JPH04182925A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH04182925A JPH04182925A JP31108490A JP31108490A JPH04182925A JP H04182925 A JPH04182925 A JP H04182925A JP 31108490 A JP31108490 A JP 31108490A JP 31108490 A JP31108490 A JP 31108490A JP H04182925 A JPH04182925 A JP H04182925A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- magnetic
- layer
- underlayer
- nonmagnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010410 layer Substances 0.000 claims abstract description 30
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 239000011521 glass Substances 0.000 claims abstract description 9
- 239000011241 protective layer Substances 0.000 claims abstract description 7
- 230000005415 magnetization Effects 0.000 abstract description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052799 carbon Inorganic materials 0.000 abstract description 4
- 239000002245 particle Substances 0.000 abstract description 3
- 238000001755 magnetron sputter deposition Methods 0.000 abstract description 2
- 230000002463 transducing effect Effects 0.000 abstract 2
- 230000000052 comparative effect Effects 0.000 description 9
- 238000005259 measurement Methods 0.000 description 8
- 230000003746 surface roughness Effects 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000005339 levitation Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】 (産業上の利用分野) 本発明は磁気ディスク等の磁気記録媒体に関する。[Detailed description of the invention] (Industrial application field) The present invention relates to magnetic recording media such as magnetic disks.
(従来の技術)
磁気記録媒体の一般的な構造は、非磁性基板上にCr等
の非磁性下地層を形成し、この非磁性下地層上にCo−
Ni等の磁性層形成し、この磁性層の上にカーボン等の
保護層を形成したものである。(Prior Art) The general structure of a magnetic recording medium is to form a non-magnetic underlayer such as Cr on a non-magnetic substrate, and coat the Co-magnetic underlayer on this non-magnetic underlayer.
A magnetic layer made of Ni or the like is formed, and a protective layer made of carbon or the like is formed on this magnetic layer.
そして上記の非磁性基板としては、従来からアルミニウ
ム板にNiPメツキを施したものと、ガラス基板とがあ
る。Conventionally, the above-mentioned non-magnetic substrate includes a NiP plated aluminum plate and a glass substrate.
(発明が解決しようとする課題)
NiPメツキを施したアルミニウム板の場合には、表面
にテクスチャー処理を施して磁化容易軸を円周方向に揃
えることができるので電磁変換特性を向上させることが
できる。(Problem to be Solved by the Invention) In the case of an aluminum plate plated with NiP, the surface is textured to align the axis of easy magnetization in the circumferential direction, thereby improving electromagnetic conversion characteristics. .
しかしながら、磁気ディスク装置において高密度を達成
するためには、ヘッドの低浮上化が重要であり、低浮上
化のためにはディスク表面は鏡面に近いほど良く、僅か
な突起でも存在すれば、ヘッドクラッシュが生じる可能
性が非常に大きくなる。そのため、テクスチャー処理を
施すと、表面粗度が大きくなってヘッドの低浮上化を図
れない。However, in order to achieve high density in magnetic disk drives, it is important to lower the flying height of the head.For lower flying height, the closer the disk surface is to a mirror surface, the better.If there is even a slight protrusion, the head The possibility of a crash is much greater. Therefore, when texture processing is applied, the surface roughness increases, making it impossible to lower the flying height of the head.
これに対し、非磁性基板としてガラス基板を用いた場合
には、表面平滑性は得られるが、磁気的配向処理を施せ
ないため、十分な電磁変換特性が得られない。On the other hand, when a glass substrate is used as the nonmagnetic substrate, surface smoothness can be obtained, but sufficient electromagnetic conversion characteristics cannot be obtained because magnetic alignment treatment cannot be performed.
(課題を解決するための手段)
上記課題を解決すべく本発明は、表面粗さRaが例えば
2OA以下のガラス基板等の非磁性基板上に上層である
磁性層の磁化容易軸が円周方向に配向するように非磁性
下地層を形成し、この下地層上に磁性層及び保護層を順
次形成した。(Means for Solving the Problems) In order to solve the above problems, the present invention provides an arrangement in which the axis of easy magnetization of the upper magnetic layer is in the circumferential direction on a non-magnetic substrate such as a glass substrate having a surface roughness Ra of, for example, 2OA or less. A nonmagnetic underlayer was formed so as to be oriented, and a magnetic layer and a protective layer were sequentially formed on this underlayer.
(作用)
スパッタリングにて非磁性下地層を形成する際に、ター
ゲットからの蒸発粒子を基板の仮想中心線を超えて基板
に到達させることで非磁性下地層の上に形成される磁性
層の磁化容易軸が円周方向に配向する。(Function) When forming a nonmagnetic underlayer by sputtering, the evaporated particles from the target cross the virtual center line of the substrate and reach the substrate, thereby increasing the magnetization of the magnetic layer formed on the nonmagnetic underlayer. The easy axis is oriented circumferentially.
(実施例) 以下に本発明の実施例を添付図面を参照して説明する。(Example) Embodiments of the present invention will be described below with reference to the accompanying drawings.
夾胤■崖1
第1図に示すように表面粗さRaが20A以下のガラス
基板1とターゲット2とを対向配置するとともに、これ
らガラス基板1とターゲット2の間に中心部に円孔3a
を形成したマスク3を配置し、マグネトロンスパッタリ
ング法によってターゲット2からの蒸発粒子を基板1の
仮想中心線4を超えて基板1に飛来して被着せしめ、非
磁性下地層5を形成し、この非磁性下地層5の一ヒに磁
性層6をマスクをせすに形成する。As shown in Fig. 1, a glass substrate 1 with a surface roughness Ra of 20A or less and a target 2 are placed facing each other, and a circular hole 3a is provided in the center between the glass substrate 1 and the target 2.
A mask 3 on which a non-magnetic underlayer 5 is formed is arranged, and evaporated particles from the target 2 are caused to fly over the virtual center line 4 of the substrate 1 and adhere to the substrate 1 by magnetron sputtering, thereby forming a non-magnetic underlayer 5. A magnetic layer 6 is formed on one side of the non-magnetic underlayer 5 using a mask.
ここで上記のシールディングマスクプロセスによって形
成する非磁性下地層5としてはCr層を5200人at
R=27mmとし、このCr層上にシールディングマス
クプロセスを使用せずに形成する磁性層6としては、
C0t9.5Crt。4Ta、sP ta、o a
t%、400人とし、コノ磁性層6上には保護層として
カーボン層を250人成膜した磁気ディスクを作製した
。Here, as the non-magnetic underlayer 5 formed by the above-mentioned shielding mask process, a Cr layer with a thickness of 5,200 layers is used.
With R=27 mm, the magnetic layer 6 formed on this Cr layer without using a shielding mask process is as follows.
C0t9.5Crt. 4Ta,sP ta,o a
t % was set to 400 layers, and a carbon layer was formed as a protective layer on the Conomagnetic layer 6 by 250 layers to produce a magnetic disk.
固1
表面粗さRaか2OA以下のガラス基板上に、通常の方
法で下地層としてのCr層を実施例媒体と同一条件で形
成し、このCr層上に実勢側媒体と同一条件で磁性層及
び保護層を形成した磁気ディスクを作製した。1. On a glass substrate with a surface roughness of Ra or less than 2OA, a Cr layer as an underlayer is formed by the usual method under the same conditions as the example medium, and a magnetic layer is formed on this Cr layer under the same conditions as the actual medium. A magnetic disk with a protective layer formed thereon was manufactured.
ル狡五!誂l
アルミニウム基板にNLPメツキを施した非磁性基板に
テクスチャー処理を施(−1この基板上に前記と同一の
非磁性下地層及び磁性層を形成して磁気ディスクを作製
した。Le cunning five! Texture treatment was applied to a nonmagnetic substrate consisting of an aluminum substrate with NLP plating (-1).A magnetic disk was produced by forming the same nonmagnetic underlayer and magnetic layer as above on this substrate.
テクスチャー処理は、WA4000研磨テープを用いて
、カーボン膜成膜後にGC8000研磨テープでバーニ
ッシュを行ったものである。In the texture treatment, a WA4000 polishing tape was used, and after the carbon film was formed, burnishing was performed with a GC8000 polishing tape.
まず、上記の実施例媒体と比較例媒体1について、ヒス
テリシスループを測定した結果は第2図(a)、(b)
に示すようになり、静磁気特性の測定結果は以下の第1
表に示すようになった。First, the results of measuring the hysteresis loop for the above-mentioned example medium and comparative example medium 1 are shown in Figure 2 (a) and (b).
The measurement results of the magnetostatic properties are as shown in the following 1st
Now shown in the table.
尚、同表中、Tanは、円周方向に外部磁界をかけて測
定したとき、Radは、半径方向に外部磁界をかけて測
定したときである。In the same table, Tan is measured by applying an external magnetic field in the circumferential direction, and Rad is measured by applying an external magnetic field in the radial direction.
第1表
これらの測定結果から明らかなように、実施例媒体は磁
化容易軸が円周方向に配向しているのに対し、比較例媒
体1はTanとRadが重なって磁化容易軸が等方的で
ある。Table 1 As is clear from these measurement results, the easy axis of magnetization in the example medium is oriented in the circumferential direction, whereas in the comparative example medium 1, Tan and Rad overlap, and the easy axis of magnetization is isotropic. It is true.
次に、実施例媒体と比較例媒体2について、各浮上量に
おけるヘッドとのヒツト数を測定した結果は第3図に示
すようになった。Next, for the example medium and comparative example medium 2, the number of hits with the head at each flying height was measured, and the results are shown in FIG.
この測定結果から明らかなように、実施例媒体は浮上量
0.055μmまでヒツトすることなく低浮上に対応す
ることができるのに対し、比較例媒体2は浮上量0.0
8μmでヒツトしており、低浮上に対応できない。即ち
実施例媒体の表面粗さRaは11人であるのに対し、比
較例媒体2の表面粗さRaは85Aであり、表面粗さR
aが小さくなければ低浮上に対応できないことが分る。As is clear from this measurement result, the example medium can cope with low flying heights up to a flying height of 0.055 μm without hitting, whereas the comparative example medium 2 can cope with a flying height of 0.055 μm.
It hits at 8μm and cannot handle low flying heights. That is, the surface roughness Ra of the example medium is 11 people, whereas the surface roughness Ra of the comparative example medium 2 is 85A, and the surface roughness R
It can be seen that unless a is small, it is not possible to cope with low flying height.
次に、実施例媒体と比較例媒体2についての電磁変換測
定の結果は第2表に示すようになり、また10MHz信
号記録時の出力、S/N比、CZN比の測定結果は第3
表に示すようになった。Next, the results of electromagnetic conversion measurements for the example medium and comparative example medium 2 are shown in Table 2, and the measurement results of the output, S/N ratio, and CZN ratio when recording a 10 MHz signal are shown in Table 3.
Now shown in the table.
尚、測定に使用したヘッド仕様と測定条件は、以下のと
おりである。The head specifications and measurement conditions used in the measurements are as follows.
トラック幅=8μm ターン数=50ギャップ長:
0,3μm ABS:270μm浮上量:0.05μ
m at6.5m/secR=27mm
2691 rpmHF=5MHz LF=1.
88MHzこれらの各測定結果から明らかなように、い
ずれも実施例媒体の方が比較例媒体2より優れており、
高密度化に対応し易い。Track width = 8μm Number of turns = 50 Gap length:
0.3μm ABS: 270μm Flying height: 0.05μm
m at6.5m/secR=27mm
2691 rpmHF=5MHz LF=1.
88MHzAs is clear from these measurement results, the example medium is superior to comparative example medium 2,
Easily adaptable to high density.
第2−1表
第2−2表
第3表
(発明の効果)
以上説明したように本発明によれば、表面粗さRaが例
えば20λ以下のガラス基板等の非磁性基板上に、上層
となる磁性層の磁化容易軸が円周方向に配向するように
非磁性下地層を形成し、この下地層上に磁性層及び保護
層を順次形成したので、表面平滑性が得られてヘッドの
低浮上化に対応でき、しかも磁化容易軸が円周方向に配
向しているので十分な電磁変換特性が得られる。Table 2-1 Table 2-2 Table 3 (Effects of the Invention) As explained above, according to the present invention, an upper layer and A non-magnetic underlayer is formed so that the axis of easy magnetization of the magnetic layer is oriented in the circumferential direction, and a magnetic layer and a protective layer are sequentially formed on this underlayer, resulting in surface smoothness and low head performance. It can cope with levitation, and since the axis of easy magnetization is oriented in the circumferential direction, sufficient electromagnetic conversion characteristics can be obtained.
第1図は、第2図(a)、(b)は本発明に係□ る実
施例媒体と比較例媒体のヒステリシスループを示す線図
、第3図は同実施例媒体と他の比較例媒体のヘッド浮上
量とグライドカウントの関係を示すグラフである。
1・・・非磁性基板、2・・・ターゲット、3・・・マ
スク、5・・・非磁性下地層、6・・・磁性層。1, 2(a) and 2(b) are diagrams showing the hysteresis loops of the example medium according to the present invention and the comparative example medium, and FIG. 3 is the diagram showing the hysteresis loop of the same example medium and another comparative example. 7 is a graph showing a relationship between a head flying height of a medium and a glide count. DESCRIPTION OF SYMBOLS 1...Nonmagnetic substrate, 2...Target, 3...Mask, 5...Nonmagnetic base layer, 6...Magnetic layer.
Claims (1)
形成してなる磁気記録媒体において、前記非磁性基板は
ガラス基板等の表面が極めて平滑な基板とし、また前記
磁性層は磁化容易軸が円周方向に配向していることを特
徴とする磁気記録媒体。In a magnetic recording medium in which a nonmagnetic underlayer, a magnetic layer, and a protective layer are sequentially formed on a nonmagnetic substrate, the nonmagnetic substrate is a substrate with an extremely smooth surface such as a glass substrate, and the magnetic layer is easily magnetized. A magnetic recording medium characterized in that an axis is oriented in the circumferential direction.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31108490A JPH04182925A (en) | 1990-11-16 | 1990-11-16 | Magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP31108490A JPH04182925A (en) | 1990-11-16 | 1990-11-16 | Magnetic recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH04182925A true JPH04182925A (en) | 1992-06-30 |
Family
ID=18012934
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP31108490A Pending JPH04182925A (en) | 1990-11-16 | 1990-11-16 | Magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH04182925A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002109729A (en) * | 2000-09-27 | 2002-04-12 | Anelva Corp | Method and apparatus for producing magnetic film and method for manufacturing magnetic recording disk |
-
1990
- 1990-11-16 JP JP31108490A patent/JPH04182925A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002109729A (en) * | 2000-09-27 | 2002-04-12 | Anelva Corp | Method and apparatus for producing magnetic film and method for manufacturing magnetic recording disk |
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