JPH0420229U - - Google Patents
Info
- Publication number
- JPH0420229U JPH0420229U JP6205190U JP6205190U JPH0420229U JP H0420229 U JPH0420229 U JP H0420229U JP 6205190 U JP6205190 U JP 6205190U JP 6205190 U JP6205190 U JP 6205190U JP H0420229 U JPH0420229 U JP H0420229U
- Authority
- JP
- Japan
- Prior art keywords
- lid
- cleaning device
- processing tank
- tank
- blocking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 4
- 230000000903 blocking effect Effects 0.000 claims 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Description
第１図は本考案の洗浄装置の処理槽部の一実施
例を示す主要断面図。第２図は従来の洗浄装置の
処理槽部を示す主要断面図。
１……処理槽、２……フタ、３……フタ、４…
…外槽、５……局所排気口、６……搬送ロボツト
。
FIG. 1 is a main sectional view showing an embodiment of the processing tank section of the cleaning device of the present invention. FIG. 2 is a main sectional view showing a processing tank section of a conventional cleaning device. 1...processing tank, 2...lid, 3...lid, 4...
...outer tank, 5...local exhaust port, 6...transport robot.
Claims (1)
理槽のフタと連動した蓋を設けることにより、局
所排気装置の排気量を少なくし、薬液の雰囲気を
遮断することを特徴とする洗浄装置。 A cleaning device characterized in that, in the processing tank of the cleaning device, a lid is provided at the opening of the outer tank in conjunction with the lid of the processing tank, thereby reducing the exhaust amount of the local exhaust device and blocking the atmosphere of the chemical solution.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6205190U JPH0420229U (en) | 1990-06-12 | 1990-06-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6205190U JPH0420229U (en) | 1990-06-12 | 1990-06-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0420229U true JPH0420229U (en) | 1992-02-20 |
Family
ID=31590851
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6205190U Pending JPH0420229U (en) | 1990-06-12 | 1990-06-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0420229U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100344092B1 (en) * | 1998-12-29 | 2002-11-23 | 주식회사 에스아이테크 | Cover structure of semiconductor equipment |
-
1990
- 1990-06-12 JP JP6205190U patent/JPH0420229U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100344092B1 (en) * | 1998-12-29 | 2002-11-23 | 주식회사 에스아이테크 | Cover structure of semiconductor equipment |