JPH04187210A - Gas separating device - Google Patents
Gas separating deviceInfo
- Publication number
- JPH04187210A JPH04187210A JP2316534A JP31653490A JPH04187210A JP H04187210 A JPH04187210 A JP H04187210A JP 2316534 A JP2316534 A JP 2316534A JP 31653490 A JP31653490 A JP 31653490A JP H04187210 A JPH04187210 A JP H04187210A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- tank
- product gas
- concentration
- product
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 claims abstract description 33
- 239000003463 adsorbent Substances 0.000 claims abstract description 5
- 238000000926 separation method Methods 0.000 claims description 12
- 238000000605 extraction Methods 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 10
- 238000007599 discharging Methods 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 124
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 28
- 239000001301 oxygen Substances 0.000 description 28
- 229910052760 oxygen Inorganic materials 0.000 description 28
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 13
- 229910052757 nitrogen Inorganic materials 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000003795 desorption Methods 0.000 description 2
- 239000002808 molecular sieve Substances 0.000 description 2
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
Landscapes
- Separation Of Gases By Adsorption (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は気体分離装置に係り、特に製品ガス槽に貯えら
れた製品ガスの濃度を正確に検出するよう構成した気体
分離装置に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a gas separation device, and more particularly to a gas separation device configured to accurately detect the concentration of a product gas stored in a product gas tank.
従来の技術
一般に、Ｐ Ｓ Ａ （Ｐｒｅｓｓｕｒｅ Ｓｗｉｎｇ
Ａｄｓｏｒｐｔｉｏｎ）式気体分離装置は、分子ふる
いカーボンからなる吸着剤を用いて、空気を酸素と窒素
に分離し、いずれか一方を製品ガスとして取り出して使
用するものである。この種の装置では、吸着槽て分離生
成された製品ガスを製品ガス槽に貯えるようになってお
り、製品ガス槽内の製品ガス濃度は製品ガス槽に接続さ
れた取出配管の途中より分岐した分岐配管の端部に設け
られた酸素センサにより検出される。尚、酸素センサは
製品ガス中に含まれている酸素濃度を検出しており、耐
圧構造とされた製品ガス槽に直接接続することは難しい
ので、取出配管途中に設けられている。Conventional techniques generally include PSA (Pressure Swing)
The adsorption type gas separation device uses an adsorbent made of molecular sieve carbon to separate air into oxygen and nitrogen, and extracts one of them as a product gas for use. In this type of equipment, the product gas separated and generated in the adsorption tank is stored in the product gas tank, and the product gas concentration in the product gas tank is determined by branching off from the middle of the takeout pipe connected to the product gas tank. Detected by an oxygen sensor installed at the end of the branch pipe. Note that the oxygen sensor detects the oxygen concentration contained in the product gas, and since it is difficult to connect directly to a product gas tank having a pressure-resistant structure, it is provided in the middle of the extraction pipe.
又、気体分離装置では酸素センサにより検出された酸素
濃度が予め設定された濃度になるようにサイクル時間を
変更している。Further, in the gas separation device, the cycle time is changed so that the oxygen concentration detected by the oxygen sensor becomes a preset concentration.
発明か解決しようとする課題
ところが、従来の装置では、製品ガス槽に接続された取
出配管途中より分岐した分岐配管に配設された弁を開弁
じて酸素センサに製品ガスを供給するようにしていたた
め、酸素センサへ流入するガス流量が１００〜２００
ｃｃ／ｍｉｎ程度と微小流量であった。従って、従来は
製品ガス槽の容積に対し酸素センサへのガス抽出量か少
な過ぎて、製品ガス槽のガス濃度と酸素センサに供給さ
れたガス濃度が一致せず、製品ガス槽内の製品ガス濃度
か目標値に達した後、ある時間遅れて酸素センサかガス
濃度が目標値となったことを検出していた。そのため、
酸素センサは製品ガス槽に貯えられん実際のガス濃度を
検出するのに時間がかかり、例えば起動時は酸素センサ
により検出された濃度を見て製品ガスを下流側へ供給す
ることになるので、製品ガス槽内のガスが目標のガス濃
度になっているのに待つことになり製品ガス供給開始ま
での立上り時間が長くなってしまうといった課題がある
。Problem to be Solved by the Invention However, in conventional equipment, product gas is supplied to the oxygen sensor by opening a valve installed in a branch pipe branching from the middle of the take-out pipe connected to the product gas tank. Therefore, the gas flow rate flowing into the oxygen sensor is 100 to 200%.
The flow rate was minute, about cc/min. Therefore, in the past, the amount of gas extracted to the oxygen sensor was too small relative to the volume of the product gas tank, and the gas concentration in the product gas tank did not match the gas concentration supplied to the oxygen sensor, causing the product gas in the product gas tank to After the concentration reached the target value, the oxygen sensor detected that the gas concentration had reached the target value after a certain time delay. Therefore,
The oxygen sensor is not stored in the product gas tank, and it takes time to detect the actual gas concentration. For example, at startup, the concentration detected by the oxygen sensor is used to supply product gas to the downstream side. There is a problem in that the wait time occurs even though the gas in the gas tank has reached the target gas concentration, resulting in a longer rise time until the product gas supply starts.
そこで、本発明は上記課題を解決した気体分離装置を提
供することを目的とする。Therefore, an object of the present invention is to provide a gas separation device that solves the above problems.
課題を解決するための手段
本発明は、内部に吸着剤が充填された吸着槽と、該吸着
槽で生成された製品ガスを貯える製品ガス槽と、該製品
ガス槽の製品ガスを取り出す取出配管と、該取出配管よ
り取り出された該製品ガスの濃度を検出する濃度検出セ
ンサと、を有してなる気体分離装置において、
前記製品ガス槽と前記濃度検出センサとの間にガス濃度
検出時製品ガスを流出させるガス流出手段を設けてなる
。Means for Solving the Problems The present invention provides an adsorption tank filled with an adsorbent, a product gas tank for storing product gas generated in the adsorption tank, and an extraction pipe for taking out the product gas from the product gas tank. and a concentration detection sensor that detects the concentration of the product gas taken out from the extraction pipe, wherein the product gas is detected between the product gas tank and the concentration detection sensor when the gas concentration is detected. A gas outlet means for discharging the gas is provided.
作用
ガス流出手段により製品ガス槽から供給されたガスを流
出させ、濃度検出センサ側へのガス抽出量を増やす。こ
れにより、製品ガス槽に貯えられたガスをより速く濃度
検出センサへ供給することが可能とな°す、製品ガス槽
内の濃度変化をより正確に検出しうる。The working gas outlet means causes the gas supplied from the product gas tank to flow out, increasing the amount of gas extracted to the concentration detection sensor side. Thereby, the gas stored in the product gas tank can be supplied to the concentration detection sensor more quickly, and the concentration change in the product gas tank can be detected more accurately.
実施例 ・ 図に本発明になる気体分離装置の一実施例を示す。Example · The figure shows an embodiment of the gas separation device according to the present invention.
図中、気体分離装置ｌは圧縮空気から窒素を製品ガスと
して生成するＰＳＡ式の窒素発生装置であり、スタート
信号の入来により作動開始する。In the figure, the gas separation device 1 is a PSA type nitrogen generator that generates nitrogen as a product gas from compressed air, and starts operating when a start signal is received.
制御回路２は冷凍式ドライヤ３．コンプレッサ５を有す
る空気供給ユニット６、吸着ユニット７及び貯蔵ユニッ
ト８の各バルブを制御する。The control circuit 2 includes a refrigerating dryer 3. The valves of the air supply unit 6 with the compressor 5, the adsorption unit 7 and the storage unit 8 are controlled.
コンプレッサ５からの圧縮空気は冷凍式ドライヤ３で除
湿され、乾燥した清浄な圧縮空気として吸着ユニット７
に供給される。原料空気供給ユニット６と吸着ユニット
７とは配管９を介して接続されている。従って、ドライ
ヤ３で乾燥された圧縮空気は配管９を通って吸着ユニッ
ト７で分岐した給気側の配管１０．１１を介して分子ふ
るいカーボン（吸着剤）が充填された第１．第２の吸着
槽７Ａ、７Ｂに供給される。又配管１０．１１には排気
用の配管１２．１３が分岐している。The compressed air from the compressor 5 is dehumidified by the refrigeration dryer 3, and is turned into dry and clean compressed air by the adsorption unit 7.
is supplied to The raw air supply unit 6 and the adsorption unit 7 are connected via a pipe 9. Therefore, the compressed air dried in the dryer 3 passes through the pipe 9 and the first pipe filled with molecular sieve carbon (adsorbent) via the supply side pipe 10.11 which branches off at the adsorption unit 7. It is supplied to second adsorption tanks 7A and 7B. Further, an exhaust pipe 12.13 branches off from the pipe 10.11.
吸着槽？Ａ、７Ｂの上部には取出側の配管１４゜１５が
接続されており、両配管１４．１５間には両吸着槽７Ａ
、７Ｂを接続する均圧用の配管１６か横架されている。Adsorption tank? The extraction side pipes 14 and 15 are connected to the upper part of A and 7B, and both adsorption tanks 7A are connected between both pipes 14 and 15.
, 7B are connected horizontally.
又、上記配管１４．１５は吸着ユニット７と貯蔵ユニッ
ト８とを接続する配管１７と連通している。Further, the pipes 14 and 15 communicate with a pipe 17 that connects the adsorption unit 7 and the storage unit 8.
貯蔵ユニット８は、製品ガスとしてのＮ２ガスが蓄圧さ
れるＮ２ガス槽２０と、Ｎ、ガス槽２゜内の酸素濃度を
計測する酸素センサ２１とよりなる。Ｎ２ガス槽２０の
下部には上記配管１７が接続されており、吸着槽７Ａ、
７Ｂで分離生成された高純度のＮ２ガスは配管１７を介
してＮ２ガス槽２０に供給される。又、Ｎ２ガス槽２０
の上部にはＮ２ガスを取り出す取出配管１８が接続され
ている。この取出配管１８は下流側のＮ２ガスを使用す
る装置（図示せず）へ延在している。The storage unit 8 includes an N2 gas tank 20 in which N2 gas as a product gas is stored, and an oxygen sensor 21 that measures the oxygen concentration in the N2 gas tank 2°. The pipe 17 is connected to the lower part of the N2 gas tank 20, and the adsorption tank 7A,
The high-purity N2 gas separated and produced in 7B is supplied to the N2 gas tank 20 via the pipe 17. Also, N2 gas tank 20
An extraction pipe 18 for extracting N2 gas is connected to the upper part of the N2 gas. This extraction pipe 18 extends to a device (not shown) that uses N2 gas on the downstream side.
又、Ｎ２ガス槽２０の上部に位置する取出配管１８途中
には減圧弁２２か配設されている。従って、Ｎ２ガス槽
２０から取り呂されたガスは減圧弁２２により一定圧力
に減圧されて供給される。Further, a pressure reducing valve 22 is disposed in the middle of the extraction pipe 18 located at the upper part of the N2 gas tank 20. Therefore, the gas taken from the N2 gas tank 20 is reduced to a constant pressure by the pressure reducing valve 22 and then supplied.
１９は取出配管１８より分岐した分岐配管で、Ｎ２ガス
槽２０内のＮ２ガスを酸素センサ２１に供給する。この
分岐配管１９には濃度検出時に開弁されるバルブ■、が
配設されており、分岐配管１９の端部に設けられた酸素
センサ２１にはバルブ■、の開弁によりＮ２ガス槽２０
のガスが供給される。A branch pipe 19 branches from the extraction pipe 18 and supplies the N2 gas in the N2 gas tank 20 to the oxygen sensor 21. This branch pipe 19 is provided with a valve (2) that is opened when detecting the concentration, and the oxygen sensor 21 provided at the end of the branch pipe 19 is connected to an N2 gas tank 20 when the valve (2) is opened.
gas is supplied.
２３はガス流出配管で、一端かバルブＶ、と酸素センサ
２１との間の分岐配管１９に接続され、他端が大気開放
となっている。このガス流出配管２３には濃度検出等上
記バルブ■、とともに開弁されるバルブＶ、。が配設さ
れている。このバルブｖ１゜が開弁することにより分岐
配管１９に残留していたガスが外部に排出される。その
ため、分岐配管１９におけるＮ２ガス槽２ｏからのガス
抽出量が増大し、Ｎ２ガス槽２ｏ内に貯えられたガスが
酸素センサ２１へ従来よりも多量に供給されることにな
る。23 is a gas outflow pipe, one end of which is connected to the branch pipe 19 between the valve V and the oxygen sensor 21, and the other end is open to the atmosphere. This gas outflow pipe 23 includes a valve V, which is opened together with the above-mentioned valve (2) for concentration detection, etc. is installed. By opening this valve v1°, the gas remaining in the branch pipe 19 is discharged to the outside. Therefore, the amount of gas extracted from the N2 gas tank 2o in the branch pipe 19 increases, and a larger amount of gas stored in the N2 gas tank 2o is supplied to the oxygen sensor 21 than before.
上記のように第１．第２の吸着槽７Ａ、７Ｂへ空気を供
給し、あるいは分離されたＮ２ガスを送出する配管１０
−５−１８にはバルブｖ１〜Ｖ、が配設されている。吸
着ユニット７、貯蔵ユニット８の各バルブ■、〜Ｖ、。As mentioned above, the first. Piping 10 that supplies air to the second adsorption tanks 7A and 7B or sends out separated N2 gas
-5-18 is provided with valves v1 to V. Each valve ■, ~V, of the adsorption unit 7 and the storage unit 8.
は電磁弁がらなり、通常閉弁している。consists of a solenoid valve, which is normally closed.
制御回路２には上記各バルブＶ、〜ｖ１゜を開閉制御し
てＮ２ガスを生成するプログラムが入力されている。A program for generating N2 gas by controlling the opening and closing of each of the above-mentioned valves V, ~v1° is input to the control circuit 2.
吸着ユニット７では第１．第２の吸着槽７Ａ。In the suction unit 7, the first. Second adsorption tank 7A.
７Ｂ内に上記空気ドライヤ３により乾燥された圧縮空気
が供給されて、昇圧、減圧を繰り返しながら原料空気か
ら窒素と酸素とを分離する。尚、吸着ユニット７では製
品ガスとしての窒素を安定供給するため、第１の吸着槽
７Ａが昇圧されて吸着工程のとき第２の吸着槽７Ｂでは
減圧されて脱着工程が行なわれ、又、第１の吸着槽７Ａ
が脱着工程のとき第２の吸着槽７Ｂは吸着工程となる。Compressed air dried by the air dryer 3 is supplied into the air dryer 7B, and nitrogen and oxygen are separated from the raw air while repeatedly increasing and decreasing the pressure. In addition, in order to stably supply nitrogen as a product gas in the adsorption unit 7, the first adsorption tank 7A is pressurized and during the adsorption process, the pressure is reduced in the second adsorption tank 7B to perform the desorption process. 1 adsorption tank 7A
When is in the desorption process, the second adsorption tank 7B is in the adsorption process.
従って、制御回路２は予め入力されたプログラムに基づ
いて吸着槽７Ａ、７Ｂが交互に窒素ガスを生成するよう
に吸着ユニット７の各バルブ■。Therefore, the control circuit 2 controls each valve (2) of the adsorption unit 7 so that the adsorption tanks 7A and 7B alternately generate nitrogen gas based on a program input in advance.
〜Ｖ、。を開閉制御する。~V,. Control opening and closing.
上記気体分離装置ｌにおいては、スタートスイッチ（図
示せず）の操作によりコンプレッサ５が起動して各バル
ブＶ１〜ｖ７の開閉動作によりＮ、ガスが生成される。In the gas separation device I, the compressor 5 is started by operating a start switch (not shown), and N and gas are generated by opening and closing the valves V1 to V7.
吸着槽７Ａ、７Ｂで分離生成されたＮ２ガスはＮ２ガス
槽２０内に貯えられる。装置１や起動当初はＮ２ガス槽
２０内の０、濃度が高くなっているので取出配管１８の
■、は閉弁したままである。吸着槽７Ａ、７Ｂで生成さ
れたＮ２ガスが次第にＮｔガス槽２０に蓄積されるとと
もに、Ｎ２ガス槽２０内のＮ２濃度が高まり、０２濃度
が相対的に低下する。The N2 gas separated and produced in the adsorption tanks 7A and 7B is stored in the N2 gas tank 20. When the apparatus 1 and the N2 gas tank 20 are initially started, the concentration of 0 and 0 in the N2 gas tank 20 is high, so the valve 2 of the extraction pipe 18 remains closed. As the N2 gas generated in the adsorption tanks 7A and 7B is gradually accumulated in the Nt gas tank 20, the N2 concentration in the N2 gas tank 20 increases and the 02 concentration relatively decreases.
貯蔵ユニット８においては、起動時バルブＶ。In the storage unit 8, the activation valve V.
が閉弁され、分岐配管１９．ガス流出配管２３のバルブ
Ｖ、、Ｖ、。が開弁している。そのため、分岐配管１９
及びＮ、ガス槽２０の上部に残留していたガスが酸素セ
ンサ２１に供給されるとともにガス流出配管２３より排
出される。is closed, and the branch pipe 19. Valves V,,V, of the gas outflow pipe 23. is open. Therefore, the branch pipe 19
and N gas remaining in the upper part of the gas tank 20 is supplied to the oxygen sensor 21 and discharged from the gas outflow pipe 23.
Ｎ２ガス槽２０内のＯｌ−度は吸着槽７Ａ、７ＢからＮ
２ガスカく供給されるにつれて次第に低下するが、バル
ブＶ１６の開弁によりＮ、ガス槽２０から分岐配管１９
へ供給されるガス抽出量が増大するため、酸素センサ２
１へ供給されるガス濃度 ゛はＮ２ガス槽２０内のガス
濃度に近い濃度となる。The degree of Ol in the N2 gas tank 20 is determined by the amount of N from the adsorption tanks 7A and 7B.
2. Although it gradually decreases as the amount of gas is supplied, by opening the valve V16, N is released from the gas tank 20 to the branch pipe 19.
Oxygen sensor 2
The gas concentration supplied to the N2 gas tank 20 is close to the gas concentration in the N2 gas tank 20.
そのため、酸素センサ２１はＮ２ガス槽２０から離間し
た位置に設けられているが、Ｎ、ガス槽２０内の０．濃
度を検出することができる。よって、Ｎ、ガス槽２０内
の０□濃度が目標値に達すると同時にバルブＶ、が開弁
され、下流側へのＮ２ガス供給が開始される。従って、
Ｎｔガス槽２０内のＯ７濃度が目標値が達しているが、
酸素センサ２１の検出値が目標値に達していないため、
Ｎ、ガス供給が遅れるといった不都合が無く、スタート
スイッチが操作されてからバルブＶ、が開弁されるまで
の時間をより短縮できる。Therefore, although the oxygen sensor 21 is provided at a position separated from the N2 gas tank 20, the oxygen sensor 21 is located at a position separated from the N2 gas tank 20. Concentration can be detected. Therefore, as soon as the 0□ concentration in the N gas tank 20 reaches the target value, the valve V is opened and the supply of N2 gas to the downstream side is started. Therefore,
Although the O7 concentration in the Nt gas tank 20 has reached the target value,
Since the detected value of the oxygen sensor 21 has not reached the target value,
There is no inconvenience such as a delay in the supply of N gas, and the time from when the start switch is operated until the valve V is opened can be further shortened.
尚、上記実施例では窒素発生装置を例に挙げて説明した
が、これに限□らず本発明は例えば酸素発生装置にも適
用することができる。又、Ｎ２ガス槽２０の一度を検出
する濃度検出センサとしては酸素センサ２１に限らず他
の濃度センサを用いても良いあは勿論である。Although the above embodiments have been described using a nitrogen generator as an example, the present invention is not limited to this, and can also be applied to, for example, an oxygen generator. Further, the concentration detection sensor for detecting the concentration of the N2 gas tank 20 is not limited to the oxygen sensor 21, but other concentration sensors may of course be used.
発明の効果
上述の如く、本発明に浸る気体分離装置は、ガス流出手
段により製品ガス槽と濃度検出センサとの間に残留して
い・たガスを短時間で外部に排出できるとともに製品ガ
ス槽内のガス抽出量を増やすことができ、これにより製
品ガス槽内に貯えられたガスをより速（濃度検出センサ
へ供給することが可能となり、経時的に濃度変化する製
品ガス槽内の濃度を正確に検出することができる。その
ため、製品ガス槽内の濃度検出遅れがなくなり、装置起
動開始から製品ガス槽のガスを下流側へ供給できるよう
になるまでの時間を短縮することかできる等の特長を有
する。Effects of the Invention As described above, the gas separation device according to the present invention is capable of discharging gas remaining between the product gas tank and the concentration detection sensor to the outside in a short time using the gas discharge means, and also draining the gas remaining in the product gas tank to the outside. This allows the gas stored in the product gas tank to be supplied to the concentration detection sensor more quickly, making it possible to accurately measure the concentration in the product gas tank, where the concentration changes over time. As a result, there is no delay in detecting the concentration in the product gas tank, and the time from the start of equipment startup until the gas in the product gas tank can be supplied to the downstream side can be shortened. has.
図は本発明になる気体分離装置の一実施例の概略構成図
である。
１・・・気体分離装置、６・・・空気供給ユニット、７
・・・吸着ユニット、８・・貯蔵ユニット、１８・・１
取出配管、１９・・・分岐配管、２０・・・Ｎ、ガス槽
、２１・・酸素センサ、２３・・・ガス流出配管。
特許出願人 ト キ コ 株式会社The figure is a schematic configuration diagram of an embodiment of a gas separation device according to the present invention. 1... Gas separation device, 6... Air supply unit, 7
...Adsorption unit, 8...Storage unit, 18...1
Output piping, 19... Branch piping, 20... N, gas tank, 21... Oxygen sensor, 23... Gas outflow piping. Patent applicant: Tokico Co., Ltd.
Claims (1)
れた製品ガスを貯える製品ガス槽と、該製品ガス槽の製
品ガスを取り出す取出配管と、該取出配管より取り出さ
れた該製品ガスの濃度を検出する濃度検出センサと、を
有してなる気体分離装置において、 前記製品ガス槽と前記濃度検出センサとの間にガス濃度
検出時製品ガスを流出させるガス流出手段を設けてなる
ことを特徴とする気体分離装置。[Scope of Claims] An adsorption tank filled with an adsorbent, a product gas tank for storing product gas generated in the adsorption tank, an extraction piping for taking out the product gas from the product gas tank, and the extraction piping. and a concentration detection sensor that detects the concentration of the product gas taken out from the product gas, the gas separating the product gas from flowing out between the product gas tank and the concentration detection sensor when the gas concentration is detected. A gas separation device characterized by being provided with an outflow means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2316534A JPH04187210A (en) | 1990-11-20 | 1990-11-20 | Gas separating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2316534A JPH04187210A (en) | 1990-11-20 | 1990-11-20 | Gas separating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04187210A true JPH04187210A (en) | 1992-07-03 |
Family
ID=18078178
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2316534A Pending JPH04187210A (en) | 1990-11-20 | 1990-11-20 | Gas separating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04187210A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5882384A (en) * | 1996-05-20 | 1999-03-16 | Advanced Technology Materials, Inc. | Gas source and dispensing system with in situ monitoring of pressure and temperature |
| US5893944A (en) * | 1997-09-30 | 1999-04-13 | Dong; Jung Hyi | Portable PSA oxygen generator |
| US5906672A (en) * | 1996-06-14 | 1999-05-25 | Invacare Corporation | Closed-loop feedback control for oxygen concentrator |
-
1990
- 1990-11-20 JP JP2316534A patent/JPH04187210A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5882384A (en) * | 1996-05-20 | 1999-03-16 | Advanced Technology Materials, Inc. | Gas source and dispensing system with in situ monitoring of pressure and temperature |
| US5906672A (en) * | 1996-06-14 | 1999-05-25 | Invacare Corporation | Closed-loop feedback control for oxygen concentrator |
| US5893944A (en) * | 1997-09-30 | 1999-04-13 | Dong; Jung Hyi | Portable PSA oxygen generator |
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