JPH04195006A - Carbon coated optical fiber - Google Patents
Carbon coated optical fiberInfo
- Publication number
- JPH04195006A JPH04195006A JP2326408A JP32640890A JPH04195006A JP H04195006 A JPH04195006 A JP H04195006A JP 2326408 A JP2326408 A JP 2326408A JP 32640890 A JP32640890 A JP 32640890A JP H04195006 A JPH04195006 A JP H04195006A
- Authority
- JP
- Japan
- Prior art keywords
- carbon
- optical fiber
- diameter
- circle
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 73
- 229910052799 carbon Inorganic materials 0.000 title claims abstract description 56
- 239000013307 optical fiber Substances 0.000 title claims abstract description 40
- 239000011248 coating agent Substances 0.000 claims abstract description 22
- 238000000576 coating method Methods 0.000 claims abstract description 22
- 239000013078 crystal Substances 0.000 claims abstract description 22
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 19
- 239000010439 graphite Substances 0.000 claims abstract description 19
- 125000001475 halogen functional group Chemical group 0.000 claims abstract description 15
- 238000010894 electron beam technology Methods 0.000 claims abstract description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 239000010453 quartz Substances 0.000 claims description 4
- 239000001257 hydrogen Substances 0.000 abstract description 12
- 229910052739 hydrogen Inorganic materials 0.000 abstract description 12
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 abstract description 12
- 238000000034 method Methods 0.000 abstract description 7
- 229910003481 amorphous carbon Inorganic materials 0.000 abstract description 6
- 239000000463 material Substances 0.000 abstract description 6
- 238000002230 thermal chemical vapour deposition Methods 0.000 abstract description 5
- 230000005540 biological transmission Effects 0.000 abstract description 4
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 abstract description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 abstract description 2
- 239000012159 carrier gas Substances 0.000 abstract description 2
- 239000003795 chemical substances by application Substances 0.000 abstract description 2
- 239000000460 chlorine Substances 0.000 abstract description 2
- 229910052801 chlorine Inorganic materials 0.000 abstract description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 abstract 1
- 230000002209 hydrophobic effect Effects 0.000 abstract 1
- UBOXGVDOUJQMTN-UHFFFAOYSA-N trichloroethylene Natural products ClCC(Cl)Cl UBOXGVDOUJQMTN-UHFFFAOYSA-N 0.000 abstract 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 11
- 230000000903 blocking effect Effects 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 5
- 239000000835 fiber Substances 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 238000002156 mixing Methods 0.000 description 5
- 239000000654 additive Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 3
- 238000005253 cladding Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 150000001721 carbon Chemical class 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000009661 fatigue test Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 230000002194 synthesizing effect Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- 238000002003 electron diffraction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 238000009864 tensile test Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、長期間信頼性の高い光ファイバとして知られ
ているカーボン被覆光ファイバに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a carbon-coated optical fiber, which is known as an optical fiber with high reliability over a long period of time.
〔従来の技術］
光ファイバは石英ガラス等のガラスから形成されている
が、長時間放置しておくと水分が光フアイバ表面の微小
な傷に作用し、この傷を次第に増長させる。光ファイバ
は布設の際にある程度の応力がかかった状態となり、水
分の存在する雰囲気では経時的に強度の低下が生ずる。[Prior Art] Optical fibers are made of glass such as quartz glass, but if left for a long time, moisture acts on minute scratches on the surface of the optical fiber, gradually increasing the number of scratches. Optical fibers are subjected to a certain amount of stress during installation, and their strength decreases over time in an atmosphere containing moisture.
また、高多湿の環境下では水分による作用が一層増大し
、光ファイバの強度低下が著しく促進される。加えて。Further, in a high humidity environment, the effect of moisture is further increased, and the strength of the optical fiber is significantly reduced. In addition.
光ファイバのコア付近に水素分子が侵入すると。When hydrogen molecules enter near the core of the optical fiber.
波長１．２４μｍ付近に吸光ピークが生し、伝送損失が
増加する。An absorption peak occurs near the wavelength of 1.24 μm, and transmission loss increases.
このような特性の劣化を防ぐために、光フアイバ表面に
水や水素の侵入を防止する高密度なカーボン被覆層を設
けることが提案されている。In order to prevent such deterioration of characteristics, it has been proposed to provide a high-density carbon coating layer on the surface of the optical fiber to prevent water and hydrogen from entering.
カーボン被覆膜は一般に非晶質（アモルファス）である
よりもグラファイト結晶である時の方が原子配列が緻密
であり、水素分子の透過阻止性に優れている。しかしな
がら、カーボン膜中のグラファイト結晶の含有率が多く
なるにつれてヤング率が大きくなり、カーボン被覆膜の
破断に至る伸び歪は低下する。一方１石英ガラス光ファ
イバはグラファイトの含有率の大きなカーボン膜に比べ
ると伸び易く、破断に至る伸び歪も大きい。一般に１石
英やカーボンのようなセラミックの破断強度は表面のク
ランクの進行に支配されるため、破断に至る伸び歪の小
さなカーボン膜を表面に持つカーボン被覆光ファイバは
、カーボン被覆が形成されていない光ファイバに比べて
初期強度が低下する。一方、非晶質の占める割合の多い
カーボン被覆膜は原子配列の緻密さの点で結晶質のハー
メチック被覆膜に比べて劣り、非晶質の占める割合が増
していくにつれ気密性が低下し水素透過阻止性は劣化し
ていくが、破断に至る歪は逆に大きくなり初期強度は高
くなる。In general, the carbon coating film has a denser atomic arrangement when it is a graphite crystal than when it is amorphous, and is superior in blocking the permeation of hydrogen molecules. However, as the content of graphite crystals in the carbon film increases, the Young's modulus increases and the elongation strain leading to breakage of the carbon coating film decreases. On the other hand, a 1-silica glass optical fiber stretches more easily than a carbon film with a large graphite content, and the elongation strain leading to breakage is large. In general, the breaking strength of ceramics such as quartz and carbon is controlled by the progress of cranking on the surface, so carbon-coated optical fibers that have a carbon film on the surface with a small elongation strain that causes breakage do not have a carbon coating. The initial strength is lower than that of optical fiber. On the other hand, carbon coating films with a large proportion of amorphous materials are inferior to crystalline hermetic coating films in terms of the density of atomic arrangement, and as the proportion of amorphous materials increases, the airtightness decreases. However, the hydrogen permeation blocking property deteriorates, but the strain leading to fracture increases and the initial strength increases.
したがって、良好な水素分子の透過阻止性と初期強度を
合わせ持つカーボン被覆光ファイバを得るには、カーボ
ン被覆膜が非晶質とグラファイトを適度に混合させるこ
とが好適である。Therefore, in order to obtain a carbon-coated optical fiber having both good hydrogen molecule permeation blocking properties and initial strength, it is preferable that the carbon coating film contains an appropriate mixture of amorphous and graphite.
本発明の目的は、かかる観点から、カーボン膜の電子線
回折パターンを用いて、その混合比を特定して適切な混
合比率の非晶質カーボンとグラファイト結晶からなるカ
ーボン被覆膜を形成させることによって解決することに
ある。From this point of view, an object of the present invention is to identify the mixing ratio using the electron beam diffraction pattern of the carbon film and form a carbon coating film consisting of amorphous carbon and graphite crystals in an appropriate mixing ratio. The goal is to solve the problem by
〔課題を解決するための手段）
上記問題を解決するため１本発明に基づくカーボン被覆
光ファイバには、コアとクラッドからなる光ファイバの
表面に、カーボン膜の電子線回折像において非晶質を示
すハローパターンが現れ。[Means for Solving the Problems] In order to solve the above problems, the carbon-coated optical fiber according to the present invention has an amorphous material on the surface of the optical fiber consisting of a core and a cladding, as seen in the electron beam diffraction image of the carbon film. A halo pattern appears.
その他にファイバ表面に垂直にグラファイトの（００２
）面が並んで、Ｃ軸配向している円弧上のパターンが認
められ、かつ、ハローパターンの像の円の直径のグラフ
ァイト結晶パターンの像の円弧を含む円の直径に対する
割合がほぼ０．２〜１．２の範囲にあるカーボン膜が形
成される。In addition, graphite (002
) A pattern on an arc in which the planes are aligned and C-axis oriented is recognized, and the ratio of the diameter of the circle of the image of the halo pattern to the diameter of the circle including the arc of the image of the graphite crystal pattern is approximately 0.2. A carbon film in the range of ~1.2 is formed.
上記のような電子線回折パターンを示すカーボン被覆膜
は緻密な原子配列を持つグラファイトと、破断に至る伸
び歪の値が大きし・非晶質カーボンを適度な混合比で併
せ持つので、良好な水素透過阻止性と大きな初期強度を
持つ。The carbon coating film that shows the electron beam diffraction pattern shown above is a good material because it has both graphite with a dense atomic arrangement and amorphous carbon with a large elongation strain that leads to breakage at an appropriate mixing ratio. It has hydrogen permeation blocking properties and high initial strength.
以下５本発明の実施例を図面を参照して詳細に説明する
。Hereinafter, five embodiments of the present invention will be described in detail with reference to the drawings.
第１図に本発明の実施例のカーボン被覆光ファイバの横
断面構造を示す。本発明に基づくカーボン被覆光ファイ
バは、直径約１０μｍのコア１ａと外径約１２５μｍの
クラッド１ｂにより構成される石英ファイバ部１の外周
に厚さ１０２〜１０３λ程度の膜厚を持つカーボン被覆
膜２を被覆し、更に必要に応じて樹脂被覆部３が設けら
れている。クラッド１ｂの表面に石英ガラス系のジャケ
ットが設けられる場合もある。FIG. 1 shows a cross-sectional structure of a carbon-coated optical fiber according to an embodiment of the present invention. The carbon-coated optical fiber according to the present invention has a carbon coating film having a thickness of about 102 to 103λ on the outer periphery of a quartz fiber part 1, which is composed of a core 1a with a diameter of about 10 μm and a cladding 1b with an outer diameter of about 125 μm. 2, and a resin coating portion 3 is further provided as required. A silica glass jacket may be provided on the surface of the cladding 1b.
以下２本発明の実施例のカーボン被覆光ファイバの製造
方法について第２図を参照して説明する。カーボン膜の
成膜方法としてはＣＶＤ法の一種である熱分解法（熱Ｃ
ＶＤ法）を用いた。Hereinafter, two methods of manufacturing carbon-coated optical fibers according to embodiments of the present invention will be described with reference to FIG. The method for forming the carbon film is the thermal decomposition method (thermal carbon dioxide), which is a type of CVD method.
VD method) was used.
線引炉５内にプリフォーム４を入れ、軟化温度まで加熱
し５プリフオーム下端に張力をかけて線引きしてコア１
ａとクラッド１ｂからなる石英光ファイハロＡとし、外
径測定器７で所定の外径に光ファイバの外径を制御する
。次に光ファイハロＡを反応管加熱炉１０で加熱されて
いる熱ＣＶＤ反応管８の中を通過させる。熱ＣＶＤ反応
管８内には、第１のマスフローコントローラー９で、ア
セチレン（Ｃ２Ｈ４）などの炭化水素系原料ガスや、
Ｈｅ、 Ａ ｒ、 Ｎｚといった希釈ガス、さらには
第２のマスフローコントローラー１３で、グラファイト
結晶とアモルファスカーボンの量の調整を行なう役割を
果たすトリクロエチレン、四塩化炭素などの塩素系添加
剤とキャリアガスがバブラー１４を介して流量調整され
、搬入される。The preform 4 is placed in a drawing furnace 5, heated to a softening temperature, and tension is applied to the lower end of the preform 5 to draw the core 1.
The outer diameter of the optical fiber is controlled to a predetermined outer diameter using an outer diameter measuring device 7. Next, the optical fiber halo A is passed through the thermal CVD reaction tube 8 which is being heated in the reaction tube heating furnace 10 . Inside the thermal CVD reaction tube 8, a first mass flow controller 9 supplies hydrocarbon-based raw material gas such as acetylene (C2H4),
Diluent gases such as He, Ar, and Nz, as well as chlorine-based additives such as trichlorethylene and carbon tetrachloride, which play a role in adjusting the amounts of graphite crystals and amorphous carbon, and a carrier gas are used in the second mass flow controller 13. The flow rate is adjusted through the bubbler 14 and then transported.
これにより、光ファイハロＡの表面には非晶質カーボン
とグラファイト結晶との混合によるカーボン被覆膜が形
成される。この混合比については後に詳細に考察する。As a result, a carbon coating film made of a mixture of amorphous carbon and graphite crystal is formed on the surface of the optical fiber halo A. This mixing ratio will be discussed in detail later.
第１のマスフローコントローラー９と第２のマスフロー
コントローラー１３とは、後述する混合比になるように
上記原料ガスの質量を制御する。The first mass flow controller 9 and the second mass flow controller 13 control the mass of the raw material gas to achieve the mixing ratio described below.
かかるカーボン被覆が形成された光ファイバ６は被覆ダ
イス１１を通過するとき樹被覆が形成され２巻取り機１
２で巻き取られる。When the optical fiber 6 on which the carbon coating has been formed passes through the coating die 11, a carbon coating is formed thereon.
It is wound up at 2.
このような方法で、添加剤であるトリクロエチレンの添
加量とカーボン膜合成温度を変化させて、５個のサンプ
ルカーボン被覆光ファイバを製造し、評価項目としては
電子線回折の他シこ、長尺引張試験、動疲労試験、水素
試験（伝送損失増加測定）を行なった。試作した５種類
のカーボンコートファイバの製造条件と評価結果を表１
に示す。Using this method, five sample carbon-coated optical fibers were manufactured by varying the amount of trichlorethylene as an additive and the carbon film synthesis temperature. A tensile test, a dynamic fatigue test, and a hydrogen test (transmission loss increase measurement) were conducted. Table 1 shows the manufacturing conditions and evaluation results of the five types of prototype carbon coated fibers.
Shown below.
（以下余白）
表−１
５種類のカーボンコートファイバの内、４種類は添加剤
として四塩化炭素を用い８００〜９００°Ｃといった比
較的低温でカーボン膜を合成したものであり（実施例１
．実施例２．実施例３．比較例１）、他の１種類は添加
剤を用いずに原料ガスであるアセチレンガスのみで、１
０００〜１１００°Ｃと言った比較的高温でカーボン膜
を合成したものである（比較例２）。四塩化炭素をアセ
チレンに添加した４種類のカーボン被覆光ファイバは四
塩化炭素の添加濃度を変化させてカーボン膜を合成した
ものである。トリクロエチレンの添加濃度の低い順から
、実施例１．実施例２．実施例３、比較例１とする。(Leaving space below) Table 1 Among the five types of carbon-coated fibers, four types have carbon films synthesized at a relatively low temperature of 800 to 900°C using carbon tetrachloride as an additive (Example 1
．． Example 2. Example 3. Comparative Example 1), and the other type uses only acetylene gas, which is a raw material gas, without using any additives.
A carbon film was synthesized at a relatively high temperature of 000 to 1100°C (Comparative Example 2). Four types of carbon-coated optical fibers in which carbon tetrachloride is added to acetylene are obtained by synthesizing carbon films by varying the concentration of carbon tetrachloride added. Example 1. Example 2. Example 3 and Comparative Example 1.
第３図（ａ）〜（Ｃ）にこれら５種類のカーボン被覆光
ファイバのカーボン膜の電子線回折像を３種類に分類し
て示す。比較例１のサンプルでは第３図（ａ）に示すよ
うにハロー（中空）パターンのみで、結晶構造を示す回
折像は認められなかった。実施例１．実施例２．実施例
３のサンプルでは第３図（ｂ）に示すように、ハローパ
ターンの他にグラファイト結晶の（００２）面を示すパ
ターンが現れた。ハローパターンの像の円の直径の、結
晶パターンの像の円弧を含む円の直径に対する割合ｂ
／ ａは、四塩化炭素を高濃度含む実施例３が一番大き
く、実施例２．実施例１の順で小さくなっていった。ま
た、結晶パターンを示す円弧系の像の明るさは実施例１
が一番明るく、実施例２．実施例３の順で暗くなってい
った。また。FIGS. 3A to 3C show electron diffraction images of the carbon films of these five types of carbon-coated optical fibers, classified into three types. In the sample of Comparative Example 1, as shown in FIG. 3(a), only a halo (hollow) pattern was observed, and no diffraction image indicating a crystal structure was observed. Example 1. Example 2. In the sample of Example 3, as shown in FIG. 3(b), in addition to the halo pattern, a pattern indicating the (002) plane of the graphite crystal appeared. Ratio b of the diameter of the circle of the image of the halo pattern to the diameter of the circle including the arc of the image of the crystal pattern
/a is the largest in Example 3 containing a high concentration of carbon tetrachloride, and in Example 2. It became smaller in the order of Example 1. In addition, the brightness of the image of the arc system showing the crystal pattern was determined in Example 1.
is the brightest, and Example 2. The light became darker in the order of Example 3. Also.
第３図（ｃ）に示すように、比較例２のサンプルではハ
ローパターンの像のグラファイト結晶の回折像に対する
割合は実施例１と比べて更に小さくなり、またグラファ
イト結晶の回折像の明るさは実施例１と比べて一層明る
くなっている。As shown in FIG. 3(c), in the sample of Comparative Example 2, the ratio of the halo pattern image to the diffraction image of the graphite crystal is even smaller than that of Example 1, and the brightness of the diffraction image of the graphite crystal is It is even brighter than Example 1.
また、比較例１のサンプルはグラファイト結晶の回折像
は認められなかったが、はぼ一定値を示した他の４サン
プルの結晶パターンの像の円弧を含む円の直径を用いる
と、ハローパターンの像の円の直径の結晶パターンの像
の円弧を含む円の直径に対する割合ｂ ／ ａは１．３
０となる。In addition, although no diffraction image of graphite crystal was observed in the sample of Comparative Example 1, using the diameter of the circle including the arc of the crystal pattern images of the other four samples, which showed approximately constant values, the halo pattern was The ratio b/a of the diameter of the image circle to the diameter of the circle containing the image arc of the crystal pattern is 1.3
It becomes 0.
次に５種類のサンプルの初期強度を評価した。Next, the initial strength of the five types of samples was evaluated.
その結果、比較例】、実施例１．実施例２．実施例３の
各サンプルについては５．５（ｋｇｆ）以上と実用上は
ぼ問題のない強度を示したが、比較例２は３．５ （ｋ
ｇｆ）と著しい強度低下が見られた。これは表面のカー
ボン膜がグラファイトを多く含むようになるにつれて、
破断に至る伸び歪が小さくなっていくためと考えられる
。As a result, Comparative Example], Example 1. Example 2. Each sample of Example 3 showed a strength of 5.5 (kgf) or more, which is practically acceptable, but Comparative Example 2 had a strength of 3.5 (kgf) or more.
gf) and a significant decrease in strength was observed. This is because as the carbon film on the surface becomes richer in graphite,
This is thought to be because the elongation strain leading to fracture becomes smaller.
さらに５種類のサンプルの動疲労試験及び水素試験を行
なった。その結果比較例２．実施例１及び実施例２．実
施例３のサンプルに関しては良好な疲労特性、水素透過
阻止性を示したが、比較例１のサンプルでは伝送損失の
増加がみられた。これは、比較例１のサンプルがほとん
ど緻密な構造のグラファイト結晶を含まず、アモルファ
スカーボンから構造されるため、水素や水の侵入が十分
に妨げないためと考えられる。Furthermore, five types of samples were subjected to dynamic fatigue tests and hydrogen tests. As a result, Comparative Example 2. Example 1 and Example 2. The sample of Example 3 showed good fatigue properties and hydrogen permeation blocking properties, but the sample of Comparative Example 1 showed an increase in transmission loss. This is considered to be because the sample of Comparative Example 1 hardly contains graphite crystals with a dense structure and is structured from amorphous carbon, so that the intrusion of hydrogen and water is not sufficiently prevented.
以上の評価結果から、良好な初期強度、疲労特性、水素
透過阻止性を併せ持つカーボンコートファイバの電子線
回折像のハローパターンの像の直径の、結晶パターンの
像の円弧を含む円の直径に対する割合ｂ ／ ａを基準
にするとある範囲内に限定することが出来る。詳細な検
討の結果、その範囲はほぼ０．２〜１．２であり、この
範囲内に入るカーボン被覆膜を合成することにより、良
好な水素透過阻止性と初期強度を併せ持つカーボン被覆
光ファイバを得ることが出来る。From the above evaluation results, the ratio of the diameter of the halo pattern image in the electron beam diffraction image of the carbon coated fiber, which has good initial strength, fatigue properties, and hydrogen permeation blocking properties, to the diameter of the circle including the arc of the crystal pattern image. Based on b/a, it can be limited within a certain range. As a result of detailed studies, the range is approximately 0.2 to 1.2, and by synthesizing a carbon coating film that falls within this range, a carbon-coated optical fiber that has both good hydrogen permeation blocking properties and initial strength can be produced. can be obtained.
以上説明したように９本発明によれば、光ファイバに、
電子ｍ回折像にアモルファスを示すハローパターンが
現れ、その他に光フアイバ表面に垂直にグラファイトの
（００２）面が並んで、Ｃ軸配向しているパターンが認
められ、かつ、ハローパターンの像の円の直径の、結晶
パターンの像の円弧を含む円の直径に対する割合がほぼ
０．２〜１．２の範囲にあるハーメチック被覆膜を形成
させることにより、良好な初期強度、疲労特性、水素透
過阻止性を併せ持つカーボン被覆光ファイバが提供でき
る。As explained above, according to the present invention, the optical fiber has
An amorphous halo pattern appears in the electron m-diffraction image, and a pattern in which the (002) planes of graphite are aligned perpendicularly to the optical fiber surface and C-axis oriented is also observed. By forming a hermetic coating film in which the ratio of the diameter of A carbon-coated optical fiber that also has blocking properties can be provided.
第１図はカーボン被覆光ファイバの横断面構造を示す図
。
第２図は本発明の実施例の熱ＣＶＤ法を用いてカーボン
被覆光ファイバを製造する装置の概略構成を示す縦断面
図。
第３図（ａ）〜（Ｃ）は本発明の実施例のカーボン被覆
光ファイバのカーボン膜の電子線回折像を示す概略図で
ある。
（符号の説明）
１・・・石英ファイバ部。
ｌａ・・コア。
１ｂ・・クラッド。
２・・・カーボン被覆膜。
３・・・樹脂被覆部。
４・・・光フアイバ母材。
５・・・線引炉。
６Ａ・・光ファイバ。
６・・・カーボン被覆光ファイバ。
７・・・外径測定器。
８・・・熱ＣＶＤ反応管。
９・・・第１のマスフローコントローラ。
１０・・反応管加熱炉。
１１・・被覆ダイス。
１２・・巻取機。
１３・・第２のマスフローコントローラー。
１４・・バブラー。
特許出願人 古河電気工業株式会社
代理人 弁理士 住込 隆久
第１図
［コｉ、ｌ
第３図FIG. 1 is a diagram showing a cross-sectional structure of a carbon-coated optical fiber. FIG. 2 is a longitudinal cross-sectional view showing a schematic configuration of an apparatus for manufacturing a carbon-coated optical fiber using a thermal CVD method according to an embodiment of the present invention. FIGS. 3(a) to 3(C) are schematic diagrams showing electron beam diffraction images of the carbon film of the carbon-coated optical fiber of the example of the present invention. (Explanation of symbols) 1...Quartz fiber part. la...core. 1b...Clad. 2... Carbon coating film. 3...Resin coating part. 4... Optical fiber base material. 5...Drawing furnace. 6A...Optical fiber. 6...Carbon coated optical fiber. 7...Outer diameter measuring device. 8...Thermal CVD reaction tube. 9...First mass flow controller. 10...Reaction tube heating furnace. 11...Coated die. 12... Winding machine. 13...Second mass flow controller. 14. Bubbler. Patent Applicant Furukawa Electric Co., Ltd. Agent Patent Attorney Takahisa Sumigome Figure 1 [Coi, l Figure 3]
Claims (1)
ーボン被覆光ファイバにおいて、 電子線回折パターンで非晶質を示すハローパターンが現
れ、更にその他にｃ軸配向したグラファイト結晶構造を
示す円弧上のパターンが認められ、かつ結晶構造パター
ンを示す円弧を含む円の直径に対するハローパターンの
円の直径の割合がほぼ０．２〜１．２の範囲にあるカー
ボン被覆膜を形成させたことを特徴とするカーボン被覆
光ファイバ。[Scope of Claims] 1. In a carbon-coated optical fiber having a carbon coating film on the surface of a quartz optical fiber, a halo pattern indicating an amorphous state appears in an electron beam diffraction pattern, and in addition, a c-axis oriented graphite crystal appears. A carbon coating film in which a pattern on an arc indicating a structure is recognized and the ratio of the diameter of the circle of the halo pattern to the diameter of the circle including the arc indicating the crystal structure pattern is approximately in the range of 0.2 to 1.2. 1. A carbon-coated optical fiber characterized by forming a carbon-coated optical fiber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2326408A JP2846452B2 (en) | 1990-11-28 | 1990-11-28 | Carbon coated optical fiber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2326408A JP2846452B2 (en) | 1990-11-28 | 1990-11-28 | Carbon coated optical fiber |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04195006A true JPH04195006A (en) | 1992-07-15 |
| JP2846452B2 JP2846452B2 (en) | 1999-01-13 |
Family
ID=18187461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2326408A Expired - Lifetime JP2846452B2 (en) | 1990-11-28 | 1990-11-28 | Carbon coated optical fiber |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2846452B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014033186A (en) * | 2012-07-09 | 2014-02-20 | Tokyo Electron Ltd | Carbon film deposition method and deposition device |
-
1990
- 1990-11-28 JP JP2326408A patent/JP2846452B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014033186A (en) * | 2012-07-09 | 2014-02-20 | Tokyo Electron Ltd | Carbon film deposition method and deposition device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2846452B2 (en) | 1999-01-13 |
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