダー層上に過剰に散布し、加工ローラによりガラス
ビーズの高さがそろう様にＰＥＴ上に接着固定し、余剰
粒子を除去したのち、所定の幅にスリットしてテープ状
に加工し、ハードデイスク（３．５インチ）用のＮｉ−
Ｐメッキアルミニウム基板の研磨（テクスチュアリング
）に供した。研磨条件は表１に示す通りであった。また
研磨結果は表２に示す通りであった。[Description of Examples] Example 1 Polyethylene terephthalate (PET) with a thickness of 50 μm
After coating the film with a polyester resin binder at a coating thickness corresponding to the various particle sizes of the spherical glass beads, Table 2
Spherical glass beads with different average particle diameters as shown in the figure are excessively scattered on the undried binder layer, adhesively fixed on the PET using a processing roller so that the height of the glass beads is even, and after removing the excess particles, the predetermined size is Made of Ni- for hard disks (3.5 inches), slit widthwise and processed into a tape shape.
It was used for polishing (texturing) a P-plated aluminum substrate. The polishing conditions were as shown in Table 1. Further, the polishing results were as shown in Table 2.
【００１９】[0019]
【表１】[Table 1]
【００２０】[0020]
【表２】
表２に示す様に、結果は極めて満足なもので、異常
個数（目立ったえぐれの個数）及びスクラッチ（深く長
いすり傷）は全然観測されなかった。[Table 2] As shown in Table 2, the results were extremely satisfactory, with no abnormal number (noticeable gouges) or scratches (deep and long scratches) observed.
【００２１】実施例２
表３に示す組成で球状ガラスビーズをバインダー樹脂及
び溶剤と混合して塗料を製造し、塗布機により厚さ５０
μｍのＰＥＴベース上に塗布した。所定の幅にスリット
してテープ状に加工し、ハードデイスク（３．５インチ
）用のＮｉ−Ｐメッキアルミニウム基板の研磨（テクス
チュアリング）に供した。研磨条件は表１に示す通りで
あった。また研磨結果は表４に示す通りであった。Example 2 A paint was prepared by mixing spherical glass beads with a binder resin and a solvent according to the composition shown in Table 3.
Coated on a μm PET base. The tape was slit to a predetermined width and processed into a tape shape, and used for polishing (texturing) a Ni--P plated aluminum substrate for a hard disk (3.5 inches). The polishing conditions were as shown in Table 1. Further, the polishing results were as shown in Table 4.
【００２２】[0022]
【表３】[Table 3]
【００２３】[0023]
【表４】
表２に示す様に、結果は極めて満足なもので、異常
個数（目立ったえぐれの個数）及びスクラッチ（深く長
いすり傷）は全然観測されなかった。[Table 4] As shown in Table 2, the results were extremely satisfactory, and no abnormal number (number of noticeable gouges) or scratches (deep and long scratches) were observed.
【図１】本発明の粒度分布が鋭いガラスビーズを使用し
た単層型の研磨具の一部を示す断面図である。FIG. 1 is a sectional view showing a part of a single-layer polishing tool using glass beads with a sharp particle size distribution according to the present invention.
【図２】本発明の粒度分布が鋭いガラスビーズを使用し
た単層型の研磨具の一部を示す平面図である。FIG. 2 is a plan view showing part of a single-layer polishing tool using glass beads with a sharp particle size distribution according to the present invention.
【図３】本発明の粒度分布が広いガラスビーズを使用し
た単層型の研磨具の断面図と平面図である。FIG. 3 is a cross-sectional view and a plan view of a single-layer polishing tool using glass beads with a wide particle size distribution according to the present invention.
【図４】本発明の粒度分布が広いガラスビーズを使用し
た単層型の研磨具の平面図である。FIG. 4 is a plan view of a single-layer polishing tool using glass beads with a wide particle size distribution according to the present invention.
【図５】本発明の粒度分布が広いガラスビーズを使用し
た多層型の研磨具の断面図である。FIG. 5 is a cross-sectional view of a multilayer polishing tool using glass beads with a wide particle size distribution according to the present invention.
【図６】本発明の粒度分布が広いガラスビーズを使用し
た単層型の研磨具の断面図で、ガラスビーズをバインダ
ーと混合した塗料を使用して研磨層を形成する例を例示
する断面図である。FIG. 6 is a cross-sectional view of a single-layer polishing tool using glass beads with a wide particle size distribution according to the present invention, and is a cross-sectional view illustrating an example in which a polishing layer is formed using a paint containing glass beads mixed with a binder. It is.
１ 球状ガラスビーズ ２ バインダー樹脂 ３ ベース 1 Spherical glass beads 2 Binder resin 3 Base
Claims (3)
、可撓性を有する支持体上にバインダー樹脂により固着
してなることを特徴とする研磨具。1. A polishing tool characterized in that it uses spherical glass beads as a polishing material and is fixed to a flexible support with a binder resin.
ィルム基体上に実質的に重畳しない粒子として単層構造
で接着してなる研磨層を形成させたことを特徴とする請
求項１に記載の研磨具。2. The polishing tool according to claim 1, wherein the polishing layer is formed by adhering the polishing material in a monolayer structure as particles that do not substantially overlap on the film base using a binder resin. .
しくは多層で存在し、且つ被研磨材と接触する研磨材料
の表面が樹脂により被覆されていないことを特徴とする
請求項１に記載の研磨具。3. Claim 1, wherein the abrasive material is present in a single layer or multiple layers on a flexible support, and the surface of the abrasive material that comes into contact with the material to be polished is not coated with a resin. Polishing tool described in .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4237091A JPH04261777A (en) | 1991-02-15 | 1991-02-15 | Polishing tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4237091A JPH04261777A (en) | 1991-02-15 | 1991-02-15 | Polishing tool |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04261777A true JPH04261777A (en) | 1992-09-17 |
Family
ID=12634159
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4237091A Withdrawn JPH04261777A (en) | 1991-02-15 | 1991-02-15 | Polishing tool |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04261777A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005123379A1 (en) * | 2004-06-17 | 2005-12-29 | Sang-Woon Kwak | Structure of preventing sticking and method of preparing the same |
| JP2009090382A (en) * | 2007-10-04 | 2009-04-30 | Nihon Micro Coating Co Ltd | Cleaning tape and method of manufacturing the same |
-
1991
- 1991-02-15 JP JP4237091A patent/JPH04261777A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005123379A1 (en) * | 2004-06-17 | 2005-12-29 | Sang-Woon Kwak | Structure of preventing sticking and method of preparing the same |
| JP2009090382A (en) * | 2007-10-04 | 2009-04-30 | Nihon Micro Coating Co Ltd | Cleaning tape and method of manufacturing the same |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Application deemed to be withdrawn because no request for examination was validly filed |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19980514 |