JPH0421041Y2 - - Google Patents
Info
- Publication number
- JPH0421041Y2 JPH0421041Y2 JP1987019275U JP1927587U JPH0421041Y2 JP H0421041 Y2 JPH0421041 Y2 JP H0421041Y2 JP 1987019275 U JP1987019275 U JP 1987019275U JP 1927587 U JP1927587 U JP 1927587U JP H0421041 Y2 JPH0421041 Y2 JP H0421041Y2
- Authority
- JP
- Japan
- Prior art keywords
- objective lens
- inspected
- sheet
- microscope
- sheet gauge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 5
- 238000007689 inspection Methods 0.000 description 13
- 239000011521 glass Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000004075 alteration Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Description
【考案の詳細な説明】
（産業上の利用分野）
本考案は光透過性を有するシート材の表面に測
定手段が記載されたシートゲージに関する。[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to a sheet gauge in which a measuring means is written on the surface of a light-transmitting sheet material.
（従来の技術）
従来、電子部品等の精密微細部品の加工及び治
工具部品等の検査等においては、拡大顕微鏡を現
場作業者の傍らに置いて工作物等を拡大して感覚
的な検査を行つていた。詳細な寸法精度の検査を
行うには測距可能な投影機等で検査を行つてい
た。しかし、精度の高い検査を行うためには微細
部品等を検査室等へ運んで専用の設備を用いて検
査せねばならず、現場の作業はその間ストツプし
てしまうという問題点が有り、現場での精密検査
を行う手段が望まれていた。(Prior art) Conventionally, when processing precision micro parts such as electronic parts and inspecting jigs and tools, etc., a magnifying microscope was placed next to the on-site worker to magnify the workpiece and perform intuitive inspection. I was gone. Detailed dimensional accuracy inspections were performed using a distance measuring projector or the like. However, in order to perform highly accurate inspections, microscopic parts must be transported to an inspection room and inspected using special equipment, which poses the problem that on-site work stops during that time. There was a need for a means of conducting detailed inspections.
この問題を解決する手段としては、従来ルーペ
用スケールという物が知られている。 As a means to solve this problem, a scale for a magnifying glass is conventionally known.
これは拡大鏡や簡易なマイクロスコープと組み
合わせて用いるもので、対物レンズと同径もしく
はそれ以下の径を有し、光透過性の有るスケール
板上に測距目盛や、同心円等が等倍に記載されて
おり、前記拡大鏡やマイクロスコープに装着して
使用するものである。 This is used in combination with a magnifying glass or a simple microscope, and has the same diameter as the objective lens or smaller diameter, and has a distance measurement scale and concentric circles on a light-transparent scale plate that is displayed at the same magnification. It is used by being attached to the magnifying glass or microscope.
（考案が解決しようとする問題点）
しかしながら、上記のルーペ用スケールには次
のような問題点が有る。(Problems to be solved by the invention) However, the above magnifying glass scale has the following problems.
スケール板の大きさが対物レンズの径以下と制
約が有るため記載できる図形、目盛等に限りが有
る。従つて、ルーペ用スケールは記載量を多くす
べく例えば円は同心円状に描いたり、角度は分度
器の目盛のように描かれている。 Since the size of the scale plate is limited to be less than the diameter of the objective lens, there are limits to the figures, scales, etc. that can be written. Therefore, in order to increase the amount of information written on a magnifying glass scale, for example, circles are drawn concentrically, and angles are drawn like the scale of a protractor.
円弧、角度が上述のように描かれていると、微
細な測定を行う場合読み取り誤差が生じ易い。ま
た検査を行う者にとつても集中力が必要となり、
疲労が大きいという問題点が有る。 When arcs and angles are drawn as described above, reading errors are likely to occur when making minute measurements. It also requires concentration for those conducting the test.
The problem is that it causes a lot of fatigue.
さらに、レンズの光軸からはずれた位置に描か
れた図形等はレンズの球面収差により精度に問題
が有り、測定誤差の原因となる恐れが有るという
問題点も有る。 Furthermore, there is another problem in that a figure or the like drawn at a position off the optical axis of the lens has a problem in accuracy due to the spherical aberration of the lens, and may cause a measurement error.
従つて、本考案は大量の図形等を記載でき、見
易く、誤差の生じないシートゲージを提供するこ
とを目的とする。 Therefore, an object of the present invention is to provide a sheet gauge that can write a large number of figures, etc., is easy to see, and does not cause errors.
（問題点を解決するための手段）
本考案は上記目的を達成するため次の構成を備
える。(Means for solving the problems) The present invention has the following configuration to achieve the above object.
すなわち、顕微鏡の対物レンズと被検査物との
間または該被検査物に対して該対物レンズと反対
側に介挿可能、かつ対物レンズと被検査物との間
または被検査物に対して該対物レンズと反対側に
おいて移動可能であり、対物レンズの面積を越え
た面積を有する光透過性シート材の面に、コーナ
ーの曲率半径、Ｃ面取量、角度等の図形要素、測
定目盛等の測定手段を規則的に変化させたもの
を、当該変化の順番に等倍で記載されていること
を特徴とする。 That is, it can be inserted between the objective lens of the microscope and the object to be inspected or on the opposite side of the objective lens with respect to the object to be inspected, and it can be inserted between the objective lens and the object to be inspected or with respect to the object to be inspected. Graphic elements such as corner curvature radius, C chamfer amount, angle, etc., measurement scales, etc. are displayed on the surface of a light-transmitting sheet material that is movable on the side opposite to the objective lens and has an area exceeding the area of the objective lens. It is characterized in that the measuring means is changed regularly and is written at the same size in the order of the change.
（作用） 作用を図面と共に説明する。(effect) The operation will be explained with reference to the drawings.
被検査物の検査部位に対応する図形要素、測定
手段を有するシートゲージを、顕微鏡の対物レン
ズと被検査物との間または被検査物に対して対物
レンズと反対側に介挿する。 A sheet gauge having a graphical element and measuring means corresponding to the inspection region of the object to be inspected is inserted between the objective lens of the microscope and the object to be inspected, or on the side opposite to the objective lens with respect to the object to be inspected.
すると、シート材は光透過性を有するので、顕
微鏡の視野内では被検査物と図形要素、測定手段
とが重なつて見えるので拡大された被検査物と拡
大された図形要素、測定手段を見ながら比較検査
可能となる。 Then, since the sheet material has optical transparency, the object to be inspected, the graphic element, and the measuring means appear to overlap in the field of view of the microscope, so it is difficult to see the enlarged object to be inspected, the enlarged graphic element, and the measuring means. Comparative inspection is possible while
（実施例）
以下、本考案の好適な実施例について添付図面
と共に詳述する。(Embodiments) Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
まず構成について述べる。 First, let's talk about the configuration.
第１図において、１０はシートゲージであり、
透明なフイルム状の樹脂シートを適宜な大きさに
裁断されてなる。シートゲージ１０は顕微鏡１４
の対物レンズ１６と被検査物である部品２０との
間に介挿可能であると共に、対物レンズ１６と部
品２０との間において水平方向へ移動可能となつ
ている。このシートゲージ１０の大きさは、顕微
鏡１４の対物レンズ１６の面積を越える面積が有
れば、後述する図形要素や測定手段等の、記載す
る数量及びサイズ等を考慮の上適宜選択すればよ
い。 In FIG. 1, 10 is a seat gauge;
It is made by cutting a transparent film-like resin sheet into an appropriate size. The sheet gauge 10 is a microscope 14
It can be inserted between the objective lens 16 and the component 20 which is the object to be inspected, and it can be moved in the horizontal direction between the objective lens 16 and the component 20. The size of the sheet gauge 10 may be appropriately selected in consideration of the quantity and size of graphical elements and measuring means, etc. to be described later, as long as the area exceeds the area of the objective lens 16 of the microscope 14. .
また本実施例では樹脂シートとして透明なポリ
エステルを用いたが、十分な光透過性さえ有すれ
ば透明ではなく、擦りガラス状でもよい。素材も
ポリエステルに限らず熱の影響の少ない材質であ
れば他の樹脂やガラスでも構わない。 Further, in this example, transparent polyester was used as the resin sheet, but it may not be transparent but may be frosted glass-like as long as it has sufficient light transmittance. The material is not limited to polyester; other resins or glass may be used as long as they are less affected by heat.
シートゲージ１０の表面には、図形要素１２等
が規則的な変位量に従つて順番に記載されてい
る。図形要素等の種類についは後述する。 On the surface of the sheet gauge 10, graphic elements 12 and the like are written in order according to regular displacement amounts. The types of graphical elements will be described later.
なお図形要素１２等の記載方法は、樹脂シート
の表面を精密なカツテイングにより記載されてお
り、その精度は0.005mm以下である。カツテイン
グした面は、作業環境を考慮して耐水、耐油処理
を施すとよい。 Note that the graphic elements 12 and the like are described by precisely cutting the surface of the resin sheet, and the accuracy is 0.005 mm or less. The cut surface should be treated to be water and oil resistant, taking into consideration the working environment.
記載方法もカツテイングの他に写真製版、その
他精度さえ確保できれば何でもよい。 In addition to cutting, photolithography or any other method of writing may be used as long as accuracy is ensured.
記載された図形要素１２等は等倍に記載され、
読み取り可能に図形要素１２等のサイズも併記さ
れている。 The described graphical elements 12, etc. are described at the same size,
The sizes of the graphic elements 12 and the like are also written in a readable manner.
次に使用方法について述べる。 Next, we will discuss how to use it.
まず顕微鏡１４の対物レンズ１６直下のステー
ジ１８上に被検査物である部品２０を載置し、適
宜な方法で固定する。部品２０の測定部位の寸法
等を設定図面から読み取り、部品２０の測定部位
の形状及びサイズに有つたシートゲージ１０を選
択し、シートゲージ１０を部品２０の上に重ね
る。但し、物によつてはシートゲージ１０の上に
部品２０を載せても良い。 First, a component 20 to be inspected is placed on the stage 18 directly below the objective lens 16 of the microscope 14 and fixed by an appropriate method. The dimensions of the measurement site of the component 20 are read from the setting drawing, the sheet gauge 10 that matches the shape and size of the measurement site of the component 20 is selected, and the sheet gauge 10 is placed on the component 20. However, depending on the item, the part 20 may be placed on the sheet gauge 10.
作業者は顕微鏡１４の接眼レンズ２２を覗きな
がら、部品２０の検査部位の設計図面から読み取
つた値と一致するサイズの図形要素１２を、シー
トゲージ１０に記載されたサイズから選択する。
その選択した図形要素１２を部品２０の上に移動
させる。この時シートゲージ１０は透明なので、
図形要素１２と部品２０が重なつて作業者には見
える。従つて、作業者は検査部位と図形要素との
違いを容易に測定が可能となる。また許容量が予
め判つていれば、許容量に対応したサイズの図形
要素１２と比較して許容範囲内か否かも判断可能
である。 While looking through the eyepiece lens 22 of the microscope 14, the operator selects a graphic element 12 whose size matches the value read from the design drawing of the inspection area of the component 20 from the sizes written on the sheet gauge 10.
The selected graphic element 12 is moved onto the part 20. At this time, the sheet gauge 10 is transparent, so
The graphic element 12 and the component 20 appear to overlap to the operator. Therefore, the operator can easily measure the difference between the inspection site and the graphic element. Furthermore, if the allowable amount is known in advance, it is possible to determine whether or not it is within the allowable range by comparing it with the graphic element 12 of a size corresponding to the allowable amount.
次にシートゲージ１０の図形要素等の記載例に
ついて図面と共に述べる。 Next, description examples of graphical elements of the sheet gauge 10 will be described with reference to the drawings.
第２図に示すのは、円を示したゲージであり、
直径を0.02mmずつずらした円が順番に並んで記載
されている。 What is shown in Figure 2 is a gauge showing a circle,
Circles with diameters shifted by 0.02 mm are listed in order.
第３図に示すのは、90°コーナーの曲率半径を、
0.02mmずつずらしたアールが順番に並んで記載さ
れた例である。もちろんコーナーの角度は90°の
他60°、30°当任意に選択できる。 Figure 3 shows the radius of curvature of a 90° corner,
This is an example where radiuses shifted by 0.02 mm are listed in order. Of course, the corner angle can be arbitrarily selected from 90°, 60°, and 30°.
第４図に示すのは、90°コーナーのＣ面取量を
0.02mmずつずらしたものを順番に並べで記載され
た例である。コーナーの角度はこの場合も任意に
設定できる。 Figure 4 shows the amount of C chamfer on a 90° corner.
This is an example in which items shifted by 0.02 mm are listed in order. The angle of the corner can also be set arbitrarily in this case.
第５図に示すのは、0°〜90°までの角度を30秒
刻みずつ順番に並べて記載された例である。この
例ももちろん90°以上の角度を表示できることは
言うまでもない。 FIG. 5 shows an example in which angles from 0° to 90° are listed in 30 second increments. Needless to say, this example can also display angles of 90° or more.
上述の例では単一のシートゲージ１０を用いた
例を挙げたが、角度と円のシートゲージ１０を組
み合わせて任意角度の任意曲率半径のアールを測
定したり、偏位等を測定することも可能となる。 Although the above example uses a single sheet gauge 10, it is also possible to combine angle and circular sheet gauges 10 to measure the radius of any curvature at any angle, or to measure deviation, etc. It becomes possible.
応用例としては、固有形状や複雑形状の図形を
シートゲージ１０上に描いておく方法も有り、許
容誤差範囲を示した相似の図形を並べて記載して
おくと検査の作業効率を上げることができる。 As an example of application, there is also a method of drawing figures of unique shapes or complex shapes on the sheet gauge 10. Inspection work efficiency can be improved by writing similar figures side by side that indicate the allowable error range. .
以上、本考案の好適な実施例について種々述べ
て来たが、本考案は上述の実施例に限定されるの
ではなく、考案の精神を逸脱しない範囲で多くの
改変を施し得るのはもちろんである。 Although various preferred embodiments of the present invention have been described above, the present invention is not limited to the above-mentioned embodiments, and it goes without saying that many modifications can be made without departing from the spirit of the invention. be.
（考案の効果）
本考案に係るシートゲージを用いると、シート
ゲージの大きさに制約が無いので図形要素等の数
やサイズも任意に設定できる。(Effects of the invention) When the sheet gauge according to the present invention is used, there is no restriction on the size of the sheet gauge, so the number and size of graphical elements etc. can be set arbitrarily.
同様に、シートゲージの大きさに制約が無いの
で円ゲージを同心円にしたり、角度ゲージを分布
器状に記載せず変位量に応じ順番に並べて記載さ
れているので限定し易く、測定値の誤認の可能性
も小さくすることができる。 Similarly, since there are no restrictions on the size of sheet gauges, circular gauges are made into concentric circles, and angle gauges are not listed in the shape of a distributor, but are listed in order according to the amount of displacement, making it easy to limit and misidentify measured values. The possibility of this can also be reduced.
また測定位置を常に光軸の延長線上に設定可能
であるからレンズの球面収差による誤差も防止で
きる。 Furthermore, since the measurement position can always be set on the extension of the optical axis, errors caused by spherical aberration of the lens can be prevented.
さらに本考案のシートゲージはコスト的に安く
なるので現場の測定、検査に用いることができる
ので迅速な検査が可能となり、検査のため機械を
停止させるのも最小限で済む。 Furthermore, since the sheet gauge of the present invention is inexpensive, it can be used for on-site measurements and inspections, enabling rapid inspections and minimizing the need to stop the machine for inspections.
加えて、誰もが同一の基準で測定可能なので、
測定値に信頼性が有る等の著効を奏する。 In addition, everyone can measure using the same standard, so
It has great effects such as reliable measurement values.
第１図は本考案に係るシートゲージを用いた測
定方法を説明した斜視図、第２図〜第５図はシー
トゲージの記載例を示した図である。
１０……シートゲージ、１２……図形要素、１
４……顕微鏡、１６……対物レンズ、１８……ス
テージ、２０……部品、２２……接眼レンズ。
FIG. 1 is a perspective view illustrating a measuring method using a sheet gauge according to the present invention, and FIGS. 2 to 5 are diagrams showing examples of descriptions of the sheet gauge. 10...Sheet gauge, 12...Graphic element, 1
4... Microscope, 16... Objective lens, 18... Stage, 20... Parts, 22... Eyepiece lens.
Claims (1)
被検査物に対して該対物レンズと反対側に介挿可
能、かつ対物レンズと被検査物との間または被検
査物に対して該対物レンズと反対側において移動
可能であり、対物レンズの面積を越えた面積を有
する光透過性シート材の面に、 コーナーの曲率半径、Ｃ面取量、角度等の図形
要素、測定目盛等の測定手段を規則的に変化させ
たものを、当該変化の順番に等倍で記載されてい
ることを特徴とするシートゲージ。[Scope of Claim for Utility Model Registration] A device that can be inserted between the objective lens of a microscope and an object to be inspected or on the opposite side of the object to the objective lens, and between the objective lens and the object to be inspected or Graphics such as corner curvature radius, C chamfer amount, angle, etc. are placed on the surface of a light-transmitting sheet material that is movable on the opposite side of the object to be inspected and has an area exceeding the area of the objective lens. A sheet gauge characterized in that measurement means such as elements and measurement scales are changed regularly and are written in the same order of change in the same size.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987019275U JPH0421041Y2 (en) | 1987-02-12 | 1987-02-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987019275U JPH0421041Y2 (en) | 1987-02-12 | 1987-02-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63126801U JPS63126801U (en) | 1988-08-18 |
| JPH0421041Y2 true JPH0421041Y2 (en) | 1992-05-14 |
Family
ID=30813732
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987019275U Expired JPH0421041Y2 (en) | 1987-02-12 | 1987-02-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0421041Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS538162A (en) * | 1976-07-08 | 1978-01-25 | United Technologies Corp | Method of and apparatus for observing and measuring objects through pinhole |
-
1987
- 1987-02-12 JP JP1987019275U patent/JPH0421041Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS538162A (en) * | 1976-07-08 | 1978-01-25 | United Technologies Corp | Method of and apparatus for observing and measuring objects through pinhole |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63126801U (en) | 1988-08-18 |
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