JPH0424530A - Magnetostriction torque sensor - Google Patents

Magnetostriction torque sensor

Info

Publication number
JPH0424530A
JPH0424530A JP12812790A JP12812790A JPH0424530A JP H0424530 A JPH0424530 A JP H0424530A JP 12812790 A JP12812790 A JP 12812790A JP 12812790 A JP12812790 A JP 12812790A JP H0424530 A JPH0424530 A JP H0424530A
Authority
JP
Japan
Prior art keywords
torsion bar
spiral
magnetic
torque sensor
sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12812790A
Other languages
Japanese (ja)
Inventor
Hiroyuki Wakiwaka
弘之 脇若
Shuichi Uchiyama
修一 内山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ono Sokki Co Ltd
Original Assignee
Ono Sokki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ono Sokki Co Ltd filed Critical Ono Sokki Co Ltd
Priority to JP12812790A priority Critical patent/JPH0424530A/en
Publication of JPH0424530A publication Critical patent/JPH0424530A/en
Pending legal-status Critical Current

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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

PURPOSE:To make it possible to simplify manufacturing and to make the quality uniform by providing a torsion bar having an amorphous thin film which is wound around the outer surface of a shaft and welded and fixed with laser along the spiral welding line at the lead angle of 45 degrees, and providing an exciting coil which is provided so as to surround the outer surface of the torsion bar. CONSTITUTION:A thin film sheet 2 comprising iron-based amorphous alloy is wound around the outer surface of a torsion bar 1 and temporarily fixed. Laser welding is performed in the spiral pattern at the lead angle of 45 degrees on the wound sheet 2 along the counterclockwise spiral on the one side from the center of the torsion bar and along the clockwise spiral on the other side. Thereafter, the sheet is slowly cooled. Since the sheet is slowly cooled in the laser welding, crystallization occurs and permeability is decreased. As a result, a low-permeability part 3 and a high-permeability part 4 are alternately formed in the spiral stripe pattern on the outer surface of the torsion bar 1. Thus, a magnetic band region having magnetic anisotropy is formed, and a magnetostriction torque sensor is constituted.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、磁歪トルクセンサに関する。[Detailed description of the invention] [Industrial application field] The present invention relates to a magnetostrictive torque sensor.

〔従来の技術〕[Conventional technology]

磁歪トルクセンサにおいては、トーションバーの外周面
に軸線と正負45度方向の磁気異方性帯域を形成し、ト
ーションバーを回転してトルクを与えると、一方の側の
磁気異方性帯域に沿って圧縮応力が加わり、他方の側の
磁気異方性帯域に沿って引張応力が加わる。それにより
生じる磁気的変化率は、圧縮応力付加と引張応力付加と
で正負に変化しその変化の大きさは各応力の大きさによ
る。
In a magnetostrictive torque sensor, a magnetic anisotropic band is formed on the outer peripheral surface of the torsion bar in the positive and negative directions of 45 degrees from the axis, and when the torsion bar is rotated to apply torque, the magnetic anisotropic band on one side is formed. A compressive stress is applied along the magnetic anisotropy band on the other side, and a tensile stress is applied along the magnetic anisotropy band on the other side. The rate of magnetic change caused by this changes between positive and negative depending on the application of compressive stress and the application of tensile stress, and the magnitude of the change depends on the magnitude of each stress.

そこで、その磁気的変化を電気的出力信号として検出し
、その出力信号により各応力の大きさ、即ちトルクの大
きさを測定するのである。
Therefore, the magnetic change is detected as an electrical output signal, and the magnitude of each stress, that is, the magnitude of torque, is measured from the output signal.

従来の技術における磁歪トルクセンサのトーションバー
に磁気異方性帯域の形成には、次のようなものが例示さ
れる。
The following is an example of the formation of a magnetic anisotropic band in a torsion bar of a magnetostrictive torque sensor in the prior art.

(1)アモルファス合金の細帯を磁性体トーションバー
の外周面に所望ピッチ(所望の条数)・リード角45度
で螺旋縞状に巻回すると共に、エポキシ樹脂系接着剤で
接着する。
(1) A narrow strip of amorphous alloy is wound around the outer circumferential surface of a magnetic torsion bar in a spiral stripe pattern at a desired pitch (desired number of threads) and a lead angle of 45 degrees, and is adhered with an epoxy resin adhesive.

(2) lai歪鋼歪音軸−ションバーとして、その外
周面に螺旋溝を刻設し、熱処理を施す。
(2) As a lai strained steel strained sound shaft-shape bar, a spiral groove is carved on its outer peripheral surface and heat treated.

(3)磁歪鋼軸をトーションバーとして、熱処理を施す
。(直交磁気センサにより測定する。)(4)トーショ
ンバーの表面に磁歪膜をメツキで形成し、シェブロン状
に写真製版をする。
(3) Apply heat treatment to the magnetostrictive steel shaft as a torsion bar. (Measurement is performed using an orthogonal magnetic sensor.) (4) A magnetostrictive film is formed on the surface of the torsion bar by plating, and photoengraved into a chevron shape.

(5)トーションバーの表面に磁歪膜をスパッタでシェ
ブロン状に形成する。
(5) A magnetostrictive film is formed in a chevron shape on the surface of the torsion bar by sputtering.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

上記の従来の技術における磁歪トルクセンサのトーショ
ンバーに磁気異方性帯域の形成の方式には、次のような
欠点がある。
The method of forming a magnetic anisotropic band in the torsion bar of a magnetostrictive torque sensor in the above-mentioned conventional technology has the following drawbacks.

(1)は、トーションバーの形状に制限があり、接着剤
の温度特性や経年変化の影響が大きいので、精度に問題
がある。
(1) has a problem with accuracy because there is a limit to the shape of the torsion bar and the temperature characteristics of the adhesive and changes over time have a large influence.

同じく(2)は、機械加工が面倒であり、感度が悪い。Similarly, (2) requires troublesome machining and has poor sensitivity.

同じく(3)は、トーションバーに同期した信号処理が
必要であり、トーションバーの横揺れや磁気特性不均一
による出力ドリフトがある。又、ヒステリシスが大きい
Similarly, (3) requires signal processing that is synchronized with the torsion bar, and there is an output drift due to horizontal vibration of the torsion bar and non-uniform magnetic properties. Also, hysteresis is large.

同じく(4)は、磁歪膜が剥離し易い、大きな励磁電流
が必要である。トーションバーの形状に制限がある。
Similarly, (4) requires a large excitation current that easily causes the magnetostrictive film to peel off. There are restrictions on the shape of the torsion bar.

同じく(5)は、トーションバーに温度上昇により、磁
歪膜が影響を受ける。トーションバーの形状に制限があ
る。
Similarly, in (5), the magnetostrictive film is affected by the temperature rise in the torsion bar. There are restrictions on the shape of the torsion bar.

〔課題を解決するための手段〕[Means to solve the problem]

この発明による磁歪トルクセンサは、軸の外周面に巻回
され、リード角45度の螺旋状の溶接線に沿ってのレー
ザ溶接及び徐冷により形成された結晶化域で固着された
アモルファス薄膜を備えたトーションバーとその螺旋状
溶接線域の外周面を囲繞するよう設けられた励磁コイル
とを具備しており、螺旋状のレーザ溶接線がトーション
バーの中心から片側では左巻き、他側では右巻きである
螺旋であり、その夫々に対し個別に励磁コイルが設けら
れていることが好ましい。
The magnetostrictive torque sensor according to the present invention includes an amorphous thin film that is wound around the outer peripheral surface of a shaft and fixed in a crystallized region formed by laser welding and slow cooling along a spiral weld line with a lead angle of 45 degrees. It is equipped with a torsion bar and an excitation coil provided so as to surround the outer peripheral surface of the helical weld line area, and the helical laser weld line winds counterclockwise on one side and clockwise on the other side from the center of the torsion bar. Preferably, the coil is a spiral, each of which is provided with an individual excitation coil.

〔作  用〕[For production]

レーザ溶接に際して、溶接箇所のアモルファス合金は、
加熱溶融した後、徐冷されることになるが、それにより
結晶化して透磁率が低下する。その結果、トーションバ
ーの外周面には、上記の溶接線に沿った螺旋縞状の低透
磁率部分と螺旋縞状の高透磁率部分とが交互に形成され
た螺旋縞状の磁気異方性をもった磁性体帯域が構成され
る。
During laser welding, the amorphous alloy at the welding location is
After being heated and melted, it is slowly cooled, but this causes crystallization and decreases magnetic permeability. As a result, the outer peripheral surface of the torsion bar has a spiral striped magnetic anisotropy in which spiral striped low magnetic permeability portions and spiral striped high magnetic permeability portions are alternately formed along the weld line. A magnetic band with .

そのトーションバーの一端に回転動力源を結合し、他端
に負荷を結合して、トーションバーを所望の計測回転速
度で回転駆動する。
A rotational power source is coupled to one end of the torsion bar, a load is coupled to the other end, and the torsion bar is driven to rotate at a desired measured rotational speed.

すると、トルクにより、回転方向によりトーションバー
の外周面の一方の巻き方向の溶接線方向に沿って圧縮応
力が加わり、他方の巻き方向の溶接線に沿って引張応力
が加わる。すると、夫々における螺旋縞状の溶接線方向
に沿った磁性体帯域の透磁率は、圧縮応力付加と引張応
力付加とで正負に変化しその変化の大きさは各応力の大
きさによる。
Then, due to the torque, compressive stress is applied to the outer peripheral surface of the torsion bar along the weld line direction in one winding direction, and tensile stress is applied along the weld line in the other winding direction, due to the rotation direction. Then, the magnetic permeability of the magnetic material zone along the weld line direction of each spiral stripe changes positively or negatively depending on the application of compressive stress and the application of tensile stress, and the magnitude of the change depends on the magnitude of each stress.

そこで、夫々の励磁コイルによる励磁において、夫々の
励磁コイルのインダクタンスの変化を検出し、その出力
により各応力の大きさが求められ、それと捩じり部の寸
法及び物理的諸元とからトルクの大きさが算出されるの
である。
Therefore, during excitation by each excitation coil, changes in the inductance of each excitation coil are detected, and the magnitude of each stress is determined from the output, and the torque is determined from this and the dimensions and physical specifications of the torsion part. The size is calculated.

〔実 施 例〕〔Example〕

この発明の磁歪トルクセンサの製作方法について述べる
と、トーションバー1の外周面、特に捩じり部の外周面
における螺旋縞状の磁気異方性をもった磁性体帯域とす
べき範囲に鉄系のアモルファス合金の薄膜シート2(厚
さ・例えば50〜30μm)を巻付け、仮止めをする。
Describing the manufacturing method of the magnetostrictive torque sensor of the present invention, iron-based A thin film sheet 2 (thickness, e.g., 50 to 30 μm) of an amorphous alloy is wrapped around and temporarily fixed.

トーションバー1は、磁性体・非磁性体のいずれでもよ
く、特に捩じり部は、寸法及び物理的諸元が適宜定めら
れて製作されている。
The torsion bar 1 may be made of either a magnetic material or a non-magnetic material, and in particular, the torsion portion is manufactured with appropriately determined dimensions and physical specifications.

それから、巻付けたアモルファス合金の薄膜シート2の
上から所望ピンチ(所望の条数)のリード角45度の螺
旋であり、且つトーションバーの中心から片側では左巻
き、他側では右巻きである螺旋に沿ってレーザ溶接を施
した後、徐冷する。
Then, from above the wound amorphous alloy thin film sheet 2, a spiral with a lead angle of 45 degrees with a desired pinch (desired number of threads), and a spiral with a left-handed winding on one side and a right-handed winding on the other side from the center of the torsion bar. After performing laser welding along the lines, it is slowly cooled.

かくして、薄膜シート2は、トーションバー1の外周面
に固着される。
In this way, the thin film sheet 2 is fixed to the outer peripheral surface of the torsion bar 1.

レーザ溶接に際して、溶接箇所のアモルファス合金は、
加熱溶融した後、徐冷されることになるが、それにより
結晶化して透磁率が低下する。その結果、第1図に示す
ように、トーションバー1の外周面に上記の溶接線に沿
った螺旋縞状の低透磁率部分3と螺旋縞状の高透磁率部
分4とが交互に形成された螺旋縞状の磁気異方性をもっ
た磁性体帯域が形成されることにより磁歪トルクセンサ
が構成される。
During laser welding, the amorphous alloy at the welding location is
After being heated and melted, it is slowly cooled, but this causes crystallization and decreases magnetic permeability. As a result, as shown in FIG. 1, spiral striped low magnetic permeability portions 3 and spiral striped high magnetic permeability portions 4 are alternately formed along the welding line on the outer peripheral surface of the torsion bar 1. A magnetostrictive torque sensor is constructed by forming a magnetic band having spiral striped magnetic anisotropy.

上記のように製作された磁歪トルクセンサの使用に際し
ては、第3図に示すようにトーションバーの螺旋縞状の
磁気異方性をもった磁性体帯域の外周面を囲繞するよう
に環状のヨーク5が設けられ、ヨーク5には、左巻き螺
旋縞状の磁気異方性をもった磁性体帯域6及び右巻き螺
旋縞状の磁気異方性をもった磁性体帯域7の夫々に対応
して個別の励磁コイル8.9が巻回されている。そして
、励磁コイル8,9は、検出回路10に接続されている
When using the magnetostrictive torque sensor manufactured as described above, as shown in Fig. 3, an annular yoke is attached so as to surround the outer peripheral surface of the magnetic band of the torsion bar having spiral striped magnetic anisotropy. 5, and the yoke 5 is provided with a magnetic material zone 6 having left-handed spiral striped magnetic anisotropy and a magnetic material zone 7 having right-handed spiral striped magnetic anisotropy, respectively. A separate excitation coil 8.9 is wound. The excitation coils 8 and 9 are connected to a detection circuit 10.

トーションバー1の一端に回転動力源を結合し、他端に
負荷を結合して、トーションバー1を所望の計測回転速
度で回転駆動する。
A rotation power source is connected to one end of the torsion bar 1, a load is connected to the other end, and the torsion bar 1 is driven to rotate at a desired measured rotation speed.

すると、トーションバー1に加わるトルクにより、回転
方向によりトーションバーの外周面の一方の側、例えば
左巻き螺旋縞状の磁気異方性をもった磁性体帯域6には
螺旋に沿って圧縮応力が加わり、他方の側1例えば右巻
き螺旋縞状の磁気異方性をもった磁性体帯域7には螺旋
に沿って引張応力が加わる6すると、夫々における螺旋
縞状の磁気異方性をもった磁性体帯域における透磁率は
、圧縮応力付加と引張応力付加とで正負に変化しその変
化の大きさは各応力の大きさによる。
Then, due to the torque applied to the torsion bar 1, compressive stress is applied along the spiral to one side of the outer peripheral surface of the torsion bar, for example, the magnetic material zone 6 having left-handed spiral striped magnetic anisotropy, depending on the direction of rotation. , tensile stress is applied along the spiral to the other side 1, for example, a magnetic material band 7 having a right-handed spiral stripe-like magnetic anisotropy 6, then the magnetic material having a spiral stripe-like magnetic anisotropy on each side 6 The magnetic permeability in the body zone changes between positive and negative depending on the application of compressive stress and the application of tensile stress, and the magnitude of the change depends on the magnitude of each stress.

そこで、夫々の励磁コイル8.9による励磁において、
夫々の励磁コイル8,9のインダクタンスの変化を検出
し、その出力により各応力の大きさが求められ、それと
捩じり部の寸法及び物理的諸元とからトルクの大きさが
算出されるのである。
Therefore, in excitation by each excitation coil 8.9,
The change in inductance of each exciting coil 8, 9 is detected, and the magnitude of each stress is determined from the output, and the magnitude of torque is calculated from that and the dimensions and physical specifications of the torsion part. be.

〔発明の効果) この発明による磁歪トルクセンサは、製作が簡単であり
、品質が均一となる。
[Effects of the Invention] The magnetostrictive torque sensor according to the present invention is easy to manufacture and has uniform quality.

アモルファス合金の薄膜シートに対するレーザ溶接線が
即、磁気的目盛となるので、面倒な機械加工を要さず、
目盛精度が高く、感度もよく、励磁電流も小さくてもよ
い。
The laser weld line on the amorphous alloy thin film sheet instantly becomes a magnetic scale, eliminating the need for troublesome machining.
The scale accuracy is high, the sensitivity is good, and the excitation current may be small.

しかも、レーザ溶接が目盛形成ばかりでなく、トーショ
ンバーに対するアモルファス合金の薄膜シートの固着に
用いられているので、温度特性や経年変化の影響がなく
、剥離し難い。高精度が維持される。
Moreover, since laser welding is used not only to form the scale, but also to fix the amorphous alloy thin film sheet to the torsion bar, it is not affected by temperature characteristics or aging, and is difficult to peel off. High accuracy is maintained.

トーションバーに同期した信号処理も不要であり、トー
ションバーの横揺れや磁気特性不均一による出力ドリフ
トがなく、又、ヒステリシスが小さい。
There is no need for signal processing synchronized with the torsion bar, there is no output drift due to lateral vibration of the torsion bar or uneven magnetic properties, and hysteresis is small.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、この発明の実施例における磁歪トルクセンサ
の正面図、 第2図は、この発明の実施例における磁歪トルクセンサ
の断面図。 第3図は、この発明の実施例における磁歪トルクセンサ
を用いたトルク測定装置の構成図である。 1ニド−ジョンバー 2:アモルファス合金の薄膜シート 3;螺旋縞状の低透磁率部分 4:螺旋縞状の高透磁率部分 5:ヨーク6:左巻き螺
旋縞状の磁気異方性をもった磁性体帯域磁性体帯域 7:右巻き螺旋縞状磁気異方性をもった磁性体帯域磁性
体帯域 8.9:励磁コイル
FIG. 1 is a front view of a magnetostrictive torque sensor according to an embodiment of the present invention, and FIG. 2 is a sectional view of a magnetostrictive torque sensor according to an embodiment of the present invention. FIG. 3 is a configuration diagram of a torque measuring device using a magnetostrictive torque sensor according to an embodiment of the present invention. 1 Ni-joon version 2: thin film sheet of amorphous alloy 3; spiral striped low magnetic permeability portion 4: spiral striped high magnetic permeability portion 5: yoke 6: left-handed spiral striped magnetism with magnetic anisotropy Body band Magnetic band 7: Magnetic band with right-handed spiral striped magnetic anisotropy Magnetic band 8.9: Excitation coil

Claims (2)

【特許請求の範囲】[Claims] (1)トーシヨンバーとその外周面に巻回され、リード
角45度の螺旋状の溶接線に沿つてのレーザ溶接及び徐
冷により形成された結晶化域で固着されたアモルファス
薄膜とから構成された磁歪トルクセンサ
(1) Consisting of a torsion bar and an amorphous thin film wound around its outer circumferential surface and fixed in a crystallized region formed by laser welding along a spiral weld line with a lead angle of 45 degrees and slow cooling. magnetostrictive torque sensor
(2)螺旋状のレーザ溶接線がトーシヨンバーの中心か
ら片側では左巻き、他側では右巻きである螺旋である特
許請求の範囲第1項に記載の磁歪トルクセンサ
(2) The magnetostrictive torque sensor according to claim 1, wherein the spiral laser welding line is a left-handed spiral on one side and a right-handed spiral on the other side from the center of the torsion bar.
JP12812790A 1990-05-19 1990-05-19 Magnetostriction torque sensor Pending JPH0424530A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12812790A JPH0424530A (en) 1990-05-19 1990-05-19 Magnetostriction torque sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12812790A JPH0424530A (en) 1990-05-19 1990-05-19 Magnetostriction torque sensor

Publications (1)

Publication Number Publication Date
JPH0424530A true JPH0424530A (en) 1992-01-28

Family

ID=14977064

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12812790A Pending JPH0424530A (en) 1990-05-19 1990-05-19 Magnetostriction torque sensor

Country Status (1)

Country Link
JP (1) JPH0424530A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5585574A (en) * 1993-02-02 1996-12-17 Mitsubishi Materials Corporation Shaft having a magnetostrictive torque sensor and a method for making same
EP0867703A1 (en) * 1997-03-25 1998-09-30 Kabushiki Kaisha Toyoda Jidoshokki Seisakusho Torque sensor installing method
WO2000062031A1 (en) * 1999-04-07 2000-10-19 Koyo Seiko Co., Ltd. Rotation angle detector, torque detector and steering device
US7363827B2 (en) 2005-10-21 2008-04-29 Stoneridge Control Devices, Inc. Torque sensor system including an elliptically magnetized shaft
US7469604B2 (en) 2005-10-21 2008-12-30 Stoneridge Control Devices, Inc. Sensor system including a magnetized shaft
WO2017057750A1 (en) * 2015-10-01 2017-04-06 ヤマハ発動機株式会社 Magnetostrictive sensor
WO2022043252A1 (en) * 2020-08-26 2022-03-03 Thyssenkrupp Presta Ag Torque sensor unit with structured surface of the steering shafts

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5585574A (en) * 1993-02-02 1996-12-17 Mitsubishi Materials Corporation Shaft having a magnetostrictive torque sensor and a method for making same
EP0867703A1 (en) * 1997-03-25 1998-09-30 Kabushiki Kaisha Toyoda Jidoshokki Seisakusho Torque sensor installing method
US5880379A (en) * 1997-03-25 1999-03-09 Kabushiki Kaisha Toyoda Jidoshokki Seisakusho Torque sensor installing method
WO2000062031A1 (en) * 1999-04-07 2000-10-19 Koyo Seiko Co., Ltd. Rotation angle detector, torque detector and steering device
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