JPH0425667A - Vacuum sealing structure for large-sized vacuum vessel - Google Patents
Vacuum sealing structure for large-sized vacuum vesselInfo
- Publication number
- JPH0425667A JPH0425667A JP12908590A JP12908590A JPH0425667A JP H0425667 A JPH0425667 A JP H0425667A JP 12908590 A JP12908590 A JP 12908590A JP 12908590 A JP12908590 A JP 12908590A JP H0425667 A JPH0425667 A JP H0425667A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- flange
- ring
- cover
- packing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 title claims abstract description 10
- 239000012530 fluid Substances 0.000 claims abstract description 7
- 239000003566 sealing material Substances 0.000 claims description 5
- 238000012856 packing Methods 0.000 abstract description 14
- 238000010586 diagram Methods 0.000 description 5
- 238000003754 machining Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 206010011878 Deafness Diseases 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 231100000895 deafness Toxicity 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 208000016354 hearing loss disease Diseases 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
Landscapes
- Gasket Seals (AREA)
- Pressure Vessels And Lids Thereof (AREA)
- Drying Of Semiconductors (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は真空容器に係り、特に高真空の大型真空容器の
真空シール構造に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a vacuum container, and particularly to a vacuum seal structure for a large, high-vacuum vacuum container.
従来の構造は％０リング等のパブキンをフランジ面間に
はさみ込み、それを絞めろことによって真空フランジ構
造としての性能を発揮するが、７ランジが大型になると
、７ランジ自身が自重でたわみ、また、変形も大き４出
てしまい、かつ、大型のため加工精度の確保が難しい状
況にあった。The conventional structure exhibits its performance as a vacuum flange structure by sandwiching a %0 ring or similar between the flange faces and squeezing it, but as the 7 lange becomes larger, the 7 lange itself bends under its own weight. In addition, the deformation was large 4, and the large size made it difficult to ensure machining accuracy.
従来の大型真空容器は上記のようにＯリングを２重に配
列して真空シールするのが一般的であった。Conventional large vacuum containers have generally been vacuum-sealed by arranging O-rings in double layers as described above.
なお真空シール構造としてはＪＩＳ規格のＢ２２９０に
おいて論じられている。また、この檻の装置として関連
するものには、例えば特開平１−３１２２７１号が挙げ
られる。The vacuum seal structure is discussed in JIS standard B2290. Further, related to this cage device is, for example, Japanese Patent Application Laid-Open No. 1-312271.
〔発明が解決しようとするｆｉｌｌ）
上記従来技術は、真空排気前に内・外いずれかのＯす／
グを相手フランジを密着させる必要がめるが、フランジ
が大型になった場合、７ランジ自身の自重によるたわみ
、変形およびフランジ面の加工精度の良し悪しにより、
７リング全周にわたり、０りングと相手側７ランジの密
着が困難になるという欠点があった。[Fill to be Solved by the Invention] The above-mentioned conventional technology does not require any internal or external O2 gas to be removed before evacuation.
However, when the flange becomes large, the flange may be deflected or deformed due to its own weight, and the machining accuracy of the flange surface may be affected.
There was a drawback that it became difficult to make close contact between the 0 ring and the opposing 7 lunge around the entire circumference of the 7 ring.
本発明の目的は、真空排気時の外圧力を利用して大型真
空容器の７リング部を容易に密着できる大型真空容器の
真空シール構造を提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a vacuum seal structure for a large vacuum container that can easily seal the seven ring portions of the large vacuum container using external pressure during evacuation.
上記目的を達成するために、パツキンを２重に配列し内
側のパツキンは真空シールを目的とし、外側のパブキン
は内側のパブキンに比較して突起高さが大きく、内部に
流体圧を作用させることにより、突起高さが容易に９度
できるものを使用する。すなわち、本体のフランジ面の
変形が大きく加工精度が悪くとも、外側のパツキンに流
体圧を作用させ、突起を高鳴することにより、相手側フ
ランジになじんで密着し、外側パツキンの気体の洩れ量
より真空排気装置の排気能力が勝れば、外圧によって強
力にシール部材が７リング部に密着し、目的が達成され
る・
二二で、真空容器内の圧力なＰ、内径なりとし、真空に
より吸引される力Ｆとの関係は、Ｆ＝！−Ｄ２Ｐ
となる。In order to achieve the above purpose, the gaskets are arranged in double layers, the inner gasket is for vacuum sealing, and the outer gasket has a larger protrusion height than the inner gasket to apply fluid pressure to the inside. Therefore, use one that can easily have a protrusion height of 9 degrees. In other words, even if the flange surface of the main body is greatly deformed and the machining accuracy is poor, by applying fluid pressure to the outer packing and making the protrusion vibrate, it will fit and adhere to the mating flange, and the amount of gas leaking from the outer packing will be reduced. If the evacuation ability of the vacuum evacuation device is superior, the sealing member will strongly adhere to the 7th ring part due to the external pressure, and the purpose will be achieved. The relationship with the attracted force F is F=! -D2P.
また、フランジ面間に設けたシール材の必要締付力Ｗは
、シール材喝Ｂ、シール材必要面圧Ｐ、。In addition, the required tightening force W of the seal material provided between the flange surfaces is: seal material pressure B, seal material required surface pressure P,.
シール材径Ｄ８とすれば。If the sealing material diameter is D8.
Ｗ＝π・Ｂ−Ｄ、・Ｐｓ となる。W=π・BD,・Ps becomes.
ここでシール材が有効に作用するためには、Ｗ＜Ｆ
である必要がある。In order for the sealing material to work effectively here, W<F
It must be.
従って、フランジの変形度、加工精度との関係から適当
なＰｓＯ値を持つパツキンを選定する必要があるが、内
部に流体圧を加えるパ呼キンを用いることで容易にＰ、
の値を１Ｉ１１ｉでき、初期の目的が達成されるもので
ある。Therefore, it is necessary to select a seal with an appropriate PsO value in relation to the degree of deformation of the flange and machining accuracy. However, by using a seal that applies fluid pressure inside, PsO,
The value of 1I11i can be set to 1I11i, and the initial objective is achieved.
２重に配列した外側の中空パツキンの中３２部に流体圧
を加え、突起を高（することにより、真空７ランジの変
形、加工精度を吸収して、パツキンと真空フランジとが
密着し、容器内を仮に真空引きすることにより、外圧が
作用、外圧力により真空シールを目的とする内側のパツ
キンと真空フランジとを密着させることができる。Fluid pressure is applied to the inner 32 parts of the outer hollow packing, which is arranged in double layers, to make the protrusions high (by doing so, the deformation and machining accuracy of the vacuum 7 langes are absorbed, the packing and the vacuum flange come into close contact, and the container By temporarily evacuating the inside, external pressure acts, and the external pressure allows the vacuum flange to be brought into close contact with the inner packing intended for vacuum sealing.
この場合、真空による吸引力と真空フランジのボルト締
付力を併用することもできる。In this case, the suction force of the vacuum and the bolt tightening force of the vacuum flange can be used together.
以下、本発明の一実施例を第１図から′Ｍ４図により跣
明する。Hereinafter, one embodiment of the present invention will be explained with reference to FIGS. 1 to 4'M4.
図において、第１図は本発明を適用した大型真空容器を
示す。真空客ｔｉｔにカバー２が固定され容器内で真空
に保持されるものである。第１図の本体フランジ部の詳
細な′！Ｊ２図に示す。真空容器ｌ側に本体７ランジ３
を設け、カバー２側にはカバーフランジ４を設けている
。本体７ランジ３とカバーフランジ４との間に真空シー
ル用のＯリング５が設けられ、二のＯリングを本体７ラ
ンジとカバー７ランジ４との間で密着させて使用するも
のである。In the drawings, FIG. 1 shows a large-sized vacuum container to which the present invention is applied. A cover 2 is fixed to a vacuum container and maintained in a vacuum state within the container. Detailed view of the main body flange in Figure 1! Shown in Figure J2. Main body 7 lunge 3 on vacuum container l side
A cover flange 4 is provided on the cover 2 side. An O-ring 5 for vacuum sealing is provided between the flange 3 of the main body 7 and the flange 4 of the cover 7, and the second O-ring is used in close contact between the flange 3 of the main body 7 and the flange 4 of the cover 7.
ここで小径の容器であれば、ボルト８等により０リング
を密着させることができるが、大径の容器になると本体
７ランジ３や、カバーフランジ４のパブキン面が自重等
により変形を起こしたり、大径ゆえに自重が重く、取扱
いが非常に１バパヅキン面にすきまがおいてしまう。そ
の状態を示したのが第４図である。二〇状聾ですきまを
無くすためにボルト８で絞めつけるには、ボルト８が非
常に多く必要で、かつ、本体フラノン３およびカバー７
ランジ４の変形をボルト８で矯正するには、美大な締付
力が必要となり、大変難しい二とになる。If the container is a small diameter container, the O-ring can be tightly attached using bolts 8, etc., but if the container is a large diameter container, the flange 3 of the main body 7 and the cover flange surface of the cover flange 4 may deform due to their own weight, etc. Due to its large diameter, it is heavy, and it is difficult to handle, leaving a gap in the surface. FIG. 4 shows this state. In order to tighten the bolts 8 in order to eliminate the gap in the case of 20-sided deafness, a large number of bolts 8 are required, and the main body flanone 3 and the cover 7
Correcting the deformation of the lunge 4 with the bolt 8 requires a tremendous tightening force, which is extremely difficult.
ここで、この課題を解決するために、シール部材として
突起高さを流体圧により＃整できる中空パツキン６を入
れると、本体７ランジ３とカバーフランジ４のすきまが
大きくＯリング５とカバー７ランジ４が密着していない
状態であっても、中空パツキン６とカバーフランジ４と
は容易に密着させる二とができる。この状態で真空容器
４内を徐々に真空引きして行くと、中空パツキン６の部
分から空気が多少真空容器１内に洩れ込んでも、気体の
洩れ量よりも真空排気装置の排気能力が勝るため、真空
容器ｌ内の圧力が徐々に低下していくため、カバーフラ
ンジ４側に外圧が作用し、徐々にカバ−７ランジ４全体
が本体フランジ３側へ密着するように動いてゆく。そし
て最後には０リング５を押しつぶして真空シールを完了
する。その状態を第３図に示す。Here, in order to solve this problem, if a hollow gasket 6 is used as a sealing member that can adjust the height of the protrusion using fluid pressure, the gap between the main body 7 flange 3 and the cover flange 4 will be large, and the gap between the O-ring 5 and the cover 7 flange will be large. Even if the hollow packing 6 and the cover flange 4 are not in close contact with each other, the hollow packing 6 and the cover flange 4 can be easily brought into close contact with each other. If the inside of the vacuum container 4 is gradually evacuated in this state, even if some air leaks into the vacuum container 1 from the hollow gasket 6, the exhaust capacity of the vacuum exhaust device will outweigh the amount of gas leaking. As the pressure inside the vacuum container 1 gradually decreases, external pressure acts on the cover flange 4 side, and the entire cover 7 flange 4 gradually moves so as to come into close contact with the main body flange 3 side. Finally, the O-ring 5 is crushed to complete the vacuum seal. The state is shown in FIG.
本実施例によれば、大型真空容器において、フランジ部
が自重等で変形やたわみを生じていても。According to this embodiment, even if the flange portion of a large vacuum container is deformed or bent due to its own weight, etc.
７ランジ部が密着できるので、ボルト等を多数設けて締
め付ける必要がなく、安全かつ確実に７ランジ部が容易
にａ！Ｉ看できる。さらに、フランジ部を剛体に形成す
る必要がないために、より安価に真空シール構造を構成
できる効果がある。Since the 7-lunge part can be tightly attached, there is no need to install and tighten a large number of bolts, etc., and the 7-lunge part can be easily and safely and reliably attached to a! I can see it. Furthermore, since there is no need to form the flange portion into a rigid body, there is an effect that the vacuum seal structure can be constructed at a lower cost.
本発明によれば、大型真空容器において、７ランジ部が
、自重等で変形やたわみｔ生じていても安全かつ確実に
フランクが容易に密着できる大型真空容器の真空シール
構成が形成できる効果がある。According to the present invention, it is possible to form a vacuum seal structure of a large vacuum container in which the flanks can be easily and safely and reliably attached even if the 7 flange portions of the large vacuum container are deformed or deflected due to their own weight, etc. .
第１図は、本発明の一実施例の大型真空容器の正面図、
ＩＪ２図は、第１図の７ランジ部の詳動図で、本体７ラ
ンジにパツキンを装着した状態の説明図、第３図は同じ
く第１図の７ランジ部の詳細図で、外圧が作用しパツキ
ンが押しつぶされた状態の説明図、第４図は第１図の１
−１線断面図である。
ｌ・・・・・・真空容器、２・・・・・・カバー ３・
・・・・・本体フランジ、４・・・・・・カバー７ラン
ジ、５・・・・・・０リング、６・・・・・・中空パツ
キン、７・・・・・・加圧配管、８・曲・ボルト
代理人 弁理士 小 川 勝 男
第
図FIG. 1 is a front view of a large vacuum container according to an embodiment of the present invention;
Figure IJ2 is a detailed diagram of the 7 flange part in Figure 1, and is an explanatory diagram of the state in which the gasket is attached to the 7 lunge of the main body, and Figure 3 is a detailed diagram of the 7 lange part in Figure 1, showing how external pressure is applied. An explanatory diagram of the compressed state of the packing, Figure 4 is 1 in Figure 1.
-1 line sectional view. l...Vacuum container, 2...Cover 3.
...Body flange, 4...Cover 7 lange, 5...0 ring, 6...Hollow packing, 7...Pressure piping, 8. Song/Bolt Agent Patent Attorney Katsutoshi Ogawa Diagram
Claims (1)
設けて成る大型真空容器の真空シール構造において、 前記フランジ間に前記シール部材の他に柔軟性のあるシ
ール材を設け、該柔軟性のあるシール材がフランジ部の
変形や傾きに対して追従し、かつ真空引きによりフラン
ジ面間に密着し、前記Ｏリング等のシール部で真空シー
ルさせるように構成したことを特徴とする大型真空容器
の真空シール構造。 ２、前記柔軟性のあるシール材は、中空部材で形成し、
該中空部材の内部へ流体を供給する構成としたことを特
徴とする請求項第１項記載の大型真空容器の真空シール
構造。[Scope of Claims] 1. In a vacuum seal structure for a large vacuum container in which a sealing member such as an O-ring is provided between opposing flange surfaces, a flexible sealing material is provided between the flanges in addition to the sealing member. The flexible sealing material is configured to follow the deformation and inclination of the flange portion, and to adhere tightly between the flange surfaces by vacuuming, and to create a vacuum seal with the sealing portion such as the O-ring. Features a vacuum seal structure for large vacuum containers. 2. The flexible sealing material is formed of a hollow member,
The vacuum seal structure for a large vacuum container according to claim 1, characterized in that the structure is configured to supply fluid to the inside of the hollow member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12908590A JPH0425667A (en) | 1990-05-21 | 1990-05-21 | Vacuum sealing structure for large-sized vacuum vessel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12908590A JPH0425667A (en) | 1990-05-21 | 1990-05-21 | Vacuum sealing structure for large-sized vacuum vessel |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0425667A true JPH0425667A (en) | 1992-01-29 |
Family
ID=15000710
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12908590A Pending JPH0425667A (en) | 1990-05-21 | 1990-05-21 | Vacuum sealing structure for large-sized vacuum vessel |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0425667A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7004879B2 (en) * | 2004-01-12 | 2006-02-28 | American Axle & Manufacturing, Inc. | Axle differential with stamped carrier cover pan |
| CN104455408A (en) * | 2013-09-18 | 2015-03-25 | 李俊贤 | Pressure container and airtight pressure environment forming method of pressure container |
-
1990
- 1990-05-21 JP JP12908590A patent/JPH0425667A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7004879B2 (en) * | 2004-01-12 | 2006-02-28 | American Axle & Manufacturing, Inc. | Axle differential with stamped carrier cover pan |
| CN104455408A (en) * | 2013-09-18 | 2015-03-25 | 李俊贤 | Pressure container and airtight pressure environment forming method of pressure container |
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