JPH04167542A - Substrate housing cassette for chemical treatment use and manufacture thereof - Google Patents
Substrate housing cassette for chemical treatment use and manufacture thereofInfo
- Publication number
- JPH04167542A JPH04167542A JP2295797A JP29579790A JPH04167542A JP H04167542 A JPH04167542 A JP H04167542A JP 2295797 A JP2295797 A JP 2295797A JP 29579790 A JP29579790 A JP 29579790A JP H04167542 A JPH04167542 A JP H04167542A
- Authority
- JP
- Japan
- Prior art keywords
- side plates
- cassette
- side plate
- structural member
- chemical resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 title claims abstract description 40
- 239000000758 substrate Substances 0.000 title claims abstract description 32
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000000463 material Substances 0.000 claims abstract description 19
- 239000011347 resin Substances 0.000 claims abstract description 19
- 229920005989 resin Polymers 0.000 claims abstract description 19
- 238000000034 method Methods 0.000 claims abstract description 13
- 238000012545 processing Methods 0.000 claims description 17
- 238000003860 storage Methods 0.000 claims description 17
- 239000007788 liquid Substances 0.000 claims description 15
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000003466 welding Methods 0.000 abstract description 17
- 229910001220 stainless steel Inorganic materials 0.000 abstract description 14
- 239000010935 stainless steel Substances 0.000 abstract description 14
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052731 fluorine Inorganic materials 0.000 abstract description 4
- 239000011737 fluorine Substances 0.000 abstract description 4
- 230000003014 reinforcing effect Effects 0.000 description 7
- 230000012447 hatching Effects 0.000 description 6
- 239000000243 solution Substances 0.000 description 5
- 230000005484 gravity Effects 0.000 description 4
- 239000004697 Polyetherimide Substances 0.000 description 3
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 229920001601 polyetherimide Polymers 0.000 description 3
- 208000004350 Strabismus Diseases 0.000 description 2
- 238000012993 chemical processing Methods 0.000 description 2
- 229920001774 Perfluoroether Polymers 0.000 description 1
- 240000003296 Petasites japonicus Species 0.000 description 1
- 235000003823 Petasites japonicus Nutrition 0.000 description 1
- 244000007853 Sarothamnus scoparius Species 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 235000013372 meat Nutrition 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
- Packaging Frangible Articles (AREA)
- Weting (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は薬液処理用基板収納カセット及びその製造方法
に関するものであも
従来の技術
基板上に所要の材質の膜を所要のパターンに形成してた
とえば液晶デイスプレィ用の基板を作成するには 半導
体デバイスの場合と同様に基板性＆ ５１［フォトリ
ングラフィ、エツチング、 レジスト剥離等の工程がが
所要回数繰り返されもこの隊 基板洗朱 エツチング、
レジスト剥離の各工程では薬液が使用されることが多
−一 各工程での処理能率を上げるため＆へ 複数（２
０〜３０枚）の基板をカセットと称する容器に入れて薬
液中に浸漬して処理するいわゆるバッチ処理が行われも
液晶デイスプレィにおいて（友 年々高まるサイズの大
型化要求につれて、基板も大型化しつつある。薬液処理
用の基板収納カセットには、耐薬品性が要求されるので
通常フ・７素樹脂が用いられる。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a substrate storage cassette for chemical treatment and a method for manufacturing the same. To create a substrate for a liquid crystal display, as in the case of semiconductor devices, the steps of substrate preparation, photolithography, etching, resist peeling, etc. are repeated as many times as necessary.
Chemical solutions are often used in each process of resist stripping.
So-called batch processing, in which 0 to 30 substrates are placed in a container called a cassette and immersed in a chemical solution, is used. Since chemical resistance is required for substrate storage cassettes for chemical processing, F-7 resin is usually used.
発明が解決しようとする課題
ところがフッ素樹脂は他の樹脂と比較して比重が大であ
り、しかも荷重に対する変形のしにくさの指標である弾
性係数が小さい。すなわち重くて荷重に対して変形しや
すい（剛性が小さい）。Problems to be Solved by the Invention However, fluororesins have a higher specific gravity than other resins, and also have a small elastic modulus, which is an indicator of how difficult they are to deform under load. In other words, it is heavy and easily deforms under load (its rigidity is low).
例えば液晶デイスプレィの工程で、工程間の基板搬送に
よく使用されるＰＥＩ（ポリエーテルイミド）と、薬液
処理用の基板収納カセットに用いられる代表的なフッ素
樹脂であるＰＴＦＥ （４フツ化エチレン）及びＰＦＡ
（パーフロロアルコキシ）を比較すると、フッ素樹脂は
ＰＥＩに対して比重は約１．７倍、弾性係数はｌ／８〜
１１５である。For example, PEI (polyetherimide), which is often used to transport substrates between processes in the liquid crystal display process, and PTFE (tetrafluoroethylene), a typical fluororesin used in substrate storage cassettes for chemical processing. P.F.A.
(perfluoroalkoxy), the specific gravity of fluororesin is approximately 1.7 times that of PEI, and the elastic modulus is l/8 ~
It is 115.
このようなフッ素樹脂で、大型の基板を複数枚収納でき
るカセットを十分な剛性を持たせて作成すると非常に重
くなり、人手による取り扱いが困難となるばかりでなく
、それを機械的に取り扱う場合にも搬送装置やロボット
等への負荷が大きくなり、それらが大型化すると同時に
高価となる等の問題があった
そこで本発明は 耐薬品性に優れたフッソ樹脂を用いて
大型基板用のカセットを軽量でしかも充分な剛性をもた
せて作成するための構成と、その製造方法を提供するこ
とを目的とするものであも課題を解決するための手段
そして上記課題を解決するため請求項１記載の発明は
複数の基板を所要の間隔をあけて保持する溝を形成され
た一対の樹脂製の側板と、その−対の側板をその側板の
周辺部で接続する接続部材とから成り、前記１対の側板
の所要の箇所に その側板を構成する材料よりも弾性係
数の高い材料で作成された構造部材を一体的番ミ し
かもその構造部材よりも耐薬品性の高い樹脂材料で被覆
した状態で設けて成る薬液処理用基板収納カセットであ
も
請求項３記載の発明は 前記構造部材をインサートして
前記側板を樹脂成形して成る請求項１記載の薬液処理用
基板収納カセットの製造方法であム
請求項４記載の発明１１ 前記構造部材にその構造部
材よりも耐薬品性の高い樹脂を被覆材料として被覆した
被覆構造部材を作成Ｌ 次にその被覆構造部材をその被
覆材料部で前記側板に溶接して成る請求項１記載の薬液
処理用基板収納カセットの製造方法であム
作用
請求項１記載の発明は上記したようく カセット側板の
所要箇所にその側板を構成する材料よりも弾性係数の高
い材料で作成された構造部材を一体的く しかもその構
造部材よりも耐薬品性の高い樹脂材料で被覆した状態で
設けて前記側板を補強したことにより、カセット重量の
大半を占める側板の厚さを小さくし 肉ヌスミのための
抜き穴゛ を大きくして軽量化された しかも耐薬品
性に優れたカセットを実現することができも
請求項３記載の発明は上記したようへ 請求項１記載の
優れた特徴を有するカセットを効率的に大量に製造する
ことができも
請求項４記載の発明は上記したようへ 請求項１記載の
優れた特徴を有するカセットを容易に少量製造すること
ができも
実施例
以下、本発明の一実施例を液晶デイスプレィ等の矩形の
大型ガラス基板の薬液処理用カセットに適用した例につ
いて添付図面に基づいて説明すも第１図〜第９図は本発
明の薬液処理用基板収納カセットの第１実施例を示す図
であム 第１図及び第１図のＡ−Ａ’ 断面である第２
図において、１は左側板 ２は右側板で、それぞれ耐薬
品性を有する例えばフッ素樹脂で形成され それぞれの
側板が向かい合う内側には複数の基板Ｋｎ、Ｋｎ十１・
・・・・を所要の間隔をあけて保持する複数ノ溝Ｍｎ、
Ｍｎ＋１・・・・が設けられていもこの溝Ｍｎ、Ｍｎ＋
１・・・・に対向してそれぞれの側板ｌ、 ２の外側に
は 温度変化によって側板が反る事を、側板の断面形状
を略左右対称とすることによって防止するために溝Ｃｎ
、Ｃｎ＋１・・・・を設けてあム
１０は後述する補強フレームのパイプであ也ｌａ、２ａ
はそれぞれ側板の重量を軽減するための肉ヌスミの抜き
穴であａ４、５（友 前記補強それぞれ前記側板１、２
を補強する補強フレームであり、第３図に示す様へ 「
目」の字形に構成されていも
この補強フレーム４．５（よ その側板ｌ、 ２を形成
するフッ素樹脂よりも耐薬品性は劣るカミ 弾性係数が
大きい例えばステンレスで作成されたバイブｌＯを目の
字形に溶接して形成されもこの時パイプの端面１０ｅの
孔は溶接等により封孔しておくほうが好ましｔ〜
この補強フレーム４．５を内部に組みこんだ側板１、２
を大量に作成するには この補強フレーム４、５をイン
サートして側板をフッ素樹脂で射出成形 すなわちイン
サート成形すれば最も効率的であも
インサート成形するために１友 その補強フレームを金
型内で複数箇所ピン等で支える必要があるので、成形さ
れた側板１．２には そのビンの跡が孔として残本 こ
の複数のピンの孔のうちの一対の孔１１力（例えば第１
図のＲ位置にあったとすると、そのＲ位置の断面である
第４図に示すようにこの孔１１は側板成形丸 フッ素樹
脂を溶接等によりハツチング部１２で示すように充填し
て容易に封孔することができも この線 充填は必ずし
も孔１１の底まで行う必要はなｌ、％このようにして作
成された側板１、２（よ 第１図に示すようにフッ素樹
脂製の棒状の複数の接続部材６、７、８により連結され
てカセットが完成す翫
この接続部材６、７、８は第５図にその断面を示すよう
に いずれも中央部を前記と同様にステンレスバイブ１
３で補強されていも
この接続部材６、７．８（よ 前記と同様にステンレス
パイプ１３をインサート成形して、あるいはフッ素樹脂
のパイプにステンレスバイブを挿入して作成することが
できも
第１図において、接続部材６の小径部６Ｓは基板を収納
したカセットを薬液処理する装置へ図示しないが公知の
カセット保持機構がカセットを容易に保持できるように
するために設けてあムまた前記接続部材８には 基板が
下方に落下しないようにするための抜は止め棒９が掛は
渡されて例えば第６ａ 第７図に示すような方法で固定
されていも
第６図において、前記抜は止め棒９も前記接続部材６、
７、８と同様にステンレスバイブ１４で補強され その
バイブ１４の端部は 突起１５を形成するように加工さ
れていも
この突起１５を矢印り方向に前記接続部材８に加工され
た長孔８ａに第７図に示すように差し込んだ抵 フッ素
樹脂でハツチング部１６で示すように肉盛りし 溶接す
も 第６図における前記抜は止め棒９の端部の面取り９
ａは溶接時の肉盛りを容易に行うために設けてあム
次に前記接続部材６、７、８で前記側板１、２を連結す
るための両者の接続部の構造の一例を第８ａ 第９図に
て説明すも
第８図において、 １７はフッ素樹脂製のスリーブゑ
前記接続部材６、７、８の端部から突出させたステンレ
スバイブ１３にはめ込まれて接続部材６、７、８にハツ
チング部１８で溶接され ステンレスバイブ１３の端部
が外部に露出しないようにしてあ４１７ａはそのスリー
ブに形成した小径部であム
次に’Ｊ１図のＥ−Ｅｌ断面である第９図に示すように
この接続部材６、７、８を前記スリーブ１７の小径部１
７ａにて前記側板１．２の周辺部に設けた穴１９に圧入
した後ハツチング部２０、２１で溶接してカセットが完
成すも
前記スリーブ１７の段付き部の端面１７ｂと、前記側板
ｌ、 ２の側面１ｂ、２ｂとの間にわずかではあるが隙
間ができも この隙間に薬液が滲み込んでも次の水洗工
程や乾燥工程に影響が無い場合は ハツチング部２１の
溶接は省略してもよｔ〜以上において、接続部材６、７
、８はスリーブ１７を両端に溶接して作成する方法で説
明した力（ステンレスバイブ１３にスリーブ１７の部分
も含めてインサート成形することにより作成してもよ（
〜 インサート成形する場合はパイプ１３の両端の孔は
前記と同様に溶接等により封孔しておくほうが好ましし
〜
以上のように側板の所要の箇所に側板の構成材料である
フッ素樹脂よりも弾性係数の高いステンレス族のパイプ
からなる構造部材をインサートして側板を形成したこと
により側板の厚みを小さくし 重量軽減のための抜き穴
を大きくして比重の大なるフッ素樹脂を減らすことによ
り、カセットの耐薬品性と剛性を維持しつつ軽量化を図
ることが可能となム
次へ 本発明の薬液処理用基板収納カセットの第２実施
例を第１０図〜第１４図を用いて説明すも 前記第１実
施例と同一機能の構成要素には同一番号を付し その詳
細な説明は省略すも第１Ｏ図において、３１は右側板
３２は右側板であム
３１ａ、３２ａはそれぞれ前記と同機 側板の重量を軽
減するための肉ヌスミの抜き穴であも第１１図に示す角
柱状の縦部材３３と横部材３４は前記接続部材６．７．
８と同様に中央部をステンレスパイプ３５で補強されて
おり、両端部も図示しないが前記接続部材の端部と同様
にスリーブが溶接されて、あるいはスリーブの部分も含
めてインサート成形されてステンレスパイプ３５の端部
が外部へ露出しないようにしてあム すなわちステンレ
スパイプ３５は全周フッソ樹脂により被覆されていも
この縦部材３３と横部材３４はそれぞれ前記左側板３１
と右側板３２に補強部材として溶接されも
先ず、縦部材３３を側板３１、３２に溶接するための構
造を、第１Ｏ図のＦ−Ｆｌ断面である第１２図にて説明
すも 鑞 第１０図においては 図が煩雑になることを
避けるために 右側板３２のステンレスパイプ３５の図
示は省略してあム第１２図において、側板３２に長穴３
６を加ニレ その長穴３６に縦部材３３をはめ込んで前
記と同様にハツチング部３７で両者をフッソ樹脂で溶接
すム
次に 横部材３４を側板３１．３２に溶接するための構
造を、第１Ｏ図のＧ−Ｇｌ断面である第１３因 第１４
図にて説明すも
先ず、第１３図に示すように側板３２に段部３８を有す
る長穴３９を加工し その長穴３９に横部材３４をはめ
込んで前記と同様にハツチング部４０に示すように両者
をフッ素樹脂で溶接すム次に第１４図に示すようへ 前
記第２図と同様な複数の溝Ｍｎ、Ｍｎ＋１・・・・、Ｃ
ｎ、Ｃｎ＋１・・・・を加工すム
前記縦部材３３と横部材３４はフッソ樹脂によりすでに
被覆されているので、溶接部である前記ハツチング部３
７、４０に多少ピンホールなどの欠陥があっても薬液が
ステンレスパイプ３５に達することはないのでステンレ
スパイプが腐食する可能性をきわめて小さくすることが
出来る以上の説明において、縦部材３３と横部材３４は
共へ 側板に加工した長孔にはめ込んで溶接する構造と
した力（第１２図を例に取れば 第１′５図に示すよう
に溶接代を充分確保できれば片側溶接としてもよｔ〜
以上の側板の加工法沫 前記第１実施例のように成形金
型を必要としないので側板を少量作成する場合に適して
いも
前記縦部材３３と横部材３４が溶接された側板３１、３
２を前記第１実施例と同様にして前記抜は止め棒９、接
続部材６、７、８で連結すればカセットが完成すも
以上 側板の構成材料であるフッ素樹脂よりも弾性係数
の高いステンレスパイプから成る構造部材にフッ素樹脂
を被覆した縦部材と横部材を作成し 次にその縦部材と
横部材をフッソ樹脂部分で側板の所要の箇所に溶接した
ことにより、前記第１実施例と同様に側板の厚みを小さ
くし 重量軽減のための抜き穴を大きくして比重の犬な
るフッソ素樹脂を減らすことにより、カセットの耐薬品
性と剛性を維持しつつ軽量化を図ることが可能となム
以上第１実施仇 第２実施例共に説明を省略したカミ
溶接箇所は必要に応じて余分な肉盛りを削除するたべ
あるいは面を平滑に仕上げるために切削加工してもよし
−
また 抜き穴の数は側板１枚当り３箇所とした力（これ
に限るものではなＬ％
また 側板の材質はフッソ樹脂に限るものではなく、パ
イプの材質もステンレスに限るものではなｔ℃
また パイプの断面形状は円形に限るものではなく角形
であってもよ（〜
また 以上において構造部材はすべてパイプにて説明し
たカミ カセット重量が多少重くなることが許される場
合６表 パイプのかわりに中実棒を用いてもよｔ〜
また 本発明−（戴 矩形の基板を対象とした形状にて
説明したカミ 円形状あるいはその他の形状の基板にも
前記側板を基板の形状に沿った形状とすることにより適
用できるものであも
発明の効果
本発明の薬液処理用基板収納カセットは上記構成とした
ことにより、耐薬品性と剛性が高く、 しかも軽量であ
るという優れた特徴を有していも従ってこのカセットを
取り扱う搬送装置やロボット等の負荷を小さくすること
ができるのでそれらを小型にしかも安価に作成すること
が可能となり、大きな経済的効果を得ることができ也ま
た 本発明の薬液処理用基板収納カセットの製造方法に
よれば 上記優れた特徴を有する薬液処理用基板収納カ
セットを効率的番ミ 容易に製造することができもIf a cassette with sufficient rigidity that can store multiple large boards is made from such fluororesin, it would be extremely heavy, making it difficult to handle it manually, and it would also be difficult to handle it mechanically. However, there were problems such as the load on the transport equipment and robots increased, making them larger and more expensive, etc. Therefore, the present invention has developed a lightweight cassette for large substrates using fluorine resin with excellent chemical resistance. The object of the present invention is to provide a structure for manufacturing the same with sufficient rigidity, and a method for manufacturing the same. teeth
The pair of side plates is composed of a pair of resin side plates formed with grooves for holding a plurality of substrates at required intervals, and a connecting member that connects the pair of side plates at the periphery of the side plates. Structural members made of a material with a higher elastic modulus than that of the material constituting the side plate are installed at the required locations in an integral manner and covered with a resin material having higher chemical resistance than the structural member. The invention according to claim 3 is a substrate storage cassette for chemical liquid processing, and the invention is a method for manufacturing a substrate storage cassette for chemical liquid processing according to claim 1, wherein the structural member is inserted and the side plate is resin molded. Invention 11 according to Item 4: Creating a covered structural member in which the structural member is coated with a resin having higher chemical resistance than the structural member as a covering material L. Next, the covering structural member is welded to the side plate at the covering material part. In the method for manufacturing a substrate storage cassette for chemical liquid processing according to claim 1, the invention according to claim 1 is characterized in that the cassette side plate is provided with a material having a higher elastic modulus than the material constituting the side plate at required locations as described above. By reinforcing the side plates by providing the fabricated structural members integrally and coated with a resin material with higher chemical resistance than the structural members, the thickness of the side plates, which account for most of the weight of the cassette, can be reduced. The invention of claim 3 has the excellent features of claim 1 as described above, which is able to realize a cassette which is light in weight and has excellent chemical resistance by enlarging the hole for inserting the meat. The invention according to claim 4 can efficiently produce large quantities of cassettes having the excellent features described in claim 1. The invention described in claim 4 can easily produce small quantities of cassettes having the excellent features described in claim 1. An example in which an embodiment of the present invention is applied to a chemical liquid processing cassette for a large rectangular glass substrate such as a liquid crystal display will be explained based on the accompanying drawings. Figs. 1 to 9 show the chemical liquid processing substrate of the present invention. FIG. 1 is a diagram showing a first embodiment of the storage cassette; FIG.
In the figure, 1 is a left side plate, 2 is a right side plate, each made of chemical-resistant fluororesin, for example. Inside each side plate facing each other, there are a plurality of substrates Kn, Kn11,
A plurality of grooves Mn that hold ... at a required interval,
Even if Mn+1... is provided, this groove Mn, Mn+
There are grooves Cn on the outside of each of the side plates 1 and 2 facing 1... in order to prevent the side plates from warping due to temperature changes by making the cross-sectional shape of the side plates substantially symmetrical.
, Cn+1... are provided, and am 10 is a reinforcing frame pipe which will be described later.
A4 and A5 are the punched holes for reducing the weight of the side plates, respectively.
It is a reinforcing frame that reinforces the
Although the reinforcing frame 4.5 is constructed in the shape of an ``eye'', its chemical resistance is inferior to that of the fluororesin that forms the other side plates 1 and 2. Even if the pipe is formed by welding into a shape, it is preferable to seal the hole in the end face 10e of the pipe by welding or the like.
In order to make a large quantity of reinforcing frames 4 and 5, injection molding of the side plates with fluororesin is most efficient, but insert molding is the most efficient method. Since it is necessary to support the pins at multiple locations, the traces of the bottles remain as holes in the formed side plate 1.2.
Assuming that the hole 11 is located at the R position in the figure, as shown in Figure 4, which is a cross section of the R position, this hole 11 can be easily sealed by filling the side plate with molded round fluororesin by welding or the like as shown in the hatched part 12. Although it is possible to fill this line to the bottom of the hole 11, it is not always necessary to fill the holes 11 to the bottom. The connecting members 6, 7, and 8 are connected to complete the cassette.As shown in the cross section of FIG.
3, these connecting members 6, 7, and 8 (Fig. , the small diameter portion 6S of the connecting member 6 is provided so that a known cassette holding mechanism (not shown) can easily hold the cassette in an apparatus for treating a cassette containing a substrate with a chemical solution. Even if a pull-out stopper bar 9 is provided to prevent the board from falling downward and is fixed in the manner shown in Figures 6a and 7, for example, the pull-out stopper bar 9 in Figure 6 is used to prevent the board from falling downward. 9 also includes the connecting member 6,
Similar to 7 and 8, it is reinforced with a stainless steel vibrator 14, and the end of the vibrator 14 is machined to form a protrusion 15, but this protrusion 15 is inserted into the elongated hole 8a machined in the connecting member 8 in the direction of the arrow. As shown in FIG. 7, fill up the resistive fluororesin as shown in the hatching part 16 with welding. Chamfer 9 at the end of the stopper rod 9 in FIG. 6.
A is provided to facilitate overlaying during welding.Next, an example of the structure of the connection portion between the side plates 1 and 2 for connecting the side plates 1 and 2 with the connection members 6, 7, and 8 is shown in Section 8a. As explained in Figure 9, in Figure 8, 17 is a sleeve made of fluororesin.
It is fitted into the stainless steel vibrator 13 protruding from the ends of the connecting members 6, 7, 8 and welded to the connecting members 6, 7, 8 at the hatching part 18, so that the end of the stainless steel vibrator 13 is not exposed to the outside. A 417a is a small diameter portion formed in the sleeve. Next, as shown in FIG. 9, which is a cross section taken along E-El in FIG.
After press-fitting into the hole 19 provided in the peripheral part of the side plate 1.2 at step 7a, welding is performed at the hatching parts 20 and 21 to complete the cassette. If there is a slight gap between the side surfaces 1b and 2b of 2, but if the chemical solution seeps into this gap, it will not affect the next washing process or drying process, welding of the hatching part 21 may be omitted. t or more, the connecting members 6, 7
, 8 is the force explained in the method of creating the sleeve 17 by welding it to both ends (it can also be created by insert molding the sleeve 17 part into the stainless steel vibrator 13).
~ In the case of insert molding, it is preferable to seal the holes at both ends of the pipe 13 by welding or the like as described above ~ As mentioned above, it is preferable to seal the holes at both ends of the pipe 13 by welding or the like. By inserting a structural member made of stainless steel pipe with a high elastic modulus to form the side plate, the thickness of the side plate can be reduced, and by making the punch holes larger to reduce weight and reducing the amount of fluororesin, which has a high specific gravity. It is possible to reduce the weight of the cassette while maintaining chemical resistance and rigidity.Next A second embodiment of the substrate storage cassette for chemical liquid processing of the present invention will be explained with reference to FIGS. 10 to 14. Components having the same functions as those in the first embodiment are designated by the same numbers, and detailed explanation thereof will be omitted.
Reference numeral 32 designates the right side plate, and 31a and 32a are the same as those described above.The prismatic vertical member 33 and horizontal member 34 shown in FIG. 11 are the connecting members. 6.7.
Similar to 8, the central part is reinforced with a stainless steel pipe 35, and both ends are also welded with a sleeve (not shown) or insert molded including the sleeve part to form a stainless steel pipe. In other words, even if the stainless steel pipe 35 is covered with fluorocarbon resin all around,
The vertical member 33 and the horizontal member 34 are respectively connected to the left side plate 31.
First, the structure for welding the vertical member 33 to the side plates 31 and 32 as a reinforcing member will be explained with reference to FIG. 12, which is the F-Fl cross section of FIG. 1O. In the figure, the stainless steel pipe 35 on the right side plate 32 is omitted in order to avoid complicating the figure.
Insert the vertical member 33 into the elongated hole 36 and weld them together using fluorocarbon resin at the hatching part 37 in the same way as above. Next, create the structure for welding the horizontal member 34 to the side plates 31 and 32. The 13th factor, which is the G-Gl cross section of Figure 1O, and the 14th factor
First, as shown in FIG. 13, an elongated hole 39 having a stepped portion 38 is formed in the side plate 32, and the horizontal member 34 is fitted into the elongated hole 39. Then, as shown in Fig. 14, a plurality of grooves Mn, Mn+1,..., C similar to those in Fig. 2 are welded with fluororesin.
n, Cn+1, etc. Since the vertical member 33 and the horizontal member 34 are already coated with fluorocarbon resin, the hatching part 3, which is a welded part,
Even if there are some defects such as pinholes in 7 and 40, the chemical solution will not reach the stainless steel pipe 35, so the possibility of corrosion of the stainless steel pipe can be minimized.In the above explanation, the vertical member 33 and the horizontal member 34 is the force used to weld by fitting it into the long hole cut into the side plate (taking Figure 12 as an example, as shown in Figure 1'5, it is possible to weld on one side if sufficient welding allowance can be secured). The above-mentioned side plate processing method does not require a mold as in the first embodiment, so it is suitable for producing a small amount of side plates.
The cassette is completed by connecting 2 with the removal stopper rod 9 and the connecting members 6, 7, and 8 in the same manner as in the first embodiment. This is similar to the first embodiment, by creating vertical and horizontal members in which a structural member consisting of a pipe is coated with fluororesin, and then welding the vertical and horizontal members to the required locations on the side plate using the fluororesin. By reducing the thickness of the side plates, enlarging the cutout holes to reduce weight, and reducing the amount of fluorine resin that increases the specific gravity, it is possible to reduce the weight while maintaining the chemical resistance and rigidity of the cassette. Both the first embodiment and the second embodiment are omitted from explanation.
Remove excess build-up from welding areas as necessary.
Alternatively, you can cut the surface to make it smooth. Also, the number of punched holes is 3 per side plate (this is not limited to L%). Also, the material of the side plate is not limited to fluorine resin. Moreover, the material of the pipe is not limited to stainless steel. Also, the cross-sectional shape of the pipe is not limited to circular, but may be rectangular. Table 6: If some weight is allowed, a solid rod may be used instead of the pipe. It can also be applied to substrates by shaping the side plates to match the shape of the substrate. Effects of the Invention The substrate storage cassette for chemical liquid processing of the present invention has the above structure, so it has high chemical resistance and rigidity. Moreover, even though it has the excellent feature of being lightweight, it is possible to reduce the load on the transport equipment, robots, etc. that handle this cassette, making it possible to make them small and inexpensive, resulting in great economical benefits. In addition, according to the manufacturing method of a substrate storage cassette for chemical liquid processing of the present invention, it is possible to efficiently and easily manufacture a substrate storage cassette for chemical liquid processing having the above-mentioned excellent characteristics.
第１図は本発明の第１実施例における薬液処理用基板収
納カセットの外観斜視ａ 第２図は第１図のＡ−ＡＩ断
面斜視医 第３図は補強フレームの斜視図 第４図は第
１図の２位蓋の断面斜視１第５図は接続部材の断面医
第６図は接続部材と抜は止め棒の固定法説明のための要
部斜視図 第７図は接続部材と抜は止め棒の固定法説明
のための要部断面医 第８図は接続部材の端部断面医第
９図は接続部材と側板の連結部の断面ａ ｊｉｌＯ図
は本発明の第２実施例における薬液処理用基板収納カセ
ットの外観斜視＠ 第１１図は横部材と縦部材の斜視ａ
第１２図は第１Ｏ図のＦ−Ｆ１断面斜視医 第１３＠
第１４図は第１０図のＧ−Ｇｌ断面斜視図で示す加工
説明文 第１５図はその他の実施例を示す断面斜視図で
あａ
ｌ、３１−・・左側Ｋ ｌａ、 ２ａ、 ３１ａ
、 ３２ａ・・・抜き穴 ２、３２・・・右側板 ４
・・・補強フレーム ６、７、８・・・接続部材、ＫＫ
ｎ＋１・・・基板Ｍｎ、Ｍｎ＋１−鳳 ｔｏ、 １３、
１４、３５ ・・・ステンレスパイプ、３３・・・縦部
抹 ３４・・・横部材１１、１６．１８．２０．２１，
３７．４０・・・溶接慝
代理人の氏名 弁理士 小蝦治 明 ほか２名菓 １
図
第２図
第３図
蕗４図
５Ｌｕ
篇６図
第７図
第８図
第９図
１０図
第１ ｌ因
箒１２０
第１３図
第１５１１ＷFigure 1 is a perspective view of the external appearance of a substrate storage cassette for chemical liquid processing according to the first embodiment of the present invention. Figure 2 is a perspective view of the A-AI cross section of Figure 1. Figure 3 is a perspective view of the reinforcing frame. Figure 1 is a cross-sectional perspective view of the lid at position 2. Figure 5 is a cross-sectional view of the connecting member.
Fig. 6 is a perspective view of the main part to explain the method of fixing the connecting member and the stopper bar for removal. Fig. 7 is a cross-sectional view of the main part to explain the method of fixing the connecting member and the stopper bar. Fig. 8 is the connecting member. Figure 9 is a cross-section of the connection part between the connecting member and the side plate. Figure 9 is a perspective view of the external appearance of the substrate storage cassette for chemical liquid processing in the second embodiment of the present invention. strabismus a
Figure 12 is the F-F1 cross section of Figure 1O strabismus doctor No. 13@
Fig. 14 is a processing explanation shown in a G-Gl sectional perspective view of Fig. 10. Fig. 15 is a sectional perspective view showing other embodiments.
, 32a...pull hole 2, 32...right side plate 4
... Reinforcement frame 6, 7, 8 ... Connection member, KK
n+1...Substrate Mn, Mn+1-Otori to, 13,
14, 35...Stainless steel pipe, 33...Vertical section 34...Horizontal member 11, 16.18.20.21,
37.40...Name of welding agent Patent attorney Akira Koebi and 2 others 1
Fig. 2 Fig. 3 Fuki 4 Fig. 5 Lu 6 Fig. 7 Fig. 8 Fig. 9 Fig. 10 Fig. 1 l-in broom 120 Fig. 13 Fig. 1511W
Claims (4)
成された一対の樹脂製の側板と、その一対の側板をその
側板の周辺部で接続する接続部材とから成り、前記１対
の側板の所要の箇所にその側板を構成する材料よりも弾
性係数の高い材料で作成された構造部材を一体的に、し
かもその構造部材よりも耐薬品性の高い樹脂材料で被覆
した状態で設けて成る薬液処理用基板収納カセット。(1) Consisting of a pair of resin side plates formed with grooves for holding a plurality of boards at required intervals, and a connecting member connecting the pair of side plates at the periphery of the side plates; A structural member made of a material with a higher elastic modulus than the material constituting the side plate is integrally installed at the required location on the side plate, and is coated with a resin material having higher chemical resistance than the structural member. A substrate storage cassette for chemical liquid processing.
１記載の薬液処理用基板収納カセット。(2) The substrate storage cassette for chemical liquid processing according to claim 1, wherein the structural member is comprised of a cylindrical member.
形して成る請求項１記載の薬液処理用基板収納カセット
の製造方法。(3) The method of manufacturing a substrate storage cassette for chemical liquid processing according to claim 1, wherein the structural member is inserted and the side plate is resin-molded.
脂を被覆材料として被覆した被覆構造部材を作成し、次
にその被覆構造部材をその被覆材料部分で前記側板に溶
接して成る請求項１記載の薬液処理用基板収納カセット
の製造方法。(4) A claim in which a covered structural member is created by coating a structural member with a resin having higher chemical resistance than the structural member as a covering material, and then the covering structural member is welded to the side plate at the covering material portion. Item 1. A method for manufacturing a substrate storage cassette for chemical liquid processing according to item 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2295797A JPH04167542A (en) | 1990-10-31 | 1990-10-31 | Substrate housing cassette for chemical treatment use and manufacture thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2295797A JPH04167542A (en) | 1990-10-31 | 1990-10-31 | Substrate housing cassette for chemical treatment use and manufacture thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04167542A true JPH04167542A (en) | 1992-06-15 |
Family
ID=17825290
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2295797A Pending JPH04167542A (en) | 1990-10-31 | 1990-10-31 | Substrate housing cassette for chemical treatment use and manufacture thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04167542A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06286812A (en) * | 1993-03-13 | 1994-10-11 | Yodogawa Kasei Kk | Cassette |
| JP2001102437A (en) * | 1999-09-30 | 2001-04-13 | Yodogawa Kasei Kk | Substrate cassette |
| KR100361464B1 (en) * | 2000-05-24 | 2002-11-18 | 엘지.필립스 엘시디 주식회사 | Cassette for Loading Glass |
| WO2015163163A1 (en) * | 2014-04-25 | 2015-10-29 | 日本電気硝子 株式会社 | Glass plate retainer, glass plate movement regulating apparatus, and method for manufacturing glass article |
| JP2018104099A (en) * | 2018-02-26 | 2018-07-05 | 日本電気硝子株式会社 | Glass plate movement restricting device and method for manufacturing glass article |
-
1990
- 1990-10-31 JP JP2295797A patent/JPH04167542A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06286812A (en) * | 1993-03-13 | 1994-10-11 | Yodogawa Kasei Kk | Cassette |
| JP2001102437A (en) * | 1999-09-30 | 2001-04-13 | Yodogawa Kasei Kk | Substrate cassette |
| KR100361464B1 (en) * | 2000-05-24 | 2002-11-18 | 엘지.필립스 엘시디 주식회사 | Cassette for Loading Glass |
| WO2015163163A1 (en) * | 2014-04-25 | 2015-10-29 | 日本電気硝子 株式会社 | Glass plate retainer, glass plate movement regulating apparatus, and method for manufacturing glass article |
| JP2015209306A (en) * | 2014-04-25 | 2015-11-24 | 日本電気硝子株式会社 | Glass plate holder, glass plate movement restriction device, and manufacturing method of glass article |
| CN105873840A (en) * | 2014-04-25 | 2016-08-17 | 日本电气销子株式会社 | Glass plate retainer, glass plate movement regulating apparatus, and method for manufacturing glass article |
| TWI593610B (en) * | 2014-04-25 | 2017-08-01 | 日本電氣硝子股份有限公司 | Glass plate holder, glass plate? movement restriction device, and glass article production method |
| JP2018104099A (en) * | 2018-02-26 | 2018-07-05 | 日本電気硝子株式会社 | Glass plate movement restricting device and method for manufacturing glass article |
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