JPH042023U - - Google Patents
Info
- Publication number
- JPH042023U JPH042023U JP4295590U JP4295590U JPH042023U JP H042023 U JPH042023 U JP H042023U JP 4295590 U JP4295590 U JP 4295590U JP 4295590 U JP4295590 U JP 4295590U JP H042023 U JPH042023 U JP H042023U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- cleaning device
- decompose
- conveyance path
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 239000005416 organic matter Substances 0.000 claims 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- ing And Chemical Polishing (AREA)
Description
第１図は本考案の一実施例である光洗浄装置を
示す要部概略斜視図、第２図は第１図の光洗浄装
置を示す一部切欠要部平面図、第３図は第１図の
光洗浄装置を示す概略側面図、第４図は本考案の
他の実施例である光洗浄装置を示す一部切欠要部
平面図、第５図は従来の光洗浄装置を示す一部切
欠要部平面図である。
１……基板、１２，２２ａ，２２ｂ……紫外線
ランプ。
FIG. 1 is a schematic perspective view of a main part showing a light cleaning device which is an embodiment of the present invention, FIG. 2 is a partially cutaway plan view of a main part showing the light washing device of FIG. 1, and FIG. FIG. 4 is a partially cutaway plan view of a light cleaning device according to another embodiment of the present invention, and FIG. 5 is a partial view of a conventional light cleaning device. FIG. 3 is a plan view of a cutout portion. 1...Substrate, 12, 22a, 22b...Ultraviolet lamp.
Claims (1)
して搬送処理基材に付着している有機物を分解し
て洗浄する装置であつて、Ｕ字状のランプが、搬
送処理基材の搬送方向に対して斜め方向に配設さ
れていることを特徴とする光洗浄装置。 This is a device that radiates light beams onto a substrate to be transported along a conveyance path to decompose and clean organic matter adhering to the substrate. A light cleaning device characterized in that it is arranged diagonally with respect to the direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990042955U JP2553857Y2 (en) | 1990-04-20 | 1990-04-20 | Light cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990042955U JP2553857Y2 (en) | 1990-04-20 | 1990-04-20 | Light cleaning device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH042023U true JPH042023U (en) | 1992-01-09 |
| JP2553857Y2 JP2553857Y2 (en) | 1997-11-12 |
Family
ID=31554952
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990042955U Expired - Lifetime JP2553857Y2 (en) | 1990-04-20 | 1990-04-20 | Light cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2553857Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05267827A (en) * | 1992-03-19 | 1993-10-15 | Matsushita Electric Works Ltd | Cleaning method for surface of gold layer on circuit board |
| WO2002055224A1 (en) * | 2001-01-15 | 2002-07-18 | Japan Storage Battery Co., Ltd. | Optical treatment device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62190730A (en) * | 1986-02-17 | 1987-08-20 | Nec Corp | Cleaning apparatus for semiconductor device |
| JPS63204729A (en) * | 1987-02-20 | 1988-08-24 | Fujitsu Ltd | Dry cleaning method for semiconductor substrate |
-
1990
- 1990-04-20 JP JP1990042955U patent/JP2553857Y2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62190730A (en) * | 1986-02-17 | 1987-08-20 | Nec Corp | Cleaning apparatus for semiconductor device |
| JPS63204729A (en) * | 1987-02-20 | 1988-08-24 | Fujitsu Ltd | Dry cleaning method for semiconductor substrate |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05267827A (en) * | 1992-03-19 | 1993-10-15 | Matsushita Electric Works Ltd | Cleaning method for surface of gold layer on circuit board |
| WO2002055224A1 (en) * | 2001-01-15 | 2002-07-18 | Japan Storage Battery Co., Ltd. | Optical treatment device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2553857Y2 (en) | 1997-11-12 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |