JPH04244281A - Gas recovery apparatus - Google Patents
Gas recovery apparatusInfo
- Publication number
- JPH04244281A JPH04244281A JP2950891A JP2950891A JPH04244281A JP H04244281 A JPH04244281 A JP H04244281A JP 2950891 A JP2950891 A JP 2950891A JP 2950891 A JP2950891 A JP 2950891A JP H04244281 A JPH04244281 A JP H04244281A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- gas recovery
- recovered
- condensing
- condensing liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000011084 recovery Methods 0.000 title claims abstract description 71
- 239000007788 liquid Substances 0.000 claims abstract description 67
- 238000004140 cleaning Methods 0.000 claims description 27
- 238000001816 cooling Methods 0.000 claims description 15
- 238000010438 heat treatment Methods 0.000 claims description 14
- 238000004821 distillation Methods 0.000 claims description 9
- 239000003595 mist Substances 0.000 claims description 4
- 238000013020 steam cleaning Methods 0.000 claims description 4
- 239000002904 solvent Substances 0.000 abstract description 34
- 238000009792 diffusion process Methods 0.000 abstract description 4
- 238000005406 washing Methods 0.000 abstract 2
- 239000007789 gas Substances 0.000 description 104
- 238000009833 condensation Methods 0.000 description 8
- 230000005494 condensation Effects 0.000 description 8
- 230000005484 gravity Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000009835 boiling Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 238000007664 blowing Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical class CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明は、洗浄装置等のガス回収
装置に係るもの、迅速で確実なガス回収を可能にするも
のである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas recovery device such as a cleaning device, and enables quick and reliable gas recovery.
【０００２】0002
【従来の技術】従来、洗浄装置等に設けたガス回収機構
は、特公平２ー５５１１３号、特公昭６１ー５０６６８
号公報記載の発明のごとく、洗浄槽の上部に冷却コイル
を巻き回し、この冷却コイルに溶剤ガスを接触させて凝
縮回収するものが知られている。[Prior Art] Conventionally, gas recovery mechanisms installed in cleaning equipment, etc.
It is known that a cooling coil is wound around the upper part of a cleaning tank, and a solvent gas is brought into contact with the cooling coil to condense and recover the solvent, as in the invention described in the above publication.
【０００３】この方法は、機構を複雑化せずに溶剤ガス
の回収が可能である利点を有している。しかしながら、
この方法は洗浄槽の上部に冷却コイルを位置したもので
あるから、洗浄槽内に存在する溶剤ガスの全てを急速に
除去したり、溶剤ガスのレベルを任意に調整したりする
ことは出来ない。また、溶剤ガスの回収能力に限界があ
り溶剤ガスの大気中への拡散等の問題も生じ易いもので
あった。This method has the advantage that the solvent gas can be recovered without complicating the mechanism. however,
Since this method places a cooling coil above the cleaning tank, it is not possible to rapidly remove all the solvent gas present in the cleaning tank or adjust the level of solvent gas arbitrarily. . Furthermore, there is a limit to the ability to recover the solvent gas, and problems such as diffusion of the solvent gas into the atmosphere tend to occur.
【０００４】0004
【発明が解決しようとする課題】本発明は上述のごとき
課題を解決しようとするものであって、洗浄槽内に存在
する溶剤ガスの全てを急速に除去したり、洗浄槽中の溶
剤ガスのレベルを任意に調整したりすることを可能とし
、また溶剤ガスの回収能力を向上し、溶剤ガスの大気中
への拡散を確実に防止しようとするものである。[Problems to be Solved by the Invention] The present invention attempts to solve the above-mentioned problems, and it is an object of the present invention to rapidly remove all of the solvent gas present in the cleaning tank, This makes it possible to adjust the level arbitrarily, improves the recovery ability of solvent gas, and reliably prevents the diffusion of solvent gas into the atmosphere.
【０００５】[0005]
【課題を解決するための手段】本発明は上述のごとき課
題を解決するため、ガス回収槽内に完全フッ素化液体を
主成分とする凝縮用液体を冷却して収納するとともにガ
ス回収槽に、回収ガスの供給源に開閉弁を介して連通し
た導入管を接続し、この導入管の接続位置を、凝縮用液
体と回収ガスとを接触し得る位置に形成してなるもので
ある。[Means for Solving the Problems] In order to solve the above-mentioned problems, the present invention cools and stores a condensing liquid whose main component is a fully fluorinated liquid in a gas recovery tank, and also An introduction pipe is connected to a supply source of recovered gas via an on-off valve, and the connection position of the introduction pipe is formed at a position where the condensing liquid and the recovered gas can come into contact.
【０００６】また凝縮用液体は、ガス回収槽内に貯留し
たものであり、この貯留した凝縮用液体に回収ガスを吹
き込み、回収ガスと凝縮用液体とを接触して、回収ガス
の凝縮回収を行うものであっても良い。[0006] The condensing liquid is stored in a gas recovery tank, and the recovered gas is blown into the stored condensing liquid, and the recovered gas and the condensing liquid are brought into contact to condense and recover the recovered gas. It may be something you do.
【０００７】また凝縮用液体は、ガス回収槽内にノズル
から霧状またはシャワー状に噴射し、この噴射した凝縮
用液体と回収ガスとを接触して、回収ガスの凝縮回収を
行うものであっても良い。[0007] Furthermore, the condensing liquid is injected into the gas recovery tank from a nozzle in the form of a mist or shower, and the injected condensing liquid and recovered gas are brought into contact to condense and recover the recovered gas. It's okay.
【０００８】また、回収ガスの供給源は、被洗浄物の蒸
気洗浄槽であっても良い。[0008] Furthermore, the supply source of the recovered gas may be a steam cleaning tank for the object to be cleaned.
【０００９】また、回収ガスは、被洗浄物の洗浄蒸気で
あっても良い。[0009] Furthermore, the recovered gas may be cleaning vapor from the object to be cleaned.
【００１０】また、導入管には吸引ファンを形成したも
のであっも良い。[0010] Furthermore, the introduction pipe may be provided with a suction fan.
【００１１】また、ガス回収槽には、凝縮用液体と接触
する部分に加熱手段を接続し、凝縮用液体を任意に加熱
可能としたものであっも良い。[0011] Furthermore, the gas recovery tank may be connected to a heating means at a portion that comes into contact with the condensing liquid, so that the condensing liquid can be heated as desired.
【００１２】また、加熱手段は、ガス回収槽内に形成し
たものであっても良い。[0012] Furthermore, the heating means may be formed within the gas recovery tank.
【００１３】また、加熱手段は、ガス回収槽とは別個に
形成した蒸留塔に設け、この蒸留塔をガス回収槽に接続
したものであっても良い。Further, the heating means may be provided in a distillation column formed separately from the gas recovery tank, and this distillation column may be connected to the gas recovery tank.
【００１４】またガス回収槽の上部には、冷却凝縮部を
設けたものであっても良い。[0014] Furthermore, a cooling condensing section may be provided in the upper part of the gas recovery tank.
【００１５】[0015]
【作用】本発明は上述のごとく構成したものであるから
、被洗浄物の洗浄槽中に存在する溶剤ガスを回収するに
は、回収ガスの供給源である洗浄槽とガス回収槽とを連
通する開閉弁を開放する。この開閉弁の開放により、回
収ガスはガス回収槽内に流入する。この回収ガスを流入
させる連通管を洗浄槽の下底に接続すれば、空気より比
重の重い回収ガスを、容易にガス回収槽に導入出来るが
、導入管に吸引ファンを形成すれば、更に容易で迅速な
ガスの回収槽への導入を可能にする。[Operation] Since the present invention is constructed as described above, in order to recover the solvent gas present in the cleaning tank of the object to be cleaned, the cleaning tank which is the supply source of the recovered gas and the gas recovery tank are connected. Open the on-off valve. By opening this on-off valve, the recovered gas flows into the gas recovery tank. By connecting the communication pipe through which this collected gas flows in to the bottom of the cleaning tank, the collected gas, which has a higher specific gravity than air, can be easily introduced into the gas collection tank, but it is even easier if a suction fan is formed in the introduction pipe. This enables quick introduction of gas into the recovery tank.
【００１６】この回収槽に導入した回収ガスは、ガス回
収槽内に収納した、完全フッ素化液体を主成分とする、
冷却した凝縮用液体と接触し、凝縮して回収することが
出来る。The recovered gas introduced into the recovery tank is mainly composed of a fully fluorinated liquid stored in the gas recovery tank.
It can be brought into contact with cooled condensing liquid, condensed and recovered.
【００１７】この、凝縮用液体と回収ガスとの接触は、
ガス回収槽内に貯留した凝縮用液体内に回収ガスを吹き
込み、回収ガスと凝縮用液体とを接触して、回収ガスの
凝縮回収を行う事ができる。[0017] This contact between the condensing liquid and the recovered gas is as follows:
The recovered gas can be condensed and recovered by blowing the recovered gas into the condensing liquid stored in the gas recovery tank and bringing the recovered gas and the condensing liquid into contact.
【００１８】また、凝縮用液体と回収ガスとの接触は、
ガス回収槽内にノズルから凝縮用液体を霧状またはシャ
ワー状に噴射し、この噴射した凝縮用液体と回収ガスと
を接触して、回収ガスの凝縮回収を行う事ができ、効率
の良い気液接触を可能にする。[0018] Furthermore, the contact between the condensing liquid and the recovered gas is as follows:
The condensing liquid is injected into the gas recovery tank from a nozzle in the form of a mist or shower, and the injected condensing liquid comes into contact with the recovered gas, allowing the recovered gas to be condensed and recovered. Allows liquid contact.
【００１９】このように、回収ガスの凝縮回収手段を、
洗浄槽等の回収ガスの供給源とは別個に設けたものであ
る。そのため、空気よりも比重の重い溶剤ガスを、洗浄
槽内に残留する事なく、急速に全量をガス回収槽に回収
し凝縮除去することが可能となり、被洗浄物の出入時等
においても溶剤ガスの外部への拡散を防止することが可
能となる。また、溶剤ガスの回収量を、開閉弁の制御に
より調整すれば、洗浄槽内に於ける溶剤ガスのレベルを
任意の位置に設定することが可能となる。In this way, the means for condensing and recovering the recovered gas is
It is provided separately from the recovery gas supply source such as the cleaning tank. Therefore, the solvent gas, which has a specific gravity heavier than air, does not remain in the cleaning tank, and the entire amount can be rapidly collected into the gas recovery tank and condensed for removal. This makes it possible to prevent the diffusion of substances to the outside. Further, by adjusting the amount of solvent gas recovered by controlling the on-off valve, it becomes possible to set the level of the solvent gas in the cleaning tank to an arbitrary position.
【００２０】また、冷却コイルに回収ガスを接触して凝
縮回収するのに比較し、冷却した凝縮用液体との接触を
行うものであるから、凝縮効率が良く、大量の回収ガス
を短時間で回収することが可能となる。In addition, compared to condensing and recovering by contacting the recovered gas with a cooling coil, since the method involves contact with the cooled condensing liquid, the condensation efficiency is higher and a large amount of recovered gas can be collected in a short time. It becomes possible to collect it.
【００２１】また、この凝縮用液体は、完全フッ素化液
体を主成分とするものであるから、回収ガスが可燃性の
ものであっても引火の虞れはない。また、一般的に洗浄
等に使用する溶剤ガスとは不溶であるから、回収凝縮し
た回収ガスとの分離が、比重差を利用した簡易な分離器
により可能となる。Furthermore, since this condensing liquid is mainly composed of a fully fluorinated liquid, there is no risk of catching fire even if the recovered gas is flammable. Furthermore, since it is insoluble in solvent gases generally used for cleaning, etc., it can be separated from the recovered and condensed recovered gas using a simple separator that utilizes the difference in specific gravity.
【００２２】また、ガス回収槽の凝縮用液体と接触する
部分に加熱手段を接続し、凝縮用液体を任意に加熱可能
とすれば、凝縮回収の完了した後に凝縮用液体を加熱し
、完全フッ素化液体を主成分とする凝縮用液体と凝縮液
化した回収ガスとの沸点の差を利用し、蒸留することに
より凝縮液化した回収ガスを再度ガス化し、凝縮用液体
と分離しても良い。この場合は、ガス回収槽の上部に、
冷却凝縮部を設けて凝縮を行う。[0022] Furthermore, if a heating means is connected to the part of the gas recovery tank that comes into contact with the condensing liquid, and the condensing liquid can be heated as desired, the condensing liquid can be heated after the condensation recovery is completed, and completely fluorinated By utilizing the difference in boiling point between the condensing liquid whose main component is the condensed liquid and the condensed and liquefied recovered gas, the condensed and liquefied recovered gas by distillation may be gasified again and separated from the condensed liquid. In this case, at the top of the gas recovery tank,
A cooling condensation section is provided to perform condensation.
【００２３】[0023]
【実施例】以下本発明の一実施例を図面に於いて説明す
れば、（１）は回収ガスの供給源となる洗浄槽で、回収
ガスである洗浄蒸気（２）を導入して蒸気洗浄を行う蒸
気洗浄部（３）の上部に、蒸気圧の上昇によって開放す
る蓋体（４）を介して凝縮部（５）を設けている。この
凝縮部（５）は内周に冷却コイル（６）を巻き回して形
成するとともに上端に密閉蓋体（７）を開閉可能に形成
している。[Embodiment] An embodiment of the present invention will be described below with reference to the drawings. (1) is a cleaning tank which is a supply source of recovered gas, and cleaning steam (2) which is recovered gas is introduced to perform steam cleaning. A condensing section (5) is provided above the steam cleaning section (3) through which a lid (4) opens when the steam pressure increases. This condensing section (5) is formed by winding a cooling coil (6) around its inner periphery, and has a sealing lid (7) formed at its upper end so that it can be opened and closed.
【００２４】また洗浄槽（１）には、連通弁（８）を介
して蒸気発生槽（１０）を接続し、この蒸気発生槽（１
０）は、フッ素系溶剤、塩素系溶剤、５フッ化プロパノ
ール系溶剤等の溶剤液（１１）を収納し、この溶剤液（
１１）をヒーター（１２）により加熱し洗浄蒸気（２）
を形成する。また、蒸気発生槽（１０）の上部に、蒸気
圧の上昇によって開放する蓋体（１３）を介して上端に
凝縮部（１４）を設けている。この凝縮部（１４）は、
内周に冷却コイル（１５）を巻き回して形成するととも
に上端に密閉蓋体（１６）を開閉可能に形成している。
また、洗浄槽（１）の下底（１７）と溶剤液（１１）部
分をドレン管（１８）により接続し、洗浄槽（１）の下
底（１７）に溜まる溶剤液（１１）を蒸気発生槽（１０
）に回収可能としている。Furthermore, a steam generation tank (10) is connected to the cleaning tank (1) via a communication valve (8).
0) stores a solvent solution (11) such as a fluorine-based solvent, a chlorinated solvent, a pentafluorinated propanol solvent, etc., and stores this solvent solution (
11) is heated with a heater (12) to produce cleaning steam (2).
form. Further, a condensing section (14) is provided at the upper end of the steam generation tank (10) via a lid (13) that opens when the steam pressure increases. This condensation section (14) is
A cooling coil (15) is wound around the inner periphery, and a sealing lid (16) is formed at the upper end so that it can be opened and closed. In addition, the lower bottom (17) of the cleaning tank (1) and the solvent solution (11) are connected by a drain pipe (18), and the solvent solution (11) accumulated in the lower bottom (17) of the cleaning tank (1) is vaporized. Generation tank (10
).
【００２５】また、回収ガスの供給源たる洗浄槽（１）
には、開閉弁（２０）を介して連通したガス回収槽（２
１）を接続している。このガス回収槽（２１）は、内部
に完全フッ素化液体を主成分とする凝縮用液体（２２）
を冷却して収納している。そして第１図に示すごとく、
この凝縮用液体（２２）内に導入管（２３）の一端を挿
入し、この導入管（２３）の他端を、吸引ファン（２４
）とこの吸引ファン（２４）の両側に設置した開閉弁（
２０）（２０）を介して、洗浄槽（１）の下底（１７）
に近接して接続してる。この接続により、吸引ファン（
２４）で吸引した回収ガスを、凝縮用液体（２２）に吹
き込み、回収ガスと凝縮用液体（２２）とを接触して、
回収ガスの凝縮回収を行うものである。[0025] Also, a cleaning tank (1) which is a supply source of recovered gas
The gas recovery tank (2) is connected to the gas recovery tank (2
1) is connected. This gas recovery tank (21) contains a condensing liquid (22) whose main component is a fully fluorinated liquid.
are cooled and stored. And as shown in Figure 1,
One end of the introduction pipe (23) is inserted into this condensing liquid (22), and the other end of this introduction pipe (23) is connected to the suction fan (24).
) and the on-off valves (
20) Through (20), the lower bottom (17) of the cleaning tank (1)
connected in close proximity to This connection allows the suction fan (
The recovered gas sucked in step 24) is blown into the condensing liquid (22), and the recovered gas and the condensing liquid (22) are brought into contact with each other.
It condenses and recovers the recovered gas.
【００２６】また、ガス回収槽（２１）には、凝縮用液
体（２２）と接触する部分に、ヒーター等の加熱手段（
２５）を接続し、凝縮用液体（２２）を任意に加熱可能
としている。この加熱手段（２５）の作動は、回収ガス
の回収が進み凝縮用液体（２２）内に、回収ガスが多量
に含まれた場合に行う。この加熱により、完全フッ素化
液体を主成分とする凝縮用液体（２２）と回収ガスとの
沸点の差を利用し、回収ガスを蒸留再生する。The gas recovery tank (21) is also provided with heating means (such as a heater) at the part that comes into contact with the condensing liquid (22).
25) so that the condensing liquid (22) can be heated as desired. This operation of the heating means (25) is carried out when recovery of the recovered gas progresses and a large amount of recovered gas is contained in the condensing liquid (22). By this heating, the collected gas is regenerated by distillation using the difference in boiling point between the condensing liquid (22) whose main component is a fully fluorinated liquid and the collected gas.
【００２７】そして、ガス回収槽（２１）の上部には、
ガス回収槽（２１）内の蒸気圧の上昇によって開放する
凝縮蓋体（２６）を介して、上端に冷却凝縮部（２７）
を設けている。この冷却凝縮部（２７）は、内周に冷却
コイル（２８）を巻き回して形成するとともに上端に密
閉蓋体（３０）を開閉可能に形成している。また、この
冷却凝縮部（２７）には、ガス回収部（３１）との区画
壁（３２）の上面に位置して、溶剤液（１１）の排出管
（３３）を接続している。そして、この排出管（３３）
に水分分離器（３４）を介して導出管（３５）を接続し
、この導出管（３５）を蒸気発生槽（１０）の溶剤液（
１１）に凝縮溶剤を還流する。[0027] In the upper part of the gas recovery tank (21),
A cooling condensing section (27) is installed at the upper end of the gas recovery tank (21) via a condensing lid (26) that opens when the vapor pressure increases.
has been established. The cooling condensing section (27) is formed by winding a cooling coil (28) around its inner periphery, and has a sealing lid (30) formed at its upper end so that it can be opened and closed. Further, a discharge pipe (33) for the solvent liquid (11) is connected to the cooling condensing part (27), located on the upper surface of a partition wall (32) with the gas recovery part (31). And this discharge pipe (33)
An outlet pipe (35) is connected to the outlet pipe (35) through a moisture separator (34), and the outlet pipe (35) is connected to the solvent liquid (
11) Reflux the condensed solvent.
【００２８】また加熱手段（２５）は、上述のごとくガ
ス回収槽（２１）内に形成したものであっても良いが、
加熱手段（２５）は、ガス回収槽（２１）とは別個に形
成した蒸留塔（図示せず）に設け、この蒸留塔をガス回
収槽（２１）に接続したものであっても良い。[0028] The heating means (25) may be formed within the gas recovery tank (21) as described above;
The heating means (25) may be provided in a distillation column (not shown) formed separately from the gas recovery tank (21), and this distillation column may be connected to the gas recovery tank (21).
【００２９】また回収ガスの凝縮は、前述のごとく凝縮
用液体（２２）中に直接吹き込むものとしても良いが、
第２図に示すごとく、ガス回収槽（３１）にポンプ（３
６）を接続し、このポンプ（３６）により、ガス回収槽
（２１）内の凝縮用液体（２２）を、ノズル（３７）か
ら霧状またはシャワー状に噴射し、この噴射した凝縮用
液体（２２）と回収ガスとを接触して、回収ガスの凝縮
回収を行うものであっても良い。この方法はポンプ（３
６）等の存在により、機構を複雑化するものの、気液の
接触効率を良好とすることができる。The collected gas may be condensed by directly blowing it into the condensing liquid (22) as described above.
As shown in Figure 2, the pump (3) is connected to the gas recovery tank (31).
6) is connected, and the pump (36) injects the condensing liquid (22) in the gas recovery tank (21) from the nozzle (37) in the form of a mist or shower, and the injected condensing liquid ( 22) and the recovered gas to condense and recover the recovered gas. This method uses a pump (3
Although the presence of 6) etc. complicates the mechanism, it is possible to improve the gas-liquid contact efficiency.
【００３０】[0030]
【発明の効果】本発明は上述のごとく構成したもので、
回収槽に導入した回収ガスは、完全フッ素化液体を主成
分とする、冷却した凝縮用液体と接触し、凝縮回収する
ことが出来るから、冷却コイルを用いる方法に比較し、
極めて効率の良い凝縮回収を可能とする。[Effects of the Invention] The present invention is constructed as described above,
The recovered gas introduced into the recovery tank comes into contact with the cooled condensing liquid, which is mainly composed of fully fluorinated liquid, and can be condensed and recovered, compared to methods using cooling coils.
Enables extremely efficient condensation recovery.
【００３１】また、回収ガスの凝縮回収手段を、洗浄槽
等の回収ガスの供給源とは別個に設けたものであるから
、空気よりも比重の重い溶剤ガスを、洗浄槽内に残留す
る事なく、急速に全量をガス回収槽に回収し凝縮除去で
きる。そのため、被洗浄物の出入時等において、溶剤ガ
スの外部への拡散を防止することが可能となる。また、
溶剤ガスの回収量を、開閉弁の制御により調整すれば、
洗浄槽内に於ける溶剤ガスのレベルを任意の位置に設定
することが可能となる。Furthermore, since the recovery gas condensation recovery means is provided separately from the recovery gas supply source such as the cleaning tank, there is no possibility that solvent gas, which has a higher specific gravity than air, will remain in the cleaning tank. The entire amount can be rapidly collected in a gas recovery tank and condensed for removal. Therefore, it is possible to prevent the solvent gas from diffusing to the outside when the object to be cleaned is taken in and out. Also,
If the amount of solvent gas recovered is adjusted by controlling the on-off valve,
It becomes possible to set the level of solvent gas in the cleaning tank to an arbitrary position.
【００３２】また、この凝縮用液体は、完全フッ素化液
体を主成分とするものであるから、回収ガスが可燃性の
ものであっても引火の虞れはない。また、一般的に洗浄
等に使用する溶剤ガスとは不溶であるから、回収凝縮し
た回収ガスとの分離が、比重差を利用した簡易な分離器
により可能となる。Furthermore, since this condensing liquid is mainly composed of a fully fluorinated liquid, there is no risk of catching fire even if the recovered gas is flammable. Furthermore, since it is insoluble in solvent gases generally used for cleaning, etc., it can be separated from the recovered and condensed recovered gas using a simple separator that utilizes the difference in specific gravity.
【００３３】また、ガス回収槽の、加熱手段を設ければ
、凝縮回収の完了した後に凝縮用液体を加熱し、完全フ
ッ素化液体を主成分とする凝縮用液体と凝縮液化した回
収ガスとの沸点の差を利用し、蒸留することにより凝縮
液化した回収ガスを再度ガス化し、凝縮用液体と分離す
ることが可能となる。Furthermore, if a heating means is provided in the gas recovery tank, the condensing liquid is heated after the condensation and recovery is completed, and the condensing liquid containing the fully fluorinated liquid as a main component and the condensed and liquefied recovered gas are heated. Utilizing the difference in boiling point, it is possible to gasify the recovered gas that has been condensed and liquefied by distillation again and separate it from the condensing liquid.
【図１】断面図[Figure 1] Cross-sectional view
【図２】異なる実施例の断面図[Figure 2] Cross-sectional view of different embodiments
２０・・・・・・・開閉弁 ２１・・・・・ガス回収槽 ２２・・・・・・凝縮用液体 ２３・・・・・・・導入管 ２４・・・・・吸引ファン ２５・・・・・・加熱手段 ２７・・・・・冷却凝縮部 ３７・・・・・・・ノズル 20......Opening/closing valve 21...Gas recovery tank 22... Condensing liquid 23...Introduction pipe 24...Suction fan 25... Heating means 27... Cooling condensing section 37... Nozzle
Claims (10)
とする凝縮用液体を冷却して収納するとともにガス回収
槽に、回収ガスの供給源に開閉弁を介して連通した導入
管を接続し、この導入管の接続位置を、凝縮用液体と回
収ガスとを接触し得る位置に形成したことを特徴とする
ガス回収装置。Claim 1: A condensing liquid whose main component is a fully fluorinated liquid is cooled and stored in a gas recovery tank, and the gas recovery tank is provided with an inlet pipe that communicates with a supply source of recovered gas via an on-off valve. A gas recovery device characterized in that the introduction pipe is connected at a position where the condensing liquid and the recovery gas can come into contact with each other.
のであり、この貯留した凝縮用液体に回収ガスを吹き込
み、回収ガスと凝縮用液体とを接触して、回収ガスの凝
縮回収を行うものであることを特徴とする請求項１記載
のガス回収装置。Claim 2: The condensing liquid is stored in a gas recovery tank, the recovered gas is blown into the stored condensing liquid, the recovered gas and the condensing liquid are brought into contact, and the recovered gas is condensed and recovered. The gas recovery device according to claim 1, wherein the gas recovery device performs the following.
霧状またはシャワー状に噴射し、この噴射した凝縮用液
体と回収ガスとを接触して、回収ガスの凝縮回収を行う
ものであることを特徴とする請求項１記載のガス回収装
置。[Claim 3] The condensing liquid is injected into the gas recovery tank in the form of a mist or shower from a nozzle, and the injected condensing liquid and recovered gas are brought into contact to condense and recover the recovered gas. The gas recovery device according to claim 1, characterized in that:
槽であることを特徴とする請求項１記載のガス回収装置
。4. The gas recovery apparatus according to claim 1, wherein the supply source of the recovered gas is a steam cleaning tank for the object to be cleaned.
とを特徴とする請求項１記載のガス回収装置。5. The gas recovery apparatus according to claim 1, wherein the recovered gas is cleaning vapor for an object to be cleaned.
徴とする請求項１記載のガス回収装置。6. The gas recovery device according to claim 1, wherein a suction fan is formed in the introduction pipe.
分に加熱手段を接続し、凝縮用液体を任意に加熱可能と
したことを特徴とする請求項１記載のガス回収装置。7. The gas recovery device according to claim 1, wherein a heating means is connected to the gas recovery tank at a portion that comes into contact with the condensing liquid, so that the condensing liquid can be heated as desired.
を特徴とする請求項７記載のガス回収装置。8. The gas recovery device according to claim 7, wherein the heating means is formed within the gas recovery tank.
た蒸留塔に設け、この蒸留塔をガス回収槽に接続したこ
とを特徴とする請求項７記載のガス回収装置。9. The gas recovery apparatus according to claim 7, wherein the heating means is provided in a distillation column formed separately from the gas recovery tank, and the distillation column is connected to the gas recovery tank.
けたことを特徴とする請求項７、８、９記載のガス回収
装置。10. The gas recovery apparatus according to claim 7, wherein a cooling condensing section is provided in the upper part of the gas recovery tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2950891A JPH04244281A (en) | 1991-01-30 | 1991-01-30 | Gas recovery apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2950891A JPH04244281A (en) | 1991-01-30 | 1991-01-30 | Gas recovery apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04244281A true JPH04244281A (en) | 1992-09-01 |
Family
ID=12278038
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2950891A Pending JPH04244281A (en) | 1991-01-30 | 1991-01-30 | Gas recovery apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04244281A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6420732B1 (en) | 2000-06-26 | 2002-07-16 | Luxnet Corporation | Light emitting diode of improved current blocking and light extraction structure |
| JP2023013565A (en) * | 2021-07-16 | 2023-01-26 | ジャパン・フィールド株式会社 | Cleaning device for cleaning object |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57135024A (en) * | 1981-02-13 | 1982-08-20 | Matsushita Electric Ind Co Ltd | Apparatus for removing carbon dioxide and oxygen |
| JPS5910379A (en) * | 1982-07-08 | 1984-01-19 | パ−カ−熱処理工業株式会社 | Method of washing solvent |
| JPS61161582A (en) * | 1985-01-09 | 1986-07-22 | Matsushita Electric Ind Co Ltd | Pattern recognizing device |
| JPS6252675A (en) * | 1985-08-31 | 1987-03-07 | Nireko:Kk | Method for extracting specific color area |
| JPH02261583A (en) * | 1989-03-31 | 1990-10-24 | Yoshihide Shibano | Ultrasonic cleaning and deburring device |
| JPH035908A (en) * | 1989-06-02 | 1991-01-11 | Nec Corp | Disk for cleaning magnetic head |
-
1991
- 1991-01-30 JP JP2950891A patent/JPH04244281A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57135024A (en) * | 1981-02-13 | 1982-08-20 | Matsushita Electric Ind Co Ltd | Apparatus for removing carbon dioxide and oxygen |
| JPS5910379A (en) * | 1982-07-08 | 1984-01-19 | パ−カ−熱処理工業株式会社 | Method of washing solvent |
| JPS61161582A (en) * | 1985-01-09 | 1986-07-22 | Matsushita Electric Ind Co Ltd | Pattern recognizing device |
| JPS6252675A (en) * | 1985-08-31 | 1987-03-07 | Nireko:Kk | Method for extracting specific color area |
| JPH02261583A (en) * | 1989-03-31 | 1990-10-24 | Yoshihide Shibano | Ultrasonic cleaning and deburring device |
| JPH035908A (en) * | 1989-06-02 | 1991-01-11 | Nec Corp | Disk for cleaning magnetic head |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6420732B1 (en) | 2000-06-26 | 2002-07-16 | Luxnet Corporation | Light emitting diode of improved current blocking and light extraction structure |
| JP2023013565A (en) * | 2021-07-16 | 2023-01-26 | ジャパン・フィールド株式会社 | Cleaning device for cleaning object |
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