JPH04197593A - Method for cooling optical parts at outer part of laser beam machine - Google Patents
Method for cooling optical parts at outer part of laser beam machineInfo
- Publication number
- JPH04197593A JPH04197593A JP2322554A JP32255490A JPH04197593A JP H04197593 A JPH04197593 A JP H04197593A JP 2322554 A JP2322554 A JP 2322554A JP 32255490 A JP32255490 A JP 32255490A JP H04197593 A JPH04197593 A JP H04197593A
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- laser beam
- cooling water
- oscillator
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 title claims abstract description 16
- 230000003287 optical effect Effects 0.000 title claims abstract description 13
- 238000000034 method Methods 0.000 title description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 230000001105 regulatory effect Effects 0.000 claims description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 abstract description 20
- 239000000498 cooling water Substances 0.000 abstract description 18
- 229910002092 carbon dioxide Inorganic materials 0.000 abstract description 10
- 239000001569 carbon dioxide Substances 0.000 abstract description 10
- 238000009833 condensation Methods 0.000 abstract description 6
- 230000005494 condensation Effects 0.000 abstract description 6
- 239000000463 material Substances 0.000 abstract description 2
- 230000001360 synchronised effect Effects 0.000 abstract 1
- 238000011109 contamination Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Laser Beam Processing (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
U発明の目的コ
(産業上の利用分野)
この発明はレーザ加工機の外部光学部品の冷却方法に関
するものである。DETAILED DESCRIPTION OF THE INVENTION OBJECTS OF THE INVENTION (Field of Industrial Application) This invention relates to a method for cooling external optical components of a laser processing machine.
(従来の技術)
゛レーザ加工機の発振器の外部の反射ミラー及び集光レ
ンズ等は、レーザ光を高効率で反射又は透過する材質で
作られているが、発振器の高出力化に伴い、送風機又は
冷却水によって強制冷却をする必要があった。(Prior art) ゛Reflection mirrors and condensing lenses outside the oscillator of laser processing machines are made of materials that reflect or transmit laser light with high efficiency. Alternatively, it was necessary to perform forced cooling using cooling water.
しかし、冷却に水を使用すると、外気温度及び湿度との
関係で、反射ミラー及び集光レンズ等の表面に結露を生
し、水滴が反射ミラー及び集光レンズ等の表面に付着す
ることかある。この水滴は炭酸ガスレーザの場合には光
を吸収するので、反射ミラー及び集光レンズ等が加熱さ
れ、そのため破損することがあった。However, when water is used for cooling, condensation may occur on the surfaces of reflective mirrors, condensing lenses, etc. depending on the outside temperature and humidity, and water droplets may adhere to the surfaces of reflective mirrors, condensing lenses, etc. . In the case of a carbon dioxide laser, these water droplets absorb light, so that the reflecting mirror, condensing lens, etc. are heated and may be damaged.
また、外気で冷却する場合には、冷却能力が不足するだ
けてなく、集光レンズの冷却の場合には、その表面に直
接風を当てるため、塵1 ごみか付着し、付着した塵、
ごみが同様に炭酸ガスレーザ光を吸収し、集光レンズが
加熱され、破損することがあった。In addition, when cooling with outside air, not only is the cooling capacity insufficient, but when cooling a condensing lens, air is applied directly to the surface of the condensing lens, so dust 1.
Dust similarly absorbed the carbon dioxide laser beam, causing the condenser lens to heat up and sometimes break.
(発明が解決しようとする課題)
一般に、レーザ光の反射、透過に使用される反射ミラー
や集光レンズ等は水に対する耐性が弱く、コーティング
の剥離等を起こしやすい。しかし、近時発振器の高出力
か要請されるため、水冷によらざるをえない状況である
。冷却水の温度が外気の温度に近ければ、結露の可能性
がへるが、発振器側でも水冷している所が多く、冷却水
の温度の上昇はそのまま発振効率の低下、すなわちレー
ザ出力の低下となる。(Problems to be Solved by the Invention) In general, reflective mirrors, condensing lenses, and the like used for reflecting and transmitting laser light have low resistance to water, and their coatings tend to peel off. However, due to the recent demand for high output oscillators, water cooling has no choice but to be used. If the temperature of the cooling water is close to the temperature of the outside air, the possibility of condensation will be reduced, but in many places the oscillator side is also water-cooled, and an increase in the temperature of the cooling water will directly reduce the oscillation efficiency and, in other words, the laser output. becomes.
この発明は、このような点に着目して創案されたもので
、レーザの反射ミラー及び集光レンズ等の汚染5結露を
防止し、これらの外部光学部品の寿命の安定を図ると共
に、大出力レーザの外部光学部品の有効な冷却方法を提
供することを目的とするものである。This invention was created with attention to these points, and it prevents contamination and condensation on the laser reflecting mirror and condensing lens, stabilizes the lifespan of these external optical components, and provides high output power. The object is to provide an effective method for cooling external optical components of a laser.
[発明の構成]
(課題を解決するための手段)
前記の目的を達成するために、この発明は、レーザ光の
光路変更用反射ミラー及び集光レンズ等を、水の循環等
により冷却するレーザ加工機において、その冷却水路に
水の循環を規制する弁を設け、レーザ発振器のシャッタ
の開閉に同期して前記弁を開閉するものである。[Structure of the Invention] (Means for Solving the Problems) In order to achieve the above object, the present invention provides a laser that cools a reflecting mirror for changing the optical path of a laser beam, a condensing lens, etc. by circulating water or the like. A processing machine is provided with a valve for regulating water circulation in its cooling waterway, and the valve is opened and closed in synchronization with the opening and closing of a shutter of a laser oscillator.
(作用)
このように構成されているので、レーザ加工機を運転し
、発振器のシャッタを開くと、レーザ光は反射ミラー及
び集光レンズ等を経て被加工物を照射する。この場合、
前記のように反射ミラー及び集光レンズ等はレーザ光に
よって加熱されるが、同時に冷却水路に設けられた弁が
開き、冷却水によって冷却されるため、反射ミラー及び
集光レンズ等の温度上昇は成る程度でおさまる。レーザ
加工が終了した場合には、前記弁が閉しられるので、反
射ミラー及び集光レンズ等は不必要に冷却されない。し
たがって、外気中の水分かこれら部品の表面に結露する
ことはない。(Function) With this configuration, when the laser processing machine is operated and the shutter of the oscillator is opened, the laser beam passes through the reflecting mirror, the condensing lens, etc., and irradiates the workpiece. in this case,
As mentioned above, the reflective mirror, condenser lens, etc. are heated by the laser beam, but at the same time, the valve installed in the cooling channel opens and is cooled by the cooling water, so the temperature rise of the reflective mirror, condenser lens, etc. is prevented. It will subside as it becomes. When the laser processing is completed, the valve is closed, so that the reflecting mirror, condensing lens, etc. are not unnecessarily cooled. Therefore, moisture in the outside air does not condense on the surfaces of these parts.
(実施例)
次に、この発明の実施例について図面に基づいて説明す
る。第1図はこの発明の方法を炭酸ガスレーザ加工機に
実施した説明図である。図示のように、炭酸ガスレーザ
加工機1は、NC装置3により制御され、炭酸ガスレー
ザ発振器5から放出されたレーザ光りは、反射ミラー7
により光路を90度変更され、集光レンズ9によって集
光さ−れて、被加工物W上に集魚を結び、穴明、切断。(Example) Next, an example of the present invention will be described based on the drawings. FIG. 1 is an explanatory diagram in which the method of the present invention is implemented in a carbon dioxide laser processing machine. As shown in the figure, the carbon dioxide laser processing machine 1 is controlled by an NC device 3, and the laser beam emitted from the carbon dioxide laser oscillator 5 is reflected by a reflection mirror 7.
The optical path is changed by 90 degrees, and the light is focused by the condensing lens 9, and the condensed fish is tied onto the workpiece W to be drilled and cut.
溶接等のレーザ加工を行なう。Performs laser processing such as welding.
一方、熱交換器11によって低温になった冷却水は、炭
酸ガスレーザ発振器5のレーザガス等を冷却すると共に
、電磁弁13を経て反射ミラー7゜集光レンズ9等を冷
却し、再び熱交換器11へ戻り冷却されて循環使用され
る。電磁弁13は、NC装置3の指令によって、炭酸が
スレーザ発振器5のシャッタが開くと、開き、冷却水を
通し、シャッタが閉じると、一定時間後間じて、冷却水
を止める。電磁弁13とNC装置3の間に設けられたタ
イマー15は、オフデイレ−タイマで、シャッタが閉に
なったときから、一定時間後に電磁弁13を閉じるよう
にするものである。On the other hand, the cooling water made low temperature by the heat exchanger 11 cools the laser gas etc. of the carbon dioxide laser oscillator 5, and also cools the reflection mirror 7° condensing lens 9 etc. through the electromagnetic valve 13, and returns to the heat exchanger 11. It is returned to the factory to be cooled and used for circulation. The electromagnetic valve 13 opens when the shutter of the carbon dioxide laser oscillator 5 opens according to a command from the NC device 3, and allows the cooling water to pass therethrough.When the shutter closes, the solenoid valve 13 stops the cooling water after a certain period of time. A timer 15 provided between the solenoid valve 13 and the NC device 3 is an off-delay timer that closes the solenoid valve 13 after a certain period of time from when the shutter is closed.
このように構成されているので、レーザ加工が始まると
、反射ミラー7及び集光レンズ9等は、冷却水によって
冷却されるが、レーザ加工が終了すると、一定時間後、
それらの温度が適温に下がったとき、冷却水が止められ
る。したがって、反射ミラー7及び集光レンズ9等は必
要以下の温度に冷却されることがないので、結露を生ず
ることはない。With this configuration, when laser processing starts, the reflecting mirror 7, condensing lens 9, etc. are cooled by cooling water, but when laser processing is finished, after a certain period of time,
When their temperature drops to a suitable temperature, the cooling water is turned off. Therefore, the reflecting mirror 7, condensing lens 9, etc. are not cooled down to a temperature lower than necessary, so that no dew condensation occurs.
前記のように、この発明の目的は、外部光学部品の冷却
にあたって、これを冷却しすぎてその表面に外気中の水
分が結露しないようにすることである。したかって、こ
の発明のように、電磁弁で冷却水の出入を規制すると共
に、冷却水の水量をレーザ出力によって制御するように
すればさらに効果が上る。また、レーザ発振器を冷却し
て出てくる比較的温度の高い冷却水を、外部光学部品の
冷却水にしてもよい。また、外部光学部品に入る前の冷
却水を、外気温との差が小さくなるように加熱器等で温
めてもよい。As mentioned above, an object of the present invention is to cool an external optical component so that moisture in the outside air does not condense on its surface by cooling it too much. Therefore, as in the present invention, if the inflow and outflow of cooling water is regulated by a solenoid valve and the amount of cooling water is controlled by laser output, the effect will be further improved. Furthermore, the relatively high temperature cooling water that comes out after cooling the laser oscillator may be used as cooling water for external optical components. Further, the cooling water before entering the external optical component may be heated with a heater or the like so that the difference between the cooling water and the outside temperature is reduced.
[発明の効果コ
以上の説明から理解されるように、この発明は特許請求
の範囲に記載の構成を備えているので、レーザの反射ミ
ラー及び集光レンズ等の汚染、結露を防止し、これらの
外部光学部品の寿命の安定を図ると共に、大出力レーザ
の外部光学部品の有効な冷却方法を提供することができ
る。[Effects of the Invention] As can be understood from the above description, the present invention has the structure set forth in the claims, so it prevents contamination and dew condensation of the laser reflecting mirror and condensing lens, and In addition to stabilizing the lifespan of external optical components of a high-output laser, it is possible to provide an effective cooling method for external optical components of a high-output laser.
第1図はこの発明を炭酸ガスレーサ加工機番こ実施した
説明図である。
1・・・炭酸ガスレーサ加工機
13・・・電磁弁
15・・・タイマー
代理人 弁理士 三 好 秀 和
\
第1図FIG. 1 is an explanatory diagram of the present invention implemented on a carbon dioxide laser processing machine. 1... Carbon dioxide laser processing machine 13... Solenoid valve 15... Timer agent Patent attorney Hidekazu Miyoshi\ Figure 1
Claims (1)
水の循環等により冷却するレーザ加工機において、その
冷却水路に水の循環を規制する弁を設け、レーザ発振器
のシャッタの開閉に同期して前記弁を開閉することを特
徴とするレーザ加工機の外部光学部品の冷却方法。Reflective mirrors and condensing lenses for changing the optical path of laser beams, etc.
A laser processing machine that is cooled by water circulation, etc., wherein a valve for regulating water circulation is provided in the cooling channel, and the valve is opened and closed in synchronization with the opening and closing of a shutter of a laser oscillator. How to cool external optics.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2322554A JP3029864B2 (en) | 1990-11-28 | 1990-11-28 | Cooling method of external optical parts of laser beam machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2322554A JP3029864B2 (en) | 1990-11-28 | 1990-11-28 | Cooling method of external optical parts of laser beam machine |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH04197593A true JPH04197593A (en) | 1992-07-17 |
JP3029864B2 JP3029864B2 (en) | 2000-04-10 |
Family
ID=18144974
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2322554A Expired - Fee Related JP3029864B2 (en) | 1990-11-28 | 1990-11-28 | Cooling method of external optical parts of laser beam machine |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3029864B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8653468B2 (en) | 2011-04-27 | 2014-02-18 | Fujifilm Corporation | Radiological image conversion panel, method of manufacturing radiological conversion panel and radiological image detection apparatus |
JP2017045753A (en) * | 2015-08-24 | 2017-03-02 | ファナック株式会社 | Laser device having temperature control function for maintenance work |
CN108747024A (en) * | 2018-05-17 | 2018-11-06 | 湖南科技大学 | A kind of sensing heating for thick plates and laser compound welding apparatus and method |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6124607B2 (en) * | 2013-01-28 | 2017-05-10 | キヤノン株式会社 | Imaging device |
-
1990
- 1990-11-28 JP JP2322554A patent/JP3029864B2/en not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8653468B2 (en) | 2011-04-27 | 2014-02-18 | Fujifilm Corporation | Radiological image conversion panel, method of manufacturing radiological conversion panel and radiological image detection apparatus |
JP2017045753A (en) * | 2015-08-24 | 2017-03-02 | ファナック株式会社 | Laser device having temperature control function for maintenance work |
CN106486881A (en) * | 2015-08-24 | 2017-03-08 | 发那科株式会社 | With the upkeep operation laser aid of temperature treatment function |
US9899790B2 (en) | 2015-08-24 | 2018-02-20 | Fanuc Corporation | Laser apparatus having temperature control function for maintenance work |
CN108747024A (en) * | 2018-05-17 | 2018-11-06 | 湖南科技大学 | A kind of sensing heating for thick plates and laser compound welding apparatus and method |
Also Published As
Publication number | Publication date |
---|---|
JP3029864B2 (en) | 2000-04-10 |
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