JPH04253384A - Laminated layer type displacement element - Google Patents
Laminated layer type displacement elementInfo
- Publication number
- JPH04253384A JPH04253384A JP3027901A JP2790191A JPH04253384A JP H04253384 A JPH04253384 A JP H04253384A JP 3027901 A JP3027901 A JP 3027901A JP 2790191 A JP2790191 A JP 2790191A JP H04253384 A JPH04253384 A JP H04253384A
- Authority
- JP
- Japan
- Prior art keywords
- laminated
- displacement element
- electrodes
- platinum
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 26
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 21
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims abstract description 19
- 239000000463 material Substances 0.000 claims abstract description 11
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 10
- 229910052697 platinum Inorganic materials 0.000 claims abstract description 10
- 229910000990 Ni alloy Inorganic materials 0.000 claims abstract description 4
- 238000006243 chemical reaction Methods 0.000 claims abstract description 4
- 239000007769 metal material Substances 0.000 claims abstract description 4
- PCLURTMBFDTLSK-UHFFFAOYSA-N nickel platinum Chemical compound [Ni].[Pt] PCLURTMBFDTLSK-UHFFFAOYSA-N 0.000 claims abstract description 3
- 230000005012 migration Effects 0.000 abstract description 7
- 238000013508 migration Methods 0.000 abstract description 7
- 230000015556 catabolic process Effects 0.000 abstract description 5
- 239000007772 electrode material Substances 0.000 abstract description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 5
- 229910010293 ceramic material Inorganic materials 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 239000004332 silver Substances 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- 238000010030 laminating Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052763 palladium Inorganic materials 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 241000218645 Cedrus Species 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明は、産業用ロボットのアク
チュエータ、超音波モーター等に使用する電気機械変換
素子に関するものであり、特に電気機械変換材料からな
る薄板を、内部電極を介して複数枚積層することにより
、変位量を増大させた積層型変位素子の改良に関するも
のである。[Industrial Application Field] The present invention relates to an electromechanical transducer used in actuators of industrial robots, ultrasonic motors, etc. In particular, the present invention relates to an electromechanical transducer used in actuators of industrial robots, ultrasonic motors, etc. The present invention relates to an improvement of a laminated displacement element in which the amount of displacement is increased by laminating layers.
【０００２】0002
【従来の技術】従来、Ｘ−Ｙステージの位置決め機構や
制動ブレーキ等に用いられている変位用素子に使用する
積層型変位素子は、所定の形状に加工した圧電セラミッ
クス材料からなる薄板に電極を設けて分極した後、直接
あるいは金属を介して有機系の接着剤で接合する方法が
採用されている。しかし上記のように接着剤を使用して
積層したものは、使用条件により、圧電素子の振動によ
る変位を接着剤が吸収したり、高温の環境もしくは長期
間の使用により接着剤が劣化する等の欠点がある。[Prior Art] Conventionally, a laminated displacement element used as a displacement element used in a positioning mechanism of an X-Y stage, a brake, etc. has electrodes attached to a thin plate made of piezoelectric ceramic material processed into a predetermined shape. After the electrodes are provided and polarized, they are bonded directly or via a metal using an organic adhesive. However, when laminated using adhesive as described above, depending on the usage conditions, the adhesive may absorb the displacement caused by the vibration of the piezoelectric element, or the adhesive may deteriorate due to high temperature environment or long-term use. There are drawbacks.
【０００３】このため最近では積層チップコンデンサー
の製法を応用し、積層型変位素子を作製する方法が実用
化されている。すなわち例えば特公昭５９−３２０４０
１号公報に記載のように、原料粉末にバインダーを添加
、混練したペースト状の圧電セラミックス材料を、所定
の厚さの薄片に成形し、この薄片の一方の面もしくは両
面に銀・パラジウム等の導体材料を塗布して内部電極を
形成し、前記薄板を複数枚積層して圧着し、更に所定の
形状に加工した後、焼成することによりセラミックス化
し、積層体の両側面に外部電極を形成したものである。
上記構成の積層型変位素子は、圧電セラミックス材料か
らなる薄板と内部電極の接合部分の密着性に優れている
と共に、熱的特性も安定であるため高温環境においても
充分に使用可能であり、また長期間に亘って劣化が極め
て少ない等の利点がある。[0003] For this reason, recently, a method of manufacturing a laminated displacement element by applying the manufacturing method of a laminated chip capacitor has been put into practical use. For example, Special Publication No. 59-32040
As described in Publication No. 1, a paste-like piezoelectric ceramic material made by adding a binder to raw material powder and kneading is formed into a thin piece of a predetermined thickness, and one or both sides of this thin piece are coated with silver, palladium, etc. A conductive material was applied to form internal electrodes, a plurality of the thin plates were laminated and crimped, and after being further processed into a predetermined shape, it was fired to form a ceramic material, and external electrodes were formed on both sides of the laminate. It is something. The laminated displacement element with the above structure has excellent adhesion between the thin plate made of piezoelectric ceramic material and the internal electrode, and has stable thermal characteristics, so it can be used satisfactorily even in high-temperature environments. It has the advantage of extremely little deterioration over a long period of time.
【０００４】0004
【発明が解決しようとする課題】上記構成の積層型変位
素子においては、電子部品のように電極間に直流高電圧
を連続印加して変位を得るという使用形態の場合には、
電極材料として銀系の材料を使用すると、高湿雰囲気に
おいていわゆるマイグレーションを生じ、ついには絶縁
破壊に至るという問題点がある。即ち電極を構成するＡ
ｇは酸化しやすい元素であるが、高湿度雰囲気において
イオン化（Ａｇ＋）し、印加電圧によって負電極に吸収
され、負電極側に堆積する。このような堆積物は時間の
経過と共に杉葉状に成長して、電極間の絶縁抵抗を低下
させ、ついには短絡するのである。[Problems to be Solved by the Invention] In the laminated displacement element having the above structure, when used in an electronic component where a high DC voltage is continuously applied between electrodes to obtain displacement,
When a silver-based material is used as an electrode material, there is a problem in that so-called migration occurs in a high humidity atmosphere, eventually leading to dielectric breakdown. That is, A constituting the electrode
Although g is an element that is easily oxidized, it is ionized (Ag+) in a high humidity atmosphere, absorbed by the negative electrode by the applied voltage, and deposited on the negative electrode side. Over time, such deposits grow in the shape of cedar leaves, lowering the insulation resistance between the electrodes and eventually causing a short circuit.
【０００５】このようなマイグレーションを防止する手
段として、電極を例えばＰｔ，Ｐｄの様な高融点の貴金
属材料によって形成することが考えられるが、接合強度
が低い、コストが高い等の問題点がある。また、銀より
小さなマイグレーション特性を有する金属からなる膜に
よって上記側面に露出する銀電極を被覆するという提案
がされている（例えば特開昭６２−６２５７１号公報）
が、積層体に形成した後において露出部分を被覆する作
業は極めて煩雑であると共に、金属膜によって必ずしも
完全に被覆することが出来ず例えばピンホール等を介し
て外部の湿気の進入を許容することがあり、信頼性の点
で不満足な点がある。[0005] As a means to prevent such migration, it is conceivable to form the electrodes from a noble metal material with a high melting point such as Pt or Pd, but this has problems such as low bonding strength and high cost. . In addition, it has been proposed to cover the silver electrode exposed on the side surface with a film made of a metal that has a migration property smaller than that of silver (for example, Japanese Patent Application Laid-Open No. 62-62571).
However, the work of covering the exposed parts after forming a laminate is extremely complicated, and it is not always possible to completely cover the exposed parts with the metal film, allowing moisture from the outside to enter through pinholes, etc. However, there are some unsatisfactory points in terms of reliability.
【０００６】本発明は、上記従来技術に存在する問題点
を解決し、マイグレーションを完全に防止し、かつ、接
合強度が大きい信頼性の高い積層型変位素子を提供する
ことを目的とするものである。The present invention aims to solve the problems existing in the above-mentioned prior art and to provide a highly reliable laminated displacement element that completely prevents migration and has high bonding strength. be.
【０００７】[0007]
【課題を解決するための手段】上記問題を解決するため
に、本発明においては、電気機械変換材料からなる薄板
を、導電性金属材料からなる内部電極を介して複数枚交
互に積層してなる積層体であり、その側面に前記内部電
極と交互に一層おきに接続すべき一対の外部電極を設け
た積層型変位素子において、前記内部電極の材質として
白金１００重量％に対してニッケルを２重量％以上から
７０重量％以下まで混合した白金ニッケル合金を用いる
、という技術的手段を採用した。[Means for Solving the Problems] In order to solve the above problems, in the present invention, a plurality of thin plates made of an electromechanical conversion material are alternately laminated with internal electrodes made of a conductive metal material interposed therebetween. In a laminated displacement element that is a laminated body and has a pair of external electrodes on its side surfaces that are to be connected to the internal electrodes alternately every other layer, the internal electrodes are made of 100% platinum and 2% nickel by weight. A technical measure was adopted in which a platinum-nickel alloy was mixed in an amount ranging from more than 70% by weight to less than 70% by weight.
【０００８】[0008]
【作用】上記の構成により、高湿度雰囲気で直流高電圧
を連続印加してもマイグレーションは発生しない。また
、白金とニッケルは合金を形成し、かつニッケルは圧電
セラミックスと酸素を介して結合することから接合強度
の極めて高い積層型変位素子とすることができる。さら
に、ニッケルを混合することにより電極コストを低減す
ることができる。[Operation] With the above structure, migration does not occur even when a high DC voltage is continuously applied in a high humidity atmosphere. Further, since platinum and nickel form an alloy, and nickel is bonded to piezoelectric ceramics via oxygen, a laminated displacement element with extremely high bonding strength can be obtained. Furthermore, the electrode cost can be reduced by mixing nickel.
【０００９】[0009]
【実施例】図１は本発明の実施例を示す要部正面図であ
る。同図において１は薄板であり、圧電セラミックス材
料によって例えば一辺１０ｍｍ、厚さ１００μｍの正方
形状に形成する。２は内部電極であり、後述する白金・
ニッケル合金で形成し、薄板１の表面に設ける。次に３
は外部電極であり、導電性材料によって形成し、前記薄
板１を例えば１００枚積層して形成した積層体の両側面
部に内部電極２の端縁部を接続するように１対設ける。DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a front view of essential parts showing an embodiment of the present invention. In the figure, reference numeral 1 denotes a thin plate, which is made of a piezoelectric ceramic material and is formed into a square shape with a side of 10 mm and a thickness of 100 μm, for example. 2 is an internal electrode, which is made of platinum, which will be described later.
It is formed of a nickel alloy and provided on the surface of the thin plate 1. Next 3
are external electrodes, which are made of a conductive material, and are provided in pairs so as to connect the edge portions of the internal electrodes 2 to both side surfaces of a laminate formed by laminating, for example, 100 thin plates 1.
【００１０】積層型変位素子は例えば以下の工程により
作成する。チタン酸ジルコン酸鉛〔Ｐｂ（Ｚｒ，Ｔｉ）
Ｏ３〕系の粉末に、有機バインダーとしてＰＶＢ、可塑
剤としてＢＰＢＧ、有機溶剤としてトリクレンを各々添
加して混合し、この混合材料をドクターブレード法によ
り厚さ１００μｍのシート上の薄板１に形成する。次い
でこの薄板１の表面に白金・ニッケルペーストをスクリ
ーン印刷して内部電極２を形成する。所定枚数の薄板１
を積層、圧着して一体化した後、１１５０〜１２５０℃
の温度で焼結し、焼結後外部電極３を、例えばニッケル
メッキまたは白金ペースト等で作成する。表１には前記
のようにして作成した積層素子の接合強度を示す。表１
から明らかなように白金にニッケルを混合することで接
合強度が大幅に向上することがわかる。なお、ニッケル
の混合量が白金に対して２重量％より少ない場合には接
合強度の向上が得られず、７０重量％を越える場合には
内部電極括弧の酸化が発生し電極として使用できない。[0010] The laminated displacement element is manufactured, for example, by the following steps. Lead zirconate titanate [Pb (Zr, Ti)
PVB as an organic binder, BPBG as a plasticizer, and trichlene as an organic solvent are added and mixed to the O3]-based powder, and this mixed material is formed into a thin plate 1 on a sheet with a thickness of 100 μm by a doctor blade method. Next, platinum/nickel paste is screen printed on the surface of this thin plate 1 to form internal electrodes 2. Predetermined number of thin plates 1
1150-1250℃ after laminating and crimping to integrate
After sintering, the external electrode 3 is made of nickel plating or platinum paste, for example. Table 1 shows the bonding strength of the laminated elements produced as described above. Table 1
As is clear from the above, it can be seen that the bonding strength is significantly improved by mixing nickel with platinum. Note that if the amount of nickel mixed with respect to platinum is less than 2% by weight, no improvement in bonding strength can be obtained, and if it exceeds 70% by weight, oxidation of the internal electrode brackets occurs and the electrode cannot be used.
【００１１】[0011]
【表１】
＊を
付したものは比較例[Table 1] Items marked with * are comparative examples
【００１２】次にＮｏ．３の組成の
内部電極で作成した積層型変位素子の４０℃、相対湿度
９０％の条件下での耐湿試験を実施した。素子の表面を
エポキシ樹脂でコーティングし、１５０Ｖの直流電流を
印加した。１０００時間の試験を行った後絶縁破壊した
素子は皆無であった。一方、比較のために実施した内部
電極が銀・パラジウムの積層型変位素子は５００時間以
内で全ての素子が絶縁破壊した。Next, No. A humidity resistance test was conducted on the laminated displacement element made with the internal electrodes having the composition No. 3 under the conditions of 40° C. and 90% relative humidity. The surface of the device was coated with epoxy resin, and a direct current of 150 V was applied. After conducting the test for 1000 hours, there were no elements that suffered dielectric breakdown. On the other hand, all of the laminated displacement elements whose internal electrodes were silver and palladium, which were tested for comparison, suffered dielectric breakdown within 500 hours.
【００１３】図２は、本発明の別の実施例であり、同一
部分は前記図１と同一の参照符号で示す。図２において
内部電極２は薄板１の全面に設けることなく、一方の側
面部近傍に空白部を設けた、いわゆる交互電極型に形成
する。前記実施例と同様にして薄板１上に内部電極２を
形成した後、内部電極２が図２のように内部電極２が欠
如する側が交互に対辺となるように積層して圧着し、前
記同様の焼結後、図２に示す様に外部電極３を設けて積
層型変位素子とする。上記の構成により、薄板１の側面
の一部には厳密にいえば内部電極２の厚さに相当する間
隔を生じることになるが、内部電極２の厚さは通常２〜
３μｍの極めて微小厚さであると共に、薄板１の焼結前
における圧着、および焼結時における部分的膨張等によ
って前記の間隔は実質的には閉塞される。本実施例で作
成した積層型変位素子の耐湿試験を実施したが、前記実
施例と同様に絶縁破壊した素子は皆無であった。FIG. 2 shows another embodiment of the invention, in which the same parts are designated by the same reference numerals as in FIG. In FIG. 2, the internal electrodes 2 are not provided on the entire surface of the thin plate 1, but are formed in a so-called alternating electrode type with a blank space provided near one side surface. After forming the internal electrodes 2 on the thin plate 1 in the same manner as in the previous embodiment, the internal electrodes 2 are laminated and crimped so that the side where the internal electrodes 2 are missing are alternately opposite sides as shown in FIG. After sintering, external electrodes 3 are provided as shown in FIG. 2 to form a laminated displacement element. Strictly speaking, due to the above configuration, a gap corresponding to the thickness of the internal electrode 2 is created on a part of the side surface of the thin plate 1, but the thickness of the internal electrode 2 is usually 2 to 2.
The thin plate 1 has an extremely small thickness of 3 μm, and the above-mentioned interval is substantially closed due to the compression bonding of the thin plate 1 before sintering and the partial expansion during sintering. A moisture resistance test was conducted on the laminated displacement elements produced in this example, but no elements suffered dielectric breakdown as in the previous example.
【００１４】本実施例ではチタン酸ジルコン酸鉛の例を
示したが、他の圧電材料は勿論のこと、キュリー温度が
室温より低いため、分極の必要がなく、かつ、変位量が
大であると共に、ヒステリシスが少ない等の特徴を有す
る電歪材料を使用した積層型変位素子についても、前記
とまったく同様な作用を期待できる。In this example, lead zirconate titanate is used as an example, but other piezoelectric materials can be used as well, and since the Curie temperature is lower than room temperature, there is no need for polarization and the amount of displacement is large. At the same time, a laminated displacement element using an electrostrictive material having characteristics such as low hysteresis can also be expected to have exactly the same effect as described above.
【００１５】[0015]
【発明の効果】本発明は、以上記述のような構成および
作用であるからマイグレーションの発生を完全に防止す
ることができ、かつ、接合強度が大きいことから信頼性
の高い積層型変位素子を提供するものである。さらに、
ニッケルを混合することによりコストの高騰を防止する
こともできる。[Effects of the Invention] The present invention provides a laminated displacement element that can completely prevent the occurrence of migration due to the configuration and operation described above, and is highly reliable due to its high bonding strength. It is something to do. moreover,
By mixing nickel, it is also possible to prevent a rise in cost.
【図１】図１は本発明の実施例における積層型変位素子
の要部正面図である。FIG. 1 is a front view of main parts of a laminated displacement element in an embodiment of the present invention.
【図２】図２は本発明の別の実施例における要部正面図
である。FIG. 2 is a front view of main parts in another embodiment of the present invention.
１ 薄板 ２ 内部電極 ３ 外部電極 1 Thin plate 2 Internal electrode 3 External electrode
Claims (1)
電性金属材料からなる内部電極を介して複数枚交互に積
層してなる積層体であり、その側面に前記内部電極と交
互に一層おきに接続すべき一対の外部電極を設けた積層
型変位素子において、前記内部電極の材質として白金１
００重量％に対してニッケルを２重量％以上から７０重
量％以下まで混合した白金ニッケル合金を用いたことを
特徴とする積層型変位素子。1. A laminate consisting of a plurality of thin plates made of an electromechanical conversion material, which are alternately laminated with internal electrodes made of a conductive metal material interposed therebetween, and on the side thereof, a plurality of thin plates made of an electromechanical conversion material are alternately laminated with the internal electrodes alternately arranged every other layer. In a laminated displacement element provided with a pair of external electrodes to be connected, platinum 1 is used as the material of the internal electrodes.
1. A laminated displacement element characterized by using a platinum-nickel alloy in which nickel is mixed from 2% by weight to 70% by weight with respect to 00% by weight.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3027901A JPH04253384A (en) | 1991-01-29 | 1991-01-29 | Laminated layer type displacement element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3027901A JPH04253384A (en) | 1991-01-29 | 1991-01-29 | Laminated layer type displacement element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04253384A true JPH04253384A (en) | 1992-09-09 |
Family
ID=12233792
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3027901A Pending JPH04253384A (en) | 1991-01-29 | 1991-01-29 | Laminated layer type displacement element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04253384A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1042681C (en) * | 1994-10-26 | 1999-03-24 | 同济大学 | Heating-up nickel electrode for piezo-electric device |
| JP2002289861A (en) * | 2001-03-26 | 2002-10-04 | Sharp Corp | Semiconductor device and liquid crystal display using the same |
-
1991
- 1991-01-29 JP JP3027901A patent/JPH04253384A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1042681C (en) * | 1994-10-26 | 1999-03-24 | 同济大学 | Heating-up nickel electrode for piezo-electric device |
| JP2002289861A (en) * | 2001-03-26 | 2002-10-04 | Sharp Corp | Semiconductor device and liquid crystal display using the same |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2965602B2 (en) | Stacked displacement element | |
| JPH03128681A (en) | Piezoelectric/electrostrictive film type actuator | |
| JPH01161709A (en) | Laminated ceramic component | |
| JPH01157581A (en) | Laminate type displacement element | |
| JP3024763B2 (en) | Stacked displacement element | |
| JP3045531B2 (en) | Stacked displacement element | |
| JPH04253384A (en) | Laminated layer type displacement element | |
| JPS63153870A (en) | Electrostrictive effect element | |
| JP2547499Y2 (en) | Piezoelectric bimorph actuator | |
| JPH03283581A (en) | Laminated piezoelectric actuator element | |
| JPH06181343A (en) | Laminated displacement element and manufacture thereof | |
| JPH03155178A (en) | Laminated displacement element | |
| JPH0212882A (en) | Layer-built displacement element | |
| JPH03155180A (en) | Laminated displacement element | |
| JPH0256822B2 (en) | ||
| JP2819471B2 (en) | Multilayer piezoelectric actuator | |
| JPH07106654A (en) | Multilayer displacement element | |
| JPH0212880A (en) | Layer-built displacement element | |
| JPH03190291A (en) | Lamination-type displacement element | |
| JPH03155177A (en) | Laminated displacement element | |
| JPH049390B2 (en) | ||
| JPH03184386A (en) | Laminate piezoelectric device and manufacture thereof | |
| JPH04343282A (en) | Piezoelectric effect element and electrostrictive effect element | |
| JPH02138781A (en) | Bimorph type piezoelectric element and manufacture thereof | |
| JPS6362280A (en) | Laminated piezoelectric element and manufacture thereof |